• 제목/요약/키워드: Three-dimensional microstructure

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레이저묘화 기술을 이용한 3차원 미세구조물 제조 (Fabrication of three dimensional microstructures using laser direct writing technique)

  • 정성호;한성일
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.670-673
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    • 2003
  • Fabrication of three dimensional microstructures by laser-assisted chemical vapor deposition of material is investigated. To fabricate microstructures, a thin layer of deposit in desired patterns is first written using laser direct writing technique and on top of this layer a second layer is deposited to provide the third dimension normal to the surface. By depositing many layers. a three dimensional microstructure is fabricated. Optimum deposition conditions for direct writing of initial and subsequent layers with good surface quality and profile uniformity are determined. Using an arson ion laser and ethylene as the light source and reaction gas, respectively, fabrication of three-dimensional carbon microstructures is demonstrated.

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Three-dimensional reconstruction of polycrystals using a series of EBSD maps obtained from Dual-beam experiments

  • Kim, MinJi;Son, Youngkyun;Lee, Myeongjin;Jeon, Youngju;Lee, Sukbin
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.172-172
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    • 2016
  • Dual-beam experiments (Focused ion beam - Orientation mapping microstructure, FIB-OIM) is a widely used experimental tool because this experiments tool available alternates between automated serial sectioning and EBSD with the help of dual beams. We investigated the reconstruction procedure for analysis tool which three-dimensional internal microstructure using Ni superalloy(IN100) and ZrO2. As a results, we observed annealing twin boundary each layer in Ni superalloy(IN100) and fairly isotropic internal microstructure in ZrO2 using marching cubes algorithm. According to these results, this procedure is reconstructed well and we gained ability to arrange the EBSD map and internal microstructure.

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관성 항법 장치급 서보 가속도계용 다단차 3차원 실리콘 미세 구조물 제작 (Fabrication of Multi-stepped Three Dimensional Silicon Microstructure for INS Grade Servo Accelerometer)

  • 이영주;이상훈;전국진;김용권;조동일
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1996년도 추계학술대회 논문집 학회본부
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    • pp.425-427
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    • 1996
  • New fabrication technique was developed to make three dimensional silicon microstructure with five fold vertical steps through entire wafer thickness. Each step is pre-defined on multiply stacked thermal oxide and silicon nitride (O/N) layers by photolithographies. Multi-stepped silicon microstructure is formed by anisotropic etch in aqueous KOH solution with the patterned nitride film as masking layer. Fabricated microstructure consists of four $16{\mu}m$ thick flexural spring beams, $290{\mu}m$ thick proof mass, mesas for overrange stop with $10{\mu}m$ height from the surface of the proof mass, and the other mesas and V grooves used for assembling this structure to the packaging frame of pendulous servo accelerometer. Using the numerical finite element method (FEM) simulator: ABAQUS, mechanical characteristics of the fabricated microstructure by the developed technique was compared with those of the same structure processed by one step silicon bulk etch followed by oxidation and patterning the etched region.

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유체 유동을 동반한 수치상결정 미세구조의 3차원 성장에 대한 수치해석적 연구 (NUMERICAL SIMULATION OF THREE-DIMENSIONAL DENDRITIC GROWTH WITH FLUID CONVECTION)

  • 윤익로;신승원
    • 한국전산유체공학회:학술대회논문집
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    • 한국전산유체공학회 2009년 춘계학술대회논문집
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    • pp.355-362
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    • 2009
  • Most material of engineering interest undergoes solidification process from liquid to solid state. Identifying the underlying mechanism during solidification process is essential to determine the microstructure of material which governs the physical properties of final product. In this paper, we expand our previous two-dimensional numerical technique to three-dimensional simulation for computing dendritic solidification process with fluid convection. We used Level Contour Reconstruction Method to track the moving liquid-solid interface and Sharp Interface Technique to correctly implement phase changing boundary condition. Three-dimensional results showed clear difference compared to two-dimensional simulation on tip growth rate and velocity.

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Enhancement of Optical Performance by Light Diffusion Films

  • Seo, M.S.;Yoon, J.S.;Heo, J.U.;Kim, S.S.;Moon, C.W.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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    • pp.1262-1265
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    • 2004
  • To increase the performance of the light diffusion films, we controlled the three dimensional microstructure of the organic fillers(beads). The refractive index, the size distribution and the three dimensional distribution of beads play an important role to determine the performance of light diffusion films for the backlight unit of TFT-LCD.

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TRIP강에서 Al이 미세구조와 상변태에 미치는 영향 (Effects of Al in TRIP steels on microstructure and phase transformation)

  • 임남석;김성일;박찬경
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2009년도 추계학술대회 논문집
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    • pp.213-216
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    • 2009
  • In this study, three cold-rolled TRIP steels containing different Al content (0.04wt%, 1.0 wt.% and 2.00wt%) were fabricated to understand the complex effects of Al in TRIP steel. The influences of Al on microstructural evolution of cold-rolled TRIP steels have been analyzed by using advanced analysis techniques, such as transmission electron microscope (TEM) and three dimensional atom probe tomography (3D-APT). TEM results revealed that second phases such as bainte and retained austenite decrease with increase of Al content. In addition, 3D-APT was used to characterize atomic-scale distribution of alloying elements at the constituent phases. Through these analysis techniques, the advanced characteristics of constituent microstructure in TRIP steels were identified depending on Al contents in TRIP steels.

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Computer Simulation of Microstructure of Particle Sediment

  • Kim, Jong-Cheol;Keun Auh;David M. Martin
    • The Korean Journal of Ceramics
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    • 제5권1호
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    • pp.30-34
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    • 1999
  • Particle settling behavior was studied by the computer simulation using simultaneous particle condensation and relaxation. This three-dimensional settling algorithm includes the estimation of powder sediment density. Density distribution through the powder sediment was compared and was agreed well with the experimental findings. Settling density depended strongly of the degree of particle relaxation. Sediment strength and isotropy also depended on the degree of particle relaxation. Sever particle bridging was found near sharp corners.

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Atom Probe Tomography: A Characterization Method for Three-dimensional Elemental Mapping at the Atomic Scale

  • Choi, Pyuck-Pa;Povstugar, Ivan
    • 한국분말재료학회지
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    • 제19권1호
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    • pp.67-71
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    • 2012
  • The present paper gives an overview about the Atom Probe Tomography technique and its application to powder materials. The preparation of needle-shaped Atom Probe specimens from a single powder particle using focused-ion-beam milling is described. Selected experimental data on mechanically alloyed (and sintered) powder materials are presented, giving insight into the atomic-scale elemental redistribution occurring under powder metallurgical processing.

현상공정에서 표면장력에 의한 극미세 3 차원 구조물의 변형거동 분석 및 저감방안에 관한 연구 (Investigation into Deformation of Three-Dimensional Microstructures via Surface Tension of a Rinsing Material During a Developing Process)

  • 박상후;양동열
    • 대한기계학회논문집A
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    • 제32권4호
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    • pp.303-309
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    • 2008
  • Dense and fine polymer patterns often collapse, as they come into contact with each other at their protruding tips. Resist pattern collapse depends on the aspect ratio of patterns and the surface tension of rinsing materials. The pattern collapse is a very serious problem in microfabrication, because it is one of the factors which limit the device dimensions. The reasons for the pattern collapse are known as the surface tension of rinse liquid, centrifugal force and rinse liquid flow produced in the developing process. In this work, we tried to evaluate the pattern collapse of three-dimensional microstructures that were fabricated by two-photon induced photopolymerization, and showed the way how to reduce the deformation of microstructures.

변태 유기 소성강(TRIP steel)의 미세구조와 원자 단위 분석 (Atomic Scale Investigation of TRIP Steels)

  • 임남석;강주석;김성일;박찬경
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2008년도 추계학술대회 논문집
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    • pp.273-276
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    • 2008
  • In this study, microstructure and distribution of alloy elements were investigated in thermo-mechanically processed C-Mn-Si transformation induced plasticity (TRIP) steels. The microstructures of TRIP steels were investigated by using advanced analysis techniques, such as three dimensional atom probe tomography (3D-APT). At first, the microstructure was observed by using TEM. TEM results revealed that microstructure of C-Mn-Si TRIP steel was composed of ferrite, bainte, and retained austenite. 3D-APT was used to characterize atomic-scale partitioning of added elements at the phase interface. In the retained austenite phase, Ti and B were enriched with C. However, there was no fluctuation of Mn and Si concentration across the interface. Through these analysis techniques, the advanced characteristics of constituent microstructure in C-Mn-Si TRIP steels were identified.

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