• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.2
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• pp.140-148
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• 2000

In this paper, using surface micromachining technology with thick photoresist and aluminum, an SLM(Spatial Light Modulator), which is applied to the fields of adaptive optics and pattern recognition system, was fabricated and the electromechanical properties of the fabricated micro SLM are measured. In order to maximize fill-factor and remove mechanical coupling between micro SLM actuators, the micro SLM is composed of three aluminum layers so that spring structure and upper electrode are placed beneath the mirror plate, and $10\times10$ each mirror plate is individually actuated. Also, the micro SLM was designed to be able to modulate phase and amplitude of incoming light in order to have a continuity of phase modulation of incoming light. In the case of amplitude and phase modulation, maximum vertical displacement is 4$\mum$, and maximum angular displacement is $\pm4.6^{\corc}$ respectively. The height difference of the fabricated mirror plate was able to be reduced to 1100A with mirror plate planarization method using negative photoresist(AZ5214). The electromechanical properties of the fabricated micro SLM were measured with the optical measurement system using He-Ne laser and PSD(position sensitive device).

• Journal of the Korean institute of surface engineering
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• v.39 no.1
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• pp.9-12
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• 2006

Al-doped ZnO(AZO)/Ag/AZO multi-layer films deposited on PET substrate by RF magnetron sputtering have a much better electrical properties than Al-doped ZnO single-layer films. The multi-layer structure consisted of three layers, AZO/Ag/AZO, the optimum thickness of Ag layers was determined to be $112{\AA}$ for high optical transmittance and good electrical conductivity. With about $1800{\AA}$ thick AZO films, the multi-layer showed a high optical transmittance in the visible range of the spectrum. The electrical and optical properties of AZO/Ag/AZO were changed mainly by thickness of Ag layers. A high quality transparent electrode, having a resistance as low as $6\;W/{\square}$ and a high optical transmittance of 87% at 550 nm, was obtained by controlling Ag deposition parameters.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.65 no.12
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• pp.2014-2018
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• 2016

Transparent, conductive electrode films, showing the particular characteristics of good conductivity and high transparency, are of considerable research interest because of their potential for use in opto-electronic applications, such as smart window, photovoltaic cells and flat panel displays. Multilayer transparent electrodes, having a much lower electrical resistance than widely-used transparent conducting oxide electrodes, were prepared by using RF/DC magnetron sputtering system. The multilayer structure consisted of three layers, [NiInZnO(NIZO)/Ag/NIZO]. The optical and electrical properties of the multilayered NIZO/Ag/NIZO structure were investigated in relation to the thickness of each layer. The optical and electrical characteristics of multilayer structures have been investigated as a function of the Ag and NIZO film thickness. High-quality transparent conductive films have been obtained, with sheet resistance of $9.8{\Omega}/sq$ for Ag film thickness of 8 nm. Also the multilayer films of inserted Ag 8 nm thickness showed a high optical transmittance above 93% in the visible range. The electrical and optical properties of the new multilayer films were mainly dependent on the thickness of Ag insertion layer.

• Science of Emotion and Sensibility
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• v.24 no.2
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• pp.49-56
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• 2021

In this study, we investigated the necessary mechanical properties of conductive multifilament yarns for fabricating the electrodes of biosignal measurement pressure and stretch textile sensors using embroidery. When electrodes and circuits for smart wearable products are produced through the embroidery process using conductive multifilament yarns, unnecessary material loss is minimized, and complex electrode shapes or circuit designs can be produced without additional processes using a computer embroidering machine. However, because ordinary missionary threads cannot overcome the stress in the embroidery process and yarn cutting occurs, herein, we analyzed the S-S curve, thickness, and twist structure, which are three types of silver-coated multifilament yarns, and measured the stress in the thread of the embroidery simultaneously. Thus, the required mechanical properties of the yarns in the embroidery process were analyzed. In the actual sample production, cutting occurred in silver-coated multifilament rather than silver-coated polyamide/polyester, which showed the lowest S-S curve. In the embroidery process, the twist was unwound through repetitive vertical movement. Further, we fabricated a piezoresistive pressure/tension sensor to measure gauge factor, which is an index for measuring biological signals. We confirmed that the sensor can be applied to the fabrication of embroidery electrodes, which is an important process in the mass production of smart wearable products.

• Composites Research
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• v.35 no.6
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• pp.394-401
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• 2022

Two polymer precursors, polyvinylidene chloride-resin (PVDC-resin) and polyvinylidene fluoride (PVDF), are assembled into the microporous carbon by pyrolysis. Microporous carbon is advantageous as an electrode for supercapacitors that store electric charges through ion adsorption/desorption. The pyrolysis also turns the various heteroatoms of two precursors into functional groups, contributing to the additional charge storage. The analysis of the porous structure and function group during carbonization are important to develop the carbon for energy storage. Here, we analyzed the functional groups of two polymer-derived carbons through X-ray photoelectron spectroscopy. The electrochemical properties of the functional groups were explored in various pH electrolytes. The specific capacitance of two carbons in the acidic electrolyte (1 M H₂SO₄) was improved compared to that in the neutral electrolyte (0.5 M Na₂SO₄) due to the faradaic charge/discharge reaction of the quinone functional group. In particular, the carbon electrode derived from PVDC-resin exhibits a lower capacity than the carbon from PVDF due to the small micropores. In the alkaline electrolyte (6 M KOH), the highest specific capacitance and rate capability were obtained among the three electrolytes for both electrodes based on the facile adsorption of the constituent electrolyte ions (K⁺, OH^-).

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.96-96
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• 2016

Nanotechnology mostly employs nano-materials and nano-structures with distinctive properties based on their size, structure, and composition. It is quite difficult to produce nano-materials and nano-structures with identical sizes, structures, and compositions in large quantities, because of spatiotemporal fluctuation of production processes. In other words, fluctuation is the bottleneck in nanotechnology. We propose three strategies to suppress such fluctuations: employing 1) difference between linear and nonlinear phenomena, 2) difference in time constants, and 3) nucleation as a bottleneck phenomenon. We are also developing nano- and micro-scale guided assembly using plasmas as a plasma nanofabrication.1-5) We manipulate nano- and micro-objects using electrostatic, electromagnetic, ion drag, neutral drag, and optical forces. The accuracy of positioning the objects depends on fluctuation of position and energy of an object in plasmas. Here we evaluate such fluctuations and discuss the mechanism behind them. We conducted in-situ evaluation of local plasma potential fluctuation using tracking analysis of fine particles (=objects) in plasmas. Experiments were carried out with a radio frequency low-pressure plasma reactor, where we set two quartz windows at the top and bottom of the reactor. Ar plasmas were generated at 200 Pa by applying 13.56MHz, 450V peak-to-peak voltage. The injected fine particles were monodisperse methyl methacrylate-polymer spheres of $10{\mu}m$ in diameter. Fine particles were injected into the reactor and were suspended around the plasma/sheath boundary near the powered electrode. We observed binary collision of fine particles with a high-speed camera. The frame rate was 1000-10000 fps. Time evolution of their distance from the center of mass was measured by tracking analysis of the two particles. Kinetic energy during the collision was obtained from the result. Potential energy formed between the two particles was deduced by assuming the potential energy plus the kinetic energy is constant. The interaction potential is fluctuated during the collision. Maximum amplitude of the fluctuation is 25eV, and the average is 8eV. The fluctuation can be caused by neutral molecule collisions, ion collisions, and fluctuation of electrostatic force. Among theses possible causes, fluctuation of electrostatic force may be main one, because the fine particle has a large negative charge of -17000e and the corresponding electrostatic force is large compared to other forces.

• Journal of the Korean Chemical Society
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• v.42 no.1
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• pp.42-50
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• 1998

Titanium dioxide $(TiO_2)$ thin film samples were prepared by using spray pyrolysis methodology and were by using X-ray photoelectron spectroscopy and X-ray diffraction analysis. It was found that anatase prepared by the hydrolysis of titanium(Ⅳ) oxyacetylacetonate exhibited the largest specific surface area. The particle size increased with increasing temperature, while the thickness decreased. Titanium dioxide $(TiO_2)$ in the anatase form was prepared at $400^{\circ}C$ and the photoconductivity was determined using photocurrent measurements. Photoelectrochemical properties of the $TiO_2$-phthalocyanine system were measured in a three-electrode system. The photocurrent action spectrum in the visible region coincided with intrinsic absorption spectrum of phthalocyanine. The crystal structure of phthalocyanine is considered to be a very important property in the photogeneration phenomena.

• Geophysics and Geophysical Exploration
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• v.7 no.3
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• pp.197-206
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• 2004

Because the minute displacement of ground accompanied by excessive pumping of groundwater at specified site is mainly generated from ill-balancing of water budget within groundwater basin, It is necessary to monitor the variation of micro-subsidence for a long time at representative points. We made up the conceptual model using two-dimensional electrical resistivity survey and three-dimensional soil profile consisted of loam and sand. In verifying the reliability of this conceptual model using numerical modeling for ground settlement and groundwater flowing, two-dimensional electrical resistivity survey with short distance of electrode following soil sampling with hand auger would be useful for interpreting hydrogeological structure related to the minute displacement of ground consisted of loam and sand.

• Carbon letters
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• v.11 no.1
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• pp.38-40
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• 2010

Carbon supported electrocatalysts are commonly used as electrode materials for polymer electrolyte membrane fuel cells(PEMFCs). These kinds of electrocatalysts provide large surface area and sufficient electrical conductivity. The support of typical PEM fuel cell catalysts has been a traditional conductive type of carbon black. However, even though the carbon particles conduct electrons, there is still significant portion of Pt that is isolated from the external circuit and the PEM, resulting in a low Pt utilization. Herein, new types of carbon materials to effectively utilize the Pt catalyst are being evaluated. Carbon nanofiber/activated carbon fiber (CNF/ACF) composite with multifunctional surfaces were prepared through catalytic growth of CNFs on ACFs. Nickel nitrate was used as a precursor of the catalyst to synthesize carbon nanofibers(CNFs). CNFs were synthesized by pyrolysising $CH_4$ using catalysts dispersed in acetone and ACF(activated carbon fiber). The as-prepared samples were characterized with transmission electron microscopy(TEM), scanning electron microscopy(SEM). In TEM image, carbon nanofibers were synthesized on the ACF to form a three-dimensional network. Pt/CNF/ACF was employed as a catalyst for PEMFC. As the ratio of prepared catalyst to commercial catalyst was changed from 0 to 50%, the performance of the mixture of 30 wt% of Pt/CNF/ACF and 70wt% of Pt/C commercial catalyst showed better perfromance than that of 100% commercial catalyst. The unique structure of CNF can supply the significant site for the stabilization of Pt particles. CNF/ACF is expected to be promising support to improve the performance in PEMFC.

• Journal of the Semiconductor & Display Technology
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• v.5 no.3 s.16
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• pp.1-4
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• 2006

White-light-emitting ZnS:Mn, Cu, Cl phosphors with spherical shape and the size of $20\;{\mu}m$ are successfully synthesized. They have the double phases of cubic and hexagonal structures. They are applied to electroluminescent (EL) devices by silk screen method with the following structure: $electrode/BaTiO_3$ insulator layer ($50{\sim}60\;{\mu}m$)/ ZnS:Mn, Cu, Cl phosphor layer ($30{\sim}50\;{\mu}m$)/ITO glass. The EL devices are driven with the voltage of 100 V and the frequency of 400 Hz. The EL devices show the three emission peaks. The blue and green emission bands are originated from $CICu^{2+}$ transition and $ClCu^+$ transition, respectively. The yellow emission band results from $^4T^6A$ transition of $Mn^{2+}$ ion. As an increase of Cu concentrations, the blue and green emission intensities decrease whereas the yellow emission intensity increases; the quality becomes warm white. It is due to the energy transfer from the blue and green bands to the yellow band.