• Korean Journal of Materials Research
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• v.14 no.6
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• pp.402-406
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• 2004

$WSi_2$, $TiSi_2$, $CoSi_2$, and $TaSi_2$ are general silicides used today in semiconductor devices. $WSi_2$ thin films have been proposed, studied and used recently in CMOS technology extensively to reduce sheet resistance of polysilicon and $n^{+}$ region. However, there are several serious problems encountered because $WSi_2$ is oxidized and forms a native oxide layer at the interface between $WSi_2$ and $Si_3$$N_4$. In this study, we have introduced 20 $slm-N_2$ gas from top to bottom of the furnace in order to control native oxide films between $WSi_2$ and $Si_3$$N_4$ film. In resulting SEM photographs, we have observed that the native oxide films at the surface of $WSi_2$ film are removed using the long injector system.

• Journal of the Korean institute of surface engineering
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• v.55 no.6
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• pp.353-362
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• 2022

Recently, transmittance of photomasks for ultra-violet (UV) region is getting more important, as the light source wavelength of an exposure process is shortened due to the demand for technologies about high integration and miniaturization of devices. Meanwhile, such problems can occur as damages or the reduction of yield of photomask as electrostatic damage (ESD) occurs in the weak parts due to the accumulation of static electricity and the electric charge on chromium metal layers which are light shielding layers, caused by the repeated contacts and the peeling off between the photomask and the substrate during the exposure process. Accordingly, there have been studies to improve transmittance and antistatic performance through various functional coatings on the photomask surface. In the present study, we manufactured antireflection films of Nb₂O₅, | SiO₂ structure and antistatic films of ITO designed on 100 × 100 × 3 mmt sodalime glass by DC magnetron sputtering system so that photomask can maintain high transmittance at I-line (365 nm). ITO thin film deposited using In/Sn (10 wt.%) on sodalime glass was optimized to be 10 nm-thick, 3.0 × 103 𝛺/☐ sheet resistance, and about 80% transmittance, which was relatively low transmittance because of the absorption properties of ITO thin film. High average transmittance of 91.45% was obtained from a double side antireflection and antistatic thin films structure of Nb₂O₅ 64 nm | SiO₂ 41 nm | sodalime glass | ITO 10 nm | Nb₂O₅ 64 nm | SiO₂ 41 nm.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.114.2-114.2
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• 2017

Transparent film heaters (TFHs) based on Joule heating are currently an active research area. However, TFHs based on an indium tin oxide (ITO) monolayer have a number of problems. For example, heating is concentrated in part of the device. Also, heating efficiency is low because it has high sheet resistance ($R_S$). Resistance of indium zinc oxide (IZO) is similar to ITO and it can be used to flexible applications due to its amorphous structure. To solve these problems, our study introduced hybrid layers of IZO/Ag/IZO deposited by magnetron sputtering, and the electrical, optical, and thermal properties were estimated for various thickness of the metal interlayer. It was found that the sheet resistance of the multilayer was mainly dependent on the thickness of the Ag layers. The $R_S$ of IZO(40)/Ag/IZO(40nm) multilayer was 5.33, 3.29, $2.15{\Omega}/{\Box}$ for Ag thickness of 10, 15, and 20nm, respectively, while the $R_S$ of an IZO monolayer(95nm) was $59.58{\Omega}/{\Box}$. The optical transmittance at 550nm for the IZO(95nm) monolayer is 81.6%, and for the IZO(40)/Ag/IZO(40nm) multilayers with Ag thickness 10, 15 and 20nm, is for 72.8, 78.6, and 63.9%, respectively. The defrost test showed that the film with the lowest RS had the highest heat generation rate (HGR) for the same applied voltage. The results indicated that IZO(40)/Ag(15)/IZO(40nm) multilayer has the best suitable property, which is a promising thin film heater for the application in vehicle windshield.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.6
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• pp.1034-1040
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• 2003

Tension mask is a part of CRT type devices, which is installed right behind glass-made front panel. Numerous slits on the thin metal sheet enable the electron beams emitted from posterior gun to be focused, resulting in enhanced definition. Flattened and enlarged displays necessitate the imposition of pretension on the masks, in order to improve the robustness of display quality against vibration or impact. High temperature assembly process subsequent to pretensioning, however, degenerates creep resistance of mask material, and common mask may become susceptible to undesirable elongation due to creep. Once tensile stress becomes high enough to induce creep deformation, pretension is substantially loosened. In this study, tension mask assembly is modeled as a combined structure of beams and wire array, and a numerical simulation is attempted for pretensioning followed by high temperature process. Based on a model study, creep occurrence is found to be probable and its adverse influence is quantified. As fur maintaining high tensile force, simply increasing pretension does not seem to be helpful. Instead, the structure of frame needs to be modified somehow, or material for mask needs to be selected properly.

• International Journal of Precision Engineering and Manufacturing
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• v.5 no.1
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• pp.36-41
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• 2004

The blanking of thin sheet metal using progressive dies is an important process on production of precision electronic machine parts such as IC leadframe. This paper summarizes the results of simulating the progressive blanking process by means of LS/DYNA. In order to verify the influence of blanking order on the final lead profile and deformed configuration, simulation technique has been proposed and analyzed using a commercial FEM code, LS/DYNA. The results of FE-simulations are in good agreement with the experimental result. After then, to construct rule base in progressive blanking process, FE-simulation has been performed using a simple model. Based on this result rule base is set up and then the blanking order of inner lead is rearranged. Consequently, from the results of FE-simulation using suggested method in this paper, it is possible to predict the shift of lead to manufacture high precision lead frame in progressive blanking process. The proposed method can give more systematic and economically feasible means for designing progressive blanking process.

• Journal of Welding and Joining
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• v.15 no.6
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• pp.49-56
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• 1997

Effect of process parameters on the quality of condenser discharge weld for coated sheet steels was discussed. The welding specimens were coated with pure Zn of 20/20 g/m2 in the production line. Direct measurements of welding parameters such as the discharge current, the pressures and the voltage drop across the electrodes were carried out with welding process monitoring system. High speed camera was also utilized to analyze the weld formation process. Test results indicated that the relation between weld strength and applied energy was stabilized at the acceptable welding heat input range. It was thought that the acceptable welding heat input should be redefined based on the monitored data because the calculated value of the welding heat input could hardly be utilized if the discharge condition was changed. Mechanical test results and high speed photographs showed that expulsion deteriorated the weld quality and the strength at the same time especially when the size of the spatter was large enough to carry the molten metal, which should form the nugget, out of the welding spot. Results also demonstrated that the discharge current should be applied at the appropriate time during the process because sufficient nugget was not produced if the time was deviated from the optimum range.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2010.05a
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• pp.795-797
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• 2010

습식 식각은 식각용액으로서 화학용액을 사용하는 공정으로 반응물이 기판표면에서 화학반응을 일으켜 표면을 식각하는 과정이며, 표면결합의 제거를 위한 식각연마와 폴리싱을 위한 식각, 그리고 구조적 형상 패턴등이 있다. 여기서 화학용액은 산화제 또는 환원제 역할을 하는 혼합용액으로 구성된다. 습식 식각 시 수${\mu}m$의 해상도를 얻기 위해서는 그 부식액의 조성이나, 에칭시간, 부식액의 온도 등을 고려하여야 한다. 또한 습식 식각 후 포토 레지스트를 제거하는 과정에서 포토 레지스트를 깨끗이 제거해야 하며, 제거공정 자체가 a-Si:H 박막을 부식 하지 않을 조건으로 행하여야 한다. 포토레지스트 제거 후 잔류 포토 레지스트를 제거하기 위해서 본 실험에서는 RCA-I 세척 기법을 사용한 후 D.I 로 린스 하였다. 본 실험에서 사용한 금속은 Cr, Al, ITO 로 모두 DC sputter 방법을 사용해서 증착하여 사용하였다. Cr박막은 $1300\AA$ 정도의 두께를 사용하였고, ITO (Indium Tin Oxide) 박막은 가시광 영역에서 투명하고 (80% 이상의 transmittance), 저저항 (Sheet Resistance : $50{\Omega}/sq$ 이하) 인 박막을 사용하였으며, 신호선으로 주로 사용되는 Al등의 증착조건에 따른 wet etching 특성을 조사하였다.

• Journal of Welding and Joining
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• v.30 no.4
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• pp.38-43
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• 2012

Using a fiber laser heat source, an oil pressure sensor was fabricated to measure the pressure in commercial vehicles. A stepping motor was used for the rotational and translational motion in the diaphragms and hardware joining. Laser welding process algorism including shielding gas control and vision system was integrated by using LabVIEW software for the high quality welding and in-line monitoring purpose. For the maximum flexibility in pressure transmission to the pressure sensor, thin sheet metal diaphragm, $25{\sim}50{\mu}m$(SUS-316L), was used and the diaphragms were optimally designed with FEM analysis. The welded samples were cross-sectioned the observation showed that the maximum depth ratio was more than seven times of diaphragms. The maximum welding speed was measured to be as high as 50in/mm by the developed automation mechanism. The fabricated prototypes were tested for the proof pressure, spring constant and sealing. The FEM results of spring constant measurement was as accurate as up to 80% of the design value and the sensor was safely operated up to the nominal pressure of 10bars.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.5
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• pp.654-661
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• 2004

In deep drawing of sheet metal, there are many cases in which the uniform and thin wall thickness of the drawn products is more important than the bottom thickness. In this case, we can not easily get the deep drawn products with the uniform and precise wall thickness by only drawing process. Therefore in general the manufacturing processes which both the drawing and the ironing process are proceeded sequentially are used. But this method has the disadvantages of a cost-up, decrease of productivity and degradation of quality, because the ironing process is added after the drawing process. In this study, in order to improve those problems and to enhance the effect of deep drawing, the combined process of redrawing and ironing fur multistep drawing of cylindrical cups is used. In this experiment, we considered the characteristics of the combined process such as the relation between the drawing and ironing rates, the drawing limits and the forces needed for operations. The suggested force prediction shows that it can successfully represent experimental results.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.293.1-293.1
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• 2016

Various materials including conductive, dielectric, and semi-conductive materials, constitute suitable candidates for printed electronics. Metal nanoparticles (e.g. Ag, Cu, Ni, Au) are typically used in conductive ink. However, easily oxidized metals, such as Cu, must be processed at low temperatures and as such, photonic sintering has gained significant attention as a new low-temperature processing method. This method is based on the principle of selective heating of a strongly absorbent film, without light-source-induced damage to the transparent substrate. However, Cu nanoparticles used in inks are susceptible to the growth of a native copper-oxide layer on their surface. Copper-oxide-nanoparticle ink subjected to a reduction mechanism has therefore been introduced in an attempt to achieve long-term stability and reliability. In this work, a flash-light sintering process was used for the reduction of an inkjet-printed Cu(II)O thin film to a Cu film. Using a photographic lighting instrument, the intensity of the light (or intense pulse light) was controlled by the charged power (Ws). The resulting changes in the structure, as well as the optical and electrical properties of the light-irradiated Cu(II)O films, were investigated. A Cu thin film was obtained from Cu(II)O via photo-thermal reduction at 2500 Ws. More importantly, at one shot of 3000 Ws, a low sheet resistance value ($0.2527{\Omega}/sq.$) and a high resistivity (${\sim}5.05-6.32{\times}10^{-8}{\Omega}m$), which was ~3.0-3.8 times that of bulk Cu was achieved for the ~200-250-nm-thick film.