• 한국전기전자재료학회논문지
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• 제30권7호
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• pp.447-453
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• 2017

In this study, $Li_2MnSiO_4$ cathode material and LiPON solid electrolyte were manufactured into thin films, and the possibility of their use in thin-film batteries was researched. When the RTP treatment was performed after $Li_2MnSiO_4$ cathode thin-film deposition on the SUS substrate by a sputtering method, a ${\beta}-Li_2MnSiO_4$ cathode thin film was successfully manufactured. The LiPON solid electrolyte was prepared by a reactive sputtering method using a $Li_3PO_4$ target and $N_2$ gas, and a homogeneous and flat thin film was deposited on a $Li_2MnSiO_4$ cathode thin film. In order to evaluate the electrochemical properties of the $Li_2MnSiO_4$ cathode thin films, coin cells using only a liquid electrolyte were prepared and the charge/discharge test was conducted. As a result, the amorphous thin film of RTP treated at $600^{\circ}C$ showed the highest initial discharge capacity of about $60{\mu}Ah/cm^2$. In cases of coin cells using liquid/solid double electrolyte, the discharge capacities of the $Li_2MnSiO_4$ cathode thin films were comparable to those without solid LiPON electrolyte. It was revealed that $Li_2MnSiO_4$ cathode thin films with LiPON solid electrolyte were applicable in thin film batteries.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.1034-1037
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• 2006

We have developed a novel thin film encapsulation method for thin-cathode OLED by introducing organic (not polymer)/inorganic multiple thin films to protect device, which is shown to slow down the permeation rate of moisture and oxygen. From the stability test of devices, the projected lifetime of thin-cathode OLED device with thin film encapsulation was similarly to that with glass lid encapsulation.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
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• pp.1233-1236
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• 2005

We report a novel approach for encapsulating of cathode electrodes in DC plasma pixels. Anode and cathode electrodes are laterally placed on a single substrate. The encapsulated electrode minimizes the sputtering of the cathode without significantly altering the turn-on voltage-pressure characteristics. An abnormal glow in current-voltage characteristics is also observed.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.365-366
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• 2007

High quality cathode with high deposition rate of thin films and long target life time is required for manufacturing TFT-LCD and semiconductor. We developed WV(wide view) sputtering cathode with wide erosion area and high deposition rate. Ti thin film thickness variation in WV cathode is below 5% for 380 kWh target life time. Al thin film thickness using normal cathode is decreased about 20%. By using WV cathode, target using efficiency was improved 40%. in comparison with normal cathode.

• 한국세라믹학회지
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• 제38권1호
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• pp.100-105
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• 2001

An all solid-state thin film battery (TFB) was fabricated by growing, undoped and Pt-doped vanadium oxide cathode film ( $V_2$ $O_{5}$ ) on I $n_2$ $O_3$: Sn coated glass, respectively. Room temperature charge-discharge measurements based on Li/Lipon/ $V_2$ $O_{5}$ full-cell structure with a constant current clearly shows that the Pt-doped $V_2$ $O_{5}$ cathode film is superior, in terms of cyclibility. X-ray diffraction (XRD) results indicate that the Pt doping process induces a more random amorphous structure than an undoped $V_2$ $O_{5}$ film. In addition to its modified structure, the Pt-doped $V_2$ $O_{5}$ film has a smoother surface than the undoped sample. Compared to an undoped $V_2$ $O_{5}$ film, the Pt doped $V_2$ $O_{5}$ cathode film has a higher electron conductivity. We hypothesize that the addition of Pt alters electrochemical performance in a manner of making more random amorphous structure and gives an excess electron by replacing the $V^{+5}$. Possible mechanisms are discussed for the observed Pt doping effect on structural and electrochemical properties of vanadium oxide cathode films, which are grown on I $n_2$ $O_3$: Sn coated glass.

• 한국세라믹학회지
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• 제52권5호
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• pp.304-307
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• 2015

To reduce the lateral conduction loss of thin-film-processed cathodes, the microstructure of the thin-film cathode is engineered to contain a denser bridging layer in the middle. By doing so, the characteristic crack-like pores that separate the cathode domains in thin-film-processed cathodes and hamper lateral conduction are better connected and, as a result, the sheet resistance of the cathode is effectively reduced by a factor of 5. This induces suppression of the lateral conduction loss and expansion of the effective current collecting area; the cell performance is improved by more than 30%.

• 대한화학회지
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• 제63권6호
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• pp.440-445
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• 2019

본 연구는 자동차 폐리튬 이차전지의 모듈로부터 재생할 수 있는 자원을 효율적으로 회수하는 방법을 개발하는 것이다. 모듈의 셀은 구리 박막, 알루미늄 박막, 그리고 이들 사이는 폴리머 재질의 격막으로 이루어져 있다. 셀은 특별히 제작한 글러브 상자 안에서 그리고 여러 번의 단계를 거쳐 손상 없이 완전히 해체 하였다. 우선적으로 양극활물질은 400 ℃에서 열처리하여 알루미늄 박막으로부터 분리하였다. 그런 후 분리된 양극활물질은 잔류되어 있는 탄소 성분을 제거하기 위해 800 ℃에서의 소성 후에 최종적으로 높은 순도로 회수되었다. 본 연구 결과를 바탕으로 해서, 알루미늄 박막으로부터 양극활물질을 구성하고 있는 코발트(Co), 니켈(Ni), 망간(Mn), 리튬(Li)과 같은 희유금속들을 80% 이상 회수할 수 있었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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• pp.634-637
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• 1999

The amorphous vanadium oxide as a cathode material is very preferable for fabricating high performance micro-battery. The amorphous vanadium oxide cathode is preferred over the crystalline form because three times more lithium ions can be inserted into the amorphous cathode, thus making a battery that has a higher capacity. The electrochemical properties of sputtered films are strongly dependent on the oxygen partial pressure in the sputtering gas. The effect of different oxygen partial pressure on the electrochemical properties of vanadium oxide thin films formed by r.f. reactive sputtering deposition were investigated. The stoichiometry of the as-deposited films were investigated by Auger electro spectroscopy. X-ray diffraction and atomic force microscopy measurements were carried out to investigate structural properties and surface morphology, respectively. For high oxygen partial pressure(>30% ), the films were polycrystalline V$_2$O$_{5}$ while an amorphous vanadium oxide was obtained at the lower oxygen partial pressure(< 15%). Half-cell tests were conducted to investigate the electrochemical properties of the vanadium oxide film cathode. The cell capacity was about 60 $\mu$ Ah/$\textrm{cm}^2$ m after 200 cycle when oxygen partial pressure was 20%. These results suggested that the capacity of the thin film battery based on vanadium oxide cathode was strongly depends on crystallinity.y.

• 한국전기화학회:학술대회논문집
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• 한국전기화학회 2000년도 춘계총회 및 학술발표회
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• pp.37-37
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• 2000

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.696-696
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• 2013

Solid Oxide Fuel Cells (SOFCs) have been gaining academic/industrial attention due to the unique high efficiency and minimized pollution emission. SOFCs are an electrochemical system composed of dissimilar materials which operates at relatively high temperatures ranging from 800 to 1000oC. The cell performance is critically dependent on the inherent properties and integration processing of the constituents, a cathode, an electrolyte, an anode, and an interconnect in addition to the sealing materials. In particular, the gas transport, ion transport, and by-product removal also affect the cell performance, in terms of open cell voltages, and cell powers. In particular, the polarization of cathode materials is one of the main sources which affects the overall function in SOFCs. Up to now, there have been studies on the materials design and microstructure design of the component materials. The current work reports the effect of thin film processing on cathode polarization in solid oxide fuel cells. The polarization issues are discussed in terms of dc- and ac-based electrical characterizations. The potential of thin film processing to the applicability to SOFCs is discussed.