Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

Fabrication of Li2MnSiO4 Cathode Thin Films by RF Sputtering for Thin Film Li-ion Secondary Batteries and Their Electrochemical Properties

RF 스퍼터법을 이용한 Li2MnSiO4 리튬 이차전지 양극활물질 박막 제조 및 전기화학적 특성

  • Chae, Suman (Department of Materials Science and Engineering, Kunsan National University) ;
  • Shim, Joongpyo (Department of Nano and Chemical Engineering, Kunsan National University) ;
  • Sun, Ho-Jung (Department of Materials Science and Engineering, Kunsan National University)
  • 채수만 (군산대학교 신소재공학과) ;
  • 심중표 (군산대학교 나노화학공학과) ;
  • 선호정 (군산대학교 신소재공학과)
  • Received : 2017.02.11
  • Accepted : 2017.04.16
  • Published : 2017.07.01
Download PDF
⟨ Previous Next ⟩

Abstract

In this study, $Li_2MnSiO_4$ cathode material and LiPON solid electrolyte were manufactured into thin films, and the possibility of their use in thin-film batteries was researched. When the RTP treatment was performed after $Li_2MnSiO_4$ cathode thin-film deposition on the SUS substrate by a sputtering method, a ${\beta}-Li_2MnSiO_4$ cathode thin film was successfully manufactured. The LiPON solid electrolyte was prepared by a reactive sputtering method using a $Li_3PO_4$ target and $N_2$ gas, and a homogeneous and flat thin film was deposited on a $Li_2MnSiO_4$ cathode thin film. In order to evaluate the electrochemical properties of the $Li_2MnSiO_4$ cathode thin films, coin cells using only a liquid electrolyte were prepared and the charge/discharge test was conducted. As a result, the amorphous thin film of RTP treated at $600^{\circ}C$ showed the highest initial discharge capacity of about $60{\mu}Ah/cm^2$. In cases of coin cells using liquid/solid double electrolyte, the discharge capacities of the $Li_2MnSiO_4$ cathode thin films were comparable to those without solid LiPON electrolyte. It was revealed that $Li_2MnSiO_4$ cathode thin films with LiPON solid electrolyte were applicable in thin film batteries.

Keywords

References

  1. Y. N. Zhou, M. Z. Xue, and Z. W. Fu, J. Power Sources, 234, 310 (2013). [DOI: https://doi.org/10.1016/j.jpowsour.2013.01.183]
  2. J.F.M. Oudenhoven, L. Baggetto, and P.H.L. Notten, Adv. Energy Mater., 1, 10 (2011). [DOI: https://doi.org/10.1002/aenm.201000002]
  3. W. Lai, C. K. Erdonmez, T. F. Marinis, C. K. Bjune, N. J. Dudney, F. Xu, R. Wartena, and Y. M. Chiang, Adv. Mater., 22, E139 (2010). [DOI: https://doi.org/10.1002/adma.200903650]
  4. A. Patil, V. Patil, D. W. Shin, J. W. Choi, D. S. Paik, and S. J. Yoon, Mater. Res. Bull., 43, 1913 (2008). [DOI: https://doi.org/10.1016/j.materresbull.2007.08.031]
  5. B. Xu, D. Qian, Z. Wang, and Y. S. Meng, Mater. Sci. Eng., R, 73, 51 (2012). [DOI: https://doi.org/10.1016/j.mser.2012.05.003]
  6. R. Marom, S. F. Amalraj, N. Leifer, D. Jacob, and D. Aurbach, J. Mater. Chem., 21, 9938 (2011). [DOI: https://doi.org/10.1039/c0jm04225k]
  7. M. S. Whittingham, Chem. Rev., 104, 4271 (2004). [DOI: https://doi.org/10.1021/cr020731c]
  8. R. J. Gummow and Y. He, J. Power Sources, 253, 315 (2014). [DOI: https://doi.org/10.1016/j.jpowsour.2013.11.082]
  9. M. S. Islam, R. Dominko, C. Masquelier, C. Sirisopanaporn, A. R. Armstrong, and P. G. Bruce, J. Mater. Chem., 21, 9811 (2011). [DOI: https://doi.org/10.1039/c1jm10312a]
  10. R. Dominko, M, Bele, A. Kokalj, M. Gaberscek, and J. Jamnik, J. Power Sources, 174, 457 (2007). [DOI: https://doi.org/10.1016/j.jpowsour.2007.06.188]
  11. V. V. Politaev, A. A. Petrenko, V. B. Nalbandyan, B. S. Medvedev, and E. S. Shvetsova, J. Solid State Chem., 180, 1045 (2007). [DOI: https://doi.org/10.1016/j.jssc.2007.01.001]
  12. H. J. Sun, S. Chae, and J. Shim, J. Kor. Electrochem. Soc., 18, 143 (2015). [DOI: https://doi.org/10.5229/JKES.2015.18.4.143]
  13. J. Kim, J. Shim, G. Park, and H. J. Sun, J. Korean Inst. Electr. Electron. Mater. Eng., 25, 398 (2012). [DOI: https://doi.org/10.4313/JKEM.2012.25.5.398]
  14. Y. Su, J. Falgenhauer, A. Polity, T. Leichtweiss, A. Kronenberger, J. Obel, S. Zhou, D. Schlettwein, J. Janek, and B. K. Meyer, Solid State Ionics, 282, 63 (2015). [DOI: https://doi.org/10.1016/j.ssi.2015.09.022]
  15. N. Suzuki, S. Shirai, N. Takahashi, T. Inaba, and T. Shiga, Solid State Ionics, 191, 49 (2011). [DOI: https://doi.org/10.1016/j.ssi. 2011.04.001]
  16. S. Won, K. K. Lee, G. Park, H. J. Sun, J. C. An, and J. Shim, J. Appl. Electrochem., 45, 169 (2015). [DOI: https://doi.org/10.1007/s10800-014-0778-8]
  17. I. Quinzeni, S. Ferrari, E. Quartarone, D. Capsoni, M. Caputo, A. Goldoni, P. Mustarelli, and M. Bini, J. Power Sources, 266, 179 (2014). [DOI: https://doi.org/10.1016/j.jpowsour.2014.05.012]
  18. C. S. Nimisha, K. Y. Rao, G. Venkatesh, G. M. Rao, and N. Munichandraiah, Thin Solid Films, 519, 3401 (2011). [DOI: https://doi.org/10.1016/j.tsf.2011.01.087]