• 제목/요약/키워드: Thickness reduction

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NOVA System을 이용한 CMP Automation에 관한 연구 (The Study for the CMP Automation wish Nova Measurement system)

  • 김상용;정헌상;박민우;김창일;장의구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.176-180
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    • 2001
  • There are several factors causing re-work in CMP process such as improper polish time calculation by operator, removal rate decline of the polisher, unstable in-suit pad conditioning, slurry supply module problem and wafer carrier rotation inconsistency. And conclusively those fundimental reason for the re-work rate increasement is mainly from the cycle time delay between wafer polish and post measurement. Therefore, Wafer thickness measurement in wet condition could be able to remove those improper process conditions which may happen during the process in comparison with the conventional dried wafer measurement system and it can be able to reduce the CMP process cycle time. CMP scrap reduction by overpolish, re-work rate reduction, thickness control efficiency also can be easily achieved. CMP Equipment manufacturer also trying to develop integrated system which has multi-head & platen, cleaner, pre & post thickness measure and even control the polish time from the calculated removal rate of each polishing head by software. CMP re-work problem such as over & under polish by target thickness may result in the cycle time delay. By reducing those inefficient factors during the process and establish of the automatic process control, CLC system need to be adopted to maximize the process performance. Wafer to Wafer Polish Time Feed Back Control by measuring the wafer right after the polish shorten the polish time calculation for the next wafer and it lead to the perfect Post CMP target thickness control capability. By Monitoring all of the processed the wafer, CMP process will also be stabilize itself.

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고체 분말이 부상하는 2상 난류 수직관 유동에 대한 Lumley의 저항감소 모델의 적용 (II) - 열전달 기구 - (Application of Lumley's Drag Reduction Model to Two-Phase Gas-Particl Flow in a Pipe(II) - Mechanism of Heat Transfer-)

  • 한기수;정명균;성형진
    • 대한기계학회논문집
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    • 제14권1호
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    • pp.214-224
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    • 1990
  • 본 연구에서는 현 저자의 이전의 연구를 확장하여 균일한 열유속을 갖는 2상 기체-고체입자 위 방정식에서 축 방향의 열전달은 반경 방향의 열전달보다 작아 무시 하였으며, 복사 열전달은 기체와 입자 사이의 온도 차이가 적어 무시하였다. 방정식 중 $F_{px}$$F_{pr}$ 은 2상 사이의 상호작용에 의한 단위부피당 축방향과 반경방향 의 저항력이며, 수직관의 열전달 특성을 부하도와 상대 입자 크기 $d_{p}$/D를 변화시 켜 가면서 조사하는 것이다.다.

도그본 고려한 조압연 압연하중 예측모델 개발 (Model for the prediction of Roll Force of Roughing Mill considering Width reduction)

  • 곽우진;이성진
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2007년도 춘계학술대회 논문집
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    • pp.223-225
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    • 2007
  • Online models predicting roll force and forward slip of roughing mill was developed using nondimensional parameters. Using the effective inlet thickness, roll force model take into account the effect of inlet dog-bone shape of slab which take places after width reduction through edger rolling in roughing mill. The prediction accuracy of the proposed model is examined through comparison with measurements.

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제진층의 두께변화에 따른 CLD 구조의 진동응답 측정 (Measurements of the vibration responses of CLD structures varied in thickness of the damping layer)

  • 이신영;유승엽;전진용;김승준;박준홍
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2007년도 추계학술대회논문집
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    • pp.1463-1466
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    • 2007
  • Visco-elastic damping material for reducing heavy-weight floor impact noise and vibration in reinforced concrete structures was tested according to its thickness in the damping layer. The effect of damping material was compared with 20, 15, 10 and 5mm thickness. The wave propagation characteristics was measured for suggestion of an efficient method to reduce the floor impact noise. The method was proposed using the flexural wave propagation characteristics. The result showed that reduction of the thickness of damping layer made a slight difference; the natural frequency moved to higher frequency and the amplitude increased at low frequencies with 5mm thickness of damping material.

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AI합금 단순겹치기 접착이음의 인장-전단강도 평가 (The Evaluation of Tensile-shear Strength on the Al-Alloy Single-lap Adhesive Joints)

  • 오승규;유영철;정의섭;이원
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1997년도 춘계학술대회 논문집
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    • pp.567-571
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    • 1997
  • Recently, automobile industry has led to increasing use of aluminum alloy for weight reduction. Automobile made of aluminum alloy can be given lighter, stronger and a harder surface by anodizing than one made of steel-alloy. In this paper, we investigate the influence of lap length, adherend thickness and adhesive thickness on adhesive strength of single-lap adhesive joints by conducting tensile-shear tests. Single-lap adhesive joints of aluminum was calculated using joint factor by using adhesive length, adherend thickness of specimen.

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난류 유동장 내 두께를 가지는 단일 에어포일의 음향파워 예측 (Prediction of acoustic power radiated from an airfoil with thickness in turbulent flow)

  • 김대환;정철웅
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2013년도 춘계학술대회 논문집
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    • pp.353-358
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    • 2013
  • Present paper deals with turbulence-airfoil interaction noise and mainly investigates the effects of airfoil thickness on the broadband noise spectrum. The acoustic power radiation from an airfoil is predicted using high-order time-domain method, which is based on the computational aeroacoustic technique solving the linear Euler equations. The homogeneous and isotropic turbulence is generated by utilizing the synthetic turbulence modeling based on random particle method. The airfoils taken into consideration are a flat-plate and a NACA0012 airfoil aligned with uniform mean flow. The effects of airfoil thickness on the radiated inflow turbulence noise are investigated by comparing acoustic power spectrum predicted for each airfoil. The comparison of acoustic power spectrum reveals that the airfoil thickness significantly contributes the high frequency noise reduction.

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수치해석적 다짐 작용 연구: 공극률과 퇴적층 두께 변화에 미치는 영향 (Numerical analysis of sedimentary compaction: Implications for porosity and layer thickness variation)

  • 김예슬;이창열;이은영
    • 지질학회지
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    • 제54권6호
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    • pp.631-640
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    • 2018
  • 퇴적층의 두께와 형성 기간을 분석하는 것은 퇴적분지의 발달사를 이해하기 위한 분지 해석과 모델링 연구에서 중요하다. 분지 발달 과정에서 퇴적층은 깊이가 증가함에 따라 다짐 작용에 의해 두께가 감소하고, 이 두께 변화는 깊이에 따른 공극률 변화 경향(다짐 작용 경향)을 통해 계산이 가능하다. 이 연구에서는 대표적인 퇴적암상인 사암, 셰일, 탄산염암의 깊이에 따른 공극률 변화 자료를 기반으로, 암상에 따른 다짐 작용 경향의 범위를 지수 함수를 이용하여 정량화하였다. 그리고 다짐 작용이 퇴적층의 공극률과 두께 변화에 미치는 영향을 수치해석적 방법을 이용해 평가하였다. 사암은 초기 공극률의 범위가 좁고 깊이 증가에 따른 공극률 감소 경향이 비교적 일정하여, 다짐 작용에 의한 층두께의 변화 범위가 작다. 셰일은 약 2,000 m 깊이까지 공극률이 빠르게 감소한 후, 급격히 낮아진 감소율을 보이며 이는 퇴적층의 두께 변화에도 반영된다. 탄산염암은 초기 공극률의 범위가 넓고, 깊이 증가에 따른 공극률 감소 양상의 차이가 커서, 결과적으로 다짐 작용에 의해 감소한 퇴적층 두께 차이의 범위도 크게 나타난다. 이 수치 해석적 다짐 작용 연구의 정량적 분석 결과에서 나타난 각 암상들의 다짐 작용에 따른 공극률과 층두께 감소의 특징들은 퇴적분지의 생성과 발달 과정을 이해하기 위해 필요한 퇴적층 두께 복원과 침강사 그리고 지열 작용 분석에 영향을 끼치며, 이는 다짐 작용 경향이 분지 모델링 연구에서 중요한 요소이며 적절한 적용이 필요함을 보여준다.

연료분사펌프의 최적 간극 설계 (Optimal Design of Clearance in Fuel Injection Pump)

  • 홍성호;이보라;조용주;박종국
    • Tribology and Lubricants
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    • 제31권4호
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    • pp.148-156
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    • 2015
  • In the study, a design process for ensuring optimal clearance in a fuel injection pump(FIP) is suggested. Structure analysis and hydrodynamic lubrication analysis are performed to determine the optimal clearance. The FIP is simulated using Hypermesh, Abaqus 6.12 to evaluate the reduction of clearance when the maximum supply pressure is applied. The reduction in clearance is caused by the difference in the deformations between the barrel and plunger. When the deformation of the plunger is larger than that of the barrel, a reduction in clearance at the head part occurs. On the other hand, the maximum clearance reduction equals the maximum deformation in the stem part, because the deformation of barrel does not occur in this region. The clearance of FIP should be designed to be larger than maximum reduction of clearance in order to avoid contact between the plunger and barrel. In addition, the two-dimensional Reynolds equation is used to evaluate lubrication characteristics with variations of viscosity, clearance and nozzle for a laminar, incompressible, unsteady state flow. The equation is discretized using the finite difference method. The lubrication characteristics of FIP are investigated by comparing film parameter, which is the ratio of the minimum film thickness and surface roughness. The optimal clearance of FIP is to be designed by considering the maximum reduction in clearance, lubrication characteristics, machining limits and tolerance of clearance.

박폭 저장력 피스톤 링 팩에 대한 마찰저감 연구 (A Study on Friction Reduction Related with the Piston Ring Pack with Thinner Width Ring and Lower Tension Ring)

  • 전상명
    • Tribology and Lubricants
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    • 제25권5호
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    • pp.348-358
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    • 2009
  • To satisfy the more severe emission regulation and the demand of higher fuel economy in near future, the combustion pressure and power output of engines is going to be higher. In order to get the reduction of engine emission and the higher power, it is needed the reduction of the tension and width of ring pack. The lower tension ring and the manufacturing technology of cast iron thinner width ring can bring the friction reduction between the ring and liner during engine running. Therfore, the fuel economy can be achieved. Thereafter the engine emission can be reduced. In this study, by using a developed basic computer program that predicts the inter-ring pressure, the motion of ring and the inter-ring pressure through a crevice volume model between adjacent rings, and the oil film thickness and the friction computed by lubrication theories, it is to be examined the effect of friction reduction from piston ring pack equipped with thinner width ring and lower tension ring.

수소환원법에 의한 수용액 중 Cu-Al$_2$O$_3$ 복합분말제조 (Preparation of Cu-Al$_2$O$_3$ Composite Powder in the Aqueous Solution by Ha Gas Reduction)

  • 이종현
    • 한국분말재료학회지
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    • 제4권2호
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    • pp.106-112
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    • 1997
  • $Cu-Al_20_3 $ composite powders were prepared by hydrogen reduction of $Cu^{2+}$ from ammoniacal copper sulfate solution on alumina core using autoclave. The copper reduction rate and the properties of copper layer were investigated using Scanning Electron Microscope(SEM), X-ray diffractometer, size and chemical analyzers. The reduction rate of $Cu^{2+}$ showed the maximum value when the molar ratio of [$NH_3$]/[$Cu^{2+}$] was 2. In order to prevent the agglomeration of Cu powder and ethane reduction rate, $Fe^{2+}$ and anthraquinone which act as catalysis were added in the solution. Catalysis was effectively chanced with the addition of two elemerts at a time. Optimum conditions obtained in this study were hydrogen reduction temperature of 205$^{\cire}C$, stirring speed of 500 rpm and hydrogen partial pressure of 300 psi. Obtained $Cu-Al_20_3 $ composite Powders were found to have the uniform and continuous copper coating layer of nodule shape with 3~5 $\mu$m thickness.

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