• Title/Summary/Keyword: Thick film process

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Thick Film Gas Sensor Based on PCB by Using Nano Particles (나노 입자를 이용한 PCB 기반 후막 가스 센서)

  • Park, Sung-Ho;Lee, Chung-Il;Song, Soon-Ho;Kim, Yong-Jun
    • Journal of the Microelectronics and Packaging Society
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    • v.14 no.2 s.43
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    • pp.59-63
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    • 2007
  • This paper presented a low-cost thick film gas sensor module, which was based on simple PCB (Printed Circuit Board) process. The proposed sensor module included a $NO_2/H_2$ gas sensor, a relative humidity sensor, and a heating element. The $NO_2/H_2$ gas and relative humidity sensors were realized by screen-printing $SnO_2,\;BaTiO_3$ nano-powders on IDTS (Interdigital Transducer) of a PCB substrate, respectively. At first 1% $H_2$ gas flowed into the sensor chamber. After 4 min, air filled the chamber while $H_2$ gas flow stopped. This experiment was performed repeatedly. The Identical procedure was used for the $NO_2$ detection. The result for sensing $H_2$ gas showed the increase of voltage from 0.8V to 3.5V due to the conductance increase and its reaction response time by hydrogen flow was 65 sec. $NO_2$ sensing results showed 2.7 V voltage drop due to the conductance decrease and its response time was 3 sec through a voltage monitoring.

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Photocatalyst Surface Properties of the Oxide Thin Films According to the Plasma Etching Process (플라즈마 에칭공정에 따른 산화물 박막의 광촉매 표면 특성)

  • Lee, Chang-Hyun;Seo, Sung-Bo;Oh, Ji-Yong;Jin, Ik-Hyeon;Sohn, Sun-Young;Kim, Hwa-Min
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.28 no.5
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    • pp.300-305
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    • 2015
  • $WO_3$, $SiO_2$, and $TiO_2$ films with hydrophilic property are deposited by rf-magnetron sputtering. Their wettability is strongly depends on the presence or absence of the oxygen plasma etching on the glass substrates. The $TiO_2$ film of 50 nm-thick on the plasma etched glass shows a water contact angle (WCA) below $5^{\circ}$ which means a super-hydrophilic surface. However, WCA values are gradually degraded when the films are exposed under atmosphere, especially $WO_3$. In order to improve hydrophilic property, the degraded films can be again recovered by UV illumination for 10 sec using UV-light and the $TiO_2$ film shows a super-hydrophilic surface about $3^{\circ}$.

Thermal properties of the surface-modified Inconel 617 (표면 처리에 따른 Inconel 617 합금의 고온 특성)

  • Cho, Hyun;Bang, Kwang-Hyun;Lee, Byeong-Woo
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.19 no.6
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    • pp.298-304
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    • 2009
  • The effect of the surface treatments on the high temperature properties of the Inconel 617, one of the promising candidate alloys for high temperature heat-transport system, has been studied. Various surface modification methods including a rapid thermal process(RTP), a hydrothermal treatment, and a physical vapor deposition($2{\mu}m$ thick TiAlN film by an arc discharge) were applied to the Inconel 617. The morphological and the structural properties of the surface-modified Inconel 617 samples after heat treatment at $1000^{\circ}C$ in the air were compared to find out whether inhomogeneous formation of $Cr_2O_3$ crust at the surface region was suppressed or not. TiAlN-coated Inconel 617 showed homogeneous microstructure and the lowest wear loss compared to bare, RTP- and hydrothermally-treated Inconel 617 by suppressing the $Cr_2O_3$ crust formation.

Stress Dependence of Thermal Stability of Nickel Silicide for Nano MOSFETs

  • Zhang, Ying-Ying;Lee, Won-Jae;Zhong, Zhun;Li, Shi-Guang;Jung, Soon-Yen;Lee, Ga-Won;Wang, Jin-Suk;Lee, Hi-Deok;Lim, Sung-Kyu
    • Transactions on Electrical and Electronic Materials
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    • v.8 no.3
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    • pp.110-114
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    • 2007
  • Dependence of the thermal stability of nickel silicide on the film stress of inter layer dielectric (ILD) layer has been investigated in this study and silicon nitride $(Si_3N_4)$ layer is used as an ILD layer. Nickel silicide was formed with a one-step rapid thermal process at $500^{\circ}C$ for 30 sec. $2000{\AA}$ thick $Si_3N_4$ layer was deposited using plasma enhanced chemical vapor deposition after the formation of Ni silicide and its stress was split from compressive stress to tensile stress by controlling the power of power sources. Stress level of each stress type was also split for thorough analysis. It is found that the thermal stability of nickel silicide strongly depends on the stress type as well as the stress level induced by the $Si_3N_4$ layer. In the case of high compressive stress, silicide agglomeration and its phase transformation from the low-resistivity nickel mono-silicide to the high-resistivity nickel di-silicide are retarded, and hence the thermal stability is obviously improved a lot. However, in the case of high tensile stress, the thermal stability shows the worst case among the stressed cases.

Preparation and Properties of Y2O3-Doped ZrO2 Films on Etched Al Foil by Sol-Gel Process

  • Chen, Fei;Park, Sang-Shik
    • Korean Journal of Materials Research
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    • v.25 no.2
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    • pp.107-112
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    • 2015
  • The oxide films formed on etched aluminum foils play an important role as dielectric layers in aluminum electrolytic capacitors. $Y_2O_3$-doped $ZrO_2$ (YZ) films were coated on the etched aluminum foils by sol-gel dip coating, and the electrical properties of YZ-coated Al foils were characterized. YZ films annealed at $450^{\circ}C$ were crystallized into a cubic phase, and as the $Y_2O_3$ doping content increased, the unit cell of $ZrO_2$ expanded and the grain size decreased. The etch pits of Al foils were filled by YZ sol when it dried at atmospheric pressure after repeating for several times, but this step could essentially be avoided when being dried in a vacuum. YZ-coated foils indicated that the specific capacitance and dissipation factor were $2-2.5{\mu}F/cm^2$ and 2-4 at 1 kHz, respectively, and the leakage current and withstanding voltage of films approximately 200 nm thick were $5{\times}10^{-4}A$ at 21 V and 22 V, respectively. After being anodized at 500 V, the foils exhibited a specific capacitance and dissipation factor of $0.6-0.7{\mu}F/cm^2$ and 0.1-0.2, respectively, at 1 kHz, while the leakage current and withstanding voltage were $2{\times}10^{-4}-3{\times}10^{-5}A$ at 400 V and 420-450 V, respectively. This suggests that YZ film is a promising dielectric that can be used in high voltage Al electrolytic capacitors.

Fabrication of NiO-Y:BaZrO3 Composite Anode for Thin Film-Protonic Ceramic Fuel Cells using Tape-Casting

  • Bae, Kiho;Noh, Ho-Sung;Jang, Dong Young;Kim, Manjin;Kim, Hyun Joong;Hong, Jongsup;Lee, Jong-Ho;Kim, Byung-Kook;Son, Ji-Won;Shim, Joon Hyung
    • Journal of the Korean Ceramic Society
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    • v.52 no.5
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    • pp.320-324
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    • 2015
  • Optimization of the fabrication process of NiO-yttrium doped barium zirconate (BZY) composite anode substrates using tape-casting for high performance thin-film protonic ceramic fuel cells (PCFCs) is investigated. The anode substrate is composed of a tens of microns-thick anode functional layer laminated over a porous anode substrate. The macro-pore structure of the anode support is induced by micron-scale polymethyl methacrylate (PMMA) pore formers. Thermal gravity analysis (TGA) and a dilatometer are used to determine the polymeric additive burn-out and sintering temperatures. Crystallinity and microstructure of the tape-cast NiO-BZY anode are analyzed after the sintering.

Adsorption Properties of Paint Mixed with Powdered Activated Carbon According to the Number of Coatings (분말활성탄을 혼합한 도료의 도장횟수에 따른 흡착 특성)

  • Choi, Byung-Cheol;Kyoung, In-Soo;Lee, Sang-Soo
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2021.05a
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    • pp.25-26
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    • 2021
  • Due to COVID-19, the spread of non-face-to-face culture is increasing the time spent indoors. Accordingly, it is necessary to reduce indoor air pollutants. Also, among building materials, there are paints. As the number of coatings increases, the coating film becomes thick, and there is a risk of cracking and falling off. Therefore, this study is to examine the adsorption properties of indoor air pollutants according to the number of coatings of a paint mixed with powdered activated carbon. In the experimental plan, the addition ratio of powdered activated carbon was selected as 30%, and the number of coatings was selected as primcoating, second coat, and finishing coat, and the concentration of formaldehyde and volatile organic compounds were measured. As a result, as the number of coatings increased, the concentration of formaldehyde and volatile organic compounds tended to decrease. This is considered to be due to the fact that not only the physical adsorption acted by the internal pores of the powdered activated carbon, but also because a lot of powdered activated carbon was present on the painted surface as the coating film was formed. However, since it is judged that there is an error in the concentration due to the inflow of external air as the chamber cover is opened to put the test object in the adsorption test process, it is considered that the experimental method needs to be supplemented.

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Molybdenum Oxides as Diffusion Barrier Layers against MoSe2 Formation in A Nonvacuum Process for CuInSe2 Solar Cells (비진공법 CuInSe2 태양전지에서 MoSe2의 생성을 억제하기 위한 산화 몰리브데늄 확산장벽 층)

  • Lee, Byung-Seok;Lee, Doh-Kwon
    • Current Photovoltaic Research
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    • v.3 no.3
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    • pp.85-90
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    • 2015
  • Two-step processes for preparing $Cu(In,Ga)Se_2$ absorber layers consist of precursor layer formation and subsequent annealing in a Se-containing atmosphere. Among the various deposition methods for precursor layer, the nonvacuum (wet) processes have been spotlighted as alternatives to vacuum-based methods due to their potential to realize low-cost, scalable PV devices. However, due to its porous nature, the precursor layer deposited on Mo substrate by nonvacuum methods often suffers from thick $MoSe_2$ formation during selenization under a high Se vapor pressure. On the contrary, selenization under a low Se pressure to avoid $MoSe_2$ formation typically leads to low crystal quality of absorber films. Although TiN has been reported as a diffusion barrier against Se, the additional sputtering to deposit TiN layer may induce the complexity of fabrication process and nullify the advantages of nonvacuum deposition of absorber film. In this work, Mo oxide layers via thermal oxidation of Mo substrate have been explored as an alternative diffusion barrier. The morphology and phase evolution was examined as a function of oxidation temperature. The resulting Mo/Mo oxides double layers were employed as a back contact electrode for $CuInSe_2$ solar cells and were found to effectively suppress the formation of $MoSe_2$ layer.

The Synthesis Mechanism of BaTiO3 Nano Particle at Low Temperature by Hydrate Salt Method (Hydrate Salt법을 이용한 Nano BaTiO3 저온합성 메커니즘)

  • Lee, Chang-Hyun;Shin, Hyo-Soon;Yeo, Dong-Hun;Ha, Gook-Hyun;Nahm, Sahn
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.27 no.12
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    • pp.852-856
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    • 2014
  • $BaTiO_3$ nano powder can be synthesized by hydrate salt method at $120^{\circ}C$ in air. Decreasing the thickness of thick film, the nano dielectric particle is needed in electronic ceramics. However, the synthesis of $BaTiO_3$ nano particle at low temperature in air and their mechanism were not reported enough. And ultrasonic treatment can be tried because of low temperature process in air. Therefore, in this study, the $BaTiO_3$ nano powder was synthesised with the synthesis time and ultrasonic treatment at $120^{\circ}C$ in air. In the synthesis process, the effects of process were evaluated. From the experimental observation, the synthesis mechanism was proposed. The homogeneous $BaTiO_3$ particle was synthesised by KOH salt solution at $120^{\circ}C$ for 1hour. It was conformed that the ultrasonic treatment effected on the increase of synthesis rate. After cutting the salt powder using FIB, $BaTiO_3$ nano particles observed homogeneously in the cross-section of the salt particle.

Variations in Electrical Conductivity of CNF/PPy Films with the Ratio of CNF and Application to a Bending Sensor (탄소나노섬유의 함량에 따른 CNF/PPy 필름의 전기전도도 및 굽힘센서로 응용)

  • Kim, Cheol;Zhang, Shuai;Kim, Seon-Myeong
    • Composites Research
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    • v.23 no.3
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    • pp.31-36
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    • 2010
  • A new material, carbon-nanofiber/polypyrrole (CNF/PPy) composite films, with different CNF weight ratios were fabricated electrochemically. Compared to the fabrication process based on simple physical mixing, the flexibility of the new film has been improved much better than the previous similar material. Pure PPy films were also fabricated by the new electrochemical process for the comparison of difference. Several SEM images were taken at two locations (electrode-side and solution-side) and at the cross section of the samples. Electrical conductivity of the composite films was measured by the four-probe method. The conductivity of the pure PPy film 0.013cm thick was 79.33S/cm. The CNF/PPy composite film with 5% CNF showed a conductivity of 93S/cm. One with 10% CNF showed a conductivity of 126 S/cm. The conductivity of PPy improves, as the CNF weight ratio increases. The good conductivity of CNF/PPy composites makes them a candidate for a small bending actuator. A bending sensor consists of PPy and PVDF, which can be operated in the air, was designed and the bending deflection was calculated using FEM.