• 대한전기학회:학술대회논문집
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• 대한전기학회 1993년도 정기총회 및 추계학술대회 논문집 학회본부
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• pp.188-191
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• 1993

Silicon flow sensor which can detect the magnitude and direction of two dimensional air flow was designed and fabricated by CMOS process and bulk micromachining technique. The flow sensor consists of three-layered dielectric diaphragm a heater at the center of the diaphragm and four thermopiles surrounding the heater at each side of diaphragm as sensing elements. This diaphragm structure contributes to improve the sensitivity due to excellent thermal isolation property of dielectric materials and its tiny thickness. The flow sensor has good axial symmetry to sense 2-D air flow with the optimized sensing position in the given structure. Measured sensitivity of our sensor is $18.7mV/(m/s)^{1/2}$.

• 전자공학회논문지A
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• 제31A권5호
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• pp.113-120
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• 1994

Silicon flow sensor that can detect the velocity and direction of air flow was designed and fabricated by integrated circuit process and bulk micromachining technique. The flow sensor consists of three-layered dielectric diaphragm, a heater at the center of the diaphragm, and four thermopiles surrounding the heater at each side of diaphragm as sensing elements. This diaphragm structure contributes to improve the sensitivity of the sensor due to excellent thermal isolation property of dielectric materials and their tiny thickness. The flow sensor has good axial symmetry to sense 2-D air flow with the optimized sensing position in the proposed structure. The sensor is fabricated using CMOS compatible process followed by the anisotropic etching of silicon in KOH and EDP solutions to form I$\mu$ m thick dielectric diaphragm as the last step. TCR(Temperature Coefficient of Resistance) of the heater of the fabricated sensors was measured to calculate the operating temperature of the heater and the output voltage of the sensor with respect to flow velocity was also measured. The TCR of the polysilicon heater resistor is 697ppm/K, and the operating temperature of the heater is 331$^{\circ}C$ when the applied voltage is 5V. Measured sensitivity of the sensor is 18.7mV/(m/s)$^{1/2}$ for the flow velocity of smaller than 10m/s.

• 대한기계학회논문집B
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• 제31권10호
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• pp.876-883
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• 2007

Numerical simulations are conducted for the design of a micro thermal mass air flow sensor (MAFS), which consists of a microfabricated heater and thermopiles on the silicon-nitride ($Si_3N_4$) thin membrane structure. It is important to find the proper locations of these thermal elements in the design of MAFS with improved sensitivity. Three heating modes of the micro-heater are considered: constant temperature, constant power and heating pulses. The analyses are focused on the membrane temperature profile near the sensing section. Considered are the practical flow velocities, ranging from 3 m/s to 35 m/s, and the corresponding Reynolds numbers from 1000 to 10000. The results show that one of optimum sensing locations is about $100{\mu}m$ away from the microheater. It is concluded that the heating mode and configurations of thermal elements are the main factors for the MAFS with higher sensitivity.

• 한국식품위생안전성학회지
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• 제3권4호
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• pp.233-239
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• 1988

식물성 혼합조미료 즉, 된장과 청국장을 원료로 한 시판 혼합조미료(2종, 4가지)의 위생적 품질평가와 혼합미생물의 살균방법을 검토할 목적에서 시료에 3-10kGy의 감마선을 조사한 후 주요 미생물의 검사와 품질에 관련된 몇가지 이화학적 특성을 조사하였다. 제품의 미생물 혼입도는 매우 좋아 중온성 전세균이 $10^{6}-10^{7}\;cells/g$이었으며, 이들의 대부분은 내열성 및 내산성 세균으로 나타났고 10kGy 조사로서 매생물의 수를 3-4 log cycles 정도 격감시킬 수 있었다. 그러나 방사선 감수성이 낮은 이들 내열성 및 내 산성 세균의 완전 사멸을 n이해서는 15-20kGy 의 감마선이 필요할 것으로 예상되었다. 청국장 원료의 혼합 조미료에서는 대장균군의 $10^{2}-10^{6}\;cells/g$으로 나타났는데, 효모 및 곰팡이와 마찬가지로 5 kGy의 감마선 조사로서 사멸이 가능하여 일반 세균류보다 방사선에 대한 저항성이 낮음을 알 수 있었다. 10kGy 까지의 감마선은 시료의 함황아미노산 함량에 다소 변화를 가져왔으나 pH, 지방질성분, 아미노태질소, 색도 등의 이화학적 특성에는 영향을 거의 미치지 않았다.