• Proceedings of the Korean Vacuum Society Conference
• /
• 2015.08a
• /
• pp.238.2-238.2
• /
• 2015

Surface modification of vertically-aligned carbon nanotube (VACNT) is essential in order to meet specific demands for particular applications such as field emission displays, heat dissipation device and potential sun energy conversion due to their superior electrical and thermal conductivity and strong light absorption. In this study, we observe the effect of exposure to water vapor on a different lengths of the surfaces of VACNT. The study was conducted on three different lengths of the VACNT: short length around $200{\mu}m$, medium-length around $500{\mu}m$, and high length around 1 mm. Water exposure time ranges between 2-10 min and temperature of the water ranges from 60 to 120 oC. The result of water vapor exposure mainly show that increasing the exposure time and water temperature give rise to increase of the speed of change on the surface of the VACNT. Especially, the shorter VACNT change their surface morphology most rapidly.

• Journal of the Korean Vacuum Society
• /
• v.8 no.3B
• /
• pp.340-345
• /
• 1999

In this paper, polyimide thin films are fabricated by vapor deposition polymerization method appling to the interlayer insulator of semiconductor device, and are investigated in detail. It is found that the packing density and uniformity of films deposited by thermal evaporation are increased according to curing temperature. The resistivity, breakdown strength, relative permitivity, and dielectric loss are $3.2\tomes10^{15}\Omega$cm, 4.61 MV/cm, 2.9(10kHz) at $25^{\circ}C$, respectively. This thin films can be endured at $230^{\circ}C$ for 20,000 hours. Finally, we conclude that the thin films having the characteristics similar to those of $SiO_2$ can be used as an insulation films between layers of semiconductor device.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.02a
• /
• pp.565-565
• /
• 2013

Free burning arcs where the work piece acts as an anode are frequently used for a number of applications. Our investigation is exclusively concerned with a simplified unified model of arcs and anode under steady state conditions at atmospheric pressure. The model is used to make predictions of arc and anode temperatures and arc voltage for a 200 A arc in argon. The computed temperatures along the axis between the cathode tip and the anode surface compare well the measured data. This knowledge of free burning arcfeatures can play a role in developing the atmospheric plasma systems, however, further investigation should include the modelling of Cu evaporation from anode and non-LTE situation near electrodes for more realistic calculations.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
• /
• v.8 no.1
• /
• pp.41-48
• /
• 2010

Uranium deposits from an electrorefining process contain about 30% salt. In order to recover pure uranium and transform it into an ingot, the salts have to be removed from the uranium deposits. Major process variables for the salt distillation process of the uranium deposits are hold temperature and vacuum pressure. Effects of the variables on the salt removal efficiency were studied in the previous study[1]. By applying the Hertz-Langmuir relation to the salt evaporation of the uranium deposits, the evaporation coefficients were obtained at the various conditions. The operational conditions for achieving above 99% salt removal were deduced. The salt distilled uranium deposits tend to form the eutectic melt with iron, nickel, chromium for structural material of salt evaporator. In this study, we investigated the hold temperature limitation in order to prevent the formation of the eutetic melt between urnaium and other metals. The reactions between the uranium metal and stainless steel were tested at various conditions. And for enhancing the evaporation rate of the salt and the efficient recovery of the distilled salt, the thermal analysis of the salt distiller was conducted by using commercial CFX software. From the thermal analysis, the effect of Ar gas flow on the evaporation of the salt was studied.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.406-406
• /
• 2011

최근 결정질 실리콘 태양전지 분야에서는 태양전지의 Voc와 Isc의 증가를 통한 효율 향상을 목적으로 후면 passivation 박막에 대한 연구가 활발하게 진행되고 있다. Local-Back Contact Cell은 최적화된 후면 passivation 박막을 이용한 태양전지 제조방법이다. 본 연구에서는 고효율의 LBC 태양전지 개발을 위해 Rapid Thermal Oxide(RTO)를 이용한 후면 passivation 박막에 screen printing을 이용한 point contact 구조의 LBC 태양전지를 제작하고 그 특성을 분석하였다. 본 연구에 사용된 RTO 박막은 O2와 N2, 2L/min의 조건에서 $850^{\circ}C$에서 3분 동안 열처리하여 성장시켰다. 이렇게 성장된 박막은 3nm의 두께로 형성되어 passivation 효과를 나타내었으며, carrier lifetime 측정 결과 37.8us의 값을 나타냈다. 전면 ARC형성을 위해 RTO 박막 위에 PECVD를 이용하여 SiNx passivation 처리를 하였고, 그 결과 carrier lifetime은 49.1us까지 향상하였다. 후면의 전극 형성을 위해 screen printing 방법으로 Al point contact을 형성하여 local 한 BSF를 형성 시켰으며, 이후 후면 전극 연결을 위한 방법으로 300nm의 두께로 full Al evaporation 공정을 진행 하였다. 결과적으로 RTO 후면 passivation 박막에 Al point contact 형성을 통해 제작된 태양전지는, Suns-Voc 579mV, FF 82.3%, 16.7%의 효율을 달성하였다.

• Journal of the Korean Society for Precision Engineering
• /
• v.10 no.2
• /
• pp.138-145
• /
• 1993

The bath cryostat of cryogenic apparatuses which are generally used to study physical phenomena under low temperature and ultra low temperature has been desigened and constructed. The practical use of the cryostat is verified by the measurement of the storage life of liquid heloum and liquid nitrogen vessels. The cryostat consists of triple structure of high vacuum environment in order to minimize the evaporation rate of liquid helium and liquid nitrogen by thermal conductivity and radiant heat. The minimum thickness which can stand against inner and outer pressures is calculated from considering the strength of the material.

• Applied Science and Convergence Technology
• /
• v.26 no.4
• /
• pp.91-94
• /
• 2017

AThe effect of localized surface plasmon on silicon substrates was studied using silver nanoparticles. The nanoparticles were formed by self-arrangement through the surface energy using rapid thermal annealing (RTA) technique after the thin nanolayer of silver was deposited by thermal evaporation. By the theoretical calculation based on Mie scattering and dielectric function of air, indium tin oxide (ITO), and silver, the strong peak of scattering cross section of silver nanoparticles was found at 358 nm for air, and 460 nm for ITO, respectively. Accordingly, the strong suppression of reflectance under the condition of induced light of $30^{\circ}$ occurred at the specific wavelength which is almost in accordance with peak of scattering cross section. When the external quantum efficiency was measured using silicon solar cells with silver nanoparticles, there was small enhancement peak near the 460 nm wavelength in which the light was resonated between silver nanoparticles and ITO.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.11a
• /
• pp.317-318
• /
• 2008

Cu-Pc유기물 반도체를 얼 진공증착기술로 유리기판위에 40 nm 두께로 적층하였다. 상온에서 적층한 박막과 상온에서 적층한 후 $250^{\circ}C$ 이상의 온도로 후열 처리한 박막과 박막 적층 시 기판의 온도를 $250^{\circ}C$로 고정하여 적층한 박막들을 상호 비교 분석하였다. 적층된 Cu-Pc의 박막의 온도조건에 따라 X-ray diffraction(XRD)의 결정 특성이 $\alpha$-phase와 $\beta$-phase로 뚜렷이 구분되었으며， 자외선-가시광선 영역의 광 흡수도(UV-visible absorption spectra)와 field emission scanning electron microscopy(FE SEM)를 이용하여 결정성장 방향 및 표면 특성 변화를 비교조사하였다.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2011.05a
• /
• pp.39.2-39.2
• /
• 2011

With the steady increase in the demand for flexible devices, mainly in display panels, researchers have focused on finding a novel material that have excellent electrical properties even when it is bended or stretched, along with superior mechanical and thermal properties. Graphene, a single-layered two-dimensional carbon lattice, has recently attracted tremendous research interest in this respect. However, the limitations in the growing method of graphene, mainly chemical vapor deposition on transition metal catalysts, has posed severe problems in terms of device integration, due to the laborious transfer process that may damage and contaminate the graphene layer. In addition, to lower the overall cost, a fabrication technique that supports low temperature and low vacuum is required, which is the main reason why solution-based process for graphene layer deposition has become the hot issue. Nonetheless, a direct deposition method of large area, few-layered, and uniform graphene layers has not been reported yet, along with a convenient method of patterning them. Here, we report an evaporation-induced technique for directly depositing few layers of graphene nanosheets with excellent uniformity and thickness controllability on any substrate. The printed graphene nanosheets can be patterned into desired shapes and structures, which can be directly applicable as flexible and transparent electrode. To illustrate such potential, the transport properties and resistivity of the deposited graphene layers have been investigated according to their thickness. The induced internal flow of the graphene solution during tis evaporation allows uniform deposition with which its thickness, and thus resistivity can be tuned by controlling the composition ratio of the solute and solvent.

• Journal of Advanced Marine Engineering and Technology
• /
• v.38 no.9
• /
• pp.1094-1100
• /
• 2014

TEvaporator is key component in food, seawater distillation and waste water treatment system, which is basically to concentrate the raw liquid by evaporating the pure water under vacuum condition. The liquid concentration is performed through the membrane, electro-dialysis and evaporation. In this study, only the evaporating type was treated for evaluating the economic analysis with the various operating conditions. The results of this study showed that the performance of the OT-MSF desalination system is increased with decreasing the temperature difference between the neighboring evaporators, which means that the number of evaporators is increased, under the determined design conditions.