• Title/Summary/Keyword: Thermal oxidation method

Search Result 246, Processing Time 0.024 seconds

Study on Electrochemical Characteristics and Fabrication of Catalytic Electrode (복합 촉매 전극의 제조 및 전기화학적 특성에 관한 연구)

  • 민병승;정원섭;김광호;민병철;이미혜
    • Journal of the Korean institute of surface engineering
    • /
    • v.35 no.6
    • /
    • pp.401-407
    • /
    • 2002
  • Most of organic compounds discharged from industrial wastewater are treated by chemical oxidation, adsorption and biodegradable process. This process has been demanded a new advanced environmental wastewater treatment process. From this point of view, an electrochemical oxidation process using electrocatalysts has been developed for the destruction of organic compounds. Through this study, a ruthenium oxide/iridium oxide supported on titanium expanded metal was fabricated by thermal decomposition method and its performance was excellent during this experiment.

Measurement of Thermal Coefficient at High Temperature by CW-Laser Speckle Photography and Image Processing (고온하의 CW 레이져 스페클 사진법과 화상처리에 의한 열팽창계수 측정에 관한 연구)

  • Kim, Gyeong-Seok;Choe, Jeong-Seok
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.9 no.4
    • /
    • pp.90-99
    • /
    • 1992
  • In resent year Laser Speckle and its development have enabled surface deformation of engineering components and materials to be interferometrically examined. Laser Speckle- Pettern Interferometry Method is a very useful method for measuring In-plane components of displacement. In measuring thermal expansion coefficient, the various problems generated were established, and the measuring limitation examined. Metarial INCONEL 601 was used in experiments. Specimen was heated to the high temperature(100$0^{\circ}C$) by diong current to the direct two specimen. Then, those problems appear to the influence of back-ground radiation by the heated specimen, the influence by air turbulence, the oxidation of specimen. The color monitor and interference filter prevented the back-ground radiation by rad heat. The oxidation occuring in specimen itself was not generated by the being acid-proof excellence of material INCONEL 601. Yet, in this experiments, the serious problems are the oxidation of specimen and influence by air turbulence. By more reserching these problems forward, it is helpful that the thermal expansion coefficient of many materials is directly measured under high temperature.

  • PDF

EffEct of vacuum annealing on an oxidation of milled WC-Co powder (분쇄된 초경합금 분말의 산화에 미치는 진공열처리 효과)

  • 김소나
    • Journal of Powder Materials
    • /
    • v.3 no.2
    • /
    • pp.91-96
    • /
    • 1996
  • The effect of vacuum annealing on the oxidation behavior of milled WC-15%Co powder mixture has been studied. A cobalt component in the milled powder mixture was oxidized preferentially above 175$^{\circ}C$ in air. The specimens showed a steady increase in weight at 175$^{\circ}C$ but did constant weight followed by rapid increase in specimen weight at the beginning above 20$0^{\circ}C$. Oxidation of the milled powder mixture was significantly suppressed by vacuum annealing at 30$0^{\circ}C$ for 10 h. Suppression of oxidation by vacuum annealing and different oxidation behaviors of the milled powder mixture between 175$^{\circ}C$ and 20$0^{\circ}C$, were attributed to removal of strain energy stored in the cobalt powder during vacuum annealing or oxidation treatment above 20$0^{\circ}C$. The role of stored strain energy on oxidation of milled WC-15%Co powder mixture was proved by X-ray diffraction method and differential thermal analysis.

  • PDF

NO Oxidation using Non-Thermal Plasma and NOx removal by NaOH-Water Solution Shower (비열플라즈마에 의한 NO의 산화와 NaOH 샤워해 의한 NOx의 제거특성)

  • Park, Jae-Yoon;Koh, Yong-Sul;Kim, Ick-Kewn;Park, Sang-Hyun;Koh, Hee-Seok;Lee, Duck-Chool
    • Proceedings of the KIEE Conference
    • /
    • 1998.11c
    • /
    • pp.947-949
    • /
    • 1998
  • In this paper, the NO was oxidized $NO_2$ by using the non-thermal plasma and NOx removal characteristics were measured by showering NaOH water-solution to $NO_2$. The NO oxidation increased in the order of DC, AC, and Pulse. NOx oxidation for two stage with applied voltage was better than that for one stage with applied voltage. NO oxidation didn't depend on applied voltage. While NO oxidation was going on, NOx removal efficiency was 20-25%, however, significantly depended on the injection method of air and $H_2O$ + air. When NaOH water-solution density of 20% was showered to flue gases, NOx removal efficiency increased to 64%.

  • PDF

Development of three-dimensional thermal oxidation process simulator and analysis the characteristics of multi-dimensional oxide growth (1 Giga급 집적회로 구현을 위한 3차원 산화 공정 시뮬레이터 개발 및 산화층 성장 특성 분석에 관한 연구)

  • 이준하;황호정
    • Journal of the Korean Institute of Telematics and Electronics A
    • /
    • v.32A no.8
    • /
    • pp.107-118
    • /
    • 1995
  • Three-dimensional simulator for thermal oxidation process is developed. The simulator is consisted by two individual module, one is analytic-model module and the other is numerical-model module. The analytic-model which uses simple complementary-error function guarantees fast calculation in prediction of multi-dimensional oxidation process. The numerical-model which is based on boundary element method (BEM), has a good accuracy and suitable for various process conditions. The results of this study show that oxide growth is retarded at the corner of hole structure and enhanced at the corner of island structure. These effects are reson of different distribution of oxidant diffusion and mask stress. The utility of models and simulator developed in this study is demonstrated by using it to predict not only traditional shape of LOCOS but also process effects in small geometry.

  • PDF

Analysis and Measurement on Failure Behavior off Scales by Acoustic Emission Method (Scale 파괴거동 측정 및 해석)

  • Choi Jin Won;TANIGUCHI S.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
    • /
    • 2005.10a
    • /
    • pp.330-331
    • /
    • 2005
  • It was found possible to evaluate the temperature at which major scale failure takes place during cooling by installing a most modem acoustic emission(AE) analytical system. Ultra low carbon steel and low carbon steels containing a few minor alloying elements were oxidized in air at 900, 1050 and $1200^{\circ}C$ for 20 min, and then cooled in vacuum at 30, 70 and $110^{\circ}C/min$. The significance of the present research is the evaluation of the spallation temperature and thus the calculation of apparent thermal stress for scale spallation using the difference between oxidation temperature and spallation temperature. They were assessed as 0.22 to 0.68, 0.45 to 1.80, and 0.65 to 1.95 GPa for oxidation at 900, 1050 and $1200^{\circ}C$, respectively.

  • PDF

Growth of SiC Oxidation Protective Coating Layers on graphite substrates Using Single Source Precursors

  • Kim, Myung-Chan;Heo, Cheol-Ho;Park, Jin-Hyo;Park, Seung-Jun;Han, Jeon-Geon
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 1999.07a
    • /
    • pp.122-122
    • /
    • 1999
  • Graphite with its advantages of high thermal conductivity, low thermal expansion coefficient, and low elasticity, has been widely used as a structural material for high temperature. However, graphite can easily react with oxygen at even low temperature as 40$0^{\circ}C$, resulting in CO2 formation. In order to apply the graphite to high temperature structural material, therefore, it is necessary to improve its oxidation resistive property. Silicon Carbide (SiC) is a semiconductor material for high-temperature, radiation-resistant, and high power/high frequency electronic devices due to its excellent properties. Conventional chemical vapor deposited SiC films has also been widely used as a coating materials for structural applications because of its outstanding properties such as high thermal conductivity, high microhardness, good chemical resistant for oxidation. Therefore, SiC with similar thermal expansion coefficient as graphite is recently considered to be a g행 candidate material for protective coating operating at high temperature, corrosive, and high-wear environments. Due to large lattice mismatch (~50%), however, it was very difficult to grow thick SiC layer on graphite surface. In theis study, we have deposited thick SiC thin films on graphite substrates at temperature range of 700-85$0^{\circ}C$ using single molecular precursors by both thermal MOCVD and PEMOCVD methods for oxidation protection wear and tribological coating . Two organosilicon compounds such as diethylmethylsilane (EDMS), (Et)2SiH(CH3), and hexamethyldisilane (HMDS),(CH3)Si-Si(CH3)3, were utilized as single source precursors, and hydrogen and Ar were used as a bubbler and carrier gas. Polycrystalline cubic SiC protective layers in [110] direction were successfully grown on graphite substrates at temperature as low as 80$0^{\circ}C$ from HMDS by PEMOCVD. In the case of thermal MOCVD, on the other hand, only amorphous SiC layers were obtained with either HMDS or DMS at 85$0^{\circ}C$. We compared the difference of crystal quality and physical properties of the PEMOCVD was highly effective process in improving the characteristics of the a SiC protective layers grown by thermal MOCVD and PEMOCVD method and confirmed that PEMOCVD was highly effective process in improving the characteristics of the SiC layer properties compared to those grown by thermal MOCVD. The as-grown samples were characterized in situ with OES and RGA and ex situ with XRD, XPS, and SEM. The mechanical and oxidation-resistant properties have been checked. The optimum SiC film was obtained at 85$0^{\circ}C$ and RF power of 200W. The maximum deposition rate and microhardness are 2$mu extrm{m}$/h and 4,336kg/mm2 Hv, respectively. The hardness was strongly influenced with the stoichiometry of SiC protective layers.

  • PDF

Fabrication and Thermal Oxidation of ZnO Nanofibers Prepared via Electrospinning Technique

  • Baek, Jeong-Ha;Park, Ju-Yun;Kang, Ji-Soo;Kim, Don;Koh, Sung-Wi;Kang, Yong-Cheol
    • Bulletin of the Korean Chemical Society
    • /
    • v.33 no.8
    • /
    • pp.2694-2698
    • /
    • 2012
  • Materials on the scale of nanoscale have widely been used as research topics because of their interesting characteristics and aspects they bring into the field. Out of the many metal oxides, zinc oxide (ZnO) was chosen to be fabricated as nanofibers using the electrospinning method for potential uses of solar cells and sensors. After ZnO nanofibers were obtained, calcination temperature effects on the ZnO nanofibers were studied and reported here. The results of scanning electron microscopy (SEM) revealed that the aggregation of the ZnO nanofibers progressed by calcination. X-ray diffraction (XRD) study showed the hcp ZnO structure was enhanced by calcination at 873 and 1173 K. Transmission electron microscopy (TEM) confirmed the crystallinity of the calcined ZnO nanofibers. X-ray photoelectron spectroscopy (XPS) verified the thermal oxidation of Zn species by calcination in the nanofibers. These techniques have helped us deduce the facts that the diameter of ZnO increases as the calcination temperature was raised; the process of calcination affects the crystallinity of ZnO nanofibers, and the thermal oxidation of Zn species was observed as the calcination temperature was raised.

Microstructure and CO Gas Sensing Properties of Ag-CuO-SnO2 Thin Films Prepared by Co-Evaporation and Thermal Oxidation (공증발과 열산화로 제조한 Ag-CuO-SnO2 박막에서 미세조직과 CO 가스 감지특성)

  • Ji, In-Geol;Han, Kyu-Suk;Oh, Jae-Hee;Ko, Tae-Gyung
    • Journal of the Korean Ceramic Society
    • /
    • v.46 no.4
    • /
    • pp.429-435
    • /
    • 2009
  • In this study, we investigated microstructure and the CO gas sensing properties of Ag-CuO-$SnO_2$ thin films prepared by co-evaporation and subsequently thermal oxidation at air atmosphere. The sensitivity of a Cu-Sn films, thermally oxidized at $600^{\circ}C$, is strongly affected by the amount of Cu. At Cu:7 wt%-Sn:93 wt%, the film exhibited a maximum sensitivity of ${\sim}2.3$ to CO gas of 1000 ppm at $300^{\circ}C$. In contrast, the sensitivity of a Sn-Ag film did not change significantly with the amount of Ag. An enhanced sensitivity of ${\sim}3.7$ was observed in the film with a composition of Ag:3 wt%-Cu:4 wt%-Sn:93 wt%, when thermally oxidized at $600^{\circ}C$. In addition, this thin film shows a response time of ${\sim}80$ sec and a recovery time of ${\sim}450$ sec to 1000 ppm CO gas. The results demonstrate that the CO sensitivity of the Ag-CuO-$SnO_2$ thin films may be closely associated with coexistence of $SnO_2$ and SnO phase, decrease in average particle size, and a porous microstructure. We also suggest that co-evaporation and followed by thermal oxidation is a very simple and effective method to prepare oxide gas sensor thin films.

Construction and Evaluation of Oxidation System for Superconductor Thin Film (초전도 박막 제작을 위한 산화 시스템 구축 및 평가)

  • 임중관;박용필;송경용
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.16 no.2
    • /
    • pp.163-167
    • /
    • 2003
  • Ozone is strong and useful oxidizing gas for the fabrication of oxidation thin films. In order to obtain high quality thin film, the ozone concentration must be increased. An ozone condensation system is evaluated in the viewpoint of an ozone supplier for oxidation thin film growth. Ozone is condensed by the adsorption method and ozone concentration reaches 8.5 mol% by 2.5 h after the beginning of the ozone condensation is negligible if the condensed ozone is transferred between the ozone condensation system and the film growth chamber within a few minutes. CuO peak which is the result of the obtained Cu-films using condensed ozone appears by XRD patterns.