Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Construction and Evaluation of Oxidation System for Superconductor Thin Film

초전도 박막 제작을 위한 산화 시스템 구축 및 평가

  • 임중관 (동신대학교 전기전자공학부) ;
  • 박용필 (동신대학교 전기전자공학부) ;
  • 송경용 (동신대학교 TIC)
  • Published : 2003.02.01
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Abstract

Ozone is strong and useful oxidizing gas for the fabrication of oxidation thin films. In order to obtain high quality thin film, the ozone concentration must be increased. An ozone condensation system is evaluated in the viewpoint of an ozone supplier for oxidation thin film growth. Ozone is condensed by the adsorption method and ozone concentration reaches 8.5 mol% by 2.5 h after the beginning of the ozone condensation is negligible if the condensed ozone is transferred between the ozone condensation system and the film growth chamber within a few minutes. CuO peak which is the result of the obtained Cu-films using condensed ozone appears by XRD patterns.

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References

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