• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2007년도 춘계학술대회
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• pp.193-198
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• 2007

The NiSi is very promising candidate for the metallization in 60nm CMOS process such as FUSI(fully silicided) gate and source/drain contact because it exhibits non-size dependent resistance, low silicon consumption and mid-gap workfunction. Ni film was first deposited by using ALD (atomic layer deposition) technique with Bis-Ni precursor and $H_2$ reactant gas at $220^{\circ}C$ with deposition rate of $1.25{\AA}/cycle$. The as-deposited Ni film exhibited a sheet resistance of $5{\Omega}/{\square}$. RTP (repaid thermal process) was then performed by varying temperature from $400^{\circ}C$ to $900^{\circ}C$ in $N_2$ ambient for the formation of NiSi. The process window temperature for the formation of low-resistance NiSi was estimated from $600^{\circ}C$ to $800^{\circ}C$ and from $700^{\circ}C$ to $800^{\circ}C$ with and without Ti capping layer. The respective sheet resistance of the films was changed to $2.5{\Omega}/{\square}$ and $3{\Omega}/{\square}$ after silicidation. This is because Ti capping layer increases reaction between Ni and Si and suppresses the oxidation and impurity incorporation into Ni film during silicidation process. The NiSi films were treated by additional thermal stress in a resistively heated furnace for test of thermal stability, showing that the film heat-treated at $800^{\circ}C$ was more stable than that at $700^{\circ}C$ due to better crystallinity.

• 한국재료학회지
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• 제8권6호
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• pp.499-504
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• 1998

코발트 폴리사이드 게이트 전극을 형성할 때, 원주형(columnar)과 입자형(granular)다결정 Si 및 비정질 Si 기판위에 Co 단일막(Co monolayer)또는 Co/Ti 이중막(Co/Ti bilayer)을 사용하여 형성한 $CoSi_{2}$의 열정안정을 비교하여 기판의 결정성과 CoSi/ sub 2/ 형성방법이 열적안정성에 미치는 영향을 연구하였다.$ 900^{\circ}C$에서 600초까지 급속열처리하였을 때 , 기판을 비정질을 사용하거나 기판에 관계없이 Co/Ti 이중막을 사용하면 열적안정성이 향상되었다, 이는 평탄하고 깨끗한 기판 Si표면과 지연된 Co확산으로 인해,조성이 균일하고 계면이 평탄한 CoSi$_{2}$가 형성되었기 때문이다. $ CoSi_{2}$의 열적안정성에 가장 중요한 인자는 열처리 초기 처음 형성된 실리사이드의 조성 균일성과 기판과의 계면 평탄성이었다.

• 터널과지하공간
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• 제16권3호
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• pp.241-250
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• 2006

LNG지하저장 핵심기술 중 하나인 ice ring 형성을 열-수리 역학 해석을 통해 분석하였다. ice ring은 극저온물질의 누출에 대한 이차방벽 역할과 지하수의 저장공동 침투에 대한 일차방벽역할을 수행한다. 따라서 ice ring의 두께와 위치는 콘크리트와 PU foam 및 멤브레인으로 구성된 일차방호재의 무결성 유지에 있어서 핵심인자가 된다. 수치해석을 통해 이러한 ice ring의 위치와 두께를 추정하였으며 온도와 지하수위 결과를 계측치와 비교하였다. 수치해석결과는 PU foam 열전도도의 온도의존성과 지하수의 상변화를 고려한 경우 파일럿 공동에서 측정한 계측치와 잘 일치하였다. 본 논문에서 제시한 수치해석 기법은 실규모 저장시설의 설계에 있어서 ice ring 형성을 모델링하는 데에 바로 사용될 수 있을 것으로 판단된다.

• Journal of Advanced Marine Engineering and Technology
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• 제22권1호
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• pp.108-116
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• 1998

In this paper it is investigated the roles of key elementary reactions for NO formation in methane-air one-dimensional premixed flame and counterflow diffusion flame, which were studied numerically by using NO kinetics and $C_{2}$ -chemistry complied by Miller and Bowman. The spatial distributions of the reaction rates of 9 main elementary reactions directly related to NO formation and destruction were calculated. Integration of the rates of all reactions in the NO formation across the flame yields the quantitative reaction path diagram, which shows clearly relative importance of each reaction path in NO formation and how it changes with the type and parameters of the flame. The results show that the thermal and Fenimore mechanisms are dominant respectively for learn and rich premixed flames, and the latter is dominant for diffusion flames. In addition, it was found that the HCN recycle route is important for diffusion flame, and that the routes of mutual transformation between NO and NO$^{2}$, and between NO and HNO do not contribute to the net NO formation.

• 한국주조공학회지
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• 제18권5호
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• pp.467-473
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• 1998

For enhancing the mechanical properties of LTE (low thermal expansion) cast steel, systematic researches have been carried out. The effects of alloying elements such as vanadium, molybdenum and carbon on the hardness and linear thermal expansion coefficient were investigated. In the range of $0.5{\sim}2.3\;wt%$ carbon, addition of 1.73 wt% carbon caused hardness increase due to the formation of eutectic carbide having high hardness but over the range of 1.73 wt% carbon, hardness was decreased. Thermal expansion coefficient increases with carbon contents. In the LTE cast steel containing 0.6 wt% carbon, hardness increased up to 1.96 wt% vanadium addition. But over the range of 1.96 wt% vanadium hardness was decreased by coarse eutectic carbide. Thermal expansion coefficient of LTE cast steel containing 0.6 wt%carbon moderately increased with increasing vanadium contents. There was no significant variation of hardness and thermal expansion coefficient according to molybdenum content in LTE cast steel.

• 한국철도학회:학술대회논문집
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• 한국철도학회 2011년도 정기총회 및 추계학술대회 논문집
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• pp.966-970
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• 2011

The thermo-mechanical interaction between brake block and wheel tread during braking has been found to cause thermal crack on the wheel tread. Due to thermal expansion of the rim material, the thermal cracks will protrude from the wheel tread and be more exposed to wear during the wheel/block contact than the rest of the tread surface. The wheel rim is in residual compression stress when is new. After service running, the region in the tread has reversed to tension. This condition can lead to the formation and growth of thermal cracks in the rim which can ultimately lead to premature failure of wheel. In the present paper, the thermal cracks of railway wheel, one of severe damages on the wheel tread, were evaluated to understand the safety of railway wheel in running condition. The residual stresses for damaged wheel which are applied to tread brake are investigated. Mainly X-ray diffusion method is used. Under the condition of concurrent loading of continuous rolling contact with rails and cyclic frictional heat from brake blocks, the reduction of residual stress is found to correlate well with the thermal crack initiation.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.15-16
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• 2006

The thermal stability of nickel silicide with compressively and tensilely stressed nitride capping layer has been investigated in this study. The Ni (10 nm) and Ni/Co/TiN (7/3/25 nm) structures were deposited on the p-type Si substrate. The stressed capping layer was deposited using plasma enhanced chemical vapor deposition (PECVD) after silicide formation by one-step rapid thermal process (RTP) at $500^{\circ}C$ for 30 sec. It was found that the thermal stability of nickel silicide depends on the stress induced by the nitride capping layer. In the case of Ni (10 nm) structure, the high compressive sample shows the best thermal stability, whereas in the case of Ni/Co/TiN (7/3/25 nm) structure, the high compressive sample shows the worst thermal stability.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.288-291
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• 2002

Application of metal silicides such as TiSi$_2$ and CoSi$_2$ as contacts and gate electrodes are being studied. However, TiSi$_2$ due to the linewidth-dependance, and CoSi$_2$ due to the excessive Si consumption during silicidation cannot be applied to the deep-submicron MOSFET device. NiSi shows no such problems and can be formed at the low temperature. But, NiSi shows thermal instability. In this investigation, NiSi was formed with a Ti-capping layer to improve the thermal stability. Ni and Ti films were deposited by the thermal evaporator. The samples were then annealed in the N$_2$ ambient at 300-800$^{\circ}C$ in a RTA (rapid thermal annealing) system. Four point probe, FESEM, and AES were used to study the thermal properties of Ti-capped NiSi layers. The Ti-capped NiSi was stable up to 700$^{\circ}C$ for 100 sec. RTA, while the uncapped NiSi layers showed high sheet resistance after 600$^{\circ}C$. The AES results revealed that the Ni diffusion further into the Si substrate was retarded by the capping layer, resulting in the suppression of agglomeration of NiSi films.

• Nuclear Engineering and Technology
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• 제45권2호
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• pp.191-202
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• 2013

A numerical analysis of thermal stratification in the upper plenum of the MONJU fast breeder reactor was performed. Calculations were performed for a 1/6 simplified model of the MONJU reactor using the commercial code, CFX-13. To better resolve the geometrically complex upper core structure of the MONJU reactor, the porous media approach was adopted for the simulation. First, a steady state solution was obtained and the transient solutions were then obtained for the turbine trip test conducted in December 1995. The time dependent inlet conditions for the mass flow rate and temperature were provided by JAEA. Good agreement with the experimental data was observed for steady state solution. The numerical solution of the transient analysis shows the formation of thermal stratification within the upper plenum of the reactor vessel during the turbine trip test. The temporal variations of temperature were predicted accurately by the present method in the initial rapid coastdown period (~300 seconds). However, transient numerical solutions show a faster thermal mixing than that observed in the experiment after the initial coastdown period. A nearly homogenization of the temperature field in the upper plenum is predicted after about 900 seconds, which is a much shorter-term thermal stratification than the experimental data indicates. This discrepancy may be due to the shortcoming of the turbulence models available in the CFX-13 code for a natural convection flow with thermal stratification.

• Journal of Biosystems Engineering
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• 제9권2호
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• pp.89-96
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• 1984

This study was intended to search the thermal properties of rice which are necessary in preventing qualitative and quantitative losses in the drying and milling processes. First, the coefficient of cubical thermal expansion of brown rice was measured, which is required for analyzing the internal stress of rice, and then theoretical thermal and moisture stresses were calculated. The results are summarized as follows: 1. The coefficient of cubical thermal expansion of brown rice was about $2.81{\times}10^{-4}/^{\circ}C$ in the temperature range of $10^{\circ}C-60^{\circ}C$. 2. When the shape of brown rice was assumed to be a sphere or a cylinder, maximum thermal stress due to temperature change of $20^{\circ}C-60^{\circ}C$ was in the range of $25-100kg/cm^2$. And maximum moisture stress was in the range of $450-650kg/cm^2$ when the drying temperature was $35^{\circ}C$, initial and final moisture contents of brown rice were 20% and 14% (w.b.), and the moisture diffusion coefficient was assumed to be $6.79{\times}10^{-4}cm^2/hr$. 3. Consequently, it was concluded that crack formation in a rice kernel is mainly caused by moisture stress.