• 제목/요약/키워드: Thermal electron

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열적 비평형 전자분포를 갖는 아르곤 플라즈마의 두 전자그룹의 상대적인 기여도에 대한 연구 (Research on the Relative Contribution of Two Electron Groups of Ar plasma with Non-thermal Equilibrium Electron Distribution)

  • 이영석;이장재;김시준;유신재
    • 반도체디스플레이기술학회지
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    • 제17권1호
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    • pp.76-83
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    • 2018
  • The electron energy probability function (EEPF) is of significant importance since the plasma chemistry such as the rate of ionization is determined by the electron energy distribution function. It is usually assumed to be Maxwell distribution for 0-D global model. Meanwhile, it has been observed experimentally that the form of EEPF of Ar plasma changes from being two-temperature to Druyvesteyn like as the gas pressure increases. Thus, to apply the 0-D global model of Maxwellian distribution to the non-Maxwellian plasma, we investigated the relative contribution of two distinct electrons with different temperatures. The contributions of cold/hot electrons to the equilibrium state of the plasma have attracted interest and been researched. The contributions to the power and particle balance of cold/hot electrons were studied by comparing the result of the global model considering all combinations of electron temperatures with that of 1-D Particle-in-Cell and Monte Carlo collision (PIC-MCC) simulation and the results of studies were analyzed physically. Furthermore, comparisons term by term for variations of the contribution of cold/hot electrons at different driving currents are presented.

Dry thermal development of negative electron beam resist polystyrene

  • Con, Celal;Abbas, Arwa Saud;Yavuz, Mustafa;Cui, Bo
    • Advances in nano research
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    • 제1권2호
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    • pp.105-109
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    • 2013
  • We report dry thermal development of negative resist polystyrene with low molecular weight. When developed on a hotplate at $350^{\circ}C$ for 30 min, polystyrene showed reasonable high contrast and resolution (30 nm half-pitch), but low sensitivity. Resist sensitivity was greatly improved at lower development temperatures, though at the cost of reduced contrast. In addition, we observed the thickness reduction due to thermal development was higher for larger remaining film thickness, implying the thermal development process is not just a surface process and the more volatile chains below the top surface may diffuse to the surface and get evaporated.

딕카이트의 열적 특성 연구 (Thermal Behavior of Dickite)

  • 조현구
    • 한국광물학회지
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    • 제12권1호
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    • pp.11-22
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    • 1999
  • Thermal behavior of dickite was studied by thermal analysis, X-ray diffraction analysis, electron microprobe analysis, and scanning electron microscopy, Dickite has an endothermic peak at about$ 650^{\circ}C$ and an exothermic one at $960^{\circ}C$ in the differential thermal analysis. The endothermic reaction is assigned to the decomposition of dickite to meta-dickite. Hydroxyl radicals are removed from dickite structure by the reaction, resulting in the weight loss about 10.5~14.5% and appearance of a 14$\AA$ phase different from other kaolin minerals. The reaction slowly proceed in the range of $200^{\circ}C$. As the completion of decomposition, aciclular mullite forms at the expense of meta-dickite plates with random crystallographic relationship. Mullites have diverse silica versus alumina ratio. The exothermic reaction without weight loss seems to be due to the formation of spinel and amorphous silica. The spinel phase shows cryptocrystalline globular morphology accompanying a little amount of silica. From spinel phase shows cryptocrystalling globular morphology accompanying a little amount of silica. From this work, it is suggested that mullite is formed from meta-dickite much lower temperature than the reported one in the previous works.

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Thermal Evaporation법으로 제작한 ZnO 나노선의 온도와 산소유량에 따른 성장 특성 (Characteristics of ZnO Nanowire Fabricated by Thermal Evaporation Method Depending on Different Temperatures and Oxygen Pressure)

  • 오원석;장건익
    • 한국전기전자재료학회논문지
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    • 제21권8호
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    • pp.766-769
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    • 2008
  • Zinc oxide (ZnO) nanowires were prepared on Si substrates by a thermal evaporation method at different temperatures and $O_2$ pressure. Microstructural analysis of the obtained ZnO nanowires was performed by using transmission electron microscopy(TEM) and scanning electron microscopy(SEM). Phase analysis was done using X-ray diffraction(XRD). As the deposition temperature and oxygen pressure were increased, the diameter and length of ZnO nanowires had a tendency to increase. Based on TEM and XRD analyses, the nanowires are single crystalline in nature and consist of a single phase. According to the measurements, the ZnO nanowires grown at 1100$^{\circ}C$, Ar 50 sccm, $O_2$ 10 sccm have good properties.

용사법에 의한 Al/Al-SiC 복합재료의 제조 (Fabrication of Al/Al-SiC Composites by Thermal Spray Process)

  • 김균택;김영식
    • 동력기계공학회지
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    • 제10권2호
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    • pp.93-98
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    • 2006
  • Metal matrix composites(MMCs) reinforced with ceramic particulates are receiving increasing attention because their high specific strength, low coefficient of thermal expansion and excellent wear resistance. Especially, Al-based composites(AMCs) have been widely applied for the aerospace and automotive industries. Such composites are mainly fabricated by the cast, powder metallurgy and infiltration process. In this study, SiC particulate reinforced Al-based composites were fabricated by thermal spray process and their wear behavior were investigated. Composites with different spray parameter were fabricated by using flame spray apparatus. Microstructure and wear behavior of the composites were observed by scanning electron microscope(SEM) and electron probe micro-analysis(EPMA).

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Effect of Inorganic Nanomater ials on the Morphology and Thermal Proper ties of PVA Nanocomposite Nanowebs

  • Choi, Jae-Young;Yeum, Jeong-Hyun
    • 한국염색가공학회지
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    • 제23권2호
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    • pp.83-89
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    • 2011
  • Poly(vinyl alcohol) (PVA), PVA/Montmorillonite (MMT), PVA/Silver (Ag), and PVA/MMT/Ag nanocomposite nanowebs were prepared by electrospinning technique in aqueous solution. In order to investigate the effect of inorganic materials on the morphology and thermal properties of PVA based nanocomposite nanowebs, experiments were performed with 5 wt.% of MMT and Ag. Field emission type scanning electron microscopy, transmission electron microscopy (TEM), reflection type X-ray diffraction (XRD), and thermal gravimetric analyzer were utilized to characterize nanocomposite nanowebs. TEM and XRD results show MMT and Ag were well dispersed in PVA nanowebs. Those inorganic nanoparticles enhanced thermal property of the nanocomposite nanowebs.

쉐도우마스크의 열변형 해석 -온도분포 (Thermal Deformation Analysis of Shadow Mask : Temperature Distribution)

  • 김현규;천현태;임세영
    • 대한기계학회논문집
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    • 제17권10호
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    • pp.2574-2581
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    • 1993
  • A Shadow mask in C. R. T. (Cathod Ray Tube) undergoes a temperature increase due to impinging electron beams emitted from guns, and thermal deformation from such temperature rise may cause the electron beams to island on the panel, and thus give rise to depolarization. Hence the analysis of temperature distribution for a shadow mask is an important procedure for designing the shadow mask. In this paper, we are concerned with nonlinear finite element analysis of the temperature distribution on a shadow mask. First of all, we replace shadow mask, containing numerous apertures of a slit type, by an orthotropic shell without apertures, and calculate the apparent thermal conductivities. Because of thermal radiation, which is one of the major heat transfer mechanism for shadow masks, the resulting finite element equation is nonlinear and solved by the Newton method. Finally numerical examples are illustrated for a 21" FST(Full Square Tube) shadow mask, and followed by discussion.sion.

Characteristics of Electron Beam Extraction in Large Area Electron Beam Generator

  • Woo, Sung-Hun;Lee, Hong-Sik
    • KIEE International Transactions on Electrophysics and Applications
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    • 제4C권1호
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    • pp.10-14
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    • 2004
  • A large area electron beam generator has been developed for industrial applications, for example, waste water cleaning, flue gas treatment, and food pasteurization. The operational principle is based on the emission of secondary electrons from the cathode when ions in the plasma contact the cathode, which are accelerated toward the exit window by the gradient of the electric potential. Conventional electron beam generators require an electron beam scanning mechanism because a small area thermal electron emitter is used. The electron beam of the large area electron beam generator does not need to be scanned over target material because the beam area is considerable. We have fabricated a large area electron beam generator with peak energy of 200keV, and a beam diameter of 200mm. The electron beam current has been investigated as a function of accelerating voltage and distance from the extracting window while its radial distribution in front of the extracting window has been also measured.

전자빔을 이용한 물리기상증착법으로 제조된 열차폐용 4 mol% YSZ 코팅의 내열특성 (Thermal Durability of 4YSZ Thermal Barrier Coating Deposited by Electron Beam PVD)

  • 박찬영;양영환;김성원;이성민;김형태;임대순;장병국;오윤석
    • 한국분말재료학회지
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    • 제20권6호
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    • pp.460-466
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    • 2013
  • 4 mol% Yttria-stabilized zirconia (4YSZ) coatings with $200{\mu}m$ thick are fabricated by Electron Beam Physical Vapor Deposition (EB-PVD) for thermal barrier coating (TBC). $150{\mu}m$ of NiCrAlY based bond coat is prepared by conventional APS (Air Plasma Spray) method on the NiCrCoAl alloy substrate before deposition of top coating. 4 mol% YSZ top coating shows typical tetragonal phase and columnar structure due to vapor phase deposition process. The adhesion strength of coating is measured about 40 MPa. There is no delamination or cracking of coatings after thermal cyclic fatigue and shock test at $850^{\circ}C$.

Influence of Endurance tests on Space Charge Distribution of 160kV HVDC XLPE Cable

  • Liu, Yun-Peng;Liu, He-Chen
    • Journal of Electrical Engineering and Technology
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    • 제12권1호
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    • pp.302-309
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    • 2017
  • The ageing of XLPE cable insulation will lead to the accelerating accumulation of space charge, which will greatly affect the safe operation of the HVDC cable. In order to investigate the influence of different ageing modes on the space charge distribution of the HVDC cable, thermal stressed, electrical stressed and electro-thermal stressed endurance tests were carried out on the XLPE peelings. The tested XLPE peelings were obtained from 160kV HVDC cable insulation. The endurance tests were carried at thermal stress of 363K, electrical stress of 20kV/mm DC and a combination of both. The Pulsed Electro-Acoustic (PEA) method was used to measure the space charge distribution of the samples. The influences of ageing on the trap energy distribution were analyzed based on the isothermal relaxation theory and the decay characteristics of the space charge. The results showed that thermal ageing would help to improve the crystalline morphologies of the XLPE at the early stage. The total amount of space charge decreased compared to the ones before thermal ageing. The long term of electrical stress would result in the cleavage of polymer molecule chains which would intensify the accumulation of space charge and increase the density and depth of electron traps. With a combination of electrical and thermal stress, the injection and migration of space charge were more significant. Besides, the depth and density of electron traps increased rapidly with the increase of endurance time.