• 대한의용생체공학회:의공학회지
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• 제28권3호
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• pp.348-354
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• 2007

Polymer actuators, which are also called as smart materials, change their shapes when electrical, chemical, thermal, or magnetic energy is applied to them and are useful in wide variety of applications such as microelectromechanical systems (MEMS), machine components, and artificial muscles. For this study, Polyaniline/carbon-nanotube polymer actuator that is one of electroactive polymer actuators was prepared. Since the nonlinear phenomena of hysteresis and a step response are essential considerations for practical use of polymer actuators, we have investigated the movement of the Polyaniline/carbon-nanotube polymer actuator and have developed an integrated model that can be used for simulating and predicting the hysteresis and a step response during actuation. The Preisach hysteresis model, one of the most popular phenomenological models of hysteresis, were used for describing the hysteretic behavior of Polyaniline/carbon-nanotube polymer actuator while the ARX method, one of system identification techniques, were used for modeling a step response. In this paper, we first expain details in preparation of the Polyaniline/carbon-nanotube polymer then present the mathematical description of our model, the extraction of the parameters, simulation results from the model, and finally a comparison with measured data.

• 한국전기전자재료학회논문지
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• 제36권3호
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• pp.214-225
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• 2023

Piezoelectric actuators, which utilize piezoelectric crystals or ceramics, are commonly used in precision positioning applications, offering high-speed response and precise control. However, the use of low-performance ceramics and expensive single crystals is limiting their versatile use in the actuator market, necessitating the development of both high-performance and cost-effective piezoelectric materials capable of delivering higher forces and displacements. The use of textured Pb (lead)-based piezoelectric ceramics formed by so-called templated grain growth method has been identified as a promising strategy to address the performance and cost issue. This review article provides insights into recent advances in texturing Pb-based piezoelectric ceramics for improved performance in actuation applications. We discussed the relevant issues in detail focusing on current challenges and emerging trends in the textured piezoelectric ceramics for their reliability and performance in actuator applications. We discussed in detail focusing on current challenges and emerging trends of textured piezoelectric ceramics for their reliability and performance in actuator applications. In conclusion, the article provides an outlook on the future direction of textured piezoelectric ceramics in actuator applications, highlighting the potential for further success in this field.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계합동학술대회 논문집
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• pp.197-201
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• 2002

This paper presents optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro electro mechanical system) applications using SOI and trench structures. The micro-heaters are based on a thermal measurement principle and contains thermal isolation regions of 10 ${\mu}m$-thick Si membranes consisting of oxide-filled trenches in the SOI membrane rim. The micro-heaters were fabricated with Pt-RTD on the same substrate via MgO buff layer between Pt thin-film and $SiO_2$ layer. The thermal characteristics of micro-heater with trench-free SOI membrane structure was $280^{\circ}C$ at input power 0.9 W; in the presence of 10 trenches, it was $580^{\circ}C$ due to reduction of the external thermal loss. Therefore, a micro-heater with trenches in SOI membrane rim structure provides a powerful and versatile alternative technology for enhancing the performance of micro-thermal sensors and actuators.

• 대한기계학회논문집
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• 제18권11호
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• pp.2913-2921
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• 1994

In SMA(shape memory alloy), the degradation by fatigue is one of the most important problems to be overcome, when SMA is used for robot-actuator material. The actuator is operated repeatitively for long time and its repeating operation develops the fatigue degradation of SMA. The fatigue degradation changes the transformation temperature and deformation behavior and results in inaccurate operation control of robot. Accordingly, the changing behavior of transformation temperature and deformation which results from repeating operation is to be investigated in advance and the scheme to resolve those problems have to be made for the design of actuator. In this study, the fatigue tests were carried out on SMA specimens prepared to have different condition of aging time and pre-strain with the direct-current heating-cooling method, which was a general method of operation in robot actuators. The behavior of transformation temperature and deformation were examined and analyzed in each specimen and the study was performed to establish the optimistic manufacturing condition of SMA against the fatigue degradation.

• 한국항공우주학회지
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• 제31권10호
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• pp.34-39
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• 2003

본 논문에서는 압전작동기 LIPCA를 이용하여 형상가변익을 제작하였고, 제작된 형상가변익의 작동변위에 관하여 연구를 수행하였다. 등가 열 모델링 방법과 MSC/NASTRAN으로 해석을 수행하여 압전작동기의 작동변위를 예측하였고, 이를 바탕으로 형상가변익의 설계와 제작을 수행하였다. 실험을 통해 제작된 형상가변익의 실제 작동변위는 압전세라믹의 재료 비선형성으로 인해 예측된 값보다 크게 나옴을 확인하였다. 압전작동기 LIPCA를 이용한 형상가변익은 작은 크기의 무인비행기나 초소형비행기의 조종면으로 사용될 수 있다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2013년도 춘계학술대회 논문집
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• pp.454-459
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• 2013

For the purpose of rapid development and superior design quality assurance, sophisticated finite element model for SOM(Spatial Optical Modulator) piezo actuator of MOEMS device has been developed and evaluated for the accuracy of dynamics and residual stress analysis. Parametric finite element model is constructed using ANSYS APDL language to increase the design and analysis performance. Geometric dimensions, mechanical material properties for each thin film layer are input parameters of FE model and residual stresses in all thin film layers are simulated by thermal expansion method with psedu process temperature. $6^{th}$ mask design samples are manufactured and $1^{st}$ natural frequency and 10V PZT driving displacement are measured with LDV. The results of experiment are compared with those of the simulation and validate the good agreement in $1^{st}$ natural frequency within 5% error. But large error over 30% occurred in 10V PZT driving displacement because of insufficient PZT constant $d_{31}$ measurement technology.

• 감성과학
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• 제21권2호
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• pp.137-144
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• 2018

본 연구에서는 가변 통기성 스마트 의류의 제작을 위해 필요한 형상기억합금 액추에이터의 작동 조건을 파악하였다. 의복의 개방, 폐쇄와 같은 양방향 작동 시 형태 변형 시에만 전력을 소모하는 저전력 소모 액추에이터 개발을 위해 복수 채널의 일방향 형상기억합금을 이용하여 스위치로 작동되는 액추에이터를 설계하였으며 가장 효율적으로 작동할 수 있는 와이어의 직경과 전압인가 단위시간을 도출하였다. 선행연구 결과 도출된 양방향 작동이 가능한 일방향 형상기억합금의 직경 범위 내에서 Arduino 스위치를 제작하여 3.7V 전압인가 시 변화량을 분석한 결과 $0.4{\Phi}$의 액추에이터가 가장 적합한 것으로 나타났다. $0.4{\Phi}$ 형상기억합금와이어를 사용한 양방향작동 액추에이터의 개방, 폐쇄에 필요한 최적전압인가 시간을 도출하기 위해 액추에이터의 최대개방, 최소폐쇄 도달 전압인가 시간으로부터 50ms씩 감소, 증가 시키며 냉각 후 액추에이터의 내경을 비교하는 방식으로 측정한 결과 개방 동작에 필요한 최적 전압인가 단위시간은 4,100ms로 나타났다. 각 채널간의 발열에 의한 간섭을 최소화하기 위한 양방향간 작동 시 필요 딜레이 분석을 위해 상온에서 형상기억합금에 최적 전압입가 시간인 4.1초 동안 전원을 공급하고 가열 후 냉각까지의 과정을 열화상카메라로 촬영하여 형상기억합금 와이의 온도가 냉각시의 상변태온 이하로 하강하는 시점을 파악한 결과, 액추에이터의 양방향간 작동 딜레이는 1.8초 이상이 확보되어야 함을 파악할 수 있었다.

• 한국산업융합학회 논문집
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• 제20권5호
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• pp.419-424
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• 2017

The purpose of this study is to develop a virtual testbed capable of predicting the functional performance of a linear electromagnetic actuator for a high voltage relay in order to reduce its development costs and time. The virtual testbed is defined by a multiphysics coupling approach in order to consider the complex interactions of multi-domains such as the solenoid model of electromagnets, the mass-spring-damper model of mechanical systems, the electric circuit model for an external control unit, and the thermal model for predicting temperature variations. The performances of the existing high voltage relay were estimated by the virtual testbed, and then the effectiveness and validation of the proposed testbed were discussed in comparison with the experimental test results. This study showed that the virtual testbed can be applied in design, optimization, and investigation of high voltage relays.

• 대한기계학회논문집A
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• 제30권6호
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• pp.622-630
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• 2006

This paper is about the magnetic suspension stage based on the Switched Reluctance propulsion principle. Because the previous studies on contact-free stage adopted the Lorentz force for main force generation mechanism they have suffered from thermal problem deteriorating the precision. Thus, the magnetic suspension stage adopting SR principle which can achieve high force density is proposed. The main operating principle and structure for achieving high resolution and long travel range are represented. The magnetic force analysis of each actuator, providing back data for dynamic modeling and controller design are carried out. By conducting basic experiments, the feasibility of the proposed system is shown. In addition the problems which should be improved and their solutions are represented.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 추계학술대회 논문집
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• pp.463-467
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• 2004

This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated b micro-heater under pulse heating. The valve-less micropump using the diffuser/nozzle is consists of the lower plate, he middle plate, the upper plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The middle plate includes the chamber and diaphragm d the upper plate is the micro-heater. The Micropump is fabricated by bonding process of the three layer. This paper resented the possibility of the PCR chip operation by the fabricated micropump.