• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2003년도 춘계학술발표대회 논문집
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• pp.87-90
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• 2003

In this paper, the electromechanical displacements of curved actuators such as THUNDER are calculated by finite element method to design the optimal configuration of curved actuators. To predict the pre-stress in the device due to the mismatch in coefficients of thermal expansion, the adhesive as well as metal and PZT ceramic is also numerically modeled by using hexahedral solid elements. Because the modeling of these thin layers causes the numbers of degree of freedom to increase, large-scale structural analyses are performed in a cluster system in this study. The curved shape and pre-stress in the actuator are obtained by the cured curvature analysis. The displacement under the piezoelectric force by an applied voltage is also calculated to compare the performance of curved actuator. The thickness of metal and adhesive, the number of metal layer are chosen as design factors.

• 유공압시스템학회논문집
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• 제4권2호
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• pp.28-33
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• 2007

In the power plant facility which use soft coal as a power source the fan pitch blade control hydraulic actuator is used to control the inlet and outlet gas to regulate the internal pressure of the furnace and control the frequence. Sometimes malfunctions of this equipment lead to the decline of boiler thermal efficiency and unexpected power plant trip. In order to localize the fan pitch blade control hydraulic actuator specially for the 500MW large scale boiler, Analysis and modelling of the system is carried out mathematically. The responses of the system are examined by using matlab simulation fur the variation of the major parameters in view of reverse engineering. Consequently the validity of the established parameters are examined.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1231-1236
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• 2007

This study presents the static and dynamic actuating performances of a bending piezoelectric actuator with a thin sandwiched PZT plate under a static load. The stored elastic energy within the actuators which occurs during a curing process is obtained through a flexural bending test. An actuating performance is evaluated in terms of an actuating displacement at the simply supported condition. The results reveal that an actuator that consists of a top layer having a high elastic modulus and a low coefficient of thermal expansion exhibits a better performance than the rest of actuators due to the formation of the large stored elastic energy within the actuator system. When actuators are excited at the alternating current voltage, the effect of PZT ceramic softening results in a slight reduction in the resonance frequency of each actuator as the applied electric field increases. It is thus suggested that the static and dynamic actuating characteristics of bending piezoelectric actuators with a thin sandwiched PZT plate should be simultaneously considered in controlling their performances.

• JSTS:Journal of Semiconductor Technology and Science
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• 제2권4호
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• pp.259-267
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• 2002

We present a novel 3D fabrication method with single X-ray process utilizing an X-ray mask in which a micro-actuator is integrated. An X-ray absorber is electroplated on the shuttle mass driven by the integrated micro-actuator during deep X-ray exposures. 3D microstructures are revealed by development kinetics and modulated in-depth dose distribution in resist, usually PMMA. Fabrication of X-ray masks with integrated electrothermal xy-stage and electrostatic actuator is presented along with discussions on PMMA development characteristics. Both devices use $20-\mu\textrm{m}$-thick overhanging single crystal Si as a structural material and fabricated using deep reactive ion etching of silicon-on-insulator wafer, phosphorous diffusion, gold electroplating, and bulk micromachining process. In electrostatic devices, $10-\mu\textrm{m}-thick$ gold absorber on $1mm{\times}1mm$ Si shuttle mass is supported by $10-\mu\textrm{m}-wide$, 1-mm-long suspension beams and oscillated by comb electrodes during X-ray exposures. In electrothermal devices, gold absorber on 1.42 mm diameter shuttle mass is oscillated in x and y directions sequentially by thermal expansion caused by joule heating of the corresponding bent beam actuators. The fundamental frequency and amplitude of the electrostatic devices are around 3.6 kHz and $20\mu\textrm{m}$, respectively, for a dc bias of 100 V and an ac bias of 20 VP-P (peak-peak). Displacements in x and y directions of the electrothermal devices are both around $20{\;}\mu\textrm{m}$at 742 mW input power. S-shaped and conical shaped PMMA microstructures are demonstrated through X-ray experiments with the fabricated devices.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.2004-2006
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• 1996

A thermally driven polysilicon micro actuator has been fabricated using surface micromachining techniques. It consists of P-doped polysilicon as a structural layer and TEOS (tetracthylorthosilicate) as a sacrificial layer. The polysilicon was annealed for the relaxation of residual stress which is the main cause to its deformation such as bending and buckling. And the newly developed HF VPE (vapor phase etching) process was also used as an effective release method for the elimination of sacrificial TEOS layer. The thickneas of polysilicon is $2{\mu}m$ and the lengths of active and passive polysilicon cantilevers are $500{\mu}m$ and $260{\mu}m$, respectively. The actuation is incurred by die thermal expansion due to the current flow in the active polysilicon cantilever, which motion is amplified by lever mechanism. The moving distance of polysilicon micro actuator was experimentally conformed as large as $21{\mu}m$ at the input voltage level of 10V and 50Hz square wave. The actuating characteristics are investigated by simulating the phenomena of heat transfer and thermal expansion in the polysilicon layer. The displacement of actuator is analyzed to be proportional to the square of input voltage. These micro actuator technology can be utilized for the fabrication of MEMS (microelectromechanical system) such as micro relay, which requires large displacement or contact force but relatively slow response.

• Composites Research
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• 제16권2호
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• pp.41-47
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• 2003

본 논문은 몇 가지 종류의 압전 복합재료 작동기 LIPCA의 성능 시험 및 비교에 관한 것이다. LIPCA는 압전 세라믹을 중심으로 상층부는 탄성계수가 크면서 열팽창계수가 낮은 섬유강화 복합재료 층이, 하층부는 탄성계수가 작으면서 열팽창계수가 큰 섬유강화 복합재료 층으로 구성되어 있다. 작동기의 성능 검증을 위해 작동 지그 및 전압 공급 장치 그치고 비접촉 레이저 센서로 이루어진 실험 시스템을 구성하였다 성능 비교시험 결과 검증실험으로부터 압전 작동기의 작동성능은 전기 작동 재료층이 중립면으로부터 멀리 벗어나게 위치하면서, 동시에 적층판의 전체 굽힘 강성을 작게 하면 극대화할 수 있다는 사실을 입증하였다.

• 항공우주시스템공학회지
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• 제16권3호
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• pp.84-92
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• 2022

전기-정유압식 작동기(EHA)는 독립적으로 유동력원을 운용함에 따라, 복잡한 유압 배관을 제거할 수 있어 누유 및 중량 최소화, 안전성 향상의 장점이 있어 최근 항공기용 비행제어 분야에서 사용되고 있다. 이러한 EHA를 탑재하는 항공기의 경우, 기존 중앙 유압시스템을 탑재한 항공기에 비해 제한된 냉각원에 따른 EHA의 열관리 이슈가 대두된다. 이러한 열관리 이슈의 해결을 위해서는, EHA의 열특성을 예측할 수 있는 열해석 모델이 필요하다. 본 연구에서는 유압펌프 및 전기모터로 구성되는 EHA 유압동력모듈의 내부 회전체를 고압 하에서 고속으로 회전이 가능하도록, 유압동력모듈 내부에 유체 순환 회로를 적용하였다. 적합한 열해석 모델을 구축하고, 유냉식 또는 비유냉식 유압동력모듈 적용에 따른 해석 결과의 비교 및 검토를 통해 EHA의 열특성 영향성을 확인하고자 하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.146-150
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• 1996

A thermal micro actualtor has been fabricated using surface micromachining techniques. It consists of doped ploysilicon as a moving part and TEOS(Tetra Ethyl Ortho Silicate) as a sacrificial layer. The polysilicon was annealed for the reduction of residual stress which is the main cause to its deformation such as bending and buckling. And the newly developed HF VPE(vapor phase etching)process was also used as an effective release method for the elimination of sacrificaial layer. With noliquid involved during any of the steps for relasing, unlike other reported relase techniques, the HF VPE pocess has produced polysilicon microstructures with virtually no process-induced stiction problem. The actuation is incured by the thermal expasion due to current flow in active polysilicon cantilever, which motion is amplified bylever mechanism. The thickness of pllysilicon is 2 .mu. m and the length of active and passive polysilicon cantilever are 500 .mu. m, respectively. The moving distance of polysilicon actuator was experimentally conformed as large as 21 .mu. m at the input voltage level of 10 V and 50Hz square wave. These micro actuator technology can be utilized for the fabrication of MEMS (microlectromechanical system) such as microrelay, which requires large displacement or contact force but relatively slow response.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2005년도 춘계학술발표대회 논문집
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• pp.5-8
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• 2005

In this paper, the electromechanical displacements of curved piezoelectric actuators composed of PZT ceramic and laminated composite materials are calculated based on high performance computing technology and the optimal configuration of composite curved actuator is examined. To accurately predict the local pre-stress in the device due to the mismatch in coefficients of thermal expansion, carbon-epoxy and glass-epoxy as well as PZT ceramic are numerically modeled by using hexahedral solid elements. Because the modeling of these thin layers increases the number of degrees of freedom, large-scale structural analyses are performed through the PEGASUS supercomputer, which is installed in our laboratory. In the first stage, the curved shape of the actuator and the internal stress in each layer are obtained by the cured curvature analysis. Subsequently, the displacement due to the piezoelectric force (which is resulted from applied voltage) is also calculated. The performance of composite curved actuator is investigated by comparing the displacements obtained by the variation of thickness and elastic modulus of laminated composite layers. In order to consider the finite deformation in the first analysis stage and include the pre-stress due to curing process in the second stage, nonlinear finite element analyses are carried out.

• 대한기계학회논문집A
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• 제31권8호
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• pp.880-888
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• 2007

This article describes the load capability of bending piezoelectric actuators with a thin sandwiched PZT plate in association with the stored elastic energy induced by an increased dome height after a curing process. The stored elastic energy within the actuators is obtained via a flexural mechanical bending test. The load capability is evaluated indirectly in terms of an actuating displacement with a load of mass at simply supported and fixed-free boundary conditions. Additionally, a free displacement under no load of mass is measured for a comparison with an actuating displacement. The results reveal that an actuator with a top layer having a high elastic modulus and a low coefficient of thermal expansion exhibits a better performance than the rest of actuators in terms of free displacement as well as actuating displacement due to the formation of the large stored elastic energy within the actuator system. When actuators are excited at AC voltage, the actuating displacement is rather higher than the free displacement for the same actuating conditions. In addition, the effect of PZT ceramic softening results in a slight reduction in the resonance frequency of each actuator as the applied electric field increases. It is thus suggested that the static and dynamic actuating characteristics of bending piezoelectric composite actuators with a thin sandwiched PZT plate should be simultaneously considered in controlling the performance.