• 제목/요약/키워드: The electron transport coefficients

검색결과 97건 처리시간 0.032초

$SF_6$-Ar혼합기체의 전리계수에 관한 연구 (The study of ionization coefficients in mixtures of $SF_6$ and Ar)

  • 김상남;하성철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 춘계학술대회 논문집 유기절연재료 방전 플라즈마연구회
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    • pp.96-99
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    • 2003
  • In this dissertation the results of the combined experimental and theoretical studies designed to understand and predict the spatial growth and transport coefficients for electrons in $SF_6$ and $SF_6$-Ar mixtures have described. The transport coefficients for electrons in (0.1[%])$SF_6$-Ar, (0.5[%])$SF_6$-Ar, (1.0[%])$SF_6$-Ar, (3.0[%])$SF_6$-Ar and (5.0[%])$SF_6$-Ar mixtures were measured by time-of-flight method, and the electron energy distribution function and the parameters of the velocity and the diffusion were determined by the variation of the collision cross-sections with energy.

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시뮬레이션을 이용한 $SF_6-Ar$의 전리계수 (A Simulation of the ionization coefficients in mixtures of $SF_6$ and Ar)

  • 김상남
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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    • pp.2202-2204
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    • 2005
  • In this dissertation the results of the combined experimental and theoretical studies designed to understand and predict the spatial growth and transport coefficients for electrons in $SF_6$ and $SF_6-Ar$ mixtures have described. The transport coefficients for electrons in (0.1[%]) $SF_6-Ar$, (0.5[%])$SF_6-Ar$,(1.0[%])$SF_6-Ar$,(3.0[%])$SF_6-Ar$ and(5.0[%]) $SF_6-Ar$ mixtures were measured by time-of- flight method, and the electron energy distribution function and the parameters of the velocity and the diffusion were determined by the variation of the collision cross-sections with energy.

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시뮬레이션을 이용한 $SF_6$-Ar혼합기체의 전리계수 (A Simulation of the ionization coefficients in mixtures of $SF_6$ and Ar)

  • 김상남
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2007년도 제38회 하계학술대회
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    • pp.1494-1495
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    • 2007
  • In this dissertation the results of the combined experimental and theoretical studies designed to understand and predict the spatial growth and transport coefficients for electrons in $SF_6$ and $SF_6$-Ar mixtures have described. The transport coefficients for electrons in (0.1[%])$SF_6$-Ar, (0.5[%])$SF_6$-Ar, (1.0[%])$SF_6$-Ar, (3.0[%])$SF_6$-Ar and (5.0[%])$SF_6$-Ar mixtures were measured by time-of-flight method, and the electron energy distribution function and the parameters of the velocity and the diffusion were determined by the variation of the collision cross-sections with energy.

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$SF_{6+}Ar$혼합기체의 전자수송특성 개선에 관한 연구 (A Study on the Improvement of the Electron Transport Properties in $SF_{6+}Ar$ Mixtures Gas)

  • 하성철;김상남;유회영;서상현;임상원;전병훈
    • 한국전기전자재료학회논문지
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    • 제11권1호
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    • pp.67-73
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    • 1998
  • In this paper, the electron swarm parameters in the 0.5% and 0.2% SF\ulcorner+Ar mixtures are measured by time of flight method over the E/N(Td) range from 30 to 300(Td). The measurements have been carried out by the double shutter drift tube with variable drift distance from the cathod. A two-term approximation of the boltzmann equation analysis and Monte Carlo simulation have been also used to study electron transport coefficients. We have calculated W, $ND_L,\;ND_T,\;\alpha,\;\eta,\;\alpha-\eta$, and the limiting breakdown electric field to gas mixtures ratio in pure $SF_6$+Ar mixtures. The electron energy distribution function has been analysed in $SF_6$+Ar mixtures at E/N : 200(Td) for a case of the equilibrium region in the mean electron energy. The measured results and the calculated results have been compared each other.

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전자충돌단면적과 전자수송계수에 관한 연구 (The study of electron collision cross sections and electron transport coefficients in gases)

  • 전병훈;박재준;하성철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 일렉트렛트 및 응용기술
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    • pp.11-14
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    • 2002
  • Accurate sets of electron collision cross sections for atoms and molecules are necessary for quantitative understanding and modeling of plasma phenomena. So, in this study, we explains the concept of electron collision cross sections for gases, and the principle of determination of the electron collision cross sections for atoms and molecules by using the present electron swarm method.

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TOF법을 이용한 $SiH_4$ 프라즈마중의 전자군파라미터특성 (Electron Swarm Parameter Characteristic in $SiH_4$ Plasma by TOF Method)

  • 이형윤;하성철;유회영;김상남;임상원;문기석
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1997년도 하계학술대회 논문집 E
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    • pp.1830-1833
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    • 1997
  • This paper describes the electron transport characteristic in $SiH_4$ gas calculated for range of E/N values from $0.5{\sim}300$(Td) using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained for TOF method. The results gained that the value of an electron swarm parameter such as the electron drift velocity, longitudinal and transverse diffusion coefficients with the experimental and theoretical for a range of E/N. The electron energy distributions function were analysed in monosilane at E/N : 30, 50(Td) for a case of equilibrium region in the mean electron energy. The validity of the results obtained has been confirmed by a TOF method.

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무전극 램프의 방전가스 연구 (A Study on discharge gas of Fluorescent Induction Lamp)

  • 김근;전병훈
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2009년도 제40회 하계학술대회
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    • pp.1481_1482
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    • 2009
  • Pure Xe, Kr and Ne atoms and Mixures of Xe-Ne used in fluorescent induction lamps(FILs). However standard regulation of FILs is not made up until now. Therefore, the electron transport coefficients, the electron drift velocity W, the longitudinal diffusion coefficient NDL and the ionization coefficient $\alpha$/N in pure Xe, Kr, Ne gases and Xe-Ne mixtures(1:9, 5:5, 7:3) were calculated over the wide E/N range from 0.01 to 500 Td at 1 Torr by two-term approximation of the Boltzman equation.

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$SF_6+Ar$ 혼합기체의 MCS-BE 알고리즘에 의한 전자에너지 분포함수 (A Study on the Electron Energy Distribution Function in $SF_6+Ar$ Mixtures Gas used by MCS-BE Algorithm)

  • 김상남;하성철
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 학술대회 논문집 전문대학교육위원
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    • pp.17-21
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    • 2000
  • A Study on the electron energy distribution function in $SF_6+Ar$ mixtures gas used by MCS-BE algorithm, the electron swam parameters in the 0.5% and 0.2% $SF_6+Ar$ mixtures are measured by time of flight method over the E/N(Td) range from 30 to 300(Td). A two-term approximation of the Boltzmann equation analysis and Monte Carlo simulation have been also used to study electron transport coefficients. The electron energy distribution function has been analysed in $SF_6$ gas and $SF_6+Ar$ mixtures at E/N : 200(Td) for a case of the equilibrium region in the mean electron energy. The measured results and the calculated results have been compared each other.

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$CF_4$ 기체의 MCS-BEq 알고리즘에 의한 전자에너지 분포함수 (Electron Energy Distribution Function in $CF_4$ Gas used by MCS-BE Algorithm)

  • 박재세;김상남;김일남
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2002년도 학술대회 논문집 전문대학교육위원
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    • pp.102-105
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    • 2002
  • In this paper, the electron transport characteristics in $CF_4$ has been analysed over the E/N range 1${\sim}$300 [Td] by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, longitudinal diffusion coefficient, the ratio of the diffusion coefficient to the mobility, electron ionization and attachment coefficients, effective ionization coefficient, mean energy, collision frequency and the electron energy distribution function. The swarm parameter from the swarm study are expected to serve as a critical test of current theories of low energy electron scattering by atoms and molecules, in particular, as well as crucial information for quantitative simulations of weakly ionized plasmas.

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