• The Transactions of the Korean Institute of Electrical Engineers P
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• v.60 no.1
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• pp.27-31
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• 2011

In this paper, the electron transport characteristics in $CF_4$ has been analysed over the E/N range 1~300[Td] by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, longitudinal diffusion coefficient, the ratio of the diffusion coefficient to the mobility, electron ionization and attachment coefficients, effective ionization coefficient, mean energy, collision frequency and the electron energy distribution function. The electron energy distribution function has been analysed in $CF_4$ at E/N=5, 10, 100, 200 and 300[Td] for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections. The results of Boltzmann equation and Monte Carlo simulation have been compared with experimental data by Y. Nakamura and M. Hayashi. The swarm parameter from the swarm study are expected to serve as a critical test of current theories of low energy electron scattering by atoms and molecules, in particular, as well as crucial information for quantitative simulations of weakly ionized plasmas.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.05c
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• pp.201-203
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• 2001

This paper describes the information for quantitative simulation of weakly ionized plasma. We must grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. In this paper, the drift velocity of electron in Xenon gas calculated for range of E/N values from 0.01~500[Td] at the temperature is $300[^{\circ}K]$ and pressure is 1[Torr], using a set of electron collision cross sections determined by the authors and the values of drift velocity of electrons are obtained for TOF, PT, SST sampling method of Backward Prolongation by two term approximation Boltzmann equation method. it has also been used to predict swarm parameter using the values of cross section as input. The result of Boltzmann equation, the drift velocity of electrons, has been compared with experimental data by L. S. Frost and A. V. Phelps for a range of E/N. The swarm parameter from the study are expected to server as a critical test of current theories of low energy scattering by atoms and molecules.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.05c
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• pp.185-188
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• 2002

This paper describes the information for quantitative simulation of weakly ionized plasma. We should grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. In this paper, the drift velocity of electron in $SF_6+O_2$ mixture gas calculated for range E/N values l~900[Td] at the temperature is 300[$^{\circ}K$] and pressure is 1[Torr], using a set of electron collision cross sections determined by the authors and the values of drift velocity of electrons are obtained for TOF, PT, SST sampling method of Backward Prolongation by two term approximation Boltzmann equation method. It has also been used to predict swarm parameter using the values of cross section as input. The result of Boltzmann equation, the drift velocity of electrons, has been compared with pure $SF_6$, pure $O_2$ and mixture gas.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.4
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• pp.375-380
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• 2005

CF₄ molecular gas is used in most of semiconductor manufacture processing and SF/sub 6/ molecular gas is widely used in industrial of insulation field. but both of gases have defect in global warming. C₃F/sub 8/ gas has large attachment cross-section more than these gases, moreover GWP, life-time and price of C₃F/sub 8/ gas is lower than them, therefor it is important to calculate transport coefficients of C₃F/sub 8/ gas like electron drift velocity, ionization coefficient, attachment coefficient, effective ionization coefficient and critical E/N. The aim of this study is to get these transport coefficients for imformation of the insulation strength and efficiency of etching process. In this paper, we calculated the electron drift velocity (W) in pure C₃F/sub 8/ molecular gas over the range of E/N=0.1∼250 Td at the temperature was 300 K and gas pressure was 1 Torr by the Boltzmann equation method. The results of this paper can be important data to present characteristic of gas for plasma etching and insulation, specially critical E/N is a data to evaluate insulation strength of a gas.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.628-631
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• 2004

A tetrafluoromethane$(CF_4)$ is most useful gas in plasma dry etching, because it has a electron attachment cross-section. therefor it is important to calculate transport coefficients like electron drift velocity, ionization coefficient, attachment coefficient, effective ionization coefficient. and critical E/N. The aim of this study is to get these transport coefficients for information of the insulation strength and efficiency of etching process. Electron transport coefficients in $CF_4+Ar$ gas mixture are simulated in range of E/N values from 1 to 250 [Td] at 300[K} and 1 [Torr] by using Boltzmann equation method. The results of this method can be important data to present characteristic of gas for plasma etching and insulation, specially critical E/N is a data to evaluate insulation strength of a gas. and is presented in this paper for various mixture ratios of $CF_4+Ar$ gas mixture.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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• 2006.11a
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• pp.407-410
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• 2006

This study describes a simulation of two-dimensional bubble forming and motion by the Lattice Boltzmann Method with the phase field equation. The free energy model is used to treat the interfacial force and deformation of binary fluids system, drawn into a T-junction the micro channel. A numerical simulation of a binary flow in a cross-junction channel is carried out by using the parallel computation method. The aim in this investigation is to examine the applicability of LBM to numerical analysis of binary fluid separation and motion in the micro channel.

• Journal of Environmental Science International
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• v.11 no.1
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• pp.57-61
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• 2002

To investigate the flow characteristics by the water stage variation between stream-aquifer, the new solution of nonlinear Boussinesq equation was derived and extended using the Boltzmann transformation. The soundness of the analytic solution obtained from this study was examined by the comparison with the linearized analytic solution and the numerical solution by finite difference method. And the movement, velocity, flowrate and volume of flow caused by the stage variation of stream and the existence of regional gradient were estimated. This new analytic solution can express the groundwater movement between stream-aquifer. So, it might be helpful to manage water environment.

• The KSFM Journal of Fluid Machinery
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• v.15 no.3
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• pp.12-18
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• 2012

The Lattice Boltzmann Method has developed for solving the Boltzmann equation in Cartesian domains containing immersed boundaries of arbitrary geometrical complexity moving with prescribed kinematics. When a immersed boundaries are sweeping the fixed fluid node, refilling the node information in a vicinity of fluid nodes is one of the important issues in Lattice Boltzmann Method. In this study, we propose a simple refill algorithm for the particle distribution function based on a proper velocity, density and strain rate to enhance accuracy and stability of the method. The refill scheme based on a asymptotic analysis of LBGK model has improved accuracy than interpolation schemes. The proposed scheme in this study is validated by the simulations of an impulsively started rotating circular cylinder to investigate adaptability for fluid-structure interaction (FSI) problem. This refill scheme has improved stability and accuracy especially at high Reynolds number region.

• Nuclear Engineering and Technology
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• v.55 no.2
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• pp.769-779
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• 2023

This paper describes an hp-angular adaptivity algorithm in the discrete ordinates method for Boltzmann transport applications with strong angular effects. This adaptivity uses discontinuous finite element quadrature sets with different degrees, which updates both angular mesh and the degree of the underlying discontinuous finite element basis functions, allowing different angular local refinement to be applied in space. The regular and goal-based error metrics are considered in this algorithm to locate some regions to be refined. A mapping algorithm derived by moment conservation is developed to pass the angular solution between spatial regions with different quadrature sets. The proposed method is applied to some test problems that demonstrate the ability of this hp-angular adaptivity to resolve complex fluxes with relatively few angular unknowns. Results illustrate that a reduction to approximately 1/50 in quadrature ordinates for a given accuracy compared with uniform angular discretization. This method therefore offers a highly efficient angular adaptivity for investigating difficult particle transport problems.

• The KSFM Journal of Fluid Machinery
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• v.14 no.3
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• pp.10-17
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• 2011

Free energy based lattice Boltzmann method (LBM) has been used to simulate the contact angle and the bubble necking with large density ratio. LBM with the proper contact angle model is able to reduce the spurious currents and eliminate the singularity in the contact lines. The numerical results of the contact angles are satisfied with the Youngs law. For bubble necking flows, simulations are executed for various viscosities and contact angles. The phenomena of the bubble necking are simulated successfully and the subsequent results are presented. The present method is also applicable to the nucleate boiling flows.