Proceedings of the Korean Vacuum Society Conference
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2014.02a
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pp.150.1-150.1
/
2014
Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.
Journal of the Korea Academia-Industrial cooperation Society
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v.18
no.12
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pp.321-328
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2017
The effects of the Sewol ferry disaster have infiltrated into various fields, such as politics, the economy, and social fields in Korea, and the population's consciousness of the importance of safety has been strengthened by the disaster. The purpose of, this study is to empirically verify whether there has been any change in the fire service environment following the Sewol ferry disaster. Such a change would be expected to have produced a change in the consciousness of the government about safety and increased the level of support. This study sets out five research hypotheses and verifies their adoption. The years studied are those before and after the accident occurred, viz. 2013 and 2015, respectively, and the main statistical technique is the t-test. The main results of this study are as follows. First, there was no significant difference in the fire-service demand between the two years. Second, the fire-service budget showed a significant difference between the two years. Third, the regional resources facilities tax showed a significant difference between the two years. Fourth, the fire-service budget considering the fire-service demand showed no statistically significant difference. Fifth, the fire service-demand considering (the number of) fire-fighters was significantly different in the rescue and emergency medical services between the two years. Sixth, the fire service-demand considering fire-equipment showed no significant difference between the two years.
Journal of the Korea Academia-Industrial cooperation Society
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v.21
no.4
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pp.276-284
/
2020
The purpose of this study was to provide basic data on hand washing of physical therapists by examining their awareness and practice of hand washing according to proper clinical practice. A total of 536 questionnaires were collected from physical therapy students in Gwangju metropolitan city. The general characteristics of the subjects were calculated by frequency analysis, and the awareness and practice of hand washing with and without clinical practice were analyzed by independent t-tests. As a result of analyzing hand washing awareness according to the clinical practice, there was a significant difference in hand washing up to the wrist (p<0.05), and a significant difference in 6 stages of proper hand washing (p<0.01). As a result of analyzing hand washing practice according to clinical practice, there was a significant difference in hand washing before eating and starting clinical practice (p<0.05), a significant difference in washing hands after contacting clinical practice equipment and washing your fingers from your thumb down (p<0.01). As a result of analyzing the correlation between awareness and practice, most showed positive correlation. This means it is important to raise the awareness of proper washing hands. Therefore, it is believed that the training school should repeatedly conduct its own hand washing training within the school and in clinical practice to increase awareness and improve handwashing in clinical practice.
Journal of the Korea Academia-Industrial cooperation Society
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v.21
no.3
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pp.129-136
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2020
A Cut Out Switch (COS) is used for line protection and pole transformer protection in power systems. The COS used to protect the pole transformer is installed on the power side of the pole transformer to protect the electric equipment from fault currents. The COS is composed largely of a body and a fuse holder, and when the fault current is energized, the element of the fuse link in the fuse holder is melted to block the fault current. The arc generated when the COS fuse link is blown causes fire and noise, causing discomfort to residents in the surrounding area, and the arc flame can cause secondary damage to the peripheral device. In this study, a current-limiting COS fuse with improved overcurrent blocking performance rather than explosion type was developed to solve the arc and noise problems during COS operation. The overcurrent breaking performance of the current-limiting COS improves the reliability by developing a striker and COS fuse bracket. In addition, this study aimed to verify the performance of the developed current-limiting COS fuse through a test at an authorized institution.
Park, Sung-Jae;Choi, Jae-Ho;Choi, Gil-Gyu;Lee, Dong-Ki
Journal of the Korea Academia-Industrial cooperation Society
/
v.21
no.4
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pp.164-172
/
2020
The fuel oil/heat exchanger installed in military aircraft is a device that cools the lubricant oil supplied to other devices, such as an AMAD, and a hydraulic pump using the low temperature of the fuel is cracked at the AMAD lubricant inlet port. If a crack in the heat exchanger occurs, the lubricant oil supplied to other equipment is not cooled. Therefore, the flight can no longer be performed. In this study, non-destructive inspection and microscopic examination of the fracture surface of the oil port were performed to analyze the crack tendency. The oil pipe connected to the oil port is a titanium pipe, which is fastened with over torque and has been identified as the leading cause of heat exchanger oil port cracks. In addition, it was verified as the main reason for cracking by finite element analysis. The material and diameter of the pipe were changed to improve this defect, and the applied torque was adjusted. In addition, the bending value of the pipe was adjusted to minimize the fatigue accumulation due to pulsating pressure. As a result, no cracks occurred on the heat exchanger via the ground test after the installation of an improved pipe under the same conditions.
Journal of Korean Society for Geospatial Information Science
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v.11
no.3
s.26
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pp.23-34
/
2003
Currently, the efficiency of GPS has been increased in the various precise survey like as the control survey and the navigation etc. Also, it is widely used in the deformation analysis of the structure, the measurement of the marine tides, the measurement of the river level and the topographic monitoring of seabed or riverbed by combined the measurement equipment for depth. In this study, we intend to increase in efficiency of the topographic monitoring of seabed or riverbed by combined with DGPS, RTK GPS and echo sounder. For this study, we defined the error correction of the echo sounder with the experiment of water tank which is considered the characteristic of estuary riverbed and then we developed the s/w for 3-dimensional monitoring of estuary riverbed and applied the s/w to field test and improved the various problems. On analyzing topography of estuary riverbed by combined GPS with echo sounder, the draught error which is yielded to change of length from the water surface by the movement of survey vessel to the end of the transducer was eliminated by geometrical rearrangement and we defined the correction formula $z=BM+SAH-DBR_{(i)}-DRT-ED$. The sounding error about the echo sounder and characteristic of estuary riverbed was found by understanding the relation of average diameter ind residual error and we defined correction formula, $Y=0.00474{\ast}ln(X)-0.0045$ by the regression analysis. and then we verified applicability of correction formula.
There exists a remarkable differences in use of MRI scanning among income classes. The poor can hardly utilize it. This is because, among high cost technnologies, MRI is the only equipment not covered under health insurance benefits in Korea. This study was designed 1) to reveal the status of nation-wide MRI installation, customary charges and per unit annual scanning performance, and 2) to analyse factors influencing the above variables. The data for this study came from "MRI Prevalence Survey" conducted by the National Federation of Medcial Insurance(NFMI) in 1997, and were analyzed through SAS packages for T-test, analysis of variance and stepwise multiple regression. Data were collected from 188 hospitals equipped with MRI scanners. Major findings are summarized as follows : The number of MRI scanners has increased from 69 in 994 to 158 in 1996(2.3 times) while per unit annual scanning performance has risen by 11.2% from 2,173 cases in 1994 to 2,417 cases in 1996. Such a rapid increase was made possible mainly due to the inclusion of CT scanning under the health insurance benefit package. The customary charges for MRI scanning with or without contrast media, on average, amounted to 484,000 Won and 402,000 Won, respectively, with the percentile increase of 17.8% and 8.1% each during the same time. Korea ranks the third worldwidely in terms of number of MRI installations, 4.8 scanners per one million persons, only next to Japan and United States. Geographical variation of MRI, however, was rather high, 7.91 unit, in Cheju area compared to 1.82 in Kyongnam area. Variations of customary charges of MRI scanning can be explained as much as by 44.8% by both the total amount of claims to NFMI and geographical variable. The charges were more likely to be higher in metropolitan areas like Seoul and in hospitals with a bigger amount of claims. While those of per unit annual scanning performance can be explained as much as by 30.7% by both MRI installation cost and level of MRI-installed organizations. Per capital scannig performance was higher in tertiary hospitals and hospitals equipped with more expensive scanners than hospitals with less expensive scanners. Two measures are called for the remedying the existing excessive abundance in MRI units in korea : One is to set a ceiling of MRI units in an area like a province or a metropolitan district. The other is to establish a committee on introduction of high cost technologies for reviewing its effective use.ctive use.
The present study suggests the fundamental method for the prediction time of the fire origin by analyzing the combustion phenomenon of inflammable material in the building structure. The heat release rate (HRR) with time variant is evaluated for the interphone as a inflammable material, which is opted from the fire incidents in the stairwell. the fire dynamics simulator (FDS ver. 6.1) is applied in order to analyze the difference of the smoke inflow time to the downstair from the fire event area with various fire pattern. The results show that the maximum inflow time difference for the case of the interphone made from ABS materials is about 4.93 times with the input conditions of heat flux values and the environment in the FDS for the fixed stairwell which composed of total volume $291.3m^3$, floorage $23.3m^2$ and the height of each floor 2.5 m. This research can be practical information for the application method of simulation scheme with experimental data to the fire Identification.
The goals of this paper are two folds: i) to evaluate whether the data collected by a license plate matching AVI equipment being operated on some segment of a national highway are suitable or not for use in travel time estimation of interrupted traffic flows; ii) to study the statistical methodologies to be used for the determination of the optimal aggregation interval for travel time estimation. In this study it was found that the AVI data are not representative because the data are collected on some selected lanes of a roadway where main traffic is thru-traffic and, thus the AVI data are different from those collected from all lanes in traffic characteristics. For the determination of the optimal aggregation interval for travel time estimation. two statistical methods. namely point estimation and interval estimation. were tested. The test shows that the point estimation method is more sensitive and gives more desirable results in determing the optimal aggregation interval than the interval estimation method. And it turned out that the optimal aggregation interval on interrupted traffic flows has been calculated as 5 minute and thus the existing aggregation interval. 5 minute is proper.
The one-year-follow-up test of abdomen/pelvis from 10 patients who were scanned more than twice a years were analyzed the radiation dose and image quality depend on the position of the arm retrospectively from January to December in 2013. There were classified two groups, group A was examined with raising an arm on standard position and group B was performed with lowering an arm, respectively. Group A of an average mAs from the first dose amount was shown 11.4% less compared to Group B. And the value of CTDI from Group B also was investigated 11.3% less. To compare the quality comparison of the second image as histogram value, the value of max from both of two groups was measured similarly. However, a big difference was shown from the value of min and SD, the short dose was appeared depends on the position of arm even though Group A was radiated more than Group B. Less exposure to the medical image quality only by working CT scan when the examiner actively raise the arm before the development and testing of high-end equipment introduction of complex algorithms for obtaining an optimized image will be provided to the patient.
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