• 설비공학논문집
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• 제22권11호
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• pp.760-766
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• 2010

Excessive heat occurs during semiconductor manufacturing process. Thus, precise control of temperature is required to maintain constant chamber-temperature and also wafer-temperature in the chamber. Compared to an industrial chiller, semiconductor chiller's power consumption is very high due to its continuous operation for a year. Considering the high power consumption, it is necessary to develop an energy efficient chiller by optimizing operation control. Therefore, in this study, a semiconductor chiller is experimentally investigated to suggest energy-saving direction by conducting load change, temperature rise and fall and control precision experiments. The experimental study shows the cooling capacity of dual-channel chiller rises over 30% comparing to the conventional chiller. The time and power consumption in the temperature rising experiment are 43 minutes and 8.4 kWh, respectively. The control precision is the same as ${\pm}1^{\circ}C$ at $0^{\circ}C$ in any cases. However, it appears that the dual channel's control precision improves to ${\pm}0.5^{\circ}C$ when the setting temperature is over $30^{\circ}C$.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.91-92
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 추계학술대회 논문집
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• pp.261-262
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.215-219
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• 1996

We developed a part of hydraulic stroke sensing cylinder for te purpose of position controlbyusing magnetic sensor and evaluated variously its performance its performance. In this paper, for the evaluation of the developed cylinder under various temperature change, thermal control systems are designed and controlled. It is composed of an heater case, temperature sensor, and interface circuits which included SCR(silicon controlled rectifier) for the control of the voltage's phase. To obtain various temperature conditions, the thermal systems are controlled by using Ziegler-Nichols PED tuning method. The thermalcontrol systems are used to experiment to evaluate whether the developed cylinder can obtain a stable output signal for detecting a stroke of the cylinder under the controlled temperature condition.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1988년도 한국자동제어학술회의논문집(국내학술편); 한국전력공사연수원, 서울; 21-22 Oct. 1988
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• pp.457-461
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• 1988

In this study an one-board micom controlled precision temperature control system has been developed. The digital temperature control system is consisted of an one-board micom as digital controller, a 12-bit A/D and D/A converter, a power amplifier, a NTC thermister, a preamplfier and a heat chamber. An operating control program for the control system was written in Z80 machine language. A Dual-PID predictor control algorithm was proposed. Experments were conducted with different sampling time and limitted error value. As a result, the temperature in a heat chamber can be well controlled within +- 0.2 .deg.C when the sampling time was applied to 10 sec and the limitted error value +- 0.5 .deg.C under the dual-PID predictor control algorithm. By means of one-board micom overall system has been reduced in size and volume, thus the system becomes compact and less expensive.

• 한국정밀공학회지
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• 제23권10호
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• pp.60-67
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• 2006

This paper presents the temperature control in aluminum plate with Peltier module. From the experimental work, Peltier module is used to control the temperature of small aluminum plate for both heating and cooling with the control of current and fan ON/OFF. And current control of Peltier module was accomplished by PWM method. As a result of experiments, it is proper that operate cooling fan only while cooling duration and there exist a proper cooling current to drop temperature rapidly. It takes about 125sec to control temperature of aluminium plate between $30^{\circ}C$ and $70^{\circ}C$ and about 70sec between $40^{\circ}C$ and $60^{\circ}C$, in ambient temperature $28^{\circ}C{\sim}29^{\circ}C$ while cooling fan is operated only cooling duration. With the cooling current, temperature control of aluminum plate was accomplished more rapidly in comparison without cooling current. Future aim is to realize more rapid temperature control and develop SMHA(special metal hydride actuator) by using Peltier module as a heating and cooling source.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.897-900
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• 2005

This paper presents temperature control of aluminum plate using Peltier module. As one of the thermoelectric effect, Peltier effect is heat pumping phenomena by electric energy. So if current is charged to Peltier module, it absorbs heat from low temperature side and emits heat to high temperature side. In this experiment, Peltier module is used to control the temperature of small aluminum plate with heating and cooling ability of Peltier module with current control and fan On/OFF control. And current control of Peltier module was accomplished by PWM method. As a results of experiments, it takes about 125sec to control temperature of aluminium plate between $30^{\circ}C\;and\;70^{\circ}C$ and about 70sec between $40^{\circ}C\;and\;60^{\circ}C$, in ambient temperature $29^{\circ}C$ while operating cooling fan only while cooling duration. Future aim is to realize more rapid temperature control and develop SMHA(special metal hydride actuator) by using Peltier module as a heating and cooling source.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1993년도 추계학술대회 논문집
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• pp.231-236
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• 1993

To disign and build a ultra-precision laboratory which has been required for high technology in many areas, the environmental parameters such as temperature, humidity,vibration and nosic are controlled precisely. To absorb the outside vibration, particular concrete blocks were designed and set under the laboratory. The inside room temperature were controlled in local area within .+-. 0.3 .deg. c. It was efficient to induce laminar flow in air conditioning system for the control of room temperature, humidity etc. The control conditions should be determined according to their specific purposes. Also, the control method will be different for their respective environmental conditions.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 추계학술대회 논문요약집
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• pp.277-277
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• 2003

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.247-248
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• 2012