Effects of the RTOS for the Collimated Ti/TiN on the Barrier Property and Electrical Contact Resistance (RTOS 적용한 Collimated Ti/TiN의 확산 방지 특성과 접합저항 변화)
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- Proceedings of the Materials Research Society of Korea Conference
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- 1996.05a
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- pp.65-66
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- 1996