• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.199-199
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• 2010

최근 평판 디스플레이 산업의 발전에 따라 능동행렬 액정 표시 소자 (AMOLED : Active Matrix Organic Liquid Crystral Display) 가 차세대 디스플레이 분야에서 각광을 받고있다. 기존의 TFT-LCD에 사용되는 a-Si:H는 균일도가 좋지만 전기적인 스트레스에 의해 쉽게 열화되고 낮은 이동도는 갖는 단점이 있으며, ELA (Eximer Laser Annealing) 결정화 poly-Si은 전기적인 특성은 좋지만 uniformity가 떨어지는 단점을 가지고 있어서 AMOLED 및 대면적 디스플레이에 적용하기 어렵다. 따라서 a-Si:H TFT보다 좋은 전기적인 특성을 보이며 ELA 결정화 poly-Si TFT보다 좋은 uniformity를 갖는 SPC (Solid Phase Crystallization) poly-Si TFT가 주목을 받고있다. 본 연구에서는 차세대 디스플레이 적용을 위해서 glass 기판위에 증착된 a-Si을 SPC 로 결정화 시킨 후 TFT를 제작하고 평가하였다. 또한 TFT 형성시에 저온공정을 실현하기 위해서 소스/드레인 영역에 실리사이드를 형성시켰다. 소자 제작시의 최고온도는 $500^{\circ}C$ 이하에서 공정을 진행하는 저온 공정을 실현하였다. Glass 기판위에 a-Si이 80 nm 증착된 기판을 퍼니스에서 24시간 동안 N2 분위기로 약 $600^{\circ}C$ 에서 결정화를 진행하였다. 노광공정을 통하여 Active 영역을 형성시키고 E-beam evaporator를 이용하여 약 70 nm 의 Pt를 증착시킨 후, 소스와 드레인 영역의 실리사이드 형성은 N2 분위기에서 $450^{\circ}C$, $500^{\circ}C$, $550^{\circ}C$에서 열처리를 통하여 형성하였다. 게이트 절연막은 스퍼터링을 이용하여 SiO2를 약 15 nm 의 두께로 증착하였다. 게이트 전극의 형성을 위하여 E-beam evaporator 을 이용하여 약 150 nm 두께의 알루미늄을 증착하고 노광공정을 통하여 게이트 영역을 형성 후 에 $450^{\circ}C$, H2/N2 분위기에서 약 30분 동안 forming gas annealing (FGA)을 실시하였다. 제작된 소자는 실리사이드 형성 온도에 따라서 각각 다른 특성을 보였으며 $450^{\circ}C$에서 실리사이드를 형성시킨 소자는 on currnet와 SS (Subthreshold Swing)이 가장 낮은것을 확인하였다. $500^{\circ}C$와 $550^{\circ}C$에서 실리사이드를 형성시킨 소자는 거의 동일한 on current와 SS값을 나타냈다. 이로써 glass 기판위의 SB-TFT 제작 시 실리사이드 형성의 최적온도는 $500^{\circ}C$로 생각되어 진다. 위의 결과를 토대로 본 연구에서는 SPC 결정화 방법을 이용하여 SB-TFT를 성공적으로 제작 및 평가하였고, 차세대 디스플레이에 적용할 경우 우수한 특성이 기대된다.

• 한국정보디스플레이학회:학술대회논문집
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• 2008.10a
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• pp.851-854
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• 2008

In order to reduce the manufacturing cost of TFT LCDs and cut down an amount facilities invested, there are many LCD panel makers contributes to convert the current Five-mask manufacturing process into the noble Four-mask fabrication process. We optimized the slit mask to improve the poor process reliability.

• 한국정보디스플레이학회:학술대회논문집
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• 2006.08a
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• pp.1613-1617
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• 2006

The total light efficiencies of the novel 1.9" transflective tRGB-t/rW and tRGB-rW TFT LCDs are calculated and they are implemented by the traditional 7-mask ${\alpha}$-Si processing. Then, the two vehicles are turned on with the appropriate Sub-Pixel Rendering White (SPRW) algorithms, so they can exhibit the extra luminance without the original visual resolution loss. Their outstanding optical properties are approved by measuring the contrast ratio (C.R.) and the NTSC ratio. Because they utilize the light resource very effectively and efficiently, they are very suitable for the dark indoor and the bright outdoor environments.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07b
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• pp.898-901
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• 2005

We propose a novel pixel structure using bootstrapped voltage programming for amorphoussilicon TFT backplane of AM-OLED (Active Matrix-Organic Light Emitting Diode) displays. The proposed structure is composed of two TFTs and one capacitor. It operates at low drive voltage ($0{\sim}5V$) which can reduce power consumption comparing with the conventional pixel circuit structure using same OLED material. Also, it can easily control dark level and use commercial mobile LCD ICs. In this paper, we describe the operating principle and the characteristics of the proposed pixel structure and verify the performance by SPICE simulation comparing with the conventional pixel structure.

• 한국정보디스플레이학회:학술대회논문집
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• 2003.07a
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• pp.686-689
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• 2003

This paper describes two kind of new concept for low power consumption for small area TFT-LCDs. First, the proposed analog buffer could reduce the static current by adopting new scheme. Second, new data driver structure reduced DC power consumption by reducing the number of operational amplifier (op-amp). As simulation results of Hspice, the quiescent current of proposed analog buffer is less than $0.8{\mu}A$ and the DC power consumption is reduced about $40{\sim}50%$ compared with conventional ones.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.6
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• pp.440-444
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• 2016

Owing to the introduction of various IT devices with emphasis on portability and design, the TFT (thin film transistor liquid crystal display) panel applied to IT devices has the same shape as the product, and the portability requirement of IT devices has resulted in a need for panels with higher rigidity. In this study, the effect of grinding conditions such as the feed rate and edge speed of edge grinding on the surface roughness and chipping of the machined surface is investigated using a metal bond wheel. During edge grinding of alkari-free glass, weak mechanical property of glass results in big chipping owing to generation of tensile stress at the end of grining operation. The results of this study show that the grinding characteristics of alkali-free glass are obtained and meet industry requirements.

• 한국정보디스플레이학회:학술대회논문집
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• 2000.01a
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• pp.17-18
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• 2000

A low-power source driver for TFT-LCDs has been proposed using the triple charge sharing method that enhances the AC power saving efficiency of the prior charge sharing method. The AC power saving efficiency of the proposed source driver reaches 66.6%. In addition, a novel OP-AMP with low-quiescent current has been developed. The measured quiescent current of the OP-AMP is $5{\mu}A{\sim}7{\mu}A$ at VDD=5V and VSS=0V with load resistance of $2k{\Omega}$ and load capacitance of 300pF.

• 한국정보디스플레이학회:학술대회논문집
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• 2000.01a
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• pp.71-72
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• 2000

The design of large area thin film transistor liquid crystal displays (TFT-LCDs) requires consideration of cross-talks between the data lines and pixel electrodes. These limits are imposed by the mutual coupling capacitances present in a pixel. The mutual coupling capacitance causes a pixel voltage error. In this study, semi-empirical model, which is adopted from VLSI interconnection capacitance calculations, is used to calculate mutual coupling capacitances. With calculated mutual coupling capacitances and arbitrary given image pattern, the root mean square (RMS) voltage of pixel is calculated to see vertical cross-talk from the first to the last column. The information obtained this study can be utilized to design the larger area and finer image quality panel.

• Journal of the Korean Institute of Intelligent Systems
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• v.19 no.6
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• pp.743-748
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• 2009

In this paper, we propose an effective method to extract background components in automated vision inspection system for polarized film used in TFT LCD display panels. The test image signals are typically composed of three components such as ununiform background, random noises and target defect signals. It is important to analyze the background signal for accurate extraction of defect components. Two dimensional continuous wavelets with first derivative gaussian is used. This methods can be applied for reliable extraction of defect signal by elimination of the background signal from the original image. The proposed method outperforms over conventional FFT methods.

• Journal of the Microelectronics and Packaging Society
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• v.21 no.2
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• pp.85-89
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• 2014

We propose the new fabrication method of a 70 nm half-pitch wire grid polarizer with high performance using magnetic soft mold. The device is a form of aluminium gratings on a PET(Polyethylene phthalate) substrate whose size of $3cm{\times}3cm$ is compatible with a TFT_LCD(Tin Flat Transistor Liquid Crystal Display) panel. A magnetic soft mold with a pitch of 70 nm is fabricated using two-step replication method. As a result, we get a NWGP pattern which has 70.39 nm line width, 64.76 nm depth, 140.78 nm pitch, on substrate. The maximum and minimum transmittances of the NWGP at 800 nm are 75% and 10%, respectively. This work demonstrates a unique cost-effective solution for nanopatterning requirements in consumer electronics components.