• Title/Summary/Keyword: TEM Journal

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TDEAT single source를 사용한 TiN막의 특성평가

  • 김재호;이재갑;박상준;신현국;황찬용
    • Journal of the Korean Vacuum Society
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    • v.4 no.S1
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    • pp.28-33
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    • 1995
  • TiN 박막은 저온(<$500^{\circ}C$), 저압(1Torr)에서 Tetrakis(diethylamido)titanium[TDEAT, Ti(NEt2)4]single precursor를 사용하여 증착하였다. 증차고딘 박막은 SEM(Scanning Electron Microscopy)으로 surface morphology와 step coverage를 측정하였고, TEM(Transmission Electron Microscopy)분석결과 microcrystalline의 TiN을 확인하였다. XPS(X-ray Photoelectron Spectroscopy)분석결과에 따르면 $200-500^{\circ}C$구간에서는 $\beta$-hydogen elimination에 의한 반응이 일어나고 $600-700^{\circ}C$구간에서는 thermal decomposition에 의한 반응이 일어나고 있음을 알 수 있다. Carbon과 oxygen의 농도는 AES(Auger Electron Spectroscopy)를 사용하여 측정하였으며 온도가 감소할수록 carbon의 농도가 감소하는 경향을 보여주고 있다.

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RF 스퍼터 처리된 폴리이미드와 Cr 박막간 계면 접착력과 계면 반응성

  • 김동구
    • Journal of the Microelectronics and Packaging Society
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    • v.1 no.1
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    • pp.33-40
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    • 1994
  • 금속박막 증착 전 Ar 이온을 이용한 폴리이미드 표면의 RF 스퍼터링 처리가 Cr/폴 리이미드 계면의 접착력과 반응성에 미치는 영향에 대하여 90。 peel test, TEM, FTIR 및 XPS를 사용하여 연구하였다. Cr/폴리이미드 계면의 접착력은 촐리이미드 표면은 RF 스퍼 터링 처리에 의해 1g/mm에서 100g/mm로 현저히 증가하였다. 표면 비저항 측정과 FTIR 및 XPS 분석결과 RF 스퍼터링 처리에 의한 Cr/폴리이미드 계면의 접착력 증가는 RF 스퍼 터링에 의한 폴리이미드 표면의 chemical modification 에 의해 증착되는 Cr과 계면 반응성 이 향상되는데 기인하는 것임을 밝혔다.

A Study on the Thermal, Structural and Dielectric Properties of Photo Machinable Glass-Ceramics

  • Lee, Myung-won;Kang, Won-ho
    • Journal of Electrical Engineering and information Science
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    • v.3 no.1
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    • pp.68-72
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    • 1998
  • The photomachinable glass-ceramics of Ag and CeO2 doped Li203-SiO2 (LAS)glass system was investigated as a function of UV irradiation time. After the expose and the non-exposed samples were heated, they went under crystalline phase with DTA, SEM, TEM and XRD of normal/high temperature. In this work, crystalline phases, microstructure and dielectric properties were studied under the various time of UV irradiation and heat treatment.

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Properties of Potashborosilicate Glass-ceramic Substrate by adding Al2O3 (Al2O3 첨가에 따른 potashborosilicate glass ceramic 기판의 특성변화에 관한연구)

  • 김용철
    • Journal of the Microelectronics and Packaging Society
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    • v.5 no.2
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    • pp.53-58
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    • 1998
  • Sintering and dielectric characteristics of substrates were estimated by mixing rate of alumina and potashborosilicate glass(PBSG) powders. PBSG powders were used 7761(corning code)and alumina powders were used in extra pure rate(99.9%) and had 0.1 ${\mu}$m mean size. After ball milling with organic additives green sheets which were casted by doctor blade machine were sintered at 800$^{\circ}C$ for 1∼3hrs. Microstructure, linear shrinkage and dielectric constant of substrates were surveyed in order to fabricate low-dielectric and low tem-perature sintering substrate.

Analysis of the shielded suspended substrate coplanar waveguide (차폐된 서스펜디드 섭스테레이트 코플래너 도파관 해석)

  • 안광은;이상설
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.32A no.4
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    • pp.40-46
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    • 1995
  • The characteristics of the shielded suspended substrate coplanar waveguide(SSCPW) are analyzed by applying the point matchning method to the quasi-TEM mode approximation. The characteristic impedances and the effective dielectric constants are also calculated by changing the height of air and dielectric layer, and the strip width of SSCPW. Approaching the side strip width of SSCPW to zero, values of characteristic impedances and effective dielectric constants are agreed well with the results obtained by the variational method.

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Studies on the Digestion of Beef by Ficin Treatment V. A Transmission Electron Microscopic Observation (Ficin 처리시 우육의 단백질 분해에 관한 연구 V. 투과형 전자현미경에 의한 관찰)

  • 김정숙
    • The Korean Journal of Food And Nutrition
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    • v.2 no.2
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    • pp.21-26
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    • 1989
  • The morphological changes of fresh beef treated with ficin(0.1% : 2 hrs, 6 hrs)were examined with transmission electron microscope(TEM), the results obtained were as follows ; Connective tissue protein in fresh beef treated with ficin became gradually fragmentation and was occurred solubilization with time The length of sarcomere in myofibrillar protein was elongated, M-line became dim, and the 1-band of Z-line was broken and beck me fragmentation with time.

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Analysis of the Shielded Suspended Substrate Strip Transmission Line (차폐된 서스펜디드 섭스트레이트 스트립 전송선 해석)

  • 황정섭;백경훈;이상설
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.31A no.2
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    • pp.53-59
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    • 1994
  • The characteristics of the shielded suspended substrate strip transmission line(SSSL) are analyzed by the point matching method and the variational method in Quasi-TEM mode. The accuracy of this solution is confirmed by analyzing and comparing this solution with the empirical solution obtained from the same dimension. The characteristic impedance and the effective dielectric constant are also studied by increasing the air-layer height of SSSL.

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Anodic Film Formation on Aluminum(II) (양극산화피막 형성에 관한 연구(II))

  • 한성호
    • Journal of Surface Science and Engineering
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    • v.21 no.4
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    • pp.183-192
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    • 1988
  • 양극산화피막의 조성은 현대 장비의 정밀도가 nano 영역까지의 성분 분석이 이루어 짐의로서, 최근에 와서 금속한 진전을 나타내고 있다. 특히 TEM. EDC System을 이용한 Ultramicrotomed 시편의 정밀분석 기술은 이제 한계를 나타내고 있는 것 같다. 본고에서는 반응 Mechanism을 연구하는데 가장 필수적인 분야인 양극산화피막의 조성에 관해 1950 연대 이후 어떻게 연구되고 설명되었는가를 조명하므로 해서, 그 응용의 기반을 확고히 하고자 한다.

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Microstructure and High Temperature Strength of Rapidly Solidified Al-8wt%Fe Alloy (급속응고된 Al-8wt%Fe 합금의 미세조직 및 고온강도)

  • 최병준
    • Journal of Powder Materials
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    • v.5 no.3
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    • pp.192-198
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    • 1998
  • Microstructure and mechanical properties were examined on rapidly solidified Al-8wt%Fe alloy. High temperature strength test was also undertaken, and it is shown that the refinement in microstructure resulting from extremely rapid cooling rates gives rise to improved high temperature strength, but the elongation to fracture of this material decreases with increasing temperature, particularly in the temperature range up to 30$0^{\circ}C$. Specimens heat-treated for 100 hrs were analyzed with TEM micrographs to understand the thermal stability of this material.

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Fabrication and consolidation of amorphous Cu55Ti45 powders by mechanical alloying (기계적 합금화에 의한 비정질 Cu55Ti45 분말의 제조 및 성형)

  • 김도용
    • Journal of Powder Materials
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    • v.7 no.2
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    • pp.85-92
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    • 2000
  • The Cu55Ti45 system was effectively mechanically-alloyed using a pulverizer. Noncrystallinities of the powders were characterized by TEM, X-ray and DSC. The amorphous powders were consolidated without losing their noncrystallinities. The consolidating conditions keeping a non-crystalline were obtained by building a TTT diagram of the amorphous powders. The microhardness of the crystallite and bulk amorphous alloys are also compared.

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