• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.136.2-136.2
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• 2015

반도체 제조는 chip의 성능 향상 및 단가 하락을 위해 지속적으로 pattern size가 nano size로 감소해 왔고, capacitor 용량은 증가해 왔다. 이러한 현상은 contact hole의 aspect ratio를 지속적으로 증가시킨바, 그에 따라 최적의 HARC (high aspect ratio contact)을 확보하는 적합한 dry etch process가 필수적이다. 그러나 HARC dry etch process는 많은 critical plasma properties 에 의존하는 매우 복잡한 공정이다. 따라서, critical plasma properties를 적절히 조절하여 higher aspect ratio, higher etch selectivity, tighter critical dimension control, lower P2ID과 같은 plasma characteristics을 확보하는 것이 요구된다. 현재 critical plasma properties를 제어하기 위해 다양한 plasma etching 방법이 연구 되어왔다. 이 중 plasma를 낮은 kHz의 frequency에서 on/off 하는 pulsed plasma etching technique은 nanoscale semiconductor material의 etch 특성을 효과적으로 향상 시킬 수 있다. 따라서 본 실험에서는 dual-frequency capacitive coupled plasma (DF-CCP)을 사용하여 plasma operation 동안 duty ratio와 pulse frequency와 같은 pulse parameters를 적용하여 plasma의 특성을 각각 제어함으로써 etch selectivity와 uniformity를 향상 시키고자 하였다. Selective SiO2 contact etching을 위해 top electrode에는 60 MHz pulsed RF source power를, bottom electrode에는 2MHz pulse plasma를 인가하여 synchronously pulsed dual-frequency capacitive coupled plasma (DF-CCP)에서의 plasma 특성과 dual pulsed plasma의 sync. pulsing duty ratio의 영향에 따른 etching 특성 등을 연구 진행하였다. 또한 emissive probe를 통해 전자온도, OES를 통한 radical 분석으로 critical Plasma properties를 분석하였고 SEM을 통한 etch 특성분석과 XPS를 통한 표면분석도 함께 진행하였다. 그 결과 60%의 source duty percentage와 50%의 bias duty percentage에서 가장 향상된 etch 특성을 얻을 수 있었다.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.36 no.5B
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• pp.429-436
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• 2011

The G-PON is an efficient solution to implement the FTTH and have GEM frame to accomodate various protocols like Ethernet frames, IP packets, and TDM signals. Above all, the Ethernet is one of the most widely used 2nd layer protocol in the campus, the subscriber access, and the carrier service. So G-PON system has to provide an Ethernet interface with top priority. In this paper, we implement a gigabit Ethernet adapter based on Ethernet over GEM in the ITU-T G.984.3 to accommodate Ethernet protocol in the G-PON TC chip. The adapter maps each Ethernet frame to a single or multiple GEM frames and has several functions including generation of the GEM header, encapsulation of frames and the SAR. In particular, the adapter have converter (LUT) MAC address to port-ID which is a key to identify logical connections though it is not defined in specification but important. We implement the adapter with a FPGA and verify the functions of segmentation and reassembling, MAC address learning, and throughput with the logic analyzer and the Ethernet analyzer.

• Journal of the Korea Computer Industry Society
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• v.2 no.8
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• pp.1055-1062
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• 2001

Study, it is the purpose to develope a cheap and compact pulsed $CO_2$ laser with pulse repetition rate range of 1 KHz. We used a IGBT switched power supply as a power supply, which is cheap and simple comparing to others. PIC one-chip microprocessor was used for precise control of a laser power supply on the control part. And the laser cavity was fabricated as an axial and water cooled type. The laser performance characteristics as various parameters, such as pulse repetition rate, gas pressure, and gas mixture rate have been investigated. The experiment was done under the condition of total pressure of $CO_2$： $N_2$：He ＝ 1：3：10, 1：1.5：5, 1：9：15 from 6 Torr to 15 Torr and pulse repetition rate from 100 Hz to 900 Hz. As a result, the maximum average outpu was about 20.5 W at the total pressure of 15 Torr, the gas mixture $CO_2$：$N_2$：He ＝ 1：9：15 and the pulse repetition rate of 700 Hz.

• Journal of Sensor Science and Technology
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• v.27 no.5
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• pp.311-316
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• 2018

An antenna-coupled bolometer-type terahertz sensor was designed, fabricated, evaluated, and utilized to obtain terahertz transmission images. The sensor consists of a thin film bowtie antenna that resonates accordingly in response to an incident terahertz beam, a heater that converts the applied current in the antenna into heat, and a microbolometer that converts the rise in temperature into a change in resistance. The device is fabricated by a bulk micromachining process on a 4-inch silicon wafer. The fabricated sensor chip has a size of $2{\times}2mm$ and an active area of $0.1{\times}0.1mm^2$. The temperature coefficient of resistance (TCR) of the bolometer film (VOx) is 2.0%, which is acceptable for bolometer applications. The output sensor signal is proportional to the power of the incident terahertz beam. Transmission images were obtained with a 2-axis scanning imaging system that contained the sensor. The small active area of the sensor will enable the development of highly sensitive focal plane array sensors in terahertz imaging cameras in the future.

• Journal of Microbiology and Biotechnology
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• v.16 no.12
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• pp.1968-1976
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• 2006

Recombinant E. coli ACV 1003 (recA:: lacZ) was used to measure low concentrations of DNA-damaging chemicals, which produce $\beta$-galactosidase via an SOS regulon system. Very low $\beta$-galactosidase activities of less than 0.01 unit/ml, $\beta$-galactosidase produced through an SOS response corresponding to the 10 ng/ml (ppb) of DNA damaging chemicals in the environment, can be rapidly determined by using an alternative interferometric biosensor with optically flat thin films of porous silicon rather than by the conventional time-consuming Miller's enzyme assay as well as the ELISA method. fu order to enhance the sensitivity in the interferometry, it needs to obtain more uniform distribution and higher biolinking efficiency, whereas interferometric sensing is rapid, cheap, and advantageous in high throughput by using a multiple-well-type chip. In this study, pore size adjusted to 60 nm for the target enzyme $\beta$-galactosidase to be bound on both walls of a Si pore and a calyx crown derivative was apllied as a more efficient biolinker. Furthermore, anti-$\beta$-galactosidase was previously functionalized with the biolinker for the target $\beta$-galactosidase to be specifically bound. When anti-$\beta$-galactosidase was bound to the calyx-crown derivative-linked surface, the effective optical thickness was found to be three times as high as that obtained without using anti-$\beta$-galactosidase. The resolution obtained was very similar to that afforded by the time-consuming ELISA method; however, the reproducibility was still unsatisfactory, below 1 unit $\beta$-galactosidase/ml, owing to the microscopic non-uniform distribution of the pores in the etched silicon surface.

• Journal of Powder Materials
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• v.20 no.5
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• pp.355-358
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• 2013

Micro trench structures are applied in gratings, security films, wave guides, and micro fluidics. These micro trench structures have commonly been fabricated by micro electro mechanical system (MEMS) process. However, if the micro trench structures are machined using a diamond tool on large area plate, the resulting process is the most effective manufacturing method for products with high quality surfaces and outstanding optical characteristics. A nonferrous metal has been used as a workpiece; recently, and hybrid materials, including polymer materials, have been applied to mold for display fields. Thus, the machining characteristics of polymer materials should be analyzed. In this study, machining characteristics were compared between nonferrous metals and polymer materials using single crystal diamond (SCD) tools; the use of such materials is increasing in machining applications. The experiment was conducted using a square type diamond tool and a shaper machine tool with cutting depths of 2, 4, 6 and 10 ${\mu}m$ and a cutting speed of 200 mm/s. The machined surfaces, chip, and cutting force were compared through the experiment.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.39A no.8
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• pp.467-473
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• 2014

In the direct sequence spread spectrum system, the correct synchronization is very important; hence, several acquisition schemes based on the sequential estimation have been developed. Typically, the rapid acquisition sequential estimation (RASE) scheme, the seed accumulating sequential estimation (SASE) scheme, the recursive soft sequential estimation (RSSE) scheme have been developed for the correct acquisition. However, the objective performance comparison and analysis between former estimation schemes have not been performed so far. In this paper, we compare and analyze the performance of the above sequential estimation schemes by simulating the correct chip probability and the mean acquisition time (MAT).

• The Transactions of the Korea Information Processing Society
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• v.5 no.10
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• pp.2686-2703
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• 1998

The widening pClformnnce gap between processor and memory causes an emergence of the promising architecture, processor-memory (PM) integration In this paper, various design issues for P-M integration are studied, First, an analytical model of the DRAM access time is constructed considering both the bank conflict ratio and the DRAM page hit ratio. Then the points of both the performance improvement and the perfonnance bottle neck are found by the proposed model as designing on-chip DRAM architectures. This paper proposes the new architecture, called the delayed precharge bank architecture, to improve the perfonnance of memory system as increasing the DRAM page hit ratio. This paper also adapts an efficient bank interleaving mechanism to the proposed architecture. This architecture is verified !II he better than the hierarchical multi-bank architecture as well as the conventional bank architecture by executiun driven simulation. Eight SPEC95 benchmarks are used for simulation as changing parameters for the cache architecture, the number of DRAM banks, and the delayed time quantum.

• Proceedings of the KSRS Conference
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• 2004.10a
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• pp.220-223
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• 2004

Automatic image registration is an essential element of remote sensing because remote sensing system generates enormous amount of data, which are multiple observations of the same features at different times and by different sensor. The general process of automatic image registration includes three steps: 1) The extraction of features to be used in the matching process, 2) the feature matching strategy and accurate matching process, 3) the resampling of the data based on the correspondence computed from matched feature. For step 2) and 3), we have developed an algorithms for automated registration of satellite images with RANSAC(Random Sample Consensus) in success. However, for step 1), There still remains human operation to generate GCP Chips, which is time consuming, laborious and expensive process. The main idea of this research is that we are able to automatically generate GCP chips with comer detection algorithms without GPS survey and human interventions if we have systematic corrected satellite image within adaptable positional accuracy. In this research, we use SUSAN(Smallest Univalue Segment Assimilating Nucleus) algorithm in order to detect the comer. SUSAN algorithm is known as the best robust algorithms for comer detection in the field of compute vision. However, there are so many comers in high-resolution images so that we need to reduce the comer points from SUSAN algorithms to overcome redundancy. In experiment, we automatically generate GCP chips from IKONOS images with geo level using SUSAN algorithms. Then we extract reference coordinate from IKONOS images and DEM data and filter the comer points using texture analysis. At last, we apply automatically collected GCP chips by proposed method and the GCP by operator to in-house automatic precision correction algorithms. The compared result will be presented to show the GCP quality.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.39 no.1
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• pp.7-15
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• 2002

This paper is concerned with remote environment monitoring & control for the breeding house as scattering far and wide. The environment data is detected in the breeding house that is collected to one processor. It's adapted to the PSTN(public switch tele-phone network) and multi-processing for exchange the environment data and the control data in between the manager and a breeding house by micro-processor. We have designed the algorithm of the communication sequence through the experimental research. This system is composed of sensor interface, FSK communications, LED display, data latch and MCS-51 single-chip. The S/W is composed with data acquisition by multi-processing, data communication and interrupt. And this paper is Proposed the DB structure algorithm concern to a mount scale using web design. The subject is a performance of effective management for the breeding house.