• Carbon letters
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• 제7권1호
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• pp.34-41
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• 2006

The objective of this paper is to compare the variation of surface properties by hydrochloric acid pre-treatment and of metallic potassium and their salts loading effect for activated carbon after surfaces transformation by acid. From the results of nitrogen adsorption, each isotherm shows a distinct knee band, which is closely related to the characteristic of microporous carbons with capillary condensation in micropores. In order to present the causes of the differences in surface properties and $S_{BET}$ after the samples were treated with hydrochloric acid, pore structure and surface morphology are investigated by adsorption analysis. X-ray diffraction (XRD) patterns indicate that activated carbons show better performance for metallic potassium and potassium salts by pre-treatment with hydrochloric acid. Scanning electron microscopy (SEM) pictures of potassium/activated carbon particles provide information about the homogeneous distribution of metal or metal complex on the surface. For the chemical composition microanalysis for potassium treatment of the activated carbon pre-treated with hydrochloric acid, samples were analyzed by energy disperse X-ray (EDX). Finally, the type and quality of oxygen groups are determined from the method proposed by Boehm. A positive influence of the acidic groups on the carbon surface by acid treatment is also demonstrated by an increase in the contents of potassium salts with increasing of acidic groups calculated from Boehm titration.

• Nano
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• 제13권10호
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• pp.1850120.1-1850120.9
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• 2018

Two-dimensional poly(dimethylsiloxane) (PDMS) films with wavy patterns were studied in order to investigate reversible and irreversible wetting effects. Pre-strained, surface oxidized layers of PDMS were used to form relieved wavy geometries, on which hydrophobic functionalization was carried out in order to produce irreversible wetting effects. Wavy-patterned PDMS films showed time-dependent reversible wetting effects. The degree of surface wettability could be tuned by the choice of wavy groove geometries. And the groove geometries were controlled via $O_2$ plasma treatment and mechanical pre-straining. The pre-strained, buckled PDMS films were applied to the fabrication of hydrophobic polystyrene nano-patterns using colloidal self-assembly, where the colloids were arrayed in two-dimensional way. The wavy polystyrene films were found to be more hydrophobic relative to flat polystyrene films. The grooving methodology used in this study could be applied to enhancing the hydrophobicity of other types of polymeric thin films, eliminating the need for chemical treatment.

• 한국세라믹학회지
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• 제44권6호
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• pp.313-318
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• 2007

ITO (Indium-tin oxide) thin films have been prepared by a sol-gel spinning coating method and fired and annealed in the temperature range of $450-600^{\circ}C$. The XRD patterns of the films indicated the main peak of (222) plane and showed higher crystallinity with increasing an annealing temperature. The surface of the ITO thin films were treated with 0.1 N HCl 20% solution at room temperature. The effects of surface treatment on electrical properties and surface morphologies of the ITO films were investigated with the results of sheet resistance and FE-SEM, AFM images. The samples, subsequently treated with acidic solution for 40 sec showed the sheet resistance of $0.982\;k{\Omega}/square$. The surface treatment using acidic solution diminished the RMS (root mean square) value and the residual carbon content of the ITO films. It seemed that the acid-cleaning of the ITO thin films lead to the decrease of surface roughness and sheet resistance.

• 한국전기전자재료학회논문지
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• 제18권12호
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• pp.1106-1110
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• 2005

We fabricated (110) silicon hard master by using anisotropic wet etching for embossing. The etching chemical for the silicon wafer was a TMAH $25\%$ solution. The anisotropic wet etching produces a smooth sidewall surface and the surface roughness of the fabricated master is about 3 nm. After spin coating an organic-inorganic sol-gel hybrid material on a silicon substrate, we employed hot embossing technique operated at a low pressure and temperature to form patterns on the silicon substrate by using the fabricated master. We successfully fabricated the multi-mode planar optical waveguides showing low propagation loss of 0.4 dB/cm. The surface roughness of embossed patterns was uniform for more than 10 times of the embossing processes with a single hydrophobic surface treatment of the silicon hard master.

• 한국표면공학회지
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• 제53권3호
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• pp.124-129
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• 2020

This study is for the development of high temperature ALD SiO₂ film process, optimized for gap-fill process in manufacturing memory products, using a space-divided PE-ALD system equipped with an independent control dual plasma system and orbital moving unit. Space divided PE-ALD System has high productivity, and various applications can be applied according to Top Lid Design. But space divided ALD system has a limitation to realize concentric deposition map due to process influence due to disk rotation. In order to solve this problem, we developed an orbit rotation moving unit in which disk and wafer. Also we used Independent dual plasma system to enhance thin film properties. Improve productivity and film density for gap-fill process by having deposition and surface treatment in one cycle. Optimize deposition process for gap-fill patterns with different depths by utilizing our independently controlled dual plasma system to insert N₂and/or He plasma during surface treatment, Provide void-free gap-fill process for high aspect ratio gap-fill patterns (up to 50:1) with convex curvature by adjusting deposition and surface treatment recipe in a cycle.

• International Journal of Air-Conditioning and Refrigeration
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• 제13권2호
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• pp.99-106
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• 2005

Falling film heat transfer has been widely used in many applications in which heat and mass transfer occur simultaneously, such as evaporative coolers, cooling towers, absorption chillers, etc. In such cases, it is desirable that the falling film spreads widely on the surface to form a thin liquid film to enlarge contact surface and to reduce the thermal resistance across the film and/or the flow resistance to the vapor stream over the film. In this respect, hydrophilic treatment of the surface has been tried to improve the surface wettability by decreasing the contact angle between the liquid and the surface. However, the hydrophilic treatment was found not very effective to increase the surface wettedness of inclined surfaces, since the liquid flow forms rivulet patterns instead of a thin film as it flows down the inclined surface and accelerates gradually by the gravity. In this work, a novel method is suggested to improve the surface wettedness enormously. In this work, the surface is treated to have a thin hydrophilic porous layer on the surface. With this treatment, the liquid can spread widely on the surface by the capillary force resulting from the porous structure. In addition to this, the liquid can be held within the porous structure to improve surface wettedness regardless of the surface inclination. The experiment on the evaporative cooling of inclined surfaces has been conducted to verify the effectiveness of the surface treatment. It is measured that the latent heat transfer increases almost by $80\%$ at the hydrophilic porous layer coated surface as compared with the untreated surface.

• 분석과학
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• 제19권2호
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• pp.121-130
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• 2006

In this study, silver pre-treated activated carbons are transformed using sulfuric acid. From the results of adsorption, each isotherm shows a distinct knee band, which is characteristic of microporous adsorbents with capillary condensation in micropores. In order to reveal the causes of the differences in adsorption capacity and specific surface area after the samples were washed with various strengths of sulfuric acid, surface morphology and external pore structure were investigated by SEM. X-ray diffraction patterns indicated that Ag-activated carbons show better performance for silver and silver compounds removal by post-treatment with acid. The FT-IR spectra of silver-activated carbon samples show that the acid post-treatment was consequently associated with the removal of silver with an increased surface functional group containing oxygen of the activated carbon. The type and quality of oxygen groups are determined on the method proposed by Boehm. For the chemical composition microanalysis of silver-activated carbons transformed by post-treatment with sulfuric acid, samples were analyzed by EDX.

• 한국결정성장학회지
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• 제16권3호
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• pp.106-111
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• 2006

The objective of this paper is to compare the surface features of two kinds of nano-porous activated carbon fiber (NPACF) treated with potassium and the variation of their properties by phosphoric acid pre-treatment. X-ray diffraction (XRD) patterns indicate that NPACF containing potassium species show better performance for potassium and potassium salts by pre-treatment with phosphoric acid. In order to present the causes of the differences in surface properties and specific surface area after the samples were treated with phosphoric acid, pore structure and surface morphology are investigated by adsorption analysis and SEM. For the chemical composition microanalysis for potassium loading of the NPACF pre-treated with phosphoric acid, samples were analyzed by EDX. Finally, the type and quality of oxygen groups are determined from the method proposed by Boehm.

• 센서학회지
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• 제14권6호
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• pp.423-429
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• 2005

In this paper, we proposed the fabrication process of the stable e-beam evaporation and the patterning of metals layer on the polydimethylsiloxane (PDMS) substrate. The metal layer was deposited under the various deposition rate, and its effect to the electrical and mechanical properties (e.g.: adhesion-strength of metal layer) was investigated. The influence of surface roughness to the adhesion-strength was also examined via the tape test. Here, we varied the roughness by changing the reactive ion etching (RIE) duration. The electrode patterning was performed through the conventional photolithography and chemical etching process after e-beam deposition of $200{\AA}$ Ti and $1000{\AA}$ Au. As a result, the adhesion strength of metal layer on the PDMS surface was greatly improved by the oxygen plasma treatment. The e-beam evaporation on the PDMS surface is known to create the wavy topography. Here, we found that such wavy patterns do not effect to the electrical and mechanical properties. In conclusion, the metal patterns with minimum $20{\mu}m$ line width was produced well via the our fabrication process, and its electrical conductance was almost similar to the that of metal patterns on the silicon or glass substrates.

• 한국재료학회지
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• 제28권4호
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• pp.208-213
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• 2018

Epitaxial ($11{\bar{2}}0$) a-plane GaN films were grown on a ($1{\bar{1}}02$) R-plane sapphire substrate with photoresist (PR) masks using metal organic chemical vapor deposition (MOCVD). The PR mask with striped patterns was prepared using an ex-situ lithography process, whereas carbonization and heat treatment of the PR mask were carried out using an in-situ MOCVD. The heat treatment of the PR mask was continuously conducted in ambient $H_2/NH_3$ mixture gas at $1140^{\circ}C$ after carbonization by the pyrolysis in ambient $H_2$ at $1100^{\circ}C$. As the time of the heat treatment progressed, the striped patterns of the carbonized PR mask shrank. The heat treatment of the carbonized PR mask facilitated epitaxial lateral overgrowth (ELO) of a-plane GaN films without carbon contamination on the R-plane sapphire substrate. Thhe surface morphology of a-plane GaN films was investigated by scanning electron microscopy and atomic force microscopy. The structural characteristics of a-plane GaN films on an R-plane sapphire substrate were evaluated by ${\omega}-2{\theta}$ high-resolution X-ray diffraction. The a-plane GaN films were characterized by X-ray photoelectron spectroscopy (XPS) to determine carbon contamination from carbonized PR masks in the GaN film bulk. After $Ar^+$ ion etching, XPS spectra indicated that carbon contamination exists only in the surface region. Finally, the heat treatment of carbonized PR masks was used to grow high-quality a-plane GaN films without carbon contamination. This approach showed the promising potential of the ELO process by using a PR mask.