• 한국표면공학회지
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• 제54권6호
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• pp.315-323
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• 2021

In general, surface treatments of electroless Ni-P coating are extensively applied in the industry due to their excellent properties for considerable wear resistance, hardness, corrosion resistance. This study aims to determine the effect of ultrasonic conditions on the morphology, alumina content, roughness, hardness, and corrosion resistance of electroless Ni-P-Al₂O₃ composite coatings. The characteristics were analyzed by Energy-dispersive X-ray spectroscopy (EDX), x-ray diffractions (XRD), and atomic force microscopy (AFM), etc. In this study, the effect of ultrasonic condition uniformly distributed alumina within Ni-P solution resulting in a smoother surface, lower surface roughness. Furthermore, the corrosion resistance behavior of the coating was analyzed using tafel polarization curves in a 3.5 wt.% NaCl solution at 25 ℃. Under ultrasonic, Al₂O₃ content in Ni-P composite solution increased from 0.5 to 5.0 g/L, Al₂O₃ content at 3.0 g/L was showed a significantly enhanced corrosion resistance. These results suggested that ultrasonic condition was an effective method to improve the properties of the composite coating.

• 한국기계가공학회지
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• 제11권5호
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• pp.29-34
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• 2012

This study describes the selection of optimum machining conditions for a high-hardness resin by using a large 5-axis machine. The experiments were conducted to examine the main factors that affect the surface roughness, such as the spindle speed, axial and radial depths of the cut, and pattern of the cutter path. To analyze the experiment results, the factor with the biggest impact on machining was determined using the smaller-the-better characteristic of the Taguchi method; the effectiveness of the experiment was then confirmed by verifying the selected optimum machining condition.

• 대한소아치과학회지
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• 제31권1호
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• pp.98-107
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• 2004

적절한 마무리와 연마는 치아 수복물의 심미성과 내구성 향상을 위해 필수적인 과정이다. 본 연구에서는 복합레진의 마무리/연마 과정 시행에 있어서 시기적 차이를 두어 마무리/연마 시기가 복합레진의 표면 거칠기와 경도에 미치는 영향을 비교하고자 하였다. 네 종류의 복합레진(Filtek A110, Silux Plus, Revolution formular2, Palfique Estelite)을 이용하여 시편을 제작하고 마무리/연마 과정을 거치지 않은 대조군과 중합 직후 마무리/연마를 시행한 경우와 1주 후 마무리/연마를 시행한 두 가지 실험군으로 구분하였다. 이 시편들의 표면 거칠기$(R_a\;value,\;{\mu}m)$와 경도(VHN)를 측정하고, 주사전자현미경으로 관찰하여 다음과 같은 결과를 얻었다. 1 네 가지 재료 모두 대조군에서 가장 활택한 표면을 얻었고 마무리/연마 과정을 거친 후 표면 거칠기가 증가하였으나, 마무리/연마시기에 따른 유의한 차이는 보이지 않았다. 2. 표면 거칠기는 중합 직후 마무리/연마를 시행한 경우 Silux Plus와 Revolution formular 2가 차이를 보였고, 1 주 후 시행한 경우 Silux Plus와 Palfique Estelite가 차이를 나타내었다(p<0.05). 3. 경도는 재료에 따라 Palfique Estelite > Filtek A110 > Silux Plus > Revolution formular 2 순으로 감소하였으나, 마무리/연마시기에 따른 차이는 보이지 않았다. 4. 마무리 연마시기가 표면 거칠기와 경도에 미치는 영향은 재료에 따라 차이를 보였다.

• 센서학회지
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• 제16권4호
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• pp.319-323
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• 2007

This paper describes the mechanical characteristics of poly 3C-SiC thin films grown on Si wafers with thermal oxide. In this work, the poly 3C-SiC thin film was deposited by APCVD method using only Ar carrier gas and single precursor HMDS at $1100^{\circ}C$. The elastic modulus and hardness of poly 3C-SiC thin films were measured using nanoindentation. Also, the roughness of surface was investigated by AFM. The resulting values of elastic modulus E, hardness H and the roughness of the poly 3C-SiC film are 305 GPa, 26 GPa and 49.35 nm respectively. The mechanical properties of the grown poly 3C-SiC film are better than bulk Si wafers. Therefore, the poly 3C-SiC thin film is suitable for abrasion, high frequency and MEMS applications.

• 마이크로전자및패키징학회지
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• 제15권2호
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• pp.63-67
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• 2008

전자산업의 소형화와 경량화 추세에 맞추어 최근 집적 칩(IC)이나 패키지를 적층시키는 삼차원 집적화(3D integration) 기술 개발은 차세대 핵심기술로 중요시되고 있다. 본 연구에서는 삼차원 집적화 공정 기술 중 하나인 초박막 실리콘 웨이퍼 연삭(grinding)공정이 웨이퍼 표면에 미치는 영향에 대해서 조사하였다. 실리콘 웨이퍼를 약 $30{\mu}m$과 $50{\mu}m$ 두께까지 연삭한 후, 미세연삭(fine grinding) 단계까지 처리된 시편을 건식 연마(dry polishing) 또는 습식 애칭(wet etching)으로 표면 처리된 시편들과 비교 분석하였다. 박막 웨이퍼 두께는 전계방시형 주사전자현미경과 적외선 분광기로 측정하였고, 표면 특성 분석을 위해선 표면주도(roughness), 표면손상(damage), 경도를 원자현미경, 투과정자현미경 그리고 나노인덴터(nano-indentor)를 이용하여 측정하였다. 표면 처리된 시편의 특성이 표면 처리되지 않은 시편보다 표면주도와 표면손상 등에서 현저히 우수함을 확인 할 수 있었으나, 경도의 경우 표면 처리의 유무에 관계없이 기존의 벌크(bulk)실리콘 웨이퍼와 오차범위 내에서 동일한 것으로 보였다.

• Journal of Computational Design and Engineering
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• 제1권2호
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• pp.128-139
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• 2014

This study investigates the effects of machining parameters as they relate to the quality characteristics of machined features. Two most important quality characteristics are set as the dimensional accuracy and the surface roughness. Before any newly acquired machine tool is put to use for production, it is important to test the machine in a systematic way to find out how different parameter settings affect machining quality. The empirical verification was made by conducting a Design of Experiment (DOE) with 3 levels and 3 factors on a state-of-the-art Cincinnati Hawk Arrow 750 Vertical Machining Center (VMC). Data analysis revealed that the significant factor was the Hardness of the material and the significant interaction effect was the Hardness + Feed for dimensional accuracy, while the significant factor was Speed for surface roughness. Since the equally important thing is the capability of the instruments from which the quality characteristics are being measured, a comparison was made between the VMC touch probe readings and the measurements from a Mi-tutoyo coordinate measuring machine (CMM) on bore diameters. A machine mounted touch probe has gained a wide acceptance in recent years, as it is more suitable for the modern manufacturing environment. The data vindicated that the VMC touch probe has the capability that is suitable for the production environment. The test results can be incorporated in the process plan to help maintain the machining quality in the subsequent runs.

• 대한기계학회논문집
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• 제10권6호
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• pp.898-905
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• 1986

본 논문에서는 강의 피로균열진전거동과 미시조직과의 관계를 밝히기 위한 연 구의 일환으로 제이상 마르텐사이트 중에 모상 페라이트가 존재하는 복합조직강을 준 비하여 이들 강의 제이상 경도변화에 따른 피로균열진전저항을 균열휨과 균열닫힘을 통하여 검토하였다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권12호
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• pp.549-554
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• 2006

In this paper we first applied the chemical mechanical polishing (CMP) process to the planarization of ferroelectric film in order to obtain a good planarity between electrode and ferroelectric film. $Pb_{1.1}(Zr_{0.52}Ti_{0.48})O_3$ (shortly PZT) ferroelectric film was fabricated by the sol-gel method. And then, we compared the structural characteristics before and after CMP process of PZT films. Removal rate, WIWNU% and surface roughness have been found to depend on slurry abrasive types and their hardness, especially, surface roughness and planarity were strongly depends on its pH value. A maximum in the removal rate is observed in the silica slurry, in contrast with the minimum removal rate occurs at ceria slurry. We found that the surface roughness of PZT films can be significantly reduced using the CMP technique.

• Journal of Ceramic Processing Research
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• 제19권6호
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• pp.455-460
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• 2018

Chromium plating is a common surface treatment technique extensively applied in industry due its excellent properties which include substantial hardness, abrasion resistance, corrosion resistance, surface color, and luster. In this study, the effect of PTFE on corrosion behavior of Cr-P plating, low carbon steel substrates are electroplated in Cr(III) baths without and with PTFE. Trivalent chromium carbon plating was electroplated from trivalent chromium sulfate-based baths with different PTFE dispersion contents. The study focused on the microstructure, PTFE content, roughness, and corrosion resistance of the Cr-P-PTFE composite plating. Scanning electron microscopy and atomic force microscopy images showed a smoother plating and a decrease in the surface roughness of the electrodeposited. The results demonstrate that PTFE eliminates the cracks within plating by reducing internal stress. Therefore, the corrosion resistance of Cr-P-PTFE composite platings were better than that of Cr-P alloy platings.

• 한국표면공학회지
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• 제39권3호
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• pp.105-109
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• 2006

The effects of negative carbon ion beam energy on the bonding configuration, hardness and surface roughness of DLC film prepared by a direct metal ion beam deposition system were investigated. As the negative carbon ion beam energy increased from 25 to 150 eV, the $sp^3$ fraction of DLC films was increased from 32 to 67%, while the surface roughness was decreased. The films prepared at 150 eV showed the more flat surface morphology of the film than that of the film prepared under another ion beam energy conditions. Surface roughness of DLC film varied from 0.62 to 0.22 nm with depositing carbon ion beam energy. Surface nano-hardness increased from 12 to 57 Gpa when increasing the negative carbon ion beam energy from 25 to 150 eV, and then decreased when increasing the ion beam energy from 150 to 200 eV.