• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 춘계학술대회 논문집
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• pp.109-110
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• 2009

• 대한기계학회논문집
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• 제17권5호
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• pp.1202-1207
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• 1993

본 논문에서는 삼차원형상 측정의 슬릿광 주사방법(slit beam scanning topography)의 형상측정에 응용에 대해 기술한다. 이는 광학적인 방법으로 레이저 평면광을 물체에 주사하여 얻어지는 변형된 광궤적으로부터 광삼각법(optical triangulation)과 컴퓨터비젼 기술을 응용하여 삼차원형상을 측정한다. 기존의 방법 들과 비교하여 슬릿광 주사방법은 고속의 삼차원측정이 가능하여 검사자동화에 용이 하게 적용될 수 있는 장점을 갖는다. 본 논문에서는 슬릿광 주사방법에 대한 기본원 리를 유도하며, 이를 구현할 수 있는 측정시스템의 설계와 실제 측정예를 통해 본 방법이 갖는 장단점에 관하여 검토한다.

• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2001년도 추계학술발표대회 논문개요집
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• pp.55-59
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• 2001

• 자원환경지질
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• 제27권1호
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• pp.81-91
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• 1994

There has been considerable research dealing with the influence of surface roughness along surfaces of rock discontinuities in relation to the peak shear strength of rock masses. Concepts accepted recently for measuring such strength include estimation of a roughness coefficient such as developed by Barton's studies. The method for estimation the Joint Roughness Coefficient (JRC) value of a measured roughness profile is subjective. The aim of this research is to estimate the JRC value of the roughness of a surface profile in a rock mass system using an objective method. The study of roughness of surfaces has included measurement of fractal geometric characteristics. Once the irregularity of the surface has been described by the fractal dimension, the spatial variation of the surface irregularities can be described using variogram and drift analysis. An empirical relationships between the roughness profiles of selected JRC ranges and their fractal dimension with variogram and drift were derived. The application of analyses of fractal dimension, variogram and drift was novel for the analysis of roughness profiles. Also, an empirical equation was applied to experimental data.

• 한국기계가공학회지
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• 제7권3호
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• pp.41-46
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• 2008

Generally optical components are fabricated by grinding, lapping and polishing processes. Those processes take long time to obtain optical high surface quality. In the case of large optical components, the on-machine measurement is strongly recommended because the workpiece is fragile and difficult to set up for fabricating and measuring. This paper is concerned about a swing-arm mechanism which can be used for on-machine measurement of a surface profile with a sensing probe end-effect, and also for grinding or lapping the surface with a corresponding tool. The measuring accuracy and uncertainty using a swing arm type profilometer have been studied. The experimental results show that this method is useful specially in lapping process with the accuracy of $5{\mu}m$. Those inspection data are provided for correcting the residual figuring error in next processes.

• International Journal of Precision Engineering and Manufacturing
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• 제9권4호
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• pp.79-82
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• 2008

A method is described for ideally reconstructing the profile from a surface profiling measurement containing a reasonable amount of null measurement data. The proposed method can conjecture lost information and rectify irregular data that result due to bad measuring environments, signal transmission noise, or instrument-induced errors, The method adopts the concept of computer graphics and consists of several processing steps. First, a search for valid data in the neighborhood of the null data is performed. The valid data are then grouped and their contours are extracted. By analyzing these contours, a bounding box can be obtained and the general distribution of the entire area encompassing the valid and null data is determined Finally, an ideal surface model is overlaid onto the measurement results based on the bounding box, generating a complete reconstruction of the calculations, A surface-profiling task on a liquid crystal display photo spacer is used to verify the proposed method. The results are compared to those obtained through the use of a scanning electron microscope to demonstrate the accuracy of the proposed method.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.125-125
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• 2000

An Empirical approach to determine a road-surface condition is presented The road-surface condition thus provided includes the detection of not only friction coefficient, but also abrupt surface-profile changes such as pitfalls and bumpers The former plays a key role in establishing the appropriate control strategy, while the latter allows to minimize unnecessary brake intervention induced by the aforementioned jut. In this paper, we use an empirically chosen variable, namely. the time-rate of change of vehicle speed estimated from the point where ABS engaged to the point where measurement taken Experimental results shoe that the proposed method is effective to infer various control variables critical for the control of ABS.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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• pp.1007-1009
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• 1998

In this paper, the effects of the drive-in process parameters on the residual stress profile of the p+ silicon film has been investigated. All the residual stress profile has been estimated by the second-order polynomial. All the coefficients of the polynomial have been determined from the measurement of the deflections of cantilevers and a rotating beam by using a surface profiler meter and by means of focusing a calibrated microscope. As the drive-in temperature or the drive-in time increases, the boron concentration decreases and the magnitude of the average residual stress decreases. If the boron concentration decreases the tensile residual stress decreases except near the surface where the magnitude of compressive residual stress increases.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.205-208
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• 2005

Fabrication of large scaled mirror for the telescope application is the most challenging technology in recent year. Sophisticate technologies and know-how in fabrication and measurement are required to overcome the technological obstacles. KRISS(Korea Research Institute for Standards and Science) is now developing a large scaled mirror fabrication facility and KARI(Korea Aerospace Research Institute) is supporting the development. High precision interferometric test is required during the grinding and polishing of mirror to identify the surface profile precisely. The required fabrication accuracy of the mirror surface profile is $\lambda$/50 ms($\sim$10 nm for visible wave length). Thus the measurement accuracy should be far less than 10 m. To get this requirement, it is necessary to provide vibration free environment for the interferometer system and mirror under test. Thus the vibration responses on the mirror supporting table due to external vibration should be minimized by using a special isolation system. And the responses on the top of the tower, which hold the interferometer during test, should be minimized simultaneously. In this paper, we propose the concept design of vibration suppression system for the KRISS mirror fabrication facility.

• 한국정밀공학회지
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• 제21권1호
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• pp.40-45
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• 2004

Recently, aspheric optical lenses and mirrors, which are harder to manufacture and measure than the conventional spherical ones, are widely used, particularly in electronic fabrication process. Generally, interferometric optical method is used for the measurement of spherical optical surface. However, the interferometric method for aspheric surface measurement is difficult because it needs a precise null corrector and strict environmental conditions such as constant temperature, humidity and vibrations. We have been studied on the manufacturing of aspheric optics to improve the surface profile accuracy and productivity using a corrective polishing process. For the corrective polishing, a practical method of On-Machine Measurement (OMM) is required. For this purpose, an optical OMM system has been studied using the Shach-Hartmann test, which is very robust to the practical polishing environment. The wavefront has been reconstructed from the measured data using the primary aberration polynomial function by the least squares fitting. The measured result of the OMM system shows that the maximum deviation is less than 200 nm for the one of commercial Fizeau interferometer Wyko 6000.