Vibration Suppression Design on the Instrument Supporting Structure for the Optical Performance Measurement

대구경 반사경 광학성능 측정을 위한 간섭계 지지구조물의 진동저감 설계

Fabrication of large scaled mirror for the telescope application is the most challenging technology in recent year. Sophisticate technologies and know-how in fabrication and measurement are required to overcome the technological obstacles. KRISS(Korea Research Institute for Standards and Science) is now developing a large scaled mirror fabrication facility and KARI(Korea Aerospace Research Institute) is supporting the development. High precision interferometric test is required during the grinding and polishing of mirror to identify the surface profile precisely. The required fabrication accuracy of the mirror surface profile is $\lambda$/50 ms($\sim$10 nm for visible wave length). Thus the measurement accuracy should be far less than 10 m. To get this requirement, it is necessary to provide vibration free environment for the interferometer system and mirror under test. Thus the vibration responses on the mirror supporting table due to external vibration should be minimized by using a special isolation system. And the responses on the top of the tower, which hold the interferometer during test, should be minimized simultaneously. In this paper, we propose the concept design of vibration suppression system for the KRISS mirror fabrication facility.