• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.10
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• pp.839-845
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• 2007

In this paper, a polishing pad has been analyzed in detail, to understand surface phenomena of polishing process. The polishing pad plays a key role in polishing process and is one of the important layer in polishing process, because it is a reaction layer of polishing[1]. Pad surface physical property is also ruled by pad profile. The profile and roughness of pad is controlled by different types of conditioning tool. Conditioning tool add mechanical force to pad, and make some roughness and profile. Formed pad surface will affect on polishing performance such as RR (Removal Rate) and uniformity in CMP Pad surface condition is changed by conditioning tool and dummy run and is stable at final. And this research, we want to reduce break-in and dummy polishing process by analysis of pad surface and artificial machining to make stable pad surface. The surface treatment or machining enables to control the surface of polishing pad. Therefore, this research intends to verify the effect of the buffing process on pad surface through analysis of the removal rate, friction force and temperature. In this research, urethane polishing pad which is named IC pad(Nitta-Haas Inc.) and has micro pore structure, is studied because, this type of pad is most conventional type.

• Advances in concrete construction
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• v.3 no.1
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• pp.39-54
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• 2015

Relative humidity and strains within a massive concrete cylinder (${\varphi}450mm{\times}900mm$) in the drying and the re-saturating process were measured for elucidating the process of ASR surface cracking in concrete. The expansion behavior of mortars in dry atmospheres with various R.H. values and the resaturating process was revealed. Non- or less-expansive layers were formed in near-surface regions in the concrete cylinder in the drying process, but ASR expansions actively progressed in inner portions. After resaturating, R.H. values of near-surface regions rapidly increased with time, but expansions in the regions were found to be very small. However, in the middle portions, of which R.H. values were kept 80% ~ 90% R.H. in the drying process, expansion actively progressed, resulting in further development of surface cracks in the re-saturating process.

• 제어로봇시스템학회:학술대회논문집
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• 1993.10b
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• pp.541-544
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• 1993

This paper attempts to propose new procedures to evaluate roughness of ground metallic surface in the range of 1-10.mu.m from data gained by an optical, in-process measurement of the surfaces. Studies are made to process the data of reflected lights pointed at the surface to be measured. Results obtained are compared with those of measurement by stylus roughness meter. Correlations between the two types of roughness measurement are well. The proposed method can be used as a sensor for a polishing robot.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.918-921
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• 2002

Some investigators who have tried to achieve the highly smooth surface finish using electrochemical processes have reported that high current density produced lustrous surfaces while the opposite conditions produced a passive layer and had a tendency to produce a black surface. However, processing at a low current density may produce a non-lustrous surface but the improvement of dimensional accuracy of the surface is significant. The surface with pulse process was a bit more lustrous than with continuous current but the black passive layer still could be found at grooved surface. There are two ways to achieve highly smooth surface finish. One is brushing it with a brush the other is electrochemical machining (ECM) with high current. The former method is the most common polishing practice, but not only may the surface obtained differ from operator to operator, but precision smooth surface on micro grooves are difficult to obtain. The latter one recently has been used to produce a highly smooth surface after EDM process. However, the material removal rate in ECM with high current is relatively high. Hence the original shape of the micro grooves, which was formed by electrochemical micro-machining (EMM) process, may be destroyed. In this study, an electrochemical polishing process using pulse current is adopted as a possible alternative process when micro grooves formed by EMM process should be polished. Mirror-like micro grooves with lustrous and smooth surface can be produced electrochemically with pulse current because the voltage and current used can be lower than the case of continuous current. This study will discuss the accurate control of physical and electrical conditions so as to achieve mirror-like micro grooves with lustrous and smooth surface without destroying the original shape of micro grooves.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.749-752
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• 2005

In the industry, three-dimensional coloring has been needed for realistic prototype from rapid prototyping. Z-corporation developed a 3D printer which provides three-dimensional colored prototype. However, the existing process cannot be adopted to models from other rapid prototyping process. In addition, time and cost for manufacturing colored prototype still remain to be improved. In this study, a new coloring process using ink-jet head is proposed for color printing on three-dimensional prototype surface. Process parameters such as the angle and the distance between ink-jet nozzle and the three-dimensional surface should be investigated from experiments. The correction matrix according to sloped angle to minimize the distortion of 2D image was proposed by analysis of printing error. Therefore, approximated method for angle and discrete length according to the radius of curvature for printing on the curved surface was proposed. By printing image on the doubly curved surface, the method was verified. As a practical example, helmet was chosen for printing images on the curved surface. The character images were applied with approximated method for angle and discrete length and was printed on the helmet surface.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.7
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• pp.14-21
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• 2019

Large-diameter hydraulic devices such as the hydraulic reservoir in aircraft that serves to balance the hydraulic pressure in the various hydraulic devices in the cabin and to store hydraulic oil are operated by the internal piston systems. However, since this operates in an environment with high temperature and humidity, it may cause the inner surface to flake during its operation. Therefore, an anodizing surface treatment is applied to improve the corrosion resistance, abrasion resistance, and smooth operation. However, anodizing increases the surface roughness. Accordingly, the polishing process that improves the surface roughness after anodizing is important. However, the existing polishing process is performed manually, which results in an inefficient process. Therefore, in this study, we selected the optimum polishing conditions for effective polishing using the experimental design to improve the polishing process for the $Al_2O_3$ film that forms after anodization. Through experiments, we confirmed that the surface uniformity after polishing was superior as the feed rate was slower when the same polishing time had been applied.

• Journal of the Semiconductor & Display Technology
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• v.18 no.4
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• pp.1-5
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• 2019

This study has been focused on properties of surface technology for large diameter upper electrode using in high density plasma process as like semi-conductor manufacturing process. The experimental studies have been carried out to get mirror surface for upper electrode. For a formation of high surface quality upper electrode, single crystal silicon upper electrode has been mechanical and chemical machining worked. Mechanical machining work of the upper electrode is carried out with varying mesh type using diamond wheel. In case of chemical machining work, upper electrode surface roughness was observed to be strongly dependent upon the etchant. The different surface roughness characteristics were observed according to etchant. The machining result of the surface roughness and surface morphology have been analyzed by use of surface roughness tester, laser microscope and ICP-MS.

• Journal of the Korean Society for Precision Engineering
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• v.5 no.3
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• pp.91-100
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• 1988

Surface rolling which is one of the plastic deformation have advantages to imporve surface roughness, hardness and fatigue strength with relatively simple processes. In this study, the effect of previous cutting process before rolling on the surface roughness in surface rolling for mild steel was investigated. The results obtained are as follows. (1) Waveness of the previous process has the effect on the precision of the works and coarse waveness resulted in less improvement of the surface roughness. (2) The reduction of diameter and increase of hardness can be obtained at the first rolling process.

• Transactions of Materials Processing
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• v.27 no.2
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• pp.100-106
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• 2018

In the continuous casting process, the incidence of transverse surface cracks on the piece may occur by multiple and diverse variables. It is noted that mathematical models may predict only the occurance of the transverse surface cracks, but can require a lot of time (more than three days) to produce a result with this process. This study applied neural networks to predict whether the cracks on the piece surface occurs or does not occur. The computation time was shortened to three minutes, making it applicable to an on-line program, which predicts the non-cracks or cracks of the piece surface in the actual continuous casting process. In addition, the operating conditions to prevent the occurrence of the transverse surface cracks, using decision boundaries were also suggested.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.10 no.6
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• pp.16-21
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• 2011

In machining operation, the quality of surface finish is an important factor for many turned products. In this paper, surface quality in turning machining considering angle variation has been investigated. To reach this goal, surface quality turning experiments are carried out according to cutting conditions with angle variation. The variable cutting conditions are cutting speed, feed rate and taper angle of workpiece. The surface roughness was measured and the effects of cutting conditions were analyzed by the method of analysis of variance (ANOVA). From the experimental results and ANOVA, it is found that a better surface roughness can be obtained as decreasing feed rate, increasing cutting speed. Taper angle variation has been more influenced by feed rate and cutting speed.