• 한국재료학회:학술대회논문집
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• 한국재료학회 2009년도 춘계학술발표대회
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• pp.22.2-22.2
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• 2009

Currently, metal silicides become increasingly more essential part as a contact material in complimentary metal-oxide-semiconductor (CMOS). Among various silicides, NiSi has several advantages such as low resistivity against narrow line width and low Si consumption. Generally, metal silicides are formed through physical vapor deposition (PVD) of metal film, followed by annealing. Nanoscale devices require formation of contact in the inside of deep contact holes, especially for memory device. However, PVD may suffer from poor conformality in deep contact holes. Therefore, Atomic layer deposition (ALD) can be a promising method since it can produce thin films with excellent conformality and atomic scale thickness controllability through the self-saturated surface reaction. In this study, Ni thin films were deposited by thermal ALD using bis(dimethylamino-2-methyl-2-butoxo)nickel [Ni(dmamb)2] as a precursor and NH3 gas as a reactant. The Ni ALD produced pure metallic Ni films with low resistivity of 25 $\mu{\Omega}cm$. In addition, it showed the excellent conformality in nanoscale contact holes as well as on Si nanowires. Meanwhile, the Ni ALD was applied to area-selective ALD using octadecyltrichlorosilane (OTS) self-assembled monolayer as a blocking layer. Due to the differences of the nucleation on OTS modified surfaces toward ALD reaction, ALD Ni films were selectively deposited on un-coated OTS region, producing 3 ${\mu}m$-width Ni line patterns without expensive patterning process.

• 한국재료학회지
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• 제26권3호
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• pp.109-116
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• 2016

To achieve the fabrication of high-quality Ag-coated Cu particles through a wet chemical process, we reported herein pretreatment conditions using an ammonium-based mixed solvent for the removal of a $Cu_2O$ layer on Cu particles that were oxidized in air for 1 hr at $200^{\circ}C$ or for 3 days at room temperature. Furthermore, we discussed the results of post-Ag plating with respect to removal level of the oxide layer. X-ray diffraction results revealed that the removal rate of the oxide layer is directly proportional to the concentration of the pretreatment solvent. With the results of Auger electron spectroscopy using oxidized Cu plates, the concentrations required to completely remove 50-nm-thick and 2-nm-thick oxides within 5 min were determined to be X2.5 and X0.13. However, the optimal concentrations in an actual Ag plating process using Cu powder increased to X0.4 and X0.5, respectively, because the oxidation in powder may be accelerated and the complete removal of oxide should be tuned to the thickest oxide layer among all the particles. Back-scattered electron images showed the formation of pure fine Ag particles instead of a uniform and smooth Ag coating in the Ag plating performed after incomplete removal of the oxide layer, indicating that the remaining oxide layer obstructs heterogeneous nucleation and plating by reduced Ag atoms.

• 한국진공학회지
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• 제14권4호
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• pp.222-228
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• 2005

2단계 성장법으로 c-plane 사파이어 단결정 기판 위에 metalorganic chemical vapor deposition(MOCVD)법으로 undoped GaN 에피층을 성장시켰다. 고온 성장시 성장 온도 변화가 undoped GaN 에피층의 표면형상과 거칠기, 구조적 결정성, 광학적 성질, 전기적 성질에 미치는 영향을 연구하였다. 수평형 MOCVD 장치를 이용해 압력 300 Torr 저압에서 성장시켰으며, 저온 핵생성층 성장조건은 $500^{\circ}C$로 고정시키고, 2단계 성장 온도를 $850\~1050^{\circ}C$범위로 변화시켰다. 형성된 undoped GaN 에피층을 원자력현미경, 고분해능 X-선회절장치, 광발광측정, 홀 효과 측정 장치 등을 이용하여 분석, 고찰하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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• pp.132-132
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• 2000

Cu는 Al에 비하여 낮은 저항(1.8 $\mu$$\Omega$-cm)과 높은 EM 저항성을 가지고 있어 미래의 고속 ULSI 배선물질로 그 중요성이 더욱 증가되고 있으며, 현재까지 많은 연구가 진행되고 있다. 따라서, 본 논문에서는 이러한 방법들을 고려하여 CVD Cu의 문제점인 낮은 성장률의 개선과 Cu 박막의 특성을 향상하고자 수소 플라즈마 공정을 이용하여 plasma 전처리가 초기 Cu 핵생성에 미치는 영향에 대하여 연구하였다. 본 실험에 사용된 장비는 Cu RPCVD/MOCVD이다. 초기 Cu 핵의 생성에 있어서의 수소 플라즈마의 효과를 조사하기 위하여 다음과 같은 3가지의 방법으로 행하였다. 첫 번째는 Cu 박막 형성에서 플라즈마를 사용하지 않은 방법, 두 번째는 플라즈마 전처리공정을 행한 뒤, Cu 박막 증착시 플라즈마는 사용하지 않은 방법, 세 번재는 플라즈마 전처리공저을 행한 뒤 Cu 증착시에도 플라즈마를 사용한 방법이다. 이 세가지 방법의 핵생성 차이를 분석하기 위해서 각각 10초, 20초, 40초 증착시킨 후 grain의 크기와 개수를 비교하였다. 또한 플라즈마의 power에 따른 Cu 핵생성율도 조사하였다. 수소 전처리동안 working pressure는 10분 동안 1 torr로 유지되었으며 substrate의 온도는 20$0^{\circ}C$, r.f.power는 100watt로 설정하였다. Cu RPCVD의 증착조건은 r.f.power는 10watt, substrate의 온도는 20$0^{\circ}C$, gas pressure는 1 torr, Ar carrier gas는 50sccm, hydrogen processing gas는 100sccm, bubbler 온도는 4$0^{\circ}C$, gas line의 온돈느 6$0^{\circ}C$, shower head의 온도는 $65^{\circ}C$로 설정하였다. 증착된 Cu 박막은 SEM, XRD, AFM를 통해 제작된 박막의 특성을 비교.분석하였다. 초기 plasma 처리를 한 경우에는 그림 1에서와 같이 현저히 증가한 초기 구리 입자들이 관측되었으며, 이는 도상 표면에 활성화된 catalytic site의 증가에 기인한다고 보여진다. 이러한 특성은 Cu films의 성장률을 향상시키고, 또한 voids를 줄여 전기적 성질 및 surface morphology를 향상시키는 것으로 나타났다.

• 한국재료학회지
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• 제22권7호
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• pp.362-367
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• 2012

Magnetite nanoparticles(NPs) have been the subject of much interest by researchers owing to their potential use as magnetic carriers in drug targeting and as a tumor treatment in cases of hyperthermia. However, magnetite nanoparticles with 10 nm in diameter easily aggregate and thus create large secondary particles. To disperse magnetite nanoparticles, this study proposes the infiltration of magnetite nanoparticles into hybrid silica aerogels. The feasible dispersion of magnetite is necessary to target tumor cells and to treat hyperthermia. Magnetite NPs have been synthesized by coprecipitation, hydrothermal and thermal decomposition methods. In particular, monodisperse magnetite NPs are known to be produced by the thermal decomposition of iron oleate. In this study, we thermally decomposed iron acetylacetonate in the presence of oleic acid, oleylamine and 1,2 hexadecanediol. We also attempted to disperse magnetite NPs within a mesoporous aerogels. Methyltriethoxysilicate(MTEOS)-based hybrid silica aerogels were synthesized by a supercritical drying method. To incorporate the magnetite nanoparticles into the hybrid aerogels, we devised two methods: adding the synthesized aerogel into a magnetite precursor solution followed by nucleation and crystal growth within the pores of the aerogels, and the infiltration of magnetite nanoparticles synthesized beforehand into aerogel matrices by immersing the aerogels in a magnetite nanoparticle colloid solution. An analysis using a vibrating sample magnetometer showed that approximately 20% of the magnetite nanoparticles were well dispersed in the aerogels. The composite samples showed that heating under an inductive magnetic field to a temperature of $45^{\circ}C$ is possible.

• Applied Science and Convergence Technology
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• 제27권5호
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• pp.95-99
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• 2018

We discuss the structural and optical characteristics of GaN nanowires (NWs) grown on Si(111) substrates by a plasma-assisted molecular-beam epitaxy. The GaN NWs with high crystal quality were formed by adopting a new growth approach, so called Ga pre-deposition (GaPD) method. In the GaPD, only Ga was supplied without nitrogen flux on a SiN/Si surface, resulting in the formation of Ga droplets. The Ga droplets were used as initial nucleation sites for the growth of GaN NWs. The GaN NWs with the average heights of 60.10 to 214.62 nm obtained by increasing growth time. The hexagonal-shaped top surfaces and facets were observed from the field-emission electron microscope images of GaN NWs, indicating that the NWs have the wurtzite (WZ) crystal structure. Strong peaks of GaN (0002) corresponding to WZ structures were also observed from double crystal x-ray diffraction rocking curves of the NW samples. At room temperature, free-exciton emissions were observed from GaN NWs with narrow linewidth broadenings, indicating to the formation of high-quality NWs.

• Macromolecular Research
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• 제17권11호
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• pp.856-862
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• 2009

This study examined the effects of liquid and solid additives on the morphological, mechanical and thermal insulating properties of rigid polyurethane foams (PUFs). The PUFs synthesized with tetramethylsilane (TEMS) as a liquid-type additive showed a smaller average cell size and lower thermal conductivity than those with the aerosil 200 and clay 30B as solid-type additives. When TEMS was added, the average cell size of the PUF became more uniform and finer due to the reduced surface tension of the polymer solution, which increased the nucleation rate and number of bubbles produced and reduced cell size. The PUFs with TEMS showed the highest closed cell contents among the PUFs prepared using TEMS, aerosil 200 and clay 30B. This suggests that the insulation properties of PUF can be determined by both the size of the cell structure and the amount of closed cell contents in the system. The compression and flexural strengths of the PUF increased slightly when the aerosil 200, clay 30B and TEMS were added compared those of the neat PUF. The reaction profiles of the PUFs showed a similar gel and tack tree time with the reaction time among the PUFs synthesized with three different additives and neat PUF. This suggests that the nucleating additives used in this study do not affect the bubble growth of the chemical reaction, and the additives may act as nucleating agents during the formation of PUF. From the above results of the cell size, thermal conductivity, closed cell contents and reaction profile of the PUFs, liquid-type nucleating agent, such as TEMS, is more effective in decreasing the thermal conductivity of the PUF than solid-type nucleating agent, such as aerosil 200 and clay 30B.

• 대한금속재료학회지
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• 제49권2호
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• pp.121-127
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• 2011

The mechanical properties of the various heat treatment conditions on Ti-15Mo-3Nb-3Al-0.2Si alloy plates were examined. XRD patterns from the surface of Ti-15Mo-3Nb-3Al-0.2Si were analyzed as a solution-treated Ti alloy has the single-phase ${\beta}$ structure whereas the aged Ti alloys have the ${\beta}$ matrix embedded with ${\alpha}$ needles. High strength (~1500 MPa) with decent ductility (7%) was obtained by the Ti alloy double aged at $300^{\circ}C$ and $520^{\circ}C$ for 8 hours each. The double-aged alloy exhibits the finer structure than the single-aged alloy at $300^{\circ}C$ for 8 hours because of the higher nucleation rate of ${\alpha}$ needles at an initial low aging temperature ($320^{\circ}C$). TEM observation revealed that the fine nanostructure with ${\alpha}$ needles in the ${\beta}$ matrix ensured the excellent mechanical properties in the double aged Ti-15Mo-3Nb-3Al-0.2Si alloy. In the solution treated alloy, the yield drop, stress-serrations and the ductility minimum typically associated with dynamic strain aging can be attributed to the dynamic interaction between dislocations and oxygen atoms. The yield drop and the stress serration were not observed in aged samples because the geometrically introduced dislocations due to phase precipitates suppressed the dynamic strain aging.

• 대한금속재료학회지
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• 제46권9호
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• pp.593-603
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• 2008

In this study, effects of alloying elements on the sticking occurring during hot rolling of five kinds of ferritic STS430J1L stainless steels were investigated by analyzing high-temperature hardness and oxidation behavior of the rolled steels. Hot-rolling simulation tests were conducted by a high-temperature wear tester which could simulate actual hot rolling. The simulation test results revealed that the sticking process proceeded with three stages, i.e., nucleation, growth, and saturation. Since the hardness continuously decreased as the test temperature increased, whereas the formation of Fe-Cr oxides in the rolled steel surface region increased, the sticking of five stainless steels was evaluated by considering both the high-temperature hardness and oxidation effects. The addition of Zr, Cu, or Si had a beneficial effect on the sticking resistance, while the Ni addition did not show any difference in the sticking. Particularly in the case of the Si addition, Si oxides formed first in the initial stage of high-temperature oxidation, worked as initiation sites for Fe-Cr oxides, accelerated the formation of Fe-Cr oxides, and thus raised the sticking resistance by about 10 times in comparison with the steel without Si content.

• 한국분말재료학회지
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• 제29권6호
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• pp.511-516
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• 2022

Electroless plating is widely utilized in engineering for the metallization of insulator substrates, including polymers, glass, and ceramics, without the need for the application of external potential. Homogeneous nucleation of metals requires the presence of Sn-Pd catalysts, which significantly reduce the activation energy of deposition. Therefore, rinsing conducted during Sn sensitization and Pd activation is a key variable for the formation of a uniform seed layer without the lack or excess of catalysts. Herein, we report the optimized rinsing process for the functionalization of Sn-Pd catalysts, which enables the uniform FeCo metallization of the glass fibers. Rinsing enables good deposition of the FeCo alloy because of the removal of excess catalysts from the glass fiber. Concurrently, excessive rinsing results in a complete removal of the Sn-Pd nucleus. Collectively, the comprehensive study of the proposed nanomaterial preparation and surface science show that the metallization of insulators is a promising technology for electronics, solar cells, catalysts, and mechanical parts.