• Journal of the Semiconductor & Display Technology
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• v.10 no.4
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• pp.21-23
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• 2011

Uniformity of plasma etching processes critically depends on the wafer temperature and its distribution. The wafer temperature is affected by plasma, chucking force, He back side pressure and the surface temperature of ESC(electrostatic chuck). In this work, 3D mathematical modeling is used to investigate the influence of the geometry of coolant path and the temperature distribution of the ESC surface. The model that has the coolant path with less change of the cross-sectional area and the curvature shows low standard deviation of the ESC surface temperature distribution than the model with the coolant path of the larger surface area and more geometric change.

• International Journal of Fluid Machinery and Systems
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• v.1 no.1
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• pp.155-168
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• 2008

This paper investigates a variable geometry (VG) mixed flow turbine with a novel, purposely designed pivoting nozzle vane ring. The nozzle vane ring was matched to the 3-dimensional aspect of the mixed flow rotor leading edge with lean stacking. It was found that for a nozzle vane ring in a volute, the vane surface pressure is highly affected by the flow in the volute rather than the adjacent vane surface interactions, especially at closer nozzle positions. The performance of the VG mixed flow turbine has been evaluated experimentally in steady and unsteady flow conditions. The VG mixed flow turbine shows higher peak efficiency and swallowing capacity at various vane angle settings compared to an equivalent nozzleless turbine. Comparison with an equivalent straight vane arrangement shows a higher swallowing capacity but similar efficiencies. The VG turbine unsteady performance was found to deviate substantially from the quasi-steady assumption compared to a nozzleless turbine. This is more evident in the higher vane angle settings (smaller nozzle passage), where there are high possibility of choking during a pulse cycle. The presented steady and unsteady results are expected to be beneficial in the design of variable geometry turbochargers, especially the ones with a mixed flow turbine.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.1
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• pp.18-26
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• 2002

With the introduction of Fractal notation, various fields of engineering adopted fractal notation to express characteristics of geometry involved and one of the most frequently applied areas was turbulence. With research on turbulence regarding the surface as fractal geometry, attempts to analyze turbulent premised flame as fractal geometry also attracted attention as a tool for modeling, for the flame surface can be viewed as fractal geometry. Experiments focused on disclosure of flame characteristics by measuring fractal parameters were done by researchers. But robust principle or theory can't be extracted. Only reported modeling efforts using fractal dimension is flame speed model by Gouldin. This model gives good predictions of flame speed in unstrained case but not in highly strained flame condition. In this research, approaches regarding fractal dimension of flame as one representative value is pointed out as a reason for the absence of robust model. And as an extort to establish robust modeling, Presents methods treating fractal dimension as statistical variable. From this approach flame characteristics reported by experiments such as Da effect on flame structure can be seen quantitatively and shows possibility of flame modeling using fractal parameters with statistical method. From this result more quantitative model can be derived.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.14 no.2
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• pp.68-74
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• 2000

In this paper the concentration, yield and generation quantity of the ozone by the superposition discharge according to the coaxial electrodes geometry is described. In order to improve the ozone generation, a new type of ozonizer is proposed, where a silent discharge and a surface discharge are generated in the separated discharge spaces at the same time. To investigate the ozone generation dependency on electrode geometry, a few discharge tubes with different geometry were fabricated. In our experiment, the 60[Hz] one phase voltage is applied to the discharge tube which has three electrodes. And three kinds of discharges, two silent discharges and a surface discharge are superposed in the same space of the ozonizer. As a result, the followings are obvious. When two kinds of discharges are superposed under the condition using 3 electrode-3gap discharge tube, the maximum ozone efficiency is obtained.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.5
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• pp.130-136
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• 2001

Generally, a metal slitting saw is plain milling cutter with thickness less than 3/16 inch. This is used for cutting a workpiece that high dimensional accuracy and surface finish is necessary. A small thin milling cutter like a metal slitting saw is useful for machining a narrow groove. In this case, built up edge(BUE) is severe at each tooth and affects the surface integrity of the machined surface and tool wear. It is well known that tool geometry and cutting conditions are decisive factors to remove BUE. In this paper, we optimized the geometry of the milling cutter and selected cutting conditions to remove BUE by the experimental investigation. The experiment was planned with Taguchi method based on the orthogonal array of design factors such as coating, rake angle, number of tooth, cutting speed, feed rate. Response table was obtained from the number of built-up edge generated at tooth. The optimized tool geometry and cutting conditions could be determined through response table. In addition, the relative effect of factors was identified bh the analysis of variance (ANOVA). Finally, coating and cutting speed turned out important factors for BUE.

• International Journal of Naval Architecture and Ocean Engineering
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• v.13 no.1
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• pp.628-640
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• 2021

To investigate the supercavity geometry and gas flow structure for the supercavities with two closure types under the different flow conditions, an inhomogeneous multiphase model with the SST turbulence model was established, and validated by experimental results. The results show that two distinct regions exist inside the supercavity, which include the downstream flow region along the gas-water interface and the reverse flow region. For the twin-vortex supercavity, the internal gas leaks from the supercavity boundary by two paths: the supercavity surface and the two-vortex tubes. Increasing Froude number leads to more internal gas stripped from the supercavity surface. Two types of gas loss exist for the re-entrant jet supercavity with high Froude number, one type is the steady process of gas loss, and the major gas-leaking path is the supercavity surface rather than supercavity closure region. The other type is the unsteady periodic ejection, and the gas cluster of periodic ejection is merely a small part of the gas stored inside the supercavity.

• Tunnel and Underground Space
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• v.14 no.2
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• pp.142-153
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• 2004

To investigate the influence of the rock mass inhomogeneity caused by layer geometry on the regional stress distribution the cuboid models considering a homogenous rock mass, inhomogeneous rock mass with plane layers and with uneven layers were analyzed and discussed. It was confirmed that the structure and existence of layers in rock mass affected the regional stress distribution. An approach based on an inverse analysis of the measured local stresses and the 3D finite element analysis was suggested, and used to estimate the regional stress field of the homogeneous and inhomogeneous models, which consist of the surface geometry of ground and both the surface and layer geometry respectively. Additionally, the approach of the regional stress considering the layer geometry in the rock mass was verified to estimate the regional stress field for a site.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.747-752
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• 2003

Many clinical studies have suggested that the blood flow in ideal geometry is involved in the development of atherosclerosis. This study simulated blood flow in the abdominal artery with real geometry to investigate MWSS(mean wall shear stress), AWSS(amplitude of wall shear stress) and OSI(oscillator shear index). The calculation grid for the real geometry was constructed by extracting the surface of arterial wall from CT(Computed Tomography) or MRI(Magnetic Resonance Imaging) sheets called as DICOM (Digital Imaging and Communications in Medicines). The calculated MWSS, AWSS and OSI are much different from those of ideal geometry calculation. The MWSS increased while the AWSS decreased. Many shear forces are related to shapes of gradient. This paper will give clinical datum where the MWSS, AWSS and OSI are strong or weak. The hemodynamic analysis based on real geometry can provide surgeons with more reliable information about the effect of blood flow.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.8
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• pp.46-59
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• 1998

This paper presents shape design, surface construction, and cutting path generation for the surface of marine ship propeller blades. A propeller blade should be designed to satisfy performance constraints that include operational speed which impacts rotations per minutes, stresses related to deliverable horst power, and the major length of the marine ship which impacts the blade size and shape characteristics. Primary decision variables that affect efficiency in the design of a marine ship propeller blade are the blade diameter and the expanded area ratio. The blade design resulting from these performance constraints typically consists of sculptured surfaces requiring four or five axis contoured machining. In this approach a standard blade geometry description consisting of blade sections with offset nominal points recorded in an offset table is used. From this table the composite Bezier surface geometry of the blade is created. The control vertices of the Hazier surface patches are determined using a chord length fitting procedure from tile offset table data. Cutter contact points and path intervals are calculated to minimize travel distance and production time while maintaining a cusp height within tolerance limits. Long path intervals typically generate short tool paths at the expense of increased however cusp height. Likewise, a minimal tool path results in a shorter production time. Cutting errors including gouging and under-cut, which are common errors in machining sculptured surfaces, are also identified for both convex and concave surfaces. Propeller blade geometry is conducive to gouging. The result is a minimal error free cutting path for machining propeller blades for marine ships.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.6
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• pp.1127-1134
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• 2002

The present paper provides an engineering J estimation equation for surface cracked plates under combined bending and tension. The proposed equation is based on the reference stress approach, and the most relevant normalising loads to define the reference stress for accurate J estimations are given for surface cracked plates under combined bending and tension. Comparisons with J results from extensive 3-D FE analyses, covering a wide range of crack geometry, plate geometry and loading combination, show overall good agreement not only at the deepest point but also at arbitrary points along the crack front. for pure tension, agreement between the estimated J and the FE results is excellent, even at the surface point. On the other hand, for pure bending and combined bending and tension, the estimated J values become less accurate for locations close to the surface point. Thus the results in this paper will be useful to assess short-term fracture or low cycle fatigue of surface defects in plates under combined bending and tension.