• 제목/요약/키워드: Surface contaminants

검색결과 376건 처리시간 0.024초

세정액에 따른 실리콘 웨이퍼의 Cu 및 Fe 불순물 제거 (Removal of Cu and Fe Impurities on Silicon Wafers from Cleaning Solutions)

  • 김인정;배소익
    • 한국재료학회지
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    • 제16권2호
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    • pp.80-84
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    • 2006
  • The removal efficiency of Cu and Fe contaminants on the silicon wafer surface was examined to investigate the effect of cleaning solutions on the behavior of metallic impurities. Silicon wafers were intentionally contaminated with Cu and Fe solutions by spin coating and cleaned in different types of cleaning solutions based on $NH_4OH/H_2O_2/H_2O\;(SC1),\;H_2O_2/HCl/H_2O$ (SC2), and/or HCl/$H_2O$ (m-SC2) mixtures. The concentration of metallic contaminants on the silicon wafer surface before and after cleaning was analyzed by vapor phase decomposition/inductively coupled plasma-mass spectrometry (VPD/ICP-MS). Cu ions were effectively removed both in alkali (SC1) and in acid (SC2) based solutions. When $H_2O_2$ was not added to SC2 solution like m-SC2, the removal efficiency of Cu impurities was decreased drastically. The efficiency of Cu ions in SC1 was not changed by increasing cleaning temperature. Fe ions were soluble only in acid solution like SC2 or m-SC2 solution. The removal efficiencies of Fe ions in acid solutions were enhanced by increasing cleaning temperature. It is found that the behavior of metallic contaminants as Cu and Fe from silicon surfaces in cleaning solutions could be explained in terms of Pourbaix diagram.

부여 정림사지 오층석탑의 보존과학적 풍화훼손도 평가 (Deterioration Assessment for Conservation Sciences of the Five Storied Stone Pagoda in the Jeongrimsaji Temple Site, Buyeo, Korea)

  • 김영택;이찬희;이명성
    • 자원환경지질
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    • 제38권6호
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    • pp.675-687
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    • 2005
  • 부여 정림사지 오층석탑은 반상 흑운모 화강섬록암으로 총 149매의 부재로 이루어져 있다. 구성암석은 페그마타이트 세맥과 염기성 포획암을 함유하고 있으며, 사장석의 반상조직이 고르게 발달되어 있다. 이 탑은 부재의 탈락 및 파손이탈은 많지 않으나 대기오염과 산성비의 영향으로 전체적으로 석질이 약화되어 표면박리와 입자박락이 왕성하게 진행 중이다. 석탑의 4층옥개석을 구성하는 부재는 뒤틀림과 이격으로 인해 구조적인 불균형이 관찰된다. 이 불균형은 석탑 상층부의 안정성에 위협을 가하는 것으로 판단된다. 또한 암석의 용해반응으로 용출된 철과 망간산화물의 오염물질이 부재의 표면에 침착되어 화학적 풍화작용을 가중시키고 있다. 석탑의 거의 모든 표면은 황갈색, 암흑색 및 회백색 오염물로 피복되어 있으며, 특히 각층의 옥개석 하단부와 옥개받침에서 망간산화물과 회백색 침전물에 의한 표면착색이 심각하다. 부재의 표면에는 균류, 조류, 지의류나 선태류들이 기생하면서 연회색, 암회색 덴 암흑색 등 다양한 산출상태를 보인다 .기단부에는 일차적으로 균류와 조류에 의해 검게 변색된 표면 위를 회백색 고착 지의류가 밀생하고 있으며, 각층 옥개석의 상부에서는 수근식물이 자생하고 있다. 따라서 이 석탑은 구조적인 안정성을 규명하기 위해 정밀안전진단과 중장기적인 모니터링을 실시하여 상층부를 구성하는 부재의 거동을 면밀하게 검토해야 말 것이다. 특히 부재의 표면변색과 이차오염물질의 침착현상이 심각하여 정밀진단을 통한 종합적 보존방안의 수립과 임상실험을 통한 과학적 보존수복을 실시해야 한다.법성과 적법성 문제에 대한 갈등을 기본 서사구조로 제시한 채, 노동계를 포함한 시민사회와 정부기관이 대립적인 행위자로 등장했다. 사건의 갈등 해소 단계에서는 문제 해결을 위한 방법으로 두 신문이 대통령과 야당 지도자간의 정치적 해결과 노동법 통과에 대한 위헌론 제기를 중심으로 한 노동단체들의 지속적인 연대를 중심 서사구조로 각각 제시했다. 이 시기에서 주요 행위자들의 대립관계는 종료되었다. 조응분석 결과, 사건 발생과 위기 고조 단계, 그리고 갈등 해소 단계등 모든 시기에서 두 신문의 주요 행위자 구성에 있어서 차이가 나타났다. 다시 말해, 조선일보는 기본적으로 총파업을 둘러싼 문제의 구성과 발전, 해소 과정에서 정당이나 대통령, 야당 지도자 등과 같은 정치관련 행위자를 강조하고 있었다. 반면에, 한겨레는 대체로 로든 사건진행 단계에서 노동 관련 단체들과 시민단체의 역동적인 연대와 활동에 초점을 맞추고 있는 것으로 나타났다.술 후 24시간에 599.4$\pm$145.6, 678.8 $\pm$256.4였다(t-test, p < 0.05). 동종 수혈은 RAP군에서 34명 중 7명에서(20.6$\%$), 대조군에서는 46명중 16명에서(34.8$\%$) 시행되어, RAP군에서 유의하게 빈도가 낮았다(Chi-square test, p < 0.05). 결론: 역행성 자가 충전법은 심폐바이패스의 충전에 의한 혈액희석을 최소화함으로서, 개심술 후 출혈과 동종수혈을 또한 줄이는 데 효과적인 방법이 될

Kaolin 오손물 누적량 모의실험 및 누설전류변화 특성 (A Simulation for Kaolin Contaminants Accumulation and Varying Characteristics of Leakage Currents)

  • 박재준;송일근;이재봉;천성남
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제54권11호
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    • pp.483-489
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    • 2005
  • This study performs a simulation for an accumulation mechanism of contaminants, which were produced in an industrial belt of inland, on the surface of insulators. From the simulation, silicon insulators presented higher accumulation than that of EPDM(Ethylene Propylene Diene Terpolymer : EPDM) insulators on the same distance in the case of the Virgin polymer insulator, and this result presented the same result in the insulator applied in actual fields. In the case of the accumulation test for the Virgin insulator and insulators used in actual fields, it is evident that the Virgin insulator presented more accumulation than that of the insulator used in actual fields. The results can be caused by the generation of LMW (Low Molecular Weight) on the external material of polymer insulators, and the level of the accumulation can be changed according to the degree of the continuous generation of LMW. In order to simulate a certain pollution of an industrial belt, which is located along the coastline, leakage currents were measured by applying the contaminant compulsively that was produced with salts and Kaolin according to the ratio of its weight on the surface of insulators. The more increase in the content of Kaolin pollution, the level of leakage currents on the surface of polymer insulator more increased. In addition, the approaching time to the maximum value of leakage currents presented a nearly constant level regardless of the content of Kaolin. The level of leakage currents significantly decreased according to the passage of time, and the level of leakage currents on the surface maintained a constant level at a specific time regardless of the content of Kaolin.

석조문화재 표면 산화물의 산출상태와 지구화학적 거동: 익산 미륵사지 석탑 (Geochemical Behavior and Occurrence of Surface Oxidized Materials on the Stone Cultural Heritage: Iksan Mireuksaji Stone Pagoda)

  • 이동식;이찬희;양희제;최기영
    • 자원환경지질
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    • 제40권4호
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    • pp.375-387
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    • 2007
  • 국보 제11호 익산미륵사지석탑은 현재 문화유산의 원형보존을 위하여 해체복원 중이다. 이 석탑의 구성암석은 비교적 풍화에 강한 화강암으로 이루어져 있으나 오랜 세월 동안 대기환경에 노출되면서 다양한 형태의 오염물이 피복되어 원암의 색상을 잃었다. 이 연구에서는 이차적 무기오염물을 성인적 유형으로 세분하고, 육안으로 확연히 판별되는 산화 변색된 부재만을 엄선하여 오염물질의 산출상태 및 오염종을 정량분석 하였다. 또한 용해실험을 통해 가용성 오염종의 지구화학적 거동특성을 규명하고 세정방법 및 효과 등을 분석하여, 표면 세정제의 보존과학적 적용가능성을 검토하였다.

염진해 오손물질의 성분과 전기적 특성 (The Composition and the Electrical Characteristics of Natural and Artificial Contaminants)

  • 최남호;박강식;양병모;강지원;조성배;한상옥
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 하계학술대회 논문집 D
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    • pp.1654-1656
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    • 1999
  • In this paper, we investigate the electrical characteristics of contaminants on highvoltage insulators. We measure the conductivity of polluted water obtained from bottom surface of insulators with wiping method with wiping method, then calculate the equivalent salt deposit density(ESDD) with specific equation. And, through the analysis, ICP/MS, for contaminants, we can know the amount of specific composition which is contained in the washed solution. Based on the analysis result, we investigated the degree of contribution on the electrical characteristics of contaminant solution. Through this investigation, we got some significant result, such as the relationship between the conductivity and solubility.

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옥외에서 사용되는 배전급 폴리머 현수애자의 오손특성에 관한 연구

  • 이병성;한상옥
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제50권7호
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    • pp.340-345
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    • 2001
  • Because they have superior insulating properties and lower in price than their ceramic equivalents, polymeric insulators have been used in outdoor insulators. But polymeric insulators mainly using in an heavy contamination area of outdoor could be easily attached to contaminants such as salt and by-products of industrial processes. To understand its effect on contaminants adhered to these insulators, we dismounted polymeric insulators adhered contaminant in the field, and evaluated its electrical characteristics, CA, and ESDD. We also manufactured slurry mixed by some kaolin and salt for the artificial contamination test and measured the degree of contaminant, AC leakage current for these contaminated samples. Consequently, the adhered contaminants to its surface is likely to be affected the performance of insulation.

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Surface Analysis of Aluminum Bonding Pads in Flash Memory Multichip Packaging

  • Son, Dong Ju;Hong, Sang Jeen
    • Transactions on Electrical and Electronic Materials
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    • 제15권4호
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    • pp.221-225
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    • 2014
  • Although gold wire bonding techniques have already matured in semiconductor manufacturing, weakly bonded wires in semiconductor chip assembly can jeopardize the reliability of the final product. In this paper, weakly bonded or failed aluminum bonding pads are analyzed using X-ray photoelectron spectroscopy (XPS), Auger electron Spectroscopy (AES), and energy dispersive X-ray analysis (EDX) to investigate potential contaminants on the bond pad. We found the source of contaminants is related to the dry etching process in the previous manufacturing step, and fluorocarbon plasma etching of a passivation layer showed meaningful evidence of the formation of fluorinated by-products of $AlF_x$ on the bond pads. Surface analysis of the contaminated aluminum layer revealed the presence of fluorinated compounds $AlOF_x$, $Al(OF)_x$, $Al(OH)_x$, and $CF_x$.

부식 생성물 분석법을 이용한 상수도 금속관의 부식거동에 관한 연구 (Study of Drinking water pipeline Corrosion Mechanism by using Scale Analysis)

  • 황상용;송호봉
    • 환경위생공학
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    • 제17권1호
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    • pp.57-62
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    • 2002
  • Carbon cast iron and Zinc coated steel were the most widely used portable water of supply and distribution Pipeline system. The leaching of red water in portable water could produce sericus environmental sanitary problems. Due to the red water was the most alternative to inner scale of metal pipeline. So this study was conducted the impact of red water on scale products, and was evaluated by the corrosive metal contaminants of 20 fears over. Surface tests, metal surface composition measurements of samples XRF, XRD, and SEM(EDS), analysis were used to investigate the corrosion characteristies of carbon cast iron and Zinc coated steel. As the contaminants of Fe increased the red water of carbon castiron pipe increased due to the scale products amount of $Fe_2O_3$ (Hemite).

22.9kV-Y 배전설비에 부착된 대도시 대기오염성분에 대한 조사연구 (An Investigation on the Air Pollution for Distribution Facilities In Metropolitan Area)

  • 김동명;윤태상;박상만;이수묵
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 하계학술대회 논문집 C
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    • pp.1548-1550
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    • 2000
  • The effect of air pollution on the distribution facilities was investigated. In order to evaluate the pollution level in the metropolitan area, contaminated specimens were analyzed with various technique such as ICP-AES, EA, and so on. The contaminants on the surface of the distribution line or insulators were combined with approximately 10 percent of organic and 90 percent of inorganic materials. We found out that the electric facilities were affected by the contaminants on the surface of the facilities.

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금속 불순물 Ca이 Si 기판의 표면 미세 거칠기에 미치는 영향 (The Effect on the Microroughness of Si Substrate by Metallic Impurity Ca)

  • 최형석;전형탁
    • 한국재료학회지
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    • 제9권5호
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    • pp.491-495
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    • 1999
  • In this study, we focus on Ca contaminant which affects on the roughness Si substrate after thermal process. The initial Si substrates were contaminated intentionally by using a standard Ca solution. The contamination levels of Ca impurity were measured by TXRF and the chemical composition of that was analyzed by AES. Then we gre the thermal oxide to investigate the effect of Ca contaminants. The microroughness of the Si surface, the thermal oxide surface, and the surface after removing the thermal oxide were measured to examine the electrical characteristics. The initial substrates that were contaminated with the standard solution of Ca exhibited the contamination levels of 10\ulcorner~10\ulcorneratoms/$\textrm{cm}^2$ which was measured by TXRF. The Ca contaminants were detected by AES and exhibited the peaks of Ca, SI, C and O.After intentional contamination, the surface microroughness of this initial substrate was increased from $1.5\AA$ to 4$\AA$ as contamination levels became higher. The microroughness of the thermal oxide surfaces of both contaminated and bare Si substrates exhibits similar values. But the microroughness of the contaminated$ Si/SiO_2$ interface was increased as contamination increased. The thermal oxide of contaminated substrate exhibited the small minority carrier diffusion length, low breakdown voltage, and slightly high leakage current.

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