• Journal of the Optical Society of Korea
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• 제16권1호
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• pp.80-84
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• 2012

A high reflectance mirror, which has very low absorption and scattering loss, was coated onto a crystalline substrate by ion beam sputtering and then annealed at $450^{\circ}C$. We carefully selected the mirror coating material, and designed the high reflectance mirror, in order to avoid UV degradation which comes from the He-Ne plasma. We measured the surface roughness of the Zerodur substrate using phase shift interferometry and atomic force microscopy, and compared it with the TIS scattering of the mirror. The cavity ring-down method was used to measure the absorption of the mirror, and the thin film structure was correlated to its results. We also compared the optical properties of coated mirrors before and after annealing.

• 정보저장시스템학회논문집
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• 제1권2호
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• pp.182-187
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• 2005

A large area micro mirror is an optical element that functions as changing an optical path by reflection in integrated optical system. We fabricated the large area silicon mirror by anisotropic etching using MEMS for implementation of integrated optical pickup. In this work, we report the optimum conditions to better fabricate and design, greatly improve mirror surface quality. To obtain mirror surface of $45^{\circ},\;9.74^{\circ}$ off-axis silicon wafer from (100) plane was used in etching condition of $80^{\circ}C$ with 40wt.% KOH solution. After wet etching, polishing process by MR fluid was applied to mirror surface for reduction of roughness. In the next step, after polymer coating on the polished Si wafer, the Si mirror was fabricated by UV curing using a trapezoid bar-type way structure. Finally, we obtained peak to valley roughness about 50 nm in large area of $mm^2$ and it is applicable to optical pickup using blu-ray wavelength as well as infrared wavelength.

• 한국재료학회지
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• 제28권4호
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• pp.201-207
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• 2018

Infrared(IR) heating has many advantages, such as energy efficiency, reduced heating time, cleanliness, equipment compactness, high drying rate and easy automation. These features of IR heating provide widely industrial applications, such as surface heat treatment in semiconductor fabrication, thermoforming of polymers, drying and disinfection of food products, heating to metal forging, and drying of wet materials. In this study, the characteristics of a protected gold mirror were examined by spectrophotometer and the lifetime of the coating layers were evaluated by a cross-cutting method and salt spray test. The effects of manufacturing conditions on the protected gold mirror were seen and remedies for these effects were noted in order to improve the properties of the protected gold mirror in the drying process. The reflectance and lifetime of the protected gold mirror was influenced by manufacturing conditions, such as surface roughness and forming conditions of the anti-oxide layer, the adhesion layer, the reflecting layer and the protection layer. The results of this study showed that the protected gold mirror manufactured using a buffing method for pre-treatment resulted in the most effective reflectance. In addition, $Al_2O_3$ coating on an Al substrate as an anti-oxide layer was more effective than the anodizing process in the test of reflectance. Furthermore, the protected gold mirror manufactured by layers forming of various materials resulted in the most effective reflectance and lifetime when coated with $Al_2O_3$ as the anti-oxide layer, coated Cr as the adhesion layer, and coated $MgF_2$ as the protection layer.

• 한국광학회:학술대회논문집
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• 한국광학회 2007년도 하계학술발표회 논문집
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• pp.187-188
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• 2007

Four kinds of mirror substrates with same surface roughness were fabricated. On those substrates, a dielectric multi-layer coating with high reflectivity was deposited by ion beam sputtering technique. Most of the fused silica mirrors showed lower scattering than the ZERODUR mirrors one, which deposited on substrates similar in surface roughness. The ZERODUR mirrors scattering strongly depend on the micro-structure of $Ta_2O_5/SiO_2$ thin films wear deposited on ZERODUR substrates.

• Journal of the Optical Society of Korea
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• 제10권2호
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• pp.57-62
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• 2006

Adaptive optics (AO) has been applied in various fields including astronomy, ophthalmology and high power laser systems. An adaptive optics system for a high power laser is not significantly different from other AO systems in the point of configuration except that high energy absorbed by the deformable mirror distorts the deformable mirror surface and so degrades system performance. Currently we are researching a bimorph deformable mirror for beam cleaning of a high power class laser. The bimorph mirror was considered to have 99% reflective coating and 1% absorption. So this paper first presents the temperature profiles and corresponding thermal distortions of the bimorph mirror faceplate when the mirror is under a high power lasing for 10 seconds. The analysis was accomplished by the use of finite difference and finite element computer programs to generate the element arrays, calculate the temperature profiles, and determine the structural deformations. Then this paper proposes an 'embedded wafer' type water-cooling system with derived cooling parameters.

• 항공우주기술
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• 제11권2호
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• pp.26-32
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• 2012

본 연구는 위성 열제어 주요 구성품중 하나인 SSM(이차면경) 표면에서 나타난 수상돌기(Dendrite) 현상에 대한 고장탐구 수행 내역과 그 결과를 정리한 것이다. 본 고장탐구 시편 시험을 통하여 SSM 표면의 은도금 층은 황 또는 염소 화합물이 함유된 환경에 장기간 직접 노출시키는 경우, 은도금 층이 황화 변색되는 현상이 나타날 수 있음을 확인하였으며 SSM 수상돌기(Dendrite) 현상을 방지하기 위해서는 가황 처리된 고무 패드와 직접 접촉하지 않도록 격리 보관할 필요가 있음을 알 수 있었다.

• 열처리공학회지
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• 제8권1호
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• pp.44-52
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• 1995

The specimen for laser hardening have been carried out using SM45C which is coated with black paint or graphite for better absorption. Segmented mirror was used in order to produce a square beam ($10{\times}10mm$) at the surface with a homegeneous intensity distribution across the beam. $CO_2$-Laser power was changed from 2kW to 4kW and transfer velocity was varied from 0.1m/min to 2.0m/min. The maximum hardness and case depth of SM45C steel are 790Hv and 1.5mm by laser hardening. When the surface of specimens was melted during laser hardening. the surface hardness of SM45C steel was decreased. The surface hardness of 2 layer coated specimen(black paint: $15.4{\mu}m$, graphite coating: $9.5{\mu}m$) was increased than that of 1 layer coated specimen. It is desirable to prepare 2 or more coating layer on the steel surface in order to sufficient case depth and hardness in laser hardening. The graphite coating on the specimen surface was obtained more uniform temperature distribution than black paint coating in laser hardening process.

• 전기학회논문지
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• 제66권6호
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• pp.962-967
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• 2017

The Diamond-Like-Carbon (DLC) coating is a new carbon-based amorphous material. Carbon ions in the plasma are electrically accelerated and collide with the substrate to form a thin film. This film has similar properties to diamonds such as high surface hardness, low coefficient of friction, corrosion resistance and durability that do not react with acids and bases. Also, since there is no thermal deformation, it can be printed at room temperature. and coated on almost all materials such as paper, polymer, ceramics and various metals even aspheric lens it is possible to mirror surface coating with excellent surface roughness. In this paper, we have analyzed the DLC film formed by Filtered Arc Ion Plating (Filtered AIP) process.

• 한국광학회지
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• 제29권4호
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• pp.166-172
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• 2018

본 논문에서는 우주의 진공환경에서 반사경 코팅이 흡수한 습기를 방출하면서 나타나는 경면 형상의 변화를 예측하기 위한 새로운 방법론을 제안한다. 직경 50 mm, 두께 1.03 mm의 원형 시편과 간섭계를 통해 진공환경에서 나타나는 시편 형상 변화량을 측정하고 제르니케 프린지 다항식(Zernike fringe polynomial) 곡률항으로 나타내었다. 그 결과 습기 방출에 따른 코팅 스트레스는 152.7 Mpa로 계산되었다. 계산된 스트레스는 1.25 mm 두께 시편의 수치모사 모델에 적용하여 변화된 형상의 곡률항을 측정결과의 표준편차 이내($78.9{\pm}5.9nm$)로 예측할 수 있음을 검증하였다. 이 방법론을 2019년에 발사 예정인 차세대중형위성의 직경 600 mm 쌍곡면경에 적용, 습기 방출에 의한 경면 형상 변화를 계산하여 반사경의 초점거리가 약 $2.005{\mu}m$ 만큼 ?아짐을 예측하였다. 초점거리 변화는 광학 탑재체의 MTF를 한계공간주파수(Nyquist frequency)에서 2.3% 가량 낮추지만, 요구 사양을 만족하여 우주에서도 문제없이 운용 가능함을 확인하였다.

• 한국정밀공학회지
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• 제13권6호
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• pp.45-51
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• 1996

Silicon wafers are required to be finished under the roughness of nanometer order for the subsequent chip fabrication processes. Recently, the finish grinding techniques have been researched for the improvement of accuracy and surface roughness simultaneously. Among them, the grinding technique using fine abrasive has been known as an easily accessible method. However, the manufacture of the fine grit grinding wheel has been very difficult because of the coherence of the grits. In this paper, the development of the ultrafine grit silica($SiO_2$) grinding wheel by the combination of the binder coating and the vacuum forming techniques is reported. And, the mechanochemical removal effects of the grinding conditions are discussed. Finally, a successful result of Ra O.4nm. Rmax 4nm in the ground surface roughness of a 6 inch silicon wafer was achieved.