• Tribology and Lubricants
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• 제40권2호
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• pp.47-53
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• 2024

Surface topography plays a decisive role in determining the performance of several precision components. In particular, the surface roughness of semiconductor devices affects the precision of the circuit. In this regard, the surface topography of a given surface needs to be appropriately assessed. Typically, the average roughness is used as one of the main indicators of surface finish quality because it is influenced by both dynamic and static parameters. Owing to the increasing demand for such accurate and reliable surface measurement systems, studies are continuously being conducted to understand the parameters of surface roughness and measure the average roughness with high reliability. However, the differences in the measurement methods of surface roughness are not clearly understood. Hence, in this study, the surface roughness of the back of a silicon wafer was measured using both contact and noncontact methods. Subsequently, a comparative analysis was conducted according to various surface roughness parameters to identify the differences in surface roughness depending on the measurement method. When using a 3D laser confocal microscope, even smaller surface asperities can be measured compared with the use of a 3D profiler. The results are expected to improve the understanding of the surface roughness characteristics of precision components and be used as a useful guideline for selecting the measurement method for surface topography assessment.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 추계학술대회 논문집
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• pp.474-480
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• 2002

Aspheric optical lenses and mirrors are widely used in recent. It is more difficult to manufacture and measure the aspherical optics compared to conventional spherical ones. The interferometric optical test is common for the measurement of spherical optical surface. But the application of the interferometry to the measurement of aspheric surface is difficult because it needs a precise null corrector and very careful environmental conditions such as keeping constant temperature, humidity, atmospheric pressure and vibrations. To enhance productivity of optics manufacturing on-machine measurement and correction has been developed in this study. For practical applications, robustness of the measurement method to environments is more important. For the purpose an optical OMM(On-Machine Measurement) system has been developed using Shack-Hartmann test which has robustness to the environment. The wavefront has been reconstructed from the measured data using the primary aberration polynomial function by least square fitting. The measured result of the developed only system gives the maximum deviation only in 200 nm from the result measured by a commercial Fizeau interferometer Wyko 6000.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 추계학술대회 논문집
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• pp.71-76
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• 2001

In the surface measurement system using touch probe, probe radius compensation is a key factor for accuracy. In this paper we investigate methods for compensating probe radius so that the surface equation for an "unknown surface" can be efficiently derived. The developed algorithm derives the surface equation by the iterative procedure of estimation, verification, and modification . Since the procedure is applied only for the surface region exceeding the tolerance limit, an accurate surface equation can be obtained with less computation and measurement point. The validity and effectiveness of the algorithm was tested by numerical simulations. The results convinced us that the develop algorithm can be used for surface measurement and tool path planning for NC machining.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.115-118
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• 2005

A workpiece with a large surface area is likely to be uneven due to form error and waviness. These geometric disturbances can cause inaccurate micro shapes to be formed when micro features are micro-grooved into the surface and cause the resulting workpiece to fail to function as desired. Thus, real-time measurement and compensation is required to guarantee the form accuracy of micro features while machining a workpiece with a large surface area. In this study, a method is suggested for real-time measurement of geometric error for the micro grooving of a large flat surface using a laser displacement sensor. The measurements are demonstrated for the workpieces with large surface areas and the experimental results show that the waviness and form error are well detected.

• 한국수학교육학회지시리즈A:수학교육
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• 제58권2호
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• pp.283-298
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• 2019

초등학교 교육과정에 포함된 측정 속성 가운데 둘레와 넓이, 겉넓이와 부피는 5, 6학년에서 집중적으로 다루어진다. 그러나 이 영역에서 학생들의 수행능력이 어느 정도가 되며 어떤 문제가 있는지에 대해서는 알려진 바가 많지 않다. 이 연구는 평면도형의 둘레와 넓이, 입체도형의 겉넓이와 부피에 대한 초등학교 6학년 학생들의 이해 정도를 진단하고, 각 요소별 수행 능력을 비교 분석하여 차후 수학 교과서 개발 및 측정 영역 지도를 위한 시사점을 도출하고자 하였다. 이를 위해 둘레, 넓이, 겉넓이, 부피, 둘레와 넓이의 관계, 겉넓이와 부피의 관계에 관련된 문항을 구성하여 6학년 학생 95명을 대상으로 수행 능력을 분석하였다. 분석결과 초등학교 6학년들의 수행능력이 둘레, 겉넓이, 둘레와 넓이의 관계, 겉넓이와 부피의 관계 영역에서 특히 낮은 것으로 드러났다. 이러한 연구 결과를 바탕으로 둘레와 넓이, 겉넓이와 부피 개념의 도입 순서와 지도 방법, 지도 순서 등에 대한 몇 가지 아이디어를 제안하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.255-258
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• 1995

Surface profile is an important paramerer to evaluate accuracy of machined worpiece. It is necessary to acquire this data by in-process measurement. Recent researchers have introduced Machine Vision technique to achieve it. But it is difficult to apply it to industry field yet. In this study, in-process measuring system of surface profile is developed using CCD camera. The effect of illuminance according to incident angle is investigated and surface profile from surface tester and illuminance graph are compared experimentally.

• 보존과학연구
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• 통권20호
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• pp.21-47
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• 1999

According to damage of papers by the chemical cause, papers become to acidify. Among the 3 kinds of method measuring the acidity of paper, one was nondestructive method measuring the surface of the paper by flat type electrode and the others were destructive methods measuring directly by cold water extract method and hot water extract method. In case of the cellulolytic cultural properties, the latter methods were not applied because those methods must bedissociated papers. To measure the paper acidity nondestructively, we investigated the correlation of the nondestructive method and the destructive methods. The conclusions are as follows. 1) In the relationship of the cold water extract method and the hot water extract method, It was indicated that the pH measured by the hot water extract method was high quality printing paper 0.08, rough printing paper 0.13, and Korean paper 0.29 higher than that by the cold water extract method.2) In the relationship of the cold water extract method and the surface measurement method, It showed that the pH value measured by the cold water extract method was high quality printing paper 1.86, rough printing paper 0.80,and Korean paper 0.58 higher than value that by the surface measurement.3) In the relationship of the hot water extract method and the surface measurement method, It showed that the pH value measured by the hot ABSTRACT water extract method was high quality printing paper 1.78, rough printing paper 0.66, and Korean paper 0.29 higher than that by the surface measurement. From the above-mentioned results, the pH value measured by the surface measurement was need to high about 1.78∼1.86 in high quality printing paper, 0.66-0.80 in rough printing paper, and 0.29∼0.58 in Korean paper and the surface measurement with flat type electrode was very available to measure the acidity of Korean papers actually.

• 보존과학연구
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• 통권20호
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• pp.49-64
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• 1999

According to damage of papers by the chemical cause, papers become to acidify. Among the 3 kinds of method measuring the acidity of paper, one was nondestructive method measuring the surface of the paper by flat type electrode and the others were destructive methods measuring directly by cold water extract method and hot water extract method. In case of the cellulolytic cultural properties, the latter methods were not applied because those methods must bedissociated papers. To measure the paper acidity nondestructively, we investigated the correlation of the nondestructive method and the destructive methods. The conclusions are as follows. 1) In the relationship of the cold water extract method and the hot water extract method, It was indicated that the pH measured by the hot water extract method was high quality printing paper 0.08, rough printing paper 0.13, and Korean paper 0.29 higher than that by the cold water extract method.2) In the relationship of the cold water extract method and the surface measurement method, It showed that the pH value measured by the cold water extract method was high quality printing paper 1.86, rough printing paper 0.80,and Korean paper 0.58 higher than value that by the surface measurement.3) In the relationship of the hot water extract method and the surface measurement method, It showed that the pH value measured by the hot ABSTRACT water extract method was high quality printing paper 1.78, rough printing paper 0.66, and Korean paper 0.29 higher than that by the surface measurement. From the above-mentioned results, the pH value measured by the surface measurement was need to high about 1.78∼1.86 in high quality printing paper, 0.66-0.80 in rough printing paper, and 0.29∼0.58 in Korean paper and the surface measurement with flat type electrode was very available to measure the acidity of Korean papers actually.

• 한국초전도학회:학술대회논문집
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• 한국초전도학회 2000년도 High Temperature Superconductivity Vol.X
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• pp.173-178
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• 2000

A prototype for a highly sensitive, automated measurement system for the microwave surface resistance of high-T$_c$ superconductor films was set up, and tested by measuring the microwave surface resistances of high-T$_c$ YBa$_2$Cu$_3$O$_{7-{\delta}}$(YBCO) films at the frequency of about 19.6 GHz and the temperature of 30 K ${\sim}$ 90 K. An open-ended TE$_{011}$ mode sapphire-loaded cylindrical cavity resonator was used as the measurement probe, where YBCO films were used as the endplates of the cylindrical cavity. The characteristics of the measurement system include functions to display the unloaded ${\varrho}$ and the resonant frequency of the TE$_{011}$ mode resonator as well as the microwave surface resistance of the YBCO films, all simultaneously as a function of temperature. Applicability of the measurement system for investigating the homogeneity in the microwave properties of large high-T$_c$ superconductor films is discussed.

• Progress in Superconductivity
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• 제2권1호
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• pp.27-32
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• 2000

A prototype for a highly sensitive, automated measurement system for the microwave surface resistance of high-$T_c$ superconductor films was set up, and tested by measuring the microwave surface resistances of high-$T_c$ $YBa_2Cu_3O_{7-\delta}$ (YBCO) films at the frequency of about 19.6 GHz and the temperature of 30 K $\sim$ 90 K. An open-ended $TE_{011}$ mode sapphire-loaded cylindrical cavity resonator was used as the measurement probe, where YBCO films were used as the endplates of the cylindrical cavity. The characteristics of the measurement system include functions to display the unloaded Q and the resonant frequency of the $TE_{011}$ mode resonator as well as the microwave surface resistance of the YBCO films, all simultaneously as a function of temperature. Applicability of the measurement system for investigating the homogeneity in the microwave properties of large high-$T_c$ superconductor films is discussed.