On-Machine Measurement of an Optical Surface by Hartmann Test

하트만 방법에 의한 광학면의 기상측정

Aspheric optical lenses and mirrors are widely used in recent. It is more difficult to manufacture and measure the aspherical optics compared to conventional spherical ones. The interferometric optical test is common for the measurement of spherical optical surface. But the application of the interferometry to the measurement of aspheric surface is difficult because it needs a precise null corrector and very careful environmental conditions such as keeping constant temperature, humidity, atmospheric pressure and vibrations. To enhance productivity of optics manufacturing on-machine measurement and correction has been developed in this study. For practical applications, robustness of the measurement method to environments is more important. For the purpose an optical OMM(On-Machine Measurement) system has been developed using Shack-Hartmann test which has robustness to the environment. The wavefront has been reconstructed from the measured data using the primary aberration polynomial function by least square fitting. The measured result of the developed only system gives the maximum deviation only in 200 nm from the result measured by a commercial Fizeau interferometer Wyko 6000.