• The Korean Journal of Ceramics
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• 제3권1호
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• pp.18-20
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• 1997

The fabrication process of silicon-diamond(SOD) structure wafer were studied. Microwave plasma chemical vapor deposition (MWPCVD) and annealing technology were used to synthesize diamond film with high resistivity and thermal conductivity. Bonding and etchback silicon-on-diamond (BESOD) were utilized to form supporting substrate and single silicon thin layer of SOD wafer. At last, a SOD structure wafer with 0.3~1$\mu\textrm{m}$ silicon film and 2$\mu\textrm{m}$ diamond film was prepared. The characteristics of radiation for a CMOS integrated circuit (IC) fabricated by SOD wafer were studied.

• Current Applied Physics
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• 제18권11호
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• pp.1410-1414
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• 2018

Magnetic nanoparticles (MNP) have attracted considerable interest in many fields of research and applied science due to their impressive properties. In the past, especially biomedical problems have promoted the development of MNPs. For technical applications e.g. wastewater treatment and absorption of electromagnetic waves, the existing synthesis approaches are too expensive and/or the producible quantities are too low. In this work we present a method for simple preparation of size-controlled magnetic iron oxide nanoparticles by electroerosion dispersion (EED) of carbon steel in water. We describe the synthesis method, the laboratory installation and discuss the structural, chemical and electromagnetic properties of the synthetized EED powders as well as their applicability for microwave absorption compared to other available ferrite powders.

• 한국표면공학회지
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• 제46권2호
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• pp.55-60
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• 2013

Superhard TiN coatings were fabricated by DC and ICP (inductively coupled plasma) assisted magnetron sputtering techniques. The effect of ICP power, ranging from 0 to 300 W, on coating microstructure, preferred orientation mechanical properties were systematically investigated with HR-XRD, SEM, AFM and nanoindentation. The results show that ICP power has a significant influence on coating microstructure and mechanical properties of TiN coatings. With the increasing of ICP power, coating microstructure evolves from the columnar structure of DC process to a highly dense one. Grain sizes of TiN coatings were decreased from 12.6 nm to 8.7 nm with increase of ICP power. The maximum nanohardness of 67.6 GPa was obtained for the coatings deposited at ICP power of 300 W. Preferred orientation in TiN coatings also vary with ICP power, exerting an effective influence on film nanohardness.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2009년도 추계학술대회 초록집
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• pp.163-164
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• 2009

dc unbalanced magnetron sputtering 방법으로 superhard quarternary Ti-B-C-N films을 합성하였다. XPS, XRD 분석 결과 Ti-B-C-N films은 solid-solution (Ti,C,N)$B_2$와 Ti(C,N) 결정이 amorphous BN에 분포된 나노 복합체를 형성하였다. 여기에서는 film내 N의 양에 따라 강도가 증가하다가 그 후 감소하는 경향을 보였다.

• 한국표면공학회지
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• 제36권1호
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• pp.22-26
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• 2003

This short communication reports on the experiment which demonstrates that superhard nanostructured films with hardness of about 40 GPa and greater can be composed not only of two or more nanocrystalline and/or amorphous phases of different materials, as it is in the case of nanocomposite coatings, but also that can be formed by a mixture of small (<10 nm) nanocrystalline grains of the same material with different crystallographic orientation and/or lattice structures. This finding opens new possibilities to develop advanced nanostructured materials with enhanced physical and functional properties.

• 한국표면공학회지
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• 제34권5호
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• pp.429-434
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• 2001

Ti-Cu-N nanocomposite films deposited by arc ion plating and magnetron sputter hybrid system with various copper contents. The microstructure and mechanical properties of Ti-Cu-N superhard nanocomposite films depend on the Cu concentration. In X-ray diffraction (XRD) analysis, intensity of TiN (111) and TiN (220) peak decreased and peak broadness increased with increasing the copper contents and Cu peak was not detected. The grain size of films decreased with increasing at%Cu and Transmission Electron Microscopy (TEM) analysis also showed that Ti-Cu-N film containing 1.5at%Cu was composed of very fine (<10nm) nanocrystalline grains. The maximum hardness of Ti-Cu-N (1.5at%Cu) film reached to 45GPa and friction coefficient was measured 0.3.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2006년도 추계학술발표회 초록집
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• pp.55-55
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• 2006

• 한국산학기술학회논문지
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• 제9권2호
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• pp.298-302
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• 2008

초경합금입자와 탄소강사이의 브레이징 접합부 특성을 평가하였다 선택된 두 종류의 삽입금속은 기계적 합금 공정으로 만들어졌다. 한 가지는 Cu, Zn, Ag (MIM-1) 그리고 다른 한 가지는 Cu, Zn, Ag과 Cd(MIM-2)로 구성하였다. 삽입금속들의 화학조성은 AWS BAg-20계와 BAg-2a계의 성분과 유사하였다. 그리고 상용삽입금속들(CIM-1, CIM-2) 역시 비교 평가하였다. 삽입금속들의 특성은 젖음성 시험, 전단강도 시험, 그리고 미세조직 관찰로서 나타내었다. 젖음성 시험에서 MIM-1과 CIM-1 삽입금속의 젖음각이 MIM-2와 CIM-2보다 크게 나타났고, MIM-1의 젖음각이 CIM-1보다 더 큰 값을 나타났지만 모든 경우 젖음각이 $25^{\circ}$보다 작았다. 삽입금속, MIM-1이 가장 높은 전단강도를 나타냈고, 그 값은 $2.29{\times}10^2MPa$로 측정되었다. 이 값은 상용 삽입금속의 값과 같거나 높은 것으로 나타났다. 삽입금속의 미세조직은 Cu-rich 초정영역과 Ag-rich 공정영역으로 구성되었다. MIM-1계로 만들어진 초경합금과 탄소강의 접합부는 일부 접합부 계면에 기공을 포함하지만 초정을 기지로 하는 안정적인 미세조직을 나타냈다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2005년도 추계학술발표회 및 workshop
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• pp.115-115
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• 2005

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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• pp.1321-1321
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• 2006