Effect of fluorine gas addition for improvement of surface wear property of DLC thin film deposited by using PECVD (PECVD를 이용한 DLC 박막의 표면 마모 특성 향상을 위한 플루오린 첨가의 영향)
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- Journal of the Korean institute of surface engineering
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- v.54 no.6
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- pp.357-364
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- 2021