• Title/Summary/Keyword: Substrate cells temperature

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Effect of the oxygen flow ratio on the structural and electrical properties of indium zinc tin oxide (IZTO) films prepared by pulsed DC magnetron sputtering

  • Son, Dong-Jin;Nam, Eun-Kyoung;Jung, Dong-Geun;Ko, Yoon-Duk;Choi, Byung-Hyun;Kim, Young-Sung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.168-168
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    • 2010
  • Transparent conduction oxides (TCOs) films is extensively reported for optoelectronic devices application such as touch panels, solar cells, liquid crystal displays (LCDs), and organic light emitting diodes(OLEDs). Among the many TCO film, indium tin oxide(ITO) is in great demand due to the growth of flat panel display industry. However, indium is not only high cost but also its deposits dwindling. Therefore, many studies are being done on the transparent conductive oxides(TCOs). We fabricated a target of IZTO(In2O3:ZnO:SnO2=70:15:15 wt.%) reduced indium. Then, IZTO thin films were deposited on glass substrates by pulsed DC magnetron sputtering with various oxygen flow ratio. The substrate temperature was fixed at the room temperature. We investigated the electrical, optical, structural properties of IZTO thin films. The electrical properties of IZTO thin films were dependent on the oxygen partial pressure. As a result, the most excellent properties of IZTO thin films were obtained at the 3% of oxygen flow rate with the low resistivity of $7.236{\times}10^{-4}{\Omega}cm$. And also the optical properties of IZTO thin films were shown the good transmittance over 80%. These IZTO thin films were used to fabricated organic light emitting diodes(OLEDs) as anode and the device performances studied. The OLED with an IZTO anode deposited at optimized deposition condition showed good brightness properties. Therefore, IZTO has utility value of TCO electrode although it reduced indium and we expect it is possible for the IZTO to apply to flexible display due to the low processing temperature.

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Effects of Film Thickness and Post-Annealing Temperature on Properties of the High-Quality ITO Thin Films with RF Sputtering Without Oxygen (산소 유입 없이 RF 스퍼터로 증착한 고품질 ITO 박막의 두께와 열처리 온도에 따른 박막의 특성 변화)

  • Jiha Seong;Hyungmin Kim;Seongmin Shin;Kyunghwan Kim;Jeongsoo Hong
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.37 no.3
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    • pp.253-260
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    • 2024
  • In this study, ITO thin films were fabricated on a glass substrate at different thicknesses without introducing oxygen using RF sputtering system. The structural, electrical, and optical properties were evaluated at various thicknesses ranging from 50 to 300 mm. As the thickness of deposited ITO thin film become thicker from 50 to 100 mm, carrier concentration, mobility, and band gap energy also increased while the resistivity and transmittance decreased in the visible light region. When the film thickness increased from 100 to 300 mm, the carrier concentration, mobility, and band gap energy decreased while the resistivity and transmittance increased. The optimum electrical properties were obtained for the ITO film 100 nm. After optimizing the thickness, the ITO thin films were post-annealed at different temperatures ranging from 100 to 300℃. As the annealing temperature increased, the ITO crystal phase became clearer and the grain size also increased. In particular, the ITO thin film annealed at 300℃ indicated high carrier concentration (4.32 × 1021 cm-3), mobility (9.01 cm2/V·s) and low resistivity (6.22 × 10-4 Ω·cm). This means that the optimal post-annealing temperature is 300℃ and this ITO thin film is suitable for use in solar cells and display application.

Selenization of CIG Precursors Using RTP Method with Se Cracker Cell

  • Kang, Young-Jin;Song, Hye-Jin;Cho, You-Suk;Yoon, Jong-Man;Jung, Yong-Deuk;Cho, Dea-Hyung;Kim, Ju-Hee;Park, Su-Jung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.426-426
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    • 2012
  • The CIGS absorber has outstanding advantages in the absorption coefficient and conversation efficiency. The CIGS thin film solar cells have been researched for commercialization and increasing the conversion efficiency. CIG precursors were deposited on the Mo coated glass substrate by magnetron sputtering with multilayer structure, which is CuIn/CuGa/CuIn/CuGa. Then, the metallic precursors were selenized under high Se pressure by RTP method which included. Se vapor was supplied using Se cracker cell instead of toxic hydrogen selenide gas. Se beam flux was controlled by variable reservoir zone (R-zone) temperature during selenization process. Cracked Se source reacted with CIG precursors in a small quantity of Se because of small size molecules with high activation energy. The CIGS thin films were studied by FESEM, EDX, and XRD. The CIGS solar cell was also developed by layering of CdS and ZnO layers. And the conversion efficiency of the CIGS solar cell was characterization. It was reached at 6.99% without AR layer.

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Patterned Arrays of Well-Ordered ZnO Nanorods Assisted with Polystyrene Monolayer By Oxygen Plasma Treatment

  • Choi, Hyun Ji;Lee, Yong-Min;Lee, Yulhee;Seo, Hyeon Jin;Hwang, Ki-Hwan;Kim, Dong In;Yu, Jung-Hoon;Kim, Jee Yun;Nam, Sang Hun;Boo, Jin-Hyo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.146-146
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    • 2016
  • Zinc Oxide (ZnO) was known as a promising material for surface acoustic wave devices, gas sensors, optical devices and solar cells due to piezoelectric material, large band gap of 3.37 eV and large exciton binding energy of 60 meV at room temperature. In particular, the alignment of ZnO nanostructures into ordered nanoarrays can bring about improved sensitivity of devices due to widen the surface area to catch a lot of gas particle. Oxygen plasma treatment is used to specify the nucleation site of round patterned ZnO nanorods growth. Therefore ZnO nanorods were grown on a quartz substrate with patterned polystyrene monolayer by hydrothermal method after oxygen plasma treatment. And then, we carried out nanostructures by adjusting the diameter of the arranged ZnO nanorods according to polystyrene spheres of various sizes. The obtained ZnO nanostructures was characterized by X-ray diffraction (XRD), Field emission scanning electron microscopy (FE-SEM).

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Study on Indium-free and Indium-reduced thin film Solar absorber materials for photovoltaic application

  • Kim, Kyoo-Ho;Wibowo, Rachmat Adhi
    • New & Renewable Energy
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    • v.3 no.4
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    • pp.54-62
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    • 2007
  • In this paper, we report the research highlight on the preparation and characterization of Indium-free $Cu_2ZnSnSe_4$ and Indium-reduced $CulnZnSe_2$ thin films in order to seek the viability of these absorber materials to be applied in thin film solar cells. The films of $Cu_2ZnSnSe_4\;and\;CulnZnSe_2$ were prepared using mixed binary chalcogenides powders. It was observed that Cu concentration was a function of substrate temperature as well as CuSe mole ratio in the target. Under an optimized condition, $Cu_2ZnSnSe_4\;and\;CulnZnSe_2$ thin films grew with strong [112]. [220/204] and [312/116] reflections. Both $Cu_2ZnSnSe_4\;and\;CulnZnSe_2$ films were found to exhibit a high absorption coefficient of $104^4cm^{-1}\;Cu_2ZnSnSe_4$ film showed a band gap of 1.5eV which closes to the optimum band gap of an ideal solar absorber for a solar cell. On the other side, an increase of optical band gap from 1.0 to 1.25eV was found to be proportional with an increase of Zn concentration in the $CulnZnSe_2$ film. All films in this study revealed a p-type semiconductor characteristic.

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Optimization of process parameters for improvement of electrical properties of ITiO film (ITiO박막의 전기적 특성 향상을 위한 공정변수의 최적화)

  • Choi, Woo-Jin;Sung, Youl-Moon;Kwak, Dong-Joo
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.1430-1431
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    • 2011
  • To develope the transparent conducting oxide(TCO) films is one of the essential technologies to improve various properties of electro-optical devices such as dye-sensitized solar cells(DSCs). ITiO thin film is considered one of the candidates as TCO electrodes of DSCs because it shows many advantages such as the high transparency in long wavelength range above 700nm and excellent properties of electrical necking between nanoporous TiO2 and ITiO transparent electrode. This paper presents the effect of sputtering processes on the structural, electrical and optical properties of ITiO thin film deposited by r.f. magnetron sputtering. The effect of doping concentration of Ti on the chemical compounds and C axis-orientation properties of were mainly studied experimentally. The morphology and electrical properties were greatly influenced by deposition processes, especially by the doping concentration of Ti. The $3.8{\times}10^{-4}{\Omega}{\cdot}cm$ of minimum volume resistivity were obtained under the experimental conditions of gas pressure 7mTorr, substrate temperature $300^{\circ}C$, and 2.5% of Ti doping concentration.

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Reflectivity Improvement by Particle Neutralization in a Charged Particle-Type Electronic Display

  • Kim, Young-Cho
    • Transactions on Electrical and Electronic Materials
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    • v.14 no.1
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    • pp.36-38
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    • 2013
  • Eight sample panels using an indium tin oxide(ITO)-coated glass substrate were fabricated, with barrier ribs formed of 55 ${\mu}m$ height and 10 ${\mu}m$ width. The upper and lower substrates were designed with the same panel condition, so a cell gap of 110 ${\mu}m$ was obtained. The charged particles in a cell consisted of $TiO_2$ (for white color) or carbon black (black color), negative or positive charge control agents, and a polymer. The average diameter of the two types of particles was commonly 10 ${\mu}m$, and their q/m value was -4.5 ${\mu}C/g$ and +4.5 ${\mu}C/g$, respectively. The electrically opposite particles mixed by an agitator were loaded into their cells by a simple particle-loading method. The discharging process proceeded at a humidity of 80% and a temperature of $30^{\circ}C$. Reflectivity was measured depending on discharging time, and a hysteresis curve by bias voltage obtained for comparison between the neutralized and non-neutralized panel, in which the superior optical property of the neutralized panel was ascertained.

A study on optimization of front TCO for a-Si:H/c-Si heterojunction solar cells (a-Si:H/c-Si 이종접합 태양전지용 전면 투명전도막 최적화 연구)

  • Jeong, Daeyoung;Song, Junyong;Kim, Kyungmin;Park, Joo Hyung;Song, Jinsoo;Lee, Hi-Deok;Lee, JeongChul
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.05a
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    • pp.129.1-129.1
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    • 2011
  • a-Si:H/c-Si 구조의 이종접합 태양전지 전면 투명전도막으로 Indium tin oxide(ITO) 박막의 조건에 따라 태양전지 특성을 연구하였다. ITO 박막은 파우더 타겟으로 마그네트론 스퍼터링 방식으로 성막하였고, 증착 온도(Ts)에 따라 전기적, 광학적 특성을 비교, 분석하였다. 기판 증착 온도가 증가할수록 박막의 저항이 낮아지는 것으로 나타났으며 $350^{\circ}C$ 조건에서 가장 낮은 저항($34.2{\Omega}$/sq)을 보였다. 투과도 또한 기판 증착 온도가 올라갈수록 전반적인 향상을 나타냈다. a-Si:H/c-Si 기판의 MCLT(minority carrier lifetime)는 $350^{\circ}C$에서 최적($359{\mu}s$)의 결과를 나타냈다. 그 이상의 기판 온도에서는 오히려 감소하였는데, 이는 높은 온도에서의 a-Si:H/c-Si 계면의 열손상으로 판단된다.

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Recombinant Expression and Enzyme Activity of Chymotrypsin-like Protease from Black Soldier Fly, Hermetia illucens (Diptera: Stratiomyidae)

  • Park, Kwan Ho;Choi, Young Cheol;Nam, Sung Hee;Kim, Won Tae;Kim, A Young;Kim, Sin Young
    • International Journal of Industrial Entomology and Biomaterials
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    • v.25 no.2
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    • pp.181-185
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    • 2012
  • Chymotrypsin serine protease is one of the main digestive proteases in the midgut of and is involved in various essential processes. In a previous study, a gene encoding a chymotrypsin-like protease, Hi-SP1, was cloned from the larvae of Hermetia illucens and characterized. In this study, we produced the recombinant chymotrypsin-like protease Hi-SP1 in Escherichia coli cells. The molecular weight of the recombinant Hi-SP1 was estimated to be approximately 26 kDa by sodium dodecyl sulfate-polyacrylamide gel electrophoresis and Western-blotting. Chymotrypsin activity was detected when AAPF was used as the substrate. Examination of the effects of temperature and pH revealed that the proteolytic activity of recombinant Hi-SP1 decreased markedly at temperatures above $30^{\circ}C$, and the optimum pH was found to be 10.0.

Characterization of Proteus vulgaris K80 Lipase Immobilized on Amine-Terminated Magnetic Microparticles

  • Natalia, Agnes;Kristiani, Lidya;Kim, Hyung Kwoun
    • Journal of Microbiology and Biotechnology
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    • v.24 no.10
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    • pp.1382-1388
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    • 2014
  • Proteus vulgaris K80 lipase was expressed in Escherichia coli BL21 (DE3) cells and immobilized on amine-terminated magnetic microparticles (Mag-MPs). The immobilization yield and activity retention were 84.15% and 7.87%, respectively. A homology model of lipase K80 was constructed using P. mirabilis lipase as the template. Many lysine residues were located on the protein surface, remote from active sites. The biochemical characteristics of immobilized lipase K80 were compared with the soluble free form of lipase K80. The optimum temperature of K80-Mag-MPs was $60^{\circ}C$, which was $20^{\circ}C$ higher than that of the soluble form. K80-Mag-MPs also tended to be more stable than the soluble form at elevated temperatures and a broad range of pH. K80-Mag-MP maintained its stable form at up to $40^{\circ}C$ and in a pH range of 5.0-10.0, whereas soluble K80 maintained its activity up to $35^{\circ}C$ and pH 6.0-10.0. K80-Mag-MPs had broader substrate specificity compared with that of soluble K80. K80-Mag-MPs showed about 80% residual relative activity after five recovery trials. These results indicate the potential benefit of K80-Mag-MPs as a biocatalyst in various industries.