• Asian Journal of Atmospheric Environment
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• 제11권2호
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• pp.131-137
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• 2017

A cyclone is an effective tool to facilitate the collection of aerosol particles without using filters, and in cell exposure studies is able to collect a sufficient amount of aerosol particles to evaluate their adverse health effect. In this study, we examined two different methods to improve the aerosol particle collection efficiency of a cyclone. The individual and combined effects of reducing the surface roughness of the inner wall of the cyclone and of using a circular cone attachment were tested. The collection efficiency of particles of diameter $0.2{\mu}m$ was improved by approximately 10% when using a cyclone with a smoothened inner wall (average roughness $Ra=0.08{\mu}m$) compared with the original cyclone ($Ra=5.1{\mu}m$). A circular cone attachment placed between the bottom section of the cyclone and the top section of a collection bottle, resulted in improved collection of smaller particles without the attachment. The 50% cutoff diameter of the modified cyclone (combined use of smoothened inner wall and attachment) was $0.23{\mu}m$ compared to $0.28{\mu}m$ in the original model. The combined use of these two techniques resulted in improved collection efficiency of aerosol particles.

• 한국입자에어로졸학회지
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• 제4권2호
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• pp.37-50
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• 2008

Concerns on centrifugal classifiers, of which have cut sizes are below few micrometers, have been increased and it is prospected to be used in extensive industries, such as manufacturing the fine minerals, cosmetics, advanced electric materials, and life science. This paper reviews the recent progress of research and development on the centrifugal classifiers. General categorization of classifiers for feeds was assessed and separation mechanism of the classifiers was followed. History of centrifugal classifiers was explored and some points to be improved were briefly indicated. Fundamental theory of the classification by centrifugal classifiers was pearly studied, and advanced and further understandings on factors affecting the separation or grading efficiency are described. Factors determining the classification precision and efficiency of centrifugal classifiers, such as geometry, rotational speed and inclined angle of rotating vanes, feed and air flow rates, and rotor dimensions are reviewed.

• 한국대기환경학회지
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• 제31권6호
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• pp.530-537
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• 2015

The wet electrostatic precipitator (wet ESP) is an effective control device which removes submicron particles reentrained in a collection plate and water soluble gas. However, its collection efficiency decreases, as its operation is subject to water-induced distortion of the collection electrode. In order to make up for the limitation, we modified the wet ESP system by installing electrosprayed discharge electrodes. The modified wet ESP system can wash both the collection plate and discharge electrode. As a result, we were able to fabricate a compact wet ESP with a small specific collecting area ($0.18m^2(m^3/min)$) that can accomplish a high collection efficiency of fine particles (97.1%). In addition, the device obtained a relatively low specific corona power of approximately $10W/(m^3/min)$.

• 대한기계학회논문집B
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• 제24권7호
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• pp.1002-1009
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• 2000

Among the various types of diesel after-treatment device, the corona discharge reactor may be considered as a powerful process for trapping submicron particles. But after precipitation on the electrodes occurs, the reentrainment of particles is severe and often causes low or negative precipitation efficiency. Experiments were performed to investigate the effect of an applied voltage on the reentrainment of soot particles from the electrodes. A co-annular laminar diffusion flame burner was used as the soot generator. When a highly negative voltage was applied, exfoliation of the deposited soot particles and an increase in concentration of particles smaller than approximately 150 nm were observed. Turbulence induced from the negative tuft corona and sputtering caused particle reentrainment from the corona wire and from plates as well. Under soot laden combustion gas, a streamer corona often occurred in the wire-cylinder reactor. Because of its transient nature, streamer corona violently increased the concentration of reentrained particles and CO gas.

• Transactions on Electrical and Electronic Materials
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• 제7권4호
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• pp.167-172
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• 2006

Submicron colloidal silica coated with ceria were prepared by mixing of silica and nano ceria particles and modified by hydrothermal reaction. The polishing efficiency of the ceria coated silica slurry was tested over oxide film on silicon wafer. By changing the polishing pressure in the range of $140{\sim}420g/cm^2$ with the ceria coated silica slurries in $100{\sim}300nm$, rates, WIWNU and friction force were measured. The removal rate was in the order of 200, 100, and 300 nm size silica coated with ceria. It was known that the smaller particle size gives the higher removal rate with higher contact area in Cu slurry. In the case of oxide film, the indentation volume as well as contact area gives effect on the removal rate depending on the size of abrasives. The indentation volume increase with the size of abrasive particles, which results to higher removal rate. The highest removal rate in 200 nm silica core coated with ceria is discussed as proper combination of indentation and contact area effect.

• 반도체디스플레이기술학회지
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• 제22권2호
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• pp.17-23
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• 2023

In semiconductor manufacturing processes, a cleaning process is important that can remove sub-micron particles. Conventional wet cleaning methods using chemical have limits in removing nano-particles. Thus, physical forces of a mechanical vibration up to 1 MHz frequency, was tried to aid in detaching them from the substrates. In this article, we developed a 1 MHz quartz megasonic for a bare wafer cleaning using finite element analysis. At first, a 1 MHz megasonic prototype was manufactured. Using the results, a main product which can improve a particle removal performance, was analyzed and designed. The maximum impedance frequency was 992 kHz, which agreed well with the experimental value of 986 kHz (0.6% error). Acoustic pressure distributions were measured, and the result showed that maximum / average was 400.0~432.4%, and standard deviation / average was 46.4~47.3%. Finally, submicron particles were deposited and cleaned for the assessment of the system performance. As a result, the particle removal efficiency (PRE) was proved to be 92% with 11 W power. Reflecting these results, the developed product might be used in the semiconductor cleaning process.

• 한국세라믹학회지
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• 제30권4호
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• pp.325-331
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• 1993

Aqueous solutions of metallic salts, ZrO(NO3)2.2H2O and Y(NO3)3.5H2O were used as raw materials to synthesize crystalline submicron spherical powders of Zr0.94Y0.06O1.97 with tetragonal crystal phase. Each aqueous solution was mixed on the magnetic stirrer to homogenize for 12 hours. The concentration of the mixed solutionwas changed from 0.01mol/$\ell$ to 0.1mol/$\ell$ calculated as the concentration of Zr0.94Y0.06O1.97. Ultrafine droplets of starting mixed solution were sprayed by the ultrasonic vibrator and carried into the furnace kept at 55$0^{\circ}C$, $650^{\circ}C$, 75$0^{\circ}C$ and 85$0^{\circ}C$ using carrier gas of air (10$\ell$/min) and pyrolysed to form Y-TZP fine powders. The results of this exeriment were as follows. 1) Synthesized powders were nonagglomerated and spherical type. 2) Particle size distribution was narrow between 0.1${\mu}{\textrm}{m}$ and 1${\mu}{\textrm}{m}$. 3) Forming reaction Y-TZP was finished above synthetic temperature 75$0^{\circ}C$. 4) As the synthetic temperature rised from 55$0^{\circ}C$ to 85$0^{\circ}C$, the mean particle size decreased from 0.35${\mu}{\textrm}{m}$ to 0.22${\mu}{\textrm}{m}$ in the concentration of starting solution with 0.02mol/$\ell$. 5) At 75$0^{\circ}C$ of synthetic temperature, the concentration changes of starting solution from 0.01mol/$\ell$ to 0.1mol/$\ell$ increased the mean particle size from 0.24${\mu}{\textrm}{m}$ to 0.38${\mu}{\textrm}{m}$. 6) Chemical compositions of each synthesized particle were homogeneous nearly.

• 한국분무공학회지
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• 제25권4호
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• pp.162-169
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• 2020

The worldwide focus on reducing the emissions, fuel and lubricant consumption in T-GDI engines is leading engineers to consider the crankcase ventilation and oil mist separation system as an important means of control. In today's passenger cars, the oil mist separation systems mainly use the inertia effect (e.g. labyrinth, cyclone etc.). Therefore, this study has investigated high efficiency cylinder head-integrated oil-mist separator by using a compact multi-impactor type oil mist separator system to ensure adequate oil mist separation performance. For this purpose, engine dynamometer testing with oil particle efficiency measurement equipment and 3D two-phase flow simulation have been performed for various engine operating conditions. Tests with an actual engine on a dynamometer showed oil aerosol particle size distributions varied depending on operating conditions. For instance, high rpm and load increases bot only blow-by gases but the amount of small size oil droplets. Submicron-sized particles (less than 0.5 ㎛) were also observed. It is also found that the impactor type separator is able to separate nearly no droplets of diameter lower than 3 ㎛. CFD results showed that the complex aerodynamics processes that lead to strong impingement and break-up can strip out large droplets and generate more small size droplets.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집D
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• pp.85-90
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• 2001

This work presents experimental results of filter media test by using particles from $0.02\;to\;0.6{\mu}m$ in diameter and by applying different charging states. In order to investigate the electret filter performance, the collection efficiency and the pressure drop of filter were measured. The face velocities of test filters varied from 2.4 to 20.4 cm/s. Another experiment setup for the cartridge cabin air filter was used to get an collection efficiency in submicron region. After charging level of electret filter severely decreased, the change of collection efficiency was verified. Experimental results show that the reliability of electret filters can be poor in some conditions.

• 한국세라믹학회지
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• 제25권5호
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• pp.50-50
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• 1988

Ti(OC2H5)4 농도, 물량, 용매, alcohol을 변화시켜 가수분해 반응 특성을 검토하였으며 submicron 구형 단분산 분말을 합성하기 위하여 연구를 수행하였다. TEOT 농도와 물량이 증가하면 가수분해 반응속도는 빨라지며 생성입자 size는 작아졌다. TEOT 농도가 0.1~-0.2 M, 물량이 3배일때 양호한 구형 단분산 분말을 얻을 수 있었다. 용매 alcohol의 탄소가지수가 많거나 탄소가지수가 길어지면 가수분해 반응속도는 늦어짐을 알 수 있었다. 제조된 TiO2분말의 평균입경은 0.8㎛ 정도의 구형단분산 입자이며 가열시 결정상은 550℃ 이상에서 Rutile을 확인할 수 있었으며 입자 size도 0.6~0.7 u로 감소하였다.