• Journal of Surface Science and Engineering
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• v.54 no.6
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• pp.365-370
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• 2021

In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y₂O₃ coated parts used for semiconductor and display plasma process equipment. CF₄, O₂, and Ar mixed gas were used for the plasma environment, and respective alconox, surfactant, and piranha solution was used for the cleaning process. After APS-Y₂O₃ was exposed to CF₄ plasma, the surface changed from Y₂O₃ to YF₃ and a large amount of carbon was deposited. For this reason, the plasma corrosion resistance was lowered and contamination particles were generated. We performed a cleaning process to remove the defect-inducing surface YF₃ layer and carbon layer. Among three cleaning solutions, the piranha cleaning process had the highest detergency and the alconox cleaning process had the lowest detergency. Such results could be confirmed through the etching amount, morphology, composition, and accumulated contamination particle analysis results. Piranha cleaning process showed the highest detergency, but due to the very large thickness reduction, the base metal was exposed and a large number of contaminated particles were generated. In contrast, the surfactant cleaning process exhibit excellent properties in terms of surface detergency, etching amount, and accumulated contamination particle analysis.

• Journal of Environmental Science International
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• v.15 no.3
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• pp.193-201
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• 2006

Advanced oxidation processes involving $O_3/H_2O_2$ and $O_3/catalyst$ were used to compare the degradability and the effect of pH on the oxidation of 1,4-dioxane, Oxidation processes were carried out in a bubble column reactor under different pH. Initial hydrogen peroxide concentration was 3.52 mM in $O_3/H_2O_2$ process and 115 g/L (0.65 wt.%) of activated carbon impregnated with palladium was packed in $O_3/catalyst$ column. 1,4-dioxane concentration was reduced steadily with reaction time in $O_3/H_2O_2$ oxidation process, however, in case of $O_3/catalyst$ process, about $50{\sim}75%$ of 1,4-dioxane was degraded only in 5 minutes after reaction. Overall reaction efficiency of $O_3/catalyst$ was also higher than that of $O_3/H_2O_2$ process. TOC and $COD_{cr}$ were analyzed in order to examine the oxidation characteristics with $O_3/H_2O_2\;and\;O_3/catalyst$ process. The results of $COD_{cr}$ removal efficiency and ${\Delta}TOC/{\Delta}ThOC$ ratio in $O_3/catalyst$ process gave that this process could more proceed the oxidation reaction than $O_3/H_2O_2$ oxidation process. Therefore, it was considered that $O_3/catalyst$ advanced oxidation process could be used as a effective oxidation process for removing non-degradable toxic organic materials.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.3
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• pp.190-194
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• 2003

Dielectric thin films of (P $b_{0.72}$,L $a_{0.28}$) $Ti_{0.93}$ $O_3$ (PLT(28)) have been deposited on Pt(111)/Ti/ $SiO_2$/Si(100) substrates in-situ by pulsed laser deposition using different annealing and deposition Processes. We have investigated the effect of hydrogen annealing on the ferroelectric properties of PLT thin films and found that the annealing process causes the diffusion of hydrogen into the ferroelectric film resulting in the destruction of polarization. We have tried to form the film by a two-step deposition process In order to improve electrical property. Two-step process to grow PLT films was adopted and verified to be useful to enlarge the grain size of the film and to reduce the leakage current characteristics. Structural properties and electrical properties including dielectric constant, ferroelectric characteristics, and leakage current of PLT thin films were shown to be strongly influenced by grain size. The film deposited by using two-step Process including pre-annealing treatment has a strongly(111) orientation. However, the films deposited by using single -step process with hydrogen annealing process show the smallest grain size. The film deposited by using two-step process including pre-annealing treatment shows the leakage current density of below 10$^{-7}$ A/c $m^2$ for the field of smaller than 100 kV/cm. However, the films deposited by using single-step process with hydrogen annealing process and pre-annealing process show worse leakage current density than the film deposited by using two-step process including pre-annealing treatment.tment.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.33 no.6
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• pp.515-520
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• 2020

The Ti₃SiC₂ MAX phase was synthesized by arc-melting process under three different processing times. We confirmed that the reaction between the TiC_X phase and Ti-Si liquid phase is important for the synthesis of the Ti₃SiC₂ MAX phase. Results suggest that the Ti₃SiC₂ MAX phase decomposed when the arc-melting time was greater than 80s. Herein, we aim to determine the detailed parameters for the reported arc-melting process, which can provide useful insights on the synthesis of the Ti₃SiC₂ MAX phase by arc-melting process. Furthermore, we compared the electrical characteristics and densities of the three samples.

• Journal of the Semiconductor & Display Technology
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• v.23 no.1
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• pp.92-96
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• 2024

The application of the technology for forming Al₂O₃ thin films using ALD(atomic layer deposition) method is rapidly increasing in the semiconductor and display fields. In order to increase the efficiency of the ALD process in a mass production line, metallic by-products generated from the ALD process chamber must be effectively collected. By collecting by-products flowing out of the chamber with a cold trap device before they go to the vacuum pump, damage to the vacuum pump can be prevented and the work room can be maintained stably, resulting in increased process flow rate. In this study, a cold trap was installed between the ALD process chamber and the dry pump to measure and analyze by-products generated during the Al₂O₃ thin film deposition process. As a result, it was confirmed that Al and O elements were discharged, and the collection forms were two types: bulk and powder. And the binding energy peaked at 73.7 ~ 74.3 eV, the binding energy of Al 2p, and 530.7 eV, the binding energy of O 1s, indicating that the binding structure was Al-O.

• Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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• v.22 no.2
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• pp.159-171
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• 2024

This study aimed to develop an efficient recycling process for wastewater generated from soil-washing used to remediate uranium (U(VI))-contaminated soil. Under acidic conditions, U(VI) ions leached from the soil were precipitated and separated through neutralization using hydrazine (N₂H₄). N₂H₄, employed as a pH adjuster, was decomposed into nitrogen gas (N₂), water (H₂O), and hydrogen ions (H⁺) by hydrogen peroxide (H₂O₂). The residual N₂H₄ was precipitated when the pH was adjusted using sulfuric acid (H₂SO₄) to recycle the wastewater in the soil-washing process. This purified wastewater was reused in the soil-washing process for a total of ten cycles. The results confirmed that the soil-washing performance for U(VI)-contaminated soil was maintained when using recycled wastewater. All in all, this study proposes an efficient recycling process for wastewater generated during the remediation of U(VI)-contaminated soil.

• Journal of Powder Materials
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• v.31 no.1
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• pp.50-56
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• 2024

We report the effect of plastic deformation on the thermoelectric properties of n-type Bi₂Te_2.5Se_0.5 compounds. N-type Bi₂Te_2.5Se_0.5 powders are synthesized by an oxide-reduction process and consolidated via spark-plasma sintering. To explore the effect of plastic deformation on the thermoelectric properties, the sintered bodies are subjected to uniaxial pressure to induce a controlled amount of compressive strains (-0.2, -0.3, and -0.4). The shaping temperature is set using a thermochemical analyzer, and the plastic deformation effect is assessed without altering the material composition through differential scanning calorimetry. This strategy is crucial because the conventional hot-forging process can often lead to alterations in material composition due to the high volatility of chalcogen elements. With increasing compressive strain, the (00l) planes become aligned in the direction perpendicular to the pressure axis. Furthermore, an increase in the carrier concentration is observed upon compressive plastic deformation, i.e., the donor-like effect of the plastic deformation in n-type Bi₂Te_2.5Se_0.5 compounds. Owing to the increased electrical conductivity through the preferred orientation and the donor-like effect, an improved ZT is achieved in n-type Bi₂Te_2.5Se_0.5 through the compressive-forming process.

• Journal of Powder Materials
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• v.29 no.1
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• pp.41-46
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• 2022

In this study, we report the microstructure and characteristics of Ag-SnO₂-Bi₂O₃ contact materials using a controlled milling process with a subsequent compaction process. Using magnetic pulsed compaction (MPC), the milled Ag-SnO₂-Bi₂O₃ powders have been consolidated into bulk samples. The effects of the compaction conditions on the microstructure and characteristics have been investigated in detail. The nanoscale SnO₂ phase and microscale Bi2O3 phase are well-distributed homogeneously in the Ag matrix after the consolidation process. The successful consolidation of Ag-SnO₂-Bi₂O₃ contact materials was achieved by an MPC process with subsequent atmospheric sintering, after which the hardness and electrical conductivity of the Ag-SnO₂-Bi₂O₃ contact materials were found to be 62-75 HV and 52-63% IACS, respectively, which is related to the interfacial stability between the Ag matrix, the SnO₂ phase, and the Bi₂O₃ phase.

• Journal of Institute of Convergence Technology
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• v.12 no.1
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• pp.19-23
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• 2022

Interest in hydrogen production to respond to climate change is increasing. Until now, hydrogen has been mainly produced through the SMR (Steam Methane Reforming) process using natural gas. A large amount of CO₂ is emitted in the hydrogen production process through SMR, and the gas flow including CO₂ generated in the SMR process has different characteristics for each emission source, so it is important to apply a suitable CO₂ capture process. In the case of PSA tail gas or synthesis gas, the applicability of an amine-based process has been confirmed or demonstrated close to a commercial level. However, in the case of the flue gas generated from the reformer, it is still difficult to apply the conventional amine-based process because the partial pressure of CO₂ is relatively low. Energy-saving innovative absorbents such as phase separation absorbents can be a solution to these difficulties.

• Transactions on Electrical and Electronic Materials
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• v.17 no.4
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• pp.204-207
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• 2016

Experimental study of UV-irradiated O₂/H₂ gas phase cleaning for PMMA (Polymethylmethacrylate) removal is carried out in a load-locked reactor equipped with a UV lamp and PBN heater. UV enhanced O₂/H₂ gas phase cleaning removes polymethylmethacrylate (PMMA) better at lower process pressure with higher content of H₂. O₂ gas compete for UV (184.9 nm) absorption with PMMA producing O₃, O(¹D) and lower dissociation of PMMA. In our experimental conditions, etching reaction of PMMA at the substrate temperature between 75℃ and 125℃ had activation energy of about 5.86 kcal/mol indicating etching was controlled by surface reaction. Above the 180℃, PMMA removal was governed by a supply of reaction gas rather than by substrate temperature.