• Applied Microscopy
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• v.39 no.2
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• pp.175-183
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• 2009

In this paper we present sub-50 pm resolution images of atom columns simulated with the negative of the second derivative of the exit-plane wave function (EPW). The EPW can be retrieved from a focal series reconstruction in the (high resolution) transmission electron microscopy (HRTEM). The simulated images are for Si and InAs in [114] and [116] orientations, which give about sub-50 pm separations of atom columns. The theoretical reason for the validity of this method is given from analysis based on the kinematical diffraction theory, and the limitation for applicability of this method also is discussed.