Applied Microscopy

Korean Society of Microscopy (한국현미경학회)
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Simulated Images of the Second Derivative of the Exit-plane Wavefunction Giving Sub-50 pm Resolutions in HRTEM

HRTEM에서 50 pm 이하 분해를 주는 결정 밑 표면 파동함수의 2차 도함수의 시뮬레이션 영상들

  • 김황수 (경성대학교 이과대학 물리학과)
  • Received : 2009.05.12
  • Accepted : 2009.06.22
  • Published : 2009.06.30
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Abstract

In this paper we present sub-50 pm resolution images of atom columns simulated with the negative of the second derivative of the exit-plane wave function (EPW). The EPW can be retrieved from a focal series reconstruction in the (high resolution) transmission electron microscopy (HRTEM). The simulated images are for Si and InAs in [114] and [116] orientations, which give about sub-50 pm separations of atom columns. The theoretical reason for the validity of this method is given from analysis based on the kinematical diffraction theory, and the limitation for applicability of this method also is discussed.

이 논문에서 50 pm 이하의 원자열 분해상을 효과적으로 보여 주는 결정 밑 표면 파동함수(EPW)의 음(-)의 2차 도함수의 시뮬레이션 영상들이 나타나 있다. 그리고 해당 EPW는 HRTEM에서 일련의 비 초점 단계의 관찰 영상으로부터 얻을 수 있다. 이 논문에 나타난 시뮬레이션한 영상들은 대체로 50 pm 이하의 원자열 간격을 주는 Si과 InAs의 [114] 및 [116] 방위 축에 대한 것이다. 이 방법의 정당성에 대한 이론적 이유가 운동학적 회절이론을 기초로 한 분석에서 주어졌다. 그리고 그 응용성의 한계도 논의되었다.

Keywords

References

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