• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2012년도 추계학술대회 논문집
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• pp.792-798
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• 2012

This study shows the vibration characteristics of an actuator with six wire-suspensions, used in optical pickups of optical disc drives (ODDs). In this paper, the vibration characteristics of this beam structure is induced mathematically. To obtain vibration modes of focusing direction, the vibration analysis is achieved in lateral and longitudinal directions of the structure. The accuracy of induced vibration characteristics is proved by comparing mode frequencies with a finite element analysis. Finally, it is shown that mode shapes can be modified by changing design parameters in mathematical expressions.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1998년도 제13차 학술회의논문집
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• pp.1-7
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• 1998

Robots utilized in the field of welfare or agriculture should be light in weight and flexible in structure. A pneumatic actuator has properties such that it is more powerful compared with a motor of same weight, and that it is flexible, clean and unexplosive. In this paper we propose a new structure of the pneumatic actuator with two-degree-of-freedom. By using proposed pneumatic actuators, we can easily construct multi-degree-of-freedom pneumatic manipulators. Here we constructed a fourteen-degree-of-freedom pneumatic dual manipulator. The performance of the dual manipulators is confirmed through experiments for ball-handling with impedance control. In the experiments several control schemes, including the decentralized control and the simple adaptive control (SAC), were used. The results show that a flexibility of the pneumatic actuator is appropriate to accomplish the coordinative motion of the right and left arms of the robot.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2005년도 추계종합학술대회
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• pp.913-916
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• 2005

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 V with a 50 % duty cycle, maximum non-linearity was 2.24 % FS and leak rate was $3.03{\times}10^{-8}pa$. $m^3/cm^2$.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.118-122
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. For composition of this technology, the development of system with high speed and high resolution is needed. At start point and end position vibration must be repressed on this system for composition of position control. This vibration is arisen nose, is increased setting time, is reduced accuracy. Especially, repressed for the lead with high speed. The small actuator with high speed and high resolution is need to repression against this residual vibration. This actuator is, for example, piezo actuator, piezoelectric material that converting from electronic signal to mechanical force is adequate material, beacause of control of control to position and force. In this study, piezo electric material is used to actuator, ultra precision positioning apparatus with stage of hinge structure is designed, simulation is performed, control performance is tested by producing apparatus. For easy usage and stability in industrial field, we perform to simulation and to position control test by digital PID controller.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 춘계학술대회 논문집 반도체 재료 센서 박막재료 전자세라믹스
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• pp.129-132
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• 2004

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 V with a 50 % duty cycle, maximum non-linearity was 2.24 % FS and leak rate was $3.03{\times}10^{-8}\;pa{\cdot}m^3/cm^2$. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, a medical bio-system, automobile and air transportation industry.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 추계학술대회논문집
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• pp.424-429
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• 2003

This paper proposes a swing-arm type dual-stage actuator, which consists of a PZT actuator for fine motion and a VCM(Voice Coil Motor) for coarse motion, for SFF ODD(Small Form Factor Optical Disk Drive), in order to achieve fast access speed and precise track following control. We focus our attention on the design and control of the PZT actuator, because there have been a lot of previous researches related to the VCM and dual-stage actuators. Due to the dual cantilever structure, the PZT actuator can generate precise translational tracking motion at its tip where optical pickup is attached at, and the effect of hysteric behavior of the PZT element is reduced. The dynamic model of the PZT actuator is derived by using the Hamilton's principle, and verified by comparing with the experimental frequency response. The sliding mode control is designed in order to be robust against modeling uncertainties. Simulations and experimental results confirm the effectiveness of the suggested control scheme.

• 정보저장시스템학회논문집
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• 제1권2호
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• pp.121-126
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• 2005

Recently, an optical disc system has been proposed using blue laser diode, high NA objective lens and groove only disc structure. A new method is needed to readout CD and DVD in this Blu-Ray Disc Recorder. In order to readout CD and DVD in Blu-Ray Disc Recorder, we adopted dual-lenses actuator in consideration of optical utilization efficiency, optical performance and insurance of sufficient W.D(working distance). This dual-lenses actuator has two objectives in radial direction, one is for CD/DVD and the other is for BD. We had to solve the induced problems of collision between disc and lens, DC tilt increase, AC tilt increase, 2nd resonance deterioration and AC sensitivity drop caused by disposing two lenses in an actuator. Also we developed high response twin- objective actuator with radial tilt function to apply high-speed BD Recorder or BD Player. Consequently we presented that two kinds of dual-lenses actuators for BD Recorder have been possessed good performance in 3 axis directions. And we measured eye patterns of CD, DVD and BD by using one BD optical pick-up with dual-lenses actuator.

• 센서학회지
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• 제13권3호
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• pp.230-235
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• 2004

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 seem at a supplied voltage of 100 V with a 50% duty cycle, maximum non-linearity was 2.24% FS and leak rate was $3.03{\times}10^{-8}pa{\codt}m^{3}/cm^{2}$. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, a medical bio-system, automobile and air transportation industry.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.390-391
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• 2006

This paper describes the design, fabrication and characteristics of a micromachined piezoelectric valve utilizing a multilayer ceramic actuator (MCA). The micromachined MCA valve, which uses a buckling effect, consists of three separate structures: the MCA, the valve actuator die and the seat die. The valve seat die with 6 trenches was made, and the actuator die, which is driven by the MCA under optimized conditions, was also fabricated. After Si wafer direct bonding between the seat die and the actuator die, the MCA was also anodically bonded to the seat/actuator die structure. A polydimethylsiloxane (PDMS) sealing pad was fabricated to minimize the leak rate. Finally, the PDMS sealing pad was also bonded to the seat die and the stainless steel package. The MCA valve shows a flow rate of 9.13 sccm at an applied DC voltage of 100 V with a 50% duty cycle and a maximum non-linearity of 2.24% FS. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, as a medical bio-system and in the automobile industry.

• 제어로봇시스템학회논문지
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• 제10권2호
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• pp.192-196
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• 2004

A combined optimal design problem is discussed taking a 3-D truss structure as a design object. We use descriptor forms for a controlled object and a generalized plant because the structural parameters appear naturally in these forms. We consider not only the minimum weight design problem for the structure, but also the suppression problem of the effect of disturbances for the control system as the purpose of the design. A numerical example shows the validity of combined optimal design of the structure and control systems. We also consider the validity of the sensor-actuator collocation for the control system design in this paper.