• 한국전기전자재료학회논문지
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• 제17권5호
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• pp.515-520
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• 2004

We report on the development of a Piezoelectric valvc that is designed to have a high reliability for fluid control systems, such as mass flow control, transportation and chemical analysis. The valve was fabricated using a MCA(multilayer ceramic actuator), which has a low consumption power, high resolution and accurate control. The fabricated valve is composed of MCA, a valve actuator die and an seat die. The design of the actuator dic was done by FEM(finite element method) modeling, respectively. And, the valve seat die with 6 trenches was made. and the actuator die, which possible to optimize control to MCA, was fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the scat/actuator die structure. PDMS(poly dimethylsiloxane) sealing pad was fabricated to minimize a leak-rate. It was also bonded to scat die and stainless steel package. The flow rate was 9.13 sccm at a supplied voltage of 100 V with a 50 % duty ratio and non-linearity was 2.24 % FS. From these results, the fabricated MCA valve is suitable for a variety of flow control equipments, a medical bio-system, semiconductor fabrication process, automobile and air transportation industry with low cost, batch recess and mass production.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 추계학술대회논문집
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• pp.65-69
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• 2004

The small form factor optical data storage devices are developing rapidly nowadays. Since it is designed for portable and compatibility with flash memory, its components such as disk, head, focusing actuator, and spindle motor should be assembled within 5 m thickness. The thickness of focusing actuator is within 2 mm and the total working range is $+/-100{\mu}m$, with the resolution of less than $1{\mu}m$. Since the thickness is limited tightly, it is hard to place the yoke that closes the magnetic circuit and hard to make strong flux density without yoke. Therefore, Halbach array is adopted to increase the magnetic flux of one side without yoke. The proposed Halbach array type focusing actuator has the advantage of thin actuation structure with sacrificing less flux density than conventional magnetic array. The optical head unit is moved on the swing arm type tracking actuator. Focusing coil is attached to swing arm, and Halbach magnet array is positioned at the bottom of deck along the tracking line, and focusing actuator exerts force by the Fleming's left hand rule. The working range and resolution of focusing actuator are analyzed with FEM and experiment.

• International Journal of Aeronautical and Space Sciences
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• 제7권1호
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• pp.91-98
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• 2006

The thermomechanical behaviors of SMA thin film actuator and their application are investigated. The numerical algorithm of the 2-D SMA thermomechanical constitutive equation is developed and implemented into the ABAQUS finite element program by using the user defined material (UMAT) subroutine. To verify the numerical algorithm of SMAs, the results are compared with experimental data. For the application of SMA thin film actuator, the methodology to maintain the precise configuration of inflatable membrane structure is demonstrated.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2008년도 춘계학술대회논문집
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• pp.299-304
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• 2008

Dynamic characteristics of smart hull structure are investigated and active vibration control performance is evaluated. Dynamic model of smart hull structure with surface bonded Macro-fiber Composite (MFC) actuators is established by analytical method. Equations of motion of the host hull structure are derived based on Donnell-Mushtari equilibrium equations for a thin cylindrical shell. A general model for the interaction between hull structure and MFC actuator is included in the dynamic model. Modal analysis is then conducted and mode shapes and corresponding natural frequencies are investigated. After constructing of the optimal control algorithm, active vibration control performance of the proposed system is evaluated. It has been shown that structural vibration can be reduced effectively with proper control input.

• 한국소음진동공학회논문집
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• 제18권8호
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• pp.832-840
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• 2008

Dynamic characteristics of smart hull structure are investigated and active vibration control performance is evaluated. Dynamic model of smart hull structure with surface bonded macro-fiber composite(MFC) actuators is established by analytical method. Equations of motion of the host hull structure are derived based on Donnell-Mushtari equilibrium equations for a thin cylindrical shell. A general model for the interaction between hull structure and MFC actuator is included in the dynamic model. Modal analysis is then conducted and mode shapes and corresponding natural frequencies are investigated. After constructing of the optimal control algorithm, active vibration control performance of the proposed system is evaluated. It has been shown that structural vibration can be reduced effectively with proper control input.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1034-1037
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• 2003

Recently in the field of precision positioning device, the contact-free actuators are gaining focuses with their outstanding performances by eliminating mechanical frictions. Th is paper is about the driving algorithm for contact-free linear actuator. The proposed driving algorithm has similar structure of drives of switched reluctance motor and reduces the normal forces and force ripple. The simulation and experiment are executed to verify the proposed method.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 추계학술대회 논문집
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• pp.214-218
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• 2002

In recent years, precision positioning stage is demanded for some industrial fields such as semi-conductor lithography, ultra precision machining, and fabricating of nano structure. In this research, precision multi-axis positioning stage, which consists of pzt actuator, flexure, and capacitance gauge, is designed and developed. The performance of 3-axis positioning, characteristics of motion and resolution are verified.

• 소음진동
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• 제8권3호
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• pp.428-434
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• 1998

Optimal design of a piezoelectric smart structure is studied for cabin noise control. A cubic shaped acoustic cavity with a flat plate which covers one side is taken as the problem. The sensor signal is returned to the actuator through a negative gain. The acoustic cavity is modeled using the modal approach which represents the pressure fields in the cavity as a sum of mode shapes of the cavity with unknown coefficients. By using orthogonality of the mode shapes of the cavity, finite element equation for the structure with the influence of the acoustic cavity is derived. The objective function is the average pressure at a certain region, so-called silent zone, in the cavity and the design variables are the locations and sizes of the piezoelectirc actuator and sensor. The optimal design is performed at several frequencies and the results show a remarkable noise reduction. To see the robustness of the optimally designed result, the configuration is used to examine the noise reduction at different frequencies. By adjusting the gain at each frequencies, it is possible to reduce the noise in comparison with the result when the actuator is not activated.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 춘계학술대회논문집
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• pp.280-285
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• 2000

With recent development of technology of high stiffness material and the structural design, the construction of high rise structures such as tall building, tower has increased. The more flexible and slender structure is vulnerable to the internal and external dynamic loads induced by earthquake, wind and traffic load. There have been great effort and many researches to minimize the influence of dynamic loads on the structure. The traditional and stable method, the application of the passive damper, is not able to comply with various dynamic loads, while the mass damper which active control technology is integrated can effectively comply with load types. Therefore, the application of active control of huge structures with AMD(Active mass damper) or HMD(Hybrid Mass damper) is increasing. Up to now, most of actuators are servomotor and hydraulic actuator. But it is known that the electromagnetic actuator applies non contacting control force, which makes the control system easier with no characteristic change depending on time. In this paper, Hybrid mass damper with electromagnetic actuator was designed and applied to building scaled structure. The performance of designed HMD tested by shake table test is included.

• 한국소음진동공학회논문집
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• 제19권8호
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• pp.781-787
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• 2009

This research is concerned with the application of the active linear actuator to the active vibration control of structure. The active linear actuator will be mounted on the sub-frame so that it can cancel the excitation transferred from the engine. Accelerometer mounted on the sub-frame detects the vibration and its signal is fed into the DSP controller where the control algorithm is installed. The output of the DSP controller is connected to the driver which amplifies the DSP output. In general, the pulse width modulation power amplifier is used to drive the voice-coil type actuator. This study shows the dynamic characteristics of the active linear actuator and active vibration control experimental results.