• 반도체디스플레이기술학회지
• /
• 제2권2호
• /
• pp.25-30
• /
• 2003

In the case of a vibration sensitive equipment, it require a vibration free environment to provide its proper function. Especially, lithography and inspection device, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved Giga Class semi conductor wafers. This high technology equipments require very strict environmental vibration criteria in proportion to the accuracy of the manufacturing. In this paper, the dynamic analysis and modal test were performed to evaluate the dynamic properties of the constructing clean room structure. Based on these results, a structural dynamic modification(SDM) were required to satisfiy the vibration allowable limit for pression machine. Therefore, in order to improve the dynamic stiffness of clean room structure, the VSD system which can control the force applied on structure, were adopted and its utility were proved from dynamic test results of the improved structure after a modification work.

• 한국지반공학회논문집
• /
• 제15권5호
• /
• pp.57-64
• /
• 1999

근거리 발파에 의한 구조물 피해의 임계진동수준을 결정하기 위해 구조물의 기존 균열 변형과 지반 진동수준을 계측하였다. 구조물에 대한 발파진동의 피해를 평가하기 위해 일상적인 환경변화에 의한 기존 균열의 최대 변형량을 고려한 새로운 기준을 제시하였다. 본 실험에서 사용된 2 채의 농어촌 조적조 가옥에 대한 시험 결과를 보면, 구조물에 피해를 유발하기 위한 진동 수준은 설계 기준보다 훨씬 더 큰 수준임을 알 수 있다.

• 소음진동
• /
• 제9권6호
• /
• pp.1227-1233
• /
• 1999

Modern technology depends on the reliability of extremely high technology equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a nanometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. This paper deals with the structural dynamic design in high class semiconductor factory in order to be satisfied more strict vibration criteria for high sensitive equipment.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 1998년도 춘계학술대회논문집; 용평리조트 타워콘도, 21-22 May 1998
• /
• pp.302-307
• /
• 1998

In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be represented in the form of exactness and accuracy, because this is used as basic data for the design of building structure and structural dynamics of equipment. The study on the evaluation of the factors affecting the permissible vibration criteria is required to design the efficient isolation system of the semiconductor manufacturing of equipment. This paper deals with the properties of the effected factor for vibration criteria of high sensitive equipment.

• 한국전산구조공학회:학술대회논문집
• /
• 한국전산구조공학회 2004년도 가을 학술발표회 논문집
• /
• pp.43-51
• /
• 2004

As the slenderness ratio of a high-rise building increases, the lateral load resisting system for the building is more often determined by serviceability design criteria. In serviceability design, the maximum drift and the level of vibration are controlled not to exceed the design criteria. Even though many drift method have been developed in various forms, no practical design method for wind induced vibration has been developed so far. Structural engineers rely upon heuristic or experience in designing wind induced vibration. Development of practical design method for wind induced vibration is required. Generally, wind induced acceleration responses are depending on several variables such as the weight density of a building, damping ratio, the natural period, and etc.. All parameters except the natural period or frequency are usually out of reach for structural engineers, then the wind acceleration response may be proportioned to the natural period. Therefore, in this paper, a wind induced vibration design method based on frequency control technique for high-rise is proposed. The method is applied to vibration design of a 25-story office building for performance evaluation.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2001년도 추계학술대회논문집 II
• /
• pp.1376-1383
• /
• 2001

Modem technology depends on the reliability of extremely high technology equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. The vibration criteria of high sensitive equipment should be represented in the form of 'exactness' and 'accuracy', because this is used as basic data for the design of building structure and structural dynamics of equipment. This paper deals with the properties of time and frequency domain in order to obtain more improved vibration criteria for high sensitive equipment.

• 반도체디스플레이기술학회지
• /
• 제3권4호
• /
• pp.51-55
• /
• 2004

In the design stage of high precision manufacturing/inspection FAB facilities, it is necessary to investigate the allowable vibration limits of high precision equipments and to study structural dynamic characteristics of C/R and Sub-structure in order to provide structural vibration criteria to satisfy these allowable limits. The goal of this study is to investigate the dynamic characteristics of PC-Type mock-up structures designed for next generation TFT-LCD FAB through experiments and analysis procedures. Therefore, in order to provide a proper dynamic structural design for high precision manufacturing/inspection work process, these allowable limits must be satisfied.

• 반도체디스플레이기술학회지
• /
• 제1권1호
• /
• pp.1-7
• /
• 2002

Modem technology depends on the reliability of extremely high precision equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a sub-micrometer. This equipment requires a vibration free environment to provide its proper function. Therefore, this high technology equipments require very strict environmental vibration criteria because it is used as basic data for the design of building structure and structural dynamics of equipment. In this paper, the new approach is proposed to investigate the mismatch problem of time and frequency domain for vibration criteria of sensitive equipment. The proposed approach is based on a vibration measurement data and a relative transfer function which can be obtained by experiment or analysis.

• 한국전산구조공학회:학술대회논문집
• /
• 한국전산구조공학회 2007년도 정기 학술대회 논문집
• /
• pp.751-756
• /
• 2007

In this paper, perception threshold for horizontal vibration of tall buildings was investigated. After a comparative study of human comfort criteria for wind-induced vibration in foreign countries being made, perception threshold was recorded by increasing acceleration in the range of 0.2Hz through 1.2Hz of frequency in horizontal vibration experiments, and perception of subjects was examined by a proper questionnaire. Also, the results obtained from experiments of horizontal vibration were compared with Japanese standard(AIJES-A001-2004).

• Structural Monitoring and Maintenance
• /
• 제4권3호
• /
• pp.221-236
• /
• 2017

In this study, the feasibility of vibration-based damage alarming algorithms are numerically evaluated for wind turbine tower structures which are subjected to harmonic force excitation. Firstly, the algorithm of vibration-based damage alarming for the wind turbine tower (WTT) is visited. The natural frequency change, modal assurance criterion (MAC) and frequency-response-ratio assurance criterion (FRRAC) are utilized to recognize changes in dynamic characteristics due to a structural damage. Secondly, a finite element model based on a real wind turbine tower is established in a structural analysis program, Midas FEA. The harmonic force is applied at the rotor level as presence of excitation. Several structural damage scenarios are numerically simulated in segmental joints of the wind turbine model. Finally, the natural frequency change, MAC and FRRAC algorithm are employed to identify the structural damage occurred in the finite element model. The results show that these criteria could be used as promising damage existence indicators for the damage alarming in wind turbine supporting structures.