• Journal of the Korean institute of surface engineering
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• v.41 no.6
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• pp.331-334
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• 2008

The replica of highly ordered nano-sphere array patterns were fabricated using hot embossing method. First, silica nano-sphere array on Si substrate was transferred to PVC film at $130^{\circ}C$ and 7 bar using hot embossing process. Then, silica nano-sphere array on PVC template was removed by soaking the PVC film in buffered oxide etcher. In order to form anti-stiction layer, the PVC template was coated with silicon dioxide layer and self-assembled monolayer. Through UV nanoimprint lithography with the fabricated flexible PVC template, highly ordered nano-sphere array pattern was imprinted on curved substrates with high fidelity.

• The Journal of Korea Robotics Society
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• v.4 no.3
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• pp.225-232
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• 2009

In the high precision robot systems, the most popular tasks may be handling of micro-scale objects on a surface such as a micromanipulation robot system. In handling of micro-scale objects, the stiction effect becomes a fundamental issue since the micro-contact mechanics dominates the micromanipulation robot system. In the paper, a theoretical non-stick condition derived from the micro-contact mechanics is carried out for the propose of micro-scale object manipulation. To verify the non-stick condition, a micro-manipulation robot system equipped with a high precision stage system and a microscope system is developed. Experimental results show that the proposed non-stick condition guarantees successful micro-scale object manipulation.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1999.11a
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• pp.303-309
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• 1999

Optimum tribological performance of the head/disk system is critical in maintaining reliable data processing in a hard disk drive. Particularly, as the flying height of the slider continues to decrease with increasing recording density, frictional interaction between the slider and the disk need to be better understood. In this work the effect of reduced ambient pressure on the tribological behavior of the head/disk interface is presented. It is found that surface damage of the components can be accelerated by reducing the ambient pressure. This method may be utilized to assess slider/disk compatibility of newly developed systems in short time.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.725-730
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• 1996

The key process in silicon surface micromachining is the selective etching of a sacrificial layer to release the silicon microstructure. The newly developed anhydrous HF/$CH_3$OH gas phase etching of TEOS (teraethylorthosilicate) sacrificial layers onto the polysilicon and the nitride substrates was employed to release the polysilicon microstructures. A residual product after TEOS etching onto the nitride substrate was observed on the surface, since a SiOxNy layer is formed on the TEOS/nitride interface. The polysilicon microstructures are stuck to the underlying substrate because SiOxNy layer does not vaporize. We found that the only sacrificial etching without any residual product and stiction is TEOS etching onto the polysilicon substrate.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.18 no.4
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• pp.369-374
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• 2009

In micro/nano-scale contacts in MEMS and NEMS, capillary and van der Waals forces generated around contacting micro-asperities significantly influence the performance of concerning device as they are closely related to adhesion and stiction of interacting surfaces. In this regard, it is of prime importance to accurately estimate the magnitude of surface forces so that an optimal solution for reducing friction and adhesion of micro/nano-surfaces may be obtained We introduced an effective method to calculate these surface forces based on topography information obtained from an atomic force microscope. This method was used to calculate surface forces generated in the contact interface formed between diamond-like carbon coating and $Si_3N_4$ ball. This method is shown to effectively demonstrate the influence of capillary force in the contact area, especially in humid atmosphere.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.05a
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• pp.175-180
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• 2002

Loading/Unloading(L/UL) mechanism has been considered to be an alternative to contact start-stop(CSS) mechanism which eliminates stiction and wear associated with frequent start and stop process. It has other advantages including increased areal density due to lower flying height, reduced power consumption, and improved shock resistance. In order for L/UL to be Implemented in Near-field recording system properly, dynamics of optical flying head must be understood and optimized. In this paper the dynamic characteristics during loading process is analyzed numerically to investigate the effect of design parameters such as loading speed. slider shape, and initia conditions on the dynamic reponses of flying head..

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2233-2235
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• 2000

We present the characteristics of microwave and mechanical behavior for the electrostatically actuated z-shaped laterally driven micriomachined CPW SPST(Single Pole Single Throw) Switch, which is for the application of the microwave communication systems. In this paper, we have aimed to maintain advantages. such as low insertion loss and low power consumption that the previously developed RF MEMS Switch has and minimize also stiction problem. enhance the microwave characteristics by etching of substrate beneath the switch, realize the pull-in voltage of below 30V. The optimized design parameters of the MEMS Switch can be selected by the analysis of the mechanical behavior and the use of ANSYS simulation method.

• Journal of Applied Reliability
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• v.5 no.4
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• pp.487-500
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• 2005

MEMS devices usually have micro actuators contained in a cavity, If the pressure level of testing chamber is higher than that of cavity, moisture will ingress into the cavity, which may cause critical failure such as stiction of the moving parts. To design an accelerated life test based on high temperature and high humidity, such a phenomena should be considered. In this study, a throughput model that can estimate the amount of moisture ingress is used to decide the testing time and conditions of a high temperature and high humidify test.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 2002.04a
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• pp.141-148
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• 2002

MR 유체 감쇠기는 구조물의 진동을 감소시키기 위한 가장 유망하고 새로운 제진 (制振) 장치 중 하나이다. 이 장치는 기계적인 단순성, 높은 동적 범위, 적은 전력 요구량, 커다란 감쇠 능력, 강인성 등의 장점을 가지고 있기 때문에, 토목 구조 시스템의 내진(耐震) 및 내풍(耐風) 성능을 향상시키는데 매우 유용하다. 많은 연구자들이 MR 유체 감쇠기의 유사-정적 모델을 연구했지만 그 모델이 감쇠기의 설계를 위해서는 유용하다고 하더라도, 동적 하중에 대한 감쇠기의 거동을 모사하는 데는 충분하지 않다. 논문에서는 대용량 20톤 MR 유체 감쇠기의 동적하중에 대한 응답 해석 결과를 이용하여, Bouc-Wen 모델을 기반으로 하는 새로운 역학적 모델을 제안하였다. 이 모델은 MR 유체의 stiction현상과 관성 및 shear thinning 효과를 잘 묘사한다. 또한, 제안된 MR 유체 감쇠기의 동적 모델이 실험 결과와 매우 잘 일치함을 보였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.219-219
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• 2007

Ni stamper위에 100nm의 Si 코팅후 자기조립 단문자막(SAM)을 액상 코팅방식으로 형성 하였고, 내구성 및 열적 안정성을 검증하기 위해 반복적인 이형 및 압력인가test가 실시하였다. 20 회 이상의 이형실험을 통해 열적, 기계적 안정성을 확인하고, 접촉각 측정을 통해 이형특성의 안정성도 고찰하였다. 이를 Imprint공법을 적용 fine pattern의 구조물을 얻을수 있었다. SAM코팅은 TRICHLOROSILANE을 사용하였으며 Hexane과 1000:1의 비율로 섞어서 stirrer에서 mixing하는 방식을 사용했으며, UV-ozone처리를 통한 이형성 제거 효과도 관찰하였다.