• 제목/요약/키워드: Step filling

검색결과 118건 처리시간 0.02초

Laser CVD $SiO_2$ 막의 Step Coverage에 관한 연구 (Step Coverage of Laser CVD Deposited $SiO_2$ Films)

  • 박종욱;김상욱;천영일;박지순;강희복;성영권
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1991년도 하계학술대회 논문집
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    • pp.155-157
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    • 1991
  • This paper describe a Laser CVD technology which realizes planarized interlevel dielectrics in sub-micron VLSI's. This technology comprises sub-micron gap filling with $SiO_2$ films between metal lines. Laser CVD process conditions have been investigated to improve step coverage of interlevel dielectrics. An ArF(193nm) Excimer Laser was used to excite and dissociate gas phase $SiH_4\;and\;N_2O$ molecules. The Laser CVD by $N_2O\;and \;SiH_4$. mixture gases has realized conformal deposition above the temperature of $300^{\circ}C$, as a result sub-micron gaps were buried with $SiO_2$ films.

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3차원 실장을 위한 TSV의 Cu 전해도금 및 로우알파 솔더 범핑 (Cu Electroplating and Low Alpha Solder Bumping on TSV for 3-D Packaging)

  • 정도현;쿠마르산토쉬;정재필
    • 마이크로전자및패키징학회지
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    • 제22권4호
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    • pp.7-14
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    • 2015
  • Research and application of three dimensional packaging technology in electronics have been increasing according to the trend of high density, high capacity and light weight in electronics. In this paper, TSV fabrication and research trend in three dimensional packaging are reported. Low alpha solder bumping which can solve the soft error problem in electronics is also introduced. In detail, this paper includes fabrication of TSV, functional layers deposition, Cu filling in TSV by electroplating using PPR (periodic pulse reverse) and 3 step PPR processes, and low alpha solder bumping on TSV by solder ball. TSV and low alpha solder bumping technologies need more studies and improvements, and the drawbacks of three dimensional packaging can be solved gradually through continuous attentions and researches.

Hollow Structure에서의 희생층 평탄화 제작 공정 (The Fabrication Processes for the Planarization of Sacrificial Layers over Hollow Structures)

  • 윤용섭;배기덕;최형;전찬봉;노광춘
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제53권10호
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    • pp.546-550
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    • 2004
  • Two fabrication approaches are proposed to planarize the sacrificial layer over hollow structures. One is the photoresist filling method that makes use of photolithography, thermal curing and plasma ashing. The other is the lamination method that is applying pressure and temperature to the organic film over the hollow structures. The fabrication results are compared with those of CMP process. Trenches and cavities with various dimensions have been made for the porposed process. Upon measuring the planarization levels, they are dependent on planarization methods and the geometrical size of hollow structures. The photoresist filling method is so strongly dependent on the width and depth of trenches that we have problems to use it for large dimensional trenches. To the contrary, the flatness of sacrificial layer over the trenches was found to be almost independent of trench dimensions for the lamination method. A CMP process shows the most excellent results, but the fabrication is complicated and the access to it is not so easy. It is important to choose the proper planarization method by considering the required flatness levels, materials to be planarized, and connection between the planarization step and the previous or the following process of it.

고속가공을 이용한 시작금형 및 시작품의 쾌속제작 (Rapid Manufacturing of Trial Molds and Prototypes by High Speed Machining)

  • 신보성;양동열;최두선;제태진;이응숙;황경현;이종현
    • 한국정밀공학회지
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    • 제18권12호
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    • pp.124-129
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    • 2001
  • Recently, life cycle and lead-time of products have been shortened with the demand of customers. Therefore, it is important to reduce time and cost at the step of manufacturing trial molds. High speed machining can be applied for this kind of purpose with a lot of practical advantages. In our research, several fundamental experiments are carried out to obtain machining parameters such as cutting force, machining time and surface characteristics for tool paths that are appropriate to high-speed machining. Moreover, a trial mold for an automatic transmission knob is fabricated with aluminum-7075 material. Using automatic set-up equipments, an ABS rapid prototype of a trial product of an AT knob is also manufactured with a filling process.

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치근단 역충전용 포틀랜드 시멘트 신복합재료의 물리적 성질 고찰 (Physical properties of novel composite using Portland cement for retro-filling material)

  • 이상진;조옥인;염지완;박정길;허복;김현철
    • Restorative Dentistry and Endodontics
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    • 제35권6호
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    • pp.445-452
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    • 2010
  • 연구목적: 이 연구의 목적은 새로운 근단 역충전 재료를 개발하기 위해 MTA, MTA와 AH-plus 혼합물 (AMTA), 그리고 실험적 개발재료인 Portland cement-Epoxy resin composite (EPPC)의 미세 누출 및 물리적인 성질을 비교하는 것이다. 연구 재료 및 방법: 발거 치아 49개를 근관 성형하고 gutta-percha와 sealer로 충전하였다. 각 치아의 치근을 근단부 3 mm에서 절단하고 3 mm 깊이의 역충전 와동을 형성하였다. 15개씩 무작위로 분류한 치근을 세 군으로 나누어 각각 MTA, AMTA, EPPC로 충전하였고 네 개의 치근은 대조군으로 사용하였다. 각 군의 재료로 역충전이 완료된 모든 실험군을 젖은거즈로 덮고 24시간 동안 경화시켰다. 경화 후 72시간 동안 1% methylene blue 염색액에 담근 후, 치근단을 수직 절단하여 사진을 촬영하고 미세 누출을 평가하였다. Vicat apparatus를 사용하여 실험군 별로 경화시간을 측정하였으며, aluminum step wedge를 사용한 디지털 방사선 사진을 촬영하여 각 군의 방사선 불투과도를 평가하였다. 미세누출과 경화시간에 대해 각 군간의 차이를 일원배치분산분석 및 Scheffe 사후 검증으로 유의수준 95%에서 평가하였다. 결과: AMTA와 EPPC는 MTA군에 비해 적은 미세누출량을 보였다 (p < 0.05). AMTA는 가장 높은 방사선 불투과도를 보였으며 개발 재료인 EPPC군은 5 mm aluminum 두께의 방사선 불투과도를 보였다. MTA가 가장 긴 경화시간을 나타낸반면 EPPC군은 다른 군에 비해 초기경화와 최종경화 모두 가장 짧은 경화시간을 나타냈다 (p < 0.05). 결론: 이 연구 조건하에서, 신개발 재료인 EPPC는 치근단 역충전 재료로서 기존의 MTA보다 양호한 밀폐능력과 방사선 불투과성 및 짧은 경화시간 등의 역충전 재료로서 적절한 물리적 성질을 가진 것으로 보인다.

Motion and sloshing analysis for new concept of offshore storage unit

  • Ha, Mun-Keun;Kim, Mun-Sung;Paik, Bu-Keun;Park, Chung-Hum
    • 한국해양공학회:학술대회논문집
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    • 한국해양공학회 2000년도 추계학술대회 논문집
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    • pp.189-195
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    • 2000
  • New concept of LNG-FPSO ship with moonpool and bilge step in bottom is considered and investigated in the point of motion reduction and sloshing phenomena of the cargo and operation tanks. The cargo capacity of the ship of which principle dimensions is L x B x D x t(design) =270.0 x 51.0 x 32.32 x 13.7(m) 16K at 98% loading condition. The two moonpools and rectangular step at bilge part are setted up specially for getting the effect of motion decrease. For the motion analysis, linearized three dimensional diffraction theory with the simplified boundary conditions is used. The six-degree of freedom coupled motion responses are calculated for the LNG-FPSO ship. Viscous effects on the roll motion responses of a vessel are taken into account in this calculation program using an empirical formula suggested by Ikeda, Himeno and Tanaka is used. The case study for the moonpool size had been carried out by theoretical estimation and experimental method. For the optimization of the moonpool size and effect of the step, 9 cases of its size and with and without step are considered. From the results of calculation and experiment, it can be concluded that this designed LNG-FPSO ship have possibility to carry out her missions in the rough sea as for the owner's demand waves condition. The motion responses, especially roll motion, for the designed LNG-FPSO ship are much lower than those of another drillship and shuttle tanker and limit criterions are satisfied. For the check of the cargo tank and operation tank sizes we have performed sloshing analysis in the irregular waves which focuses on the pressure distribution on the tank wall and the time history of pressure and free surface for No.2 and No5. tanks of LNG-FPSO with chamfers. Finally we got the tank size which has no resonance and no impact pressure in all filling in the bow quartering and beam sea.

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The effects of gingival blood flow on pulpal blood flow detection using ultrasound Doppler flowmetry: animal study

  • Dohyun Kim ;Hyoung-Seok Ko;Soo-Yeon Park ;Seung-Yeon Ryu ;Sung-ho Park
    • Restorative Dentistry and Endodontics
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    • 제48권1호
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    • pp.9.1-9.11
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    • 2023
  • Objectives: This study evaluated the effect of adjacent gingival blood flow on detection of pulpal blood flow (PBF) using ultrasound Doppler flowmetry (UDF) through animal study. Materials and Methods: The study included 36 right and left maxillary the third incisors and canines in 9 experimental dogs. The study included 2 main steps: In the first step, the pulse sound level (PSL) was recorded on the cervical part of each tooth without flap elevation (Group 1), with flap elevation (Group 2), and after it was repositioned in place (Group 3). In the second step, the PSL was recorded on the cervical part of each tooth (Group 4), after pulpotomy (Group 5), after partial pulp extirpation (Group 6), after complete extirpation (Group 7), and after canal filling (Group 8). In Groups 5-8, the study was performed with and without flap elevation in the left and right teeth, respectively. The PSL was graded as follows: 0, inaudible; 1, heard faintly; and 2, heard well. The difference between each group was analyzed using Friedman's test with Wilcoxon signed-rank tests (α = 0.05). Results: In step 1, the PSL results were Group 1 > 2 and 3. In step 2, there was no significant difference between the groups when the flap was not elevated, while PSL results were Group 4 > 5 ≥ 6 and 7 ≥ 8 when the flap was elevated. Conclusions: PBF is affected by gingival blood flow when measured with UDF. UDF measurements require isolation of gingiva from the tooth.

자동변속기용 언더드라이브 브레이크 피스톤의 판 단조공정 개선 방안 (Plate Forging Process Design for an Under-drive Brake Piston in Automatic Transmission)

  • 전효원;윤종헌;이정환;김병민
    • 소성∙가공
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    • 제23권2호
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    • pp.88-94
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    • 2014
  • The under-drive brake piston is an essential part in the automatic transmissions of automobiles. This component is manufactured by forging after blanking from S55C plate with a thickness of 6mm. It is difficult to design the plate forging process using a thick plate approach since there will be limited material flow as well as large press loads. Furthermore, the under-drive brake piston has a complex shape with a right angle step, which often results in die unfill and abrupt increase in press load. To overcome these obstacles, a separate die for filling material sufficiently to the corner of the right angle step is proposed. However, this approach induces an uncontrolled workpiece surface between the dies, resulting in flash. This excess flash degrades the tool life in the final machining after cold forging as well as increases the cycle time to obtain the net-shape of the part. In the current study, we propose an optimum process design using a conventional die shaped with the benefit of finite element analysis. This approach enhanced the process efficiency without sacrificing the dimensional accuracy in the forged part. As the result, the optimum plate forging process was done with a two stage die, which reduces weight of by 6% compared with previous process for the under-drive brake piston.

컴포머 충전과정에 따른 상아질 투과도의 변화 (DENTIN PERMEABILITY CHANCE ACCORDING TO THE PROCESS OF COMPOMER RESTORATION)

  • 조혜진;이경하;이세준;이광원
    • Restorative Dentistry and Endodontics
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    • 제27권4호
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    • pp.382-388
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    • 2002
  • Compomer is composed of matrix and filler : matrix is made of the combination of resins and polycarboxylic molecules that are light-cured, and a filler is a glass component which is capable of ion-release. The resin content of compomers produces polymerization shrinkage which can adversely affect marginal adaptation. Pretreatment is a fundamental step which is treated with conditioner or primer in the use of these materials. Microleakage of restorative materials has been investigated mostly by dye penetration method. Dye penetration method was not quantitative and not measured repeatedly. Fluid filtration method, introduced and developed by Pashley's group, has been extensively used for 20 years for research purpose to understand the physiology of dentin, as well as the effects of various restorative treatments on dentin permeability. It permits quantitative, nondestructive measurment of microleakage in a longitudinal manner. The purpose of this study was to evaluate the change of dentin permeability according to the process of compomer restoration. In this study. Cl V cavities were prepared on buccal surface of thirty extracted human molars. The prepared cavities were etched by 37% phosphoric acid. The experimental teeth were randomly divided into three groups. Each group was treated with following materials Group 1 : Prime & Bond NT/Dyract AP, Group2: Single Bond/F2000 compomer, Group 3 : Syntac Single Component/Compoglass. The bonding agent and compomer were applied for each group following manufacturers information. Dentin permeability of each group was measured at each process by fluid filtration method; Step 1 : preparation(smear layer). Step 2 : etching(smear layer removal), Step 3 : applying the bonding agent, Step 4 : filling the compomer. Dentin permeability was expressed by hydraulic conductance ($\mu\textrm{l}$ min$^{-1}$cm$H_2O$$^{-1}$). The data were analysed statistically using One-way ANOVA and Sheffe's method. The results were as follows : 1. Dentin permeability differences between each process were significant except between step 1 and step 2(p<0.01). 2. Dentin permeability after removal of smear layer was highly increased(p<0.01). 3. In most case, decrease of dentin permeability was obtained by applying bonding agent(p<0.01). 4. Dentin permeability differences among the experimental groups were not significant(p>0.05). 5. None of compomers used in this study showed perfect seal at the interface.

Generation of Discrete $G^1$ Continuous B-spline Ship Hullform Surfaces from Curve Network Using Virtual Iso-parametric Curves

  • Rhim, Joong-Hyun;Cho, Doo-Yeoun;Lee, Kyu-Yeul;Kim, Tae-Wan
    • Journal of Ship and Ocean Technology
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    • 제10권2호
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    • pp.24-36
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    • 2006
  • Ship hullform is usually designed with a curve network, and smooth hullform surfaces are supposed to be generated by filling in (or interpolating) the curve network with appropriate surface patches. Tensor-product surfaces such as B-spline and $B\'{e}zier$ patches are typical representations to this interpolating problem. However, they have difficulties in representing the surfaces of irregular topological type which are frequently appeared in the fore- and after-body of ship hullform curve network. In this paper, we proposed a method that can automatically generate discrete $G^1$ continuous B-spline surfaces interpolating given curve network of ship hullform. This method consists of three steps. In the first step, given curve network is reorganized to be of two types: boundary curves and reference curves of surface patches. Especially, the boundary curves are specified for their surface patches to be rectangular or triangular topological type that can be represented with tensor-product (or degenerate) B-spline surface patches. In the second step, surface fitting points and cross boundary derivatives are estimated by constructing virtual iso-parametric curves at discrete parameters. In the last step, discrete $G^1$ continuous B-spline surfaces are generated by surface fitting algorithm. Finally, several examples of resulting smooth hullform surfaces generated from the curve network data of actual ship hullform are included to demonstrate the quality of the proposed method.