• Journal of the Semiconductor & Display Technology
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• v.15 no.1
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• pp.22-26
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• 2016

Extreme ultraviolet (EUV) pellicle is one of the most concerned research in the field of EUV lithography (EUVL). Imaging performance of EUV mask with pellicle should be investigated prior to high volume manufacturing (HVM) of EUVL. In this paper, we analyzed the relationship between standoff distance and imaging performance of EUV mask to verify the influences of relative standoff distance on imaging performance. As a result, standoff distance of EUV pellicle has no effect on imaging performance of EUV mask such as critical dimension (CD), normalized image log slope (NILS) and image contrast. Therefore, pellicle support structure can be flexibly designed and modified in diverse ways to complement the thermal limitation of EUV pellicle membrane.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.9
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• pp.76-83
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• 2021

This study examines the characteristics of spraying conditions based on the change in standoff distance during fine particle spraying while measuring the surface roughness, maximum depth, and maximum width of the sprayed surface. The processing shape of the sprayed surface is analyzed to understand the effects of injection pressure, nozzle diameter, standoff distance, processing shape, processing cycle, processing speed, and injection particles, which are the main factors of fine particle injection processing. Based on the derived characteristics, we attempt to determine the interrelationships of these major factors. The standoff distance is set as a variable factor and a spray machining experiment using a hexagonal shape (from among polygons) instead of square and circular shapes is conducted. Results reveal that research on the characteristics of spraying conditions could be expanded based on changes in the shapes of workpieces.

• Bulletin of the Korean Chemical Society
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• v.35 no.12
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• pp.3547-3552
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• 2014

Laser Raman spectroscopy is one of the most powerful technologies for standoff detection of hazardous materials including explosives. Supported by recent development of laser and sensitive ICCD camera, the technology can identify trace amount of unknown substances in a distance. Using this concept, we built a standoff detection system, in which nanosecond pulse laser and nanosecond gating ICCD technique were delicately devised to avoid the large background noise which suppressed weak Raman signals from the target sample. In standoff detection of explosives which have large kill radius, one of the most important technical issues is the detection distance from the target. Hence, we focused to increase the detection distance up to 54 m by careful optimization of optics and laser settings. The Raman spectra of hazardous materials observed at the distance of 54 m were fully identifiable. We succeeded to detect and identify eleven hazardous materials of liquid or solid particles, which were either explosives or chemical substances used frequently in chemical plants. We also performed experiments to establish the limit of detection (LOD) of HMX at 10 m, which was estimated to be 6 mg.

• The Bulletin of The Korean Astronomical Society
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• v.37 no.2
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• pp.114.1-114.1
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• 2012

To measure the magnetic field strength in the solar corona, we examined 10 fast (>1000 km/s) limb coronal mass ejections (CMEs) that show clear shock structures in Solar and Heliospheric Observatory/Large Angle and Spectrometric Coronagraph images. By applying the piston-shock relationship to the observed CME's standoff distance and electron density compression ratio, we estimated the Mach number, Alfven speed, and magnetic field strength in the height range 3-15 solar radii (Rs). The main results from this study are as follows: (1) the standoff distance observed in the solar corona is consistent with those from a magnetohydrodynamic model and near-Earth observations; (2) the Mach number as a shock strength is in the range 1.49-3.43 from the standoff distance ratio, but when we use the density compression ratio, the Mach number is in the range 1.47-1.90, implying that the measured density compression ratio is likely to be underestimated owing to observational limits; (3) the Alfven speed ranges from 259 to 982 km/s and the magnetic field strength is in the range 6-105 mG when the standoff distance is used; (4) if we multiply the density compression ratio by a factor of two, the Alfven speeds and the magnetic field strengths are consistent in both methods; and (5) the magnetic field strengths derived from the shock parameters are similar to those of empirical models and previous estimates.

• Journal of Advanced Marine Engineering and Technology
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• v.30 no.1
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• pp.140-149
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• 2006

Characteristics of a laminar diffusion flame placed near wall in microgravity have been numerically analyzed in a two-dimension. The fuel for the flame is $C_2H_4$. The flame is initiated by imposing a high temperature ignition source. The flow field, temperature field, and flame shape in microgravity diffusion flame are detailed. Especially, effects of surrounding air velocity and fuel injection velocity on the microgravity diffusion flame have been discussed accounting for standoff distance. And, the effect of curvature rate has been also studied. The results showed that velocities in a diffusion flame were overshoot because of volumetric expansion and distribution of temperature showed regularity by free-buoyancy This means that the diffusion flame in microgravity is very stable, while the flame in normal gravity is not regular and unstable due to buoyancy. Standoff distance decreases with increase in surrounding air velocity and with decrease in fuel injection velocity. With increasing curvature rate, the position of reaction rate moves away the wall.

• Journal of Korean Tunnelling and Underground Space Association
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• v.14 no.4
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• pp.421-435
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• 2012

Rock excavation (removal) tests are performed with effective parameters using an abrasive waterjet. For verification of the field rock excavation capabilities, the removal performance and level of efficiency are analyzed for hard granite rock in terms of the water pressure, exposure time of the jet, and the standoff distance. In particular, experimental tests are performed with a long standoff distance required condition in the real excavation field. The rock removal performance level changes according to the rock properties. In this study, various rock specimens are used and P-wave velocities are measured in order to determine the correlation between the removal performance and the P-wave velocity. As a result of the experimental study, the effect of waterjet parameters on rock removal is analyzed.

• Journal of the Korea institute for structural maintenance and inspection
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• v.22 no.4
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• pp.83-90
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• 2018

Considering the increased threats from worldwide terrors and the increased demands on the blast resistant design of commercial buildings, this study is aimed at understanding the basic concept of blast resistant design and evaluating the blast performance with an actual design example. Although there are many differences between earthquake and blast loads, the design concept against both loads is similar in terms of allowing the plastic behavior of a structure and sharing the ductile detailing. Through the blast performance evaluation of a target building provided in this study, it is noted that a well-designed building for the conventional loads can have a certain level of blast resistance. However, this cannot be generalized since the blast load on a structure varies depending on the type of weapon, TNT equivalence, standoff distance, etc. Architectural planning with positioning the sacrificial structure or maintaining a sufficient standoff distance from the expected detonation is the simple and effective way of improving the blast resistance of a building.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.32 no.5
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• pp.205-211
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• 2022

The Granule Spray in Vacuum (GSV) process is a method of forming a dense nanostructured ceramic coating film by spraying ceramic granules on a substrate at room temperature in a vacuum. In the Granule Spray, the granules made by agglomerating particles with the size from submicrometer to micrometer can be sprayed into the substrate. Once the granules were squashed upon collision with the substrate, they become several dozens of nanometer-sized crystals in vacuum process. The zirconia of the monoclinic phase transform into tetragonal phase at 1150℃. At this time, its volume is changed by about 6.5 %. For this reason, it is widely held that it is difficult to acquire a compact of monoclinic zirconia sinter. In this study, the effect of particle treatment temperature and standoff distance on the substrate of zirconia granules were investigated in GSV. Also, particle treatment temperature, standoff distance, coating efficiency, and microstructure of the film were considered in forming the monoclinic zirconia coating film in GSV without any heating process. The deposited films exhibited monoclinic zirconia phase without any other detectable phase by X-ray diffractometer (XRD).

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.39 no.2
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• pp.114-120
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• 2011

This paper presents a cooperative standoff tracking of a moving target using multiple unmanned aircraft. To provide guidance commands, vector fields are designed utilizing the Lyapunov stability theory. A roll angle command is generated to keep a constant distance from the target in a circular motion. A speed command and a heading angle command are designed to keep a constant phase angle with respect to the front aircraft and to prevent a collision between aircraft. Numerical simulation is performed to verify the tracking and collision performance of the proposed control laws.

• Geophysics and Geophysical Exploration
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• v.15 no.4
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• pp.190-198
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• 2012

A series of density log data were obtained from the standoff experiments made in the four physical model boreholes of different densities, and the properties of spine and rib curves have been derived by the analysis of the gamma-gamma data. Particularly, the shape of gamma ray propagation path between source and detector, the geometrical property of spine and rib curves, the influence of borehole density and the detector combination on the properties of the curves, and the adequate detector combination for standoff compensation could be discussed. It was also confirmed that spine and rib slopes can be expressed as proportional to source-to-detector distance ratio between far and near detectors. The result of this experiment was also effectively applied for understanding the basic concept of spine and rib slopes.