• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.169-169
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• 2008

To keep pace with scaling trends of CMOS technologies, high-k metal oxides are to be introduced. Due to their high permittivity, high-k materials can achieve the required capacitance with stacks of higher physical thickness to reduce the leakage current through the scaled gate oxide, which make it become much more promising materials to instead of $SiO_2$. As further studying on high-k, an understanding of the relation between the etch characteristics of high-k dielectric materials and plasma properties is required for the low damaged removal process to match standard processing procedure. There are some reports on the dry etching of different high-k materials in ICP and ECR plasma with various plasma parameters, such as different gas combinations ($Cl_2$, $Cl_2/BCl_3$, $Cl_2$/Ar, $SF_6$/Ar, and $CH_4/H_2$/Ar etc). Understanding of the complex behavior of particles at surfaces requires detailed knowledge of both macroscopic and microscopic processes that take place; also certain processes depend critically on temperature and gas pressure. The choice of $BCl_3$ as the chemically active gas results from the fact that it is widely used for the etching o the materials covered by the native oxides due to the effective extraction of oxygen in the form of $BCl_xO_y$ compounds. In this study, the surface reactions and the etch rate of $Al_2O_3$ films in $BCl_3/Cl_2$/Ar plasma were investigated in an inductively coupled plasma(ICP) reactor in terms of the gas mixing ratio, RF power, DC bias and chamber pressure. The variations of relative volume densities for the particles were measured with optical emission spectroscopy (OES). The surface imagination was measured by AFM and SEM. The chemical states of film was investigated using X-ray photoelectron spectroscopy (XPS), which confirmed the existence of nonvolatile etch byproducts.

• Fire Science and Engineering
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• v.34 no.3
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• pp.134-140
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• 2020

Nuclear power plants (NPPs) in Korea are required to be maintained using a defense in-depth approach to prevent leakage of radioactive substances outside the plant and allow safe shutdown in the event of a fire. Periodic testing must be conducted to ensure that the fire protection facilities perform as required by the laws for various nuclear reactor types. In June 2017, for the first time in Korea, a nuclear plant, Kori Unit 1, was permanently shut down. It was prepared for decommissioning in accordance with the fire protection regulations imposed by the regulatory body. However, a standard protocol is necessary for systematically establishing the fire protection program for decommissioning of NPPs in the future. Therefore, the nuclear legal systems of countries with many operating nuclear power plants, such as the United States, Japan, Canada, and various European countries, were reviewed and guidelines for establishing a fire protection program for decommissioning NPPs was suggested; the fire protection requirements stated by Reg Guide 1.191 (Decommissioning fire protection program for NPPs during decommissioning and permanent shutdown) were used as a model. Suggestions for establishing legal regulations to optimize fire protection programs and secure basic technology for decommissioning NPPs were also made.

• Analytical Science and Technology
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• v.17 no.4
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• pp.355-362
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• 2004

Fission products and Inter reaction layer of $U_3Si-Al$ dispersion fuel, irradiated in HANARO research reactor with 121 kW/m of maximum liner power and 63 at% of average burn-up, was characterization by EPMA (Electron Probe Micro Analyzer). The fuel punching system developed by Irradiated Materials Examination Facility (IMEF) has used to make these samples for the EPMA. With this system a very small and thin specimen which is 1.57 mm in diameter and 2 mm in thickness respectively has been fabricated to protect the EPMA operator from high radioactive fuel and to mini-mize the equivalent dose rate less than 150 mSv/h. EPMA was performed to observe layers of sectional, Inter-reaction and oxide with specimens of cutting and polished. Stoichiometry in the Inter-reaction layer with $16{\mu}m$ of thickness was $U_{2.84}$ Si $Al_{14}$ with calibration of $UO_2$ and $U_{3.24}$ Si $Al_{14.1}$ with calibration of standard specimen. metallic precipitates in this layer were not observed using fission products examination.

• Nuclear Engineering and Technology
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• v.26 no.1
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• pp.140-148
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• 1994

A qualification test was performed for the iron removal chemical cleaning of the secondary side of nuclear steam generators at the selected temperature, 1$25^{\circ}C$, higher than the standard application temperature, 93$^{\circ}C$. The field cleaning condition for a nuclear unit was tested in a bench scale test loop including a SUS 316 stainless steel autoclave with one gallon capacity as a test vessel. The kinetics of sludge dissolution, corrosion of the secondary side materials and change of solvent chemistry were monitored. Test results indicated that more thorough cleaning was accomplished in less than half of the cleaning time required at 93$^{\circ}C$. And the total corrosions of the secondary side materials were found to be less than the values at 93$^{\circ}C$. While the solvent is recirculated and heated by an external chemical cleaning equipment for the conventional 93$^{\circ}C$ process, the secondary side is heated by the lateral heat of the primary coolant without the recirculation of the cleaning solution, and the solvent is mixed by vigorous boiling induced by periodic ventilation for the high temperature process. The requirement that the reactor coolant pumps should be running during the cleaning operation is the major disadvantage of the high temperature process which also should be considered when chemical cleaning is planned for steam generators under operation.

• Journal of Radiation Protection and Research
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• v.39 no.1
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• pp.21-29
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• 2014

A new cold neutron triple-axis spectrometer (Cold-TAS) was recently constructed at the 30 MWth research reactor, HANARO. The spectrometer, which is composed of neutron optical components and radiation shield, required a redesign of the segmented monochromator shield due to the lack of adequate support of its weight. To shed some weight, lowering the height of the segmented shield was suggested while adding more radiation shield to the top cover of the monochromator chamber. To investigate the radiological effect of such change, we performed MCNPX simulations of a few different configurations of the Cold-TAS monochromator shield and obtained neutron and photon intensities at 5 reference points just outside the shield. Reducing the 35% of the height of the segmented shield and locating lead 10 cm from the bottom of the top cover made of polyethylene was shown to perform just as well as the original configuration as radiation shield excepting gamma flux at two points. Using gamma map by MCNPX, it was checked that is distribution of gamma. Increased flux had direction to the top and it had longer distance from top of segmented shield. However, because of reducing the 35% of the height, height of dissipated gamma was lower than original geometry. Reducing the 35% of the height of the segmented shield and locating lead 10cm from the bottom of the top cover was selected. After changing geometry, radiation dose was measured by TLD for confirming tester's safety at any condition. Neutron(0.21 ${\mu}Svhr^{-1}$) and gamma(3.69 ${\mu}Svhr^{-1}$) radiation dose were satisfied standard(6.25 ${\mu}Svhr^{-1}$).

• Journal of the Korea Organic Resources Recycling Association
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• v.24 no.4
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• pp.95-103
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• 2016

The objective of this study was to investigate feasibility of semi-dry anaerobic digestion using dairy cattle manure and to evaluate solidified fuel value of semi-dry anaerobic digestate. To evaluate semi-dry anaerobic digestion using dairy cattle manure, 950 mL bottle type anaerobic reactor was set in the constant temperature room maintained at $35^{\circ}C$. To produce anaerobic digestate for making solidified fuel, acrylic cylindrical anaerobic digester(1,000 mm width ${\times}$ 450 mm height) was set in the constant room temperature to carry out batch test of semi-dry anaerobic digestion using same dairy cattle manure. Moisture content of dairy cattle manure and inoculum solution for anaerobic digestion were 80.64% and 96.83%, respectively. The dairy cattle manure and the inoculum solution was mixed by 1:1 ratio(v/v) for anaerobic digestion. Water content and VS/TS(Volatile Solids/Total Solids) of mixture of substrate and inoculum were 89.74% and 83.35%, respectively. In case of non-inoculated anaerobic digester, the biogas was not produced. By the semi-dry anaerobic digestion, the calorific value of the digestate was reduced by 20% compare to fresh dairy cattle manure. In other hand, ash content increased from 15% to 18.4%. The contents of Cr, Pb, Cd and S of pellet produced from anaerobically digested dairy cattle manure were not against the standard regulation for livestock manure solidified fuel. Therefore, it can be used as fuel that anaerobic digestate produced after semi-dry anaerobic digestion using dairy cattle manure.

• Clean Technology
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• v.27 no.4
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• pp.332-340
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• 2021

With the recent reinforcement of emission standards, it is necessary to make efforts to reduce NOx from air pollutant-emitting workplaces. The NOx reduction method mainly used in industrial facilities is selective catalytic reduction (SCR), and the most commercial SCR catalyst is the ceramic honeycomb catalyst. This study was carried out to reduce the NOx emitted from steel plants by applying De-NOx catalyst coated on metallic monolith. The De-NOx catalyst was synthesized through the optimized coating technique, and the coated catalyst was uniformly and strongly adhered onto the surface of the metallic monolith according to the air jet erosion and bending test. Due to the good thermal conductivity of metallic monolith, the De-NOx catalyst coated on metallic monolith showed good De-NOx efficiency at low temperatures (200 ~ 250 ℃). In addition, the optimal amount of catalyst coating on the metallic monolith surface was confirmed for the design of an economical catalyst. Based on these results, the De-NOx catalyst of commercial grade size was tested in a semi-pilot De-NOx performance facility under a simulated gas similar to the exhaust gas emitted from a steel plant. Even at a low temperature (200 ℃), it showed excellent performance satisfying the emission standard (less than 60 ppm). Therefore, the De-NOx catalyst coated metallic monolith has good physical and chemical properties and showed a good De-NOx efficiency even with the minimum amount of catalyst. Additionally, it was possible to compact and downsize the SCR reactor through the application of a high-density cell. Therefore, we suggest that the proposed De-NOx catalyst coated metallic monolith may be a good alternative De-NOx catalyst for industrial uses such as steel plants, thermal power plants, incineration plants ships, and construction machinery.

• Clean Technology
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• v.27 no.4
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• pp.350-358
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• 2021

The results of this study shows that the combustor temperature ranged from 848.27 to 1,026.80 ℃, averaging about 976.61 ℃, and the NOx concentration increased as the temperature increased. The urea usage ranged from 291.00 to 693.00 kg d^-1, averaging about 542.34 kg d^-1, and the NOx concentration decreased as the urea usage increased. Residence time was about 3.38 to 9.17 s, averaging about 5.22 s, about 2.61 times larger than the 2 s of the design details. This is 1,086 kg h^-1, averaging about 55.71%, compared to the 1,950 kg h^-1 SRF input permission standard. The combustion chamber area is constant, but the residence time is shown to increase with the decrease of exhaust gas. The O₂/CO ratio was 847.05 to 14,877.34, averaging about 3,111.30, and the NOx concentration slightly increased as the O₂/CO ratio increased. As the combustor temperature and O₂/CO ratio increased, the combustion reaction with nitrogen in the air increased and the NOx concentration slightly increased. As the urea usage and residence time increased, the NOx concentration decreased slightly with an increase in reactivity with NOx. The NOx concentration at the stack ranged from 7.88 to 34.02 ppm with an average of 19.92 ppm, and was discharged within the 60 ppm emission limit value. The NOhx emission factor was 1.058 to 1.795 kg ton^-1, averaging about 1.450 kg ton^-1. This value was about 24.87% of the maximum emission factor of 5.830 kg ton^-1 of other solid fuels. Other synthetic resins and industrial wastes were 79.80% and 43.65% compared to 1.817 kg ton^-1 and 3.322 kg ton^-1, respectively. This value was similar to 1.400 kg ton^-1 of RDF in the NIER notice (2005-9), 10.98% compared to the maximum SRF of 13.210 kg ton^-1. Therefore, the NOx emission factor had a large deviation.

• Journal of the Korean Applied Science and Technology
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• v.38 no.6
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• pp.1687-1698
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• 2021

This study is to produce multiple layers of liposomes in a supercritical state and encapsulates active ingredients in order to stably encapsulate thermodynamically unstable active ingredients. In order to form a liposome in a supercritical state, a mixed surfactant development including vegetable-derived hydrogenated phosphatidyl choline and their delivative, hydrogenated sucrose distearate was synthesized as high purity. It describes a manufacturing method of injecting liquid carbon dioxide into a reactor to create a supercritical state and stirring to produce a giant liposome, and adding and loading genistein and quercetin. The HLB of the mixed lipid complex (SC-Lipid Complex) was 12.50, and multiple layers of liposome vesicles were formed even at very low concentrations. This surfactant had a specific odor with a pale yellow flake, the specific gravity was 0.972, and the acid value was 0.12, indicating that it was synthesized with high purity. As a result of the emulsifying capacity experiment using 20 wt% capric/capric triglyceride and triethylhexanoin using SC-Lipid Complex, it was found to have 96.2% emulsifying power. SC LIPOSOME GENISTEIN was confirmed that a multi-layer liposome vesicle was formed through a transmission electron microscope (Cryo-TEM) for the supercritical liposome encapsulated with genistein. The primary liposome particle size in which genistein was encapsulated was 253.9 nm, and the secondary capsule size was 18.2 ㎛. Using genistein as the standard substance, the encapsulation efficiency of supercritical liposomes was 99.5%, and general liposomes were found to have an efficiency of 93.6%. In addition, the antioxidant activity experiment in which quercetin was sealed was confirmed by the DPPH method, and it was found that the supercritical liposome significantly maintained excellent antioxidant activity. In this study, thermodynamically unstable raw materials were sealed into liposomes without organic solvents in a supercritical state. Based on these results, it is expected that it can be applied to various forms such as highly functional skincare cosmetics, makeup cosmetics, and scalp protection cosmetics.