• Title/Summary/Keyword: Stage set

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Ultra high precision Dual stage system Using Air bearing and VCM for Nano level Scanning (VCM을 이용한 나노 정밀도 스캐닝 용 초정밀 이중 스테이지)

  • Kim Ki-Hyun;Gweon Dae-Gab;Choi Young-Man;Kim Dong-Min;Nam Byoung-Uk;Lee Suk-Won;Lee Moon-Gu
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.5 s.170
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    • pp.103-112
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    • 2005
  • This paper presents one-axis high precision scanning system and illustrates the design of modified $X-Y-{\theta}$ stage as a tracker using VCM and commercialized air bearings for it. The scanning system for 100nm resolution is composed of the 3-axis stage and one axis long stroke linear motor stage as a follower. In this study a previous proposed and presented structure of VCM for the fine stage is modified. The tracker has 3 DOF($X-Y-{\theta}$ motions by four VCM actuators which are located on the same plane. So 4 actuating forces are suggested and designed to create least pitch and roll motions. This article will show about the design especially about optimal design. The design focus of this fine stage is to have high acceleration to accomplish high throughput. The optimal design of maximizing acceleration is performed in restrained size. The most sensitive constraint of this optimal design is heat dissipation of coil. There are 5 design variables. Because the relationship between design variables and system parameters are quite complicated, it is very difficult to set design variables manually. Due to it, computer based optimal design procedure using MATLAB is used. Then, this paper also describes the procedures of selecting design variables for the optimal design and a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. The results can be verified by MAXWELL. The designed stage has the acceleration of about 5 $m/s^{2}$ with 40kg total mass including wafer chuck and interferometer mirror. And the temperature of coil is increased $50^{\circ}C$. In addition, the tracker is controlled by high precision controller system with HP interferometer for it and linear scaler for the follower. At that time, the scanning system has high precision resolution about 5nm and scanning resolution about 40nm in 25mm/s constant speed

Seismic damage detection of a reinforced concrete structure by finite element model updating

  • Yu, Eunjong;Chung, Lan
    • Smart Structures and Systems
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    • v.9 no.3
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    • pp.253-271
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    • 2012
  • Finite element (FE) model updating is a useful tool for global damage detection technique, which identifies the damage of the structure using measured vibration data. This paper presents the application of a finite element model updating method to detect the damage of a small-scale reinforced concrete building structure using measured acceleration data from shaking table tests. An iterative FE model updating strategy using the least-squares solution based on sensitivity of frequency response functions and natural frequencies was provided. In addition, a side constraint to mitigate numerical difficulties associated with ill-conditioning was described. The test structure was subjected to six El Centro 1942 ground motion histories with different Peak Ground Accelerations (PGA) ranging from 0.06 g to 0.5 g, and analytical models corresponding to each stage of the shaking were obtained using the model updating method. Flexural stiffness values of the structural members were chosen as the updating parameters. In model updating at each stage of shaking, the initial values of the parameter were set to those obtained from the previous stage. Severity of damage at each stage of shaking was determined from the change of the updated stiffness values. Results indicated that larger reductions in stiffness values occurred at the slab members than at the wall members, and this was consistent with the observed damage pattern of the test structure.

Analysis of the Economy and Environment Efficiencies under the Regulation of Fossil Fuel and Carbon Dioxide Emission (화석에너지와 CO2배출량 규제 하의 경제와 환경의 효율성 분석)

  • Kang, Sangmok;Zhao, Dan
    • Environmental and Resource Economics Review
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    • v.22 no.2
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    • pp.329-365
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    • 2013
  • The purpose of this paper is to measure economy and environment efficiencies under fossil fuel and environment regulation by countries for 2000-2009. Distinguishing 83 countries with three groups of OECD, upper-middle, and low countries, we compare four models such as environment oriented, economy-oriented, environment-economy oriented, and two-stage types, which include a desirable output, GDP and an undesirable output, pollutant together in the production possibility set. OECD countries relatively showed high economy efficiency and low environment efficiency, whereas Non-OECD countries showed high environment efficiency and low economy efficiency. OECD countries reported a higher possibility to reduce fossil fuel and $CO_2$ emission.

3D Object Recognition and Accurate Pose Calculation Using a Neural Network (인공신경망을 이용한 삼차원 물체의 인식과 정확한 자세계산)

  • Park, Gang
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.23 no.11 s.170
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    • pp.1929-1939
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    • 1999
  • This paper presents a neural network approach, which was named PRONET, to 3D object recognition and pose calculation. 3D objects are represented using a set of centroidal profile patterns that describe the boundary of the 2D views taken from evenly distributed view points. PRONET consists of the training stage and the execution stage. In the training stage, a three-layer feed-forward neural network is trained with the centroidal profile patterns using an error back-propagation method. In the execution stage, by matching a centroidal profile pattern of the given image with the best fitting centroidal profile pattern using the neural network, the identity and approximate orientation of the real object, such as a workpiece in arbitrary pose, are obtained. In the matching procedure, line-to-line correspondence between image features and 3D CAD features are also obtained. An iterative model posing method then calculates the more exact pose of the object based on initial orientation and correspondence.

Delphi기법에 의한 기계공학기술과 다른 기술분야의 국제적 기술수준과 국제기술협력 가능성에 대한 비교연구

  • 권영주
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1997.04a
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    • pp.794-798
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    • 1997
  • We provide a set of information on technologies to draw meaningful action plans for the inter- nationalization of National R&D activities. In this study, we employed a modified Delphi method to evaluate level od our technological capabilities and developed countries' as well. We investigated technology acquistion methodologies,technology characteristics and various aspects of international cooperation in terms of technology. Then we analyzed final responses of participants (i.e, the third round results of Delphi method) to see the correlation among various factors in developing tehnologies through international R&D cooperation. The technology classification used in this research was developed by STEPI (Science and Technology Policy Institute). In conclusion, levels of our technologies were investigated to be between the stage of imitating/absorbing advanced technologies and the stage of digesting acquired technologies. Especially, comparing with other technologies, mechanical engineering was evaluated to be almost near the stage of digesting acquired technology (the middle level stage of technology). Out overal technological capabilites were evaluated to be 40~60% of top level countries'.

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A numerical study of the performance of a turbomolecular pump (터보분자펌프의 성능해석에 관한 수치해석적 연구)

  • Hwang, Yeong-Gyu;Heo, Jung-Sik
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.20 no.11
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    • pp.3620-3629
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    • 1996
  • In the free molecular flow range, the pumping performance of a turbomolecular pump has been predicted by calculation of the transmission probability which employs the integral method and the test particle Monte-Carlo method. Also, new approximate method combining the double stage solutions, so called double-approximation, is presented here. The calculated values of transmission probability for the single stage agree quantitatively with the previous known numerical results. For a six-stage pump, the Monte-Carlo method is employed to calculate the overall transmission probability for the entire set of blade rows. When the results of the approximate method combining the single stage solutions are compared with those of the Monte-Carlo method at dimensionless blade velocity ratio C=0.4, the previous known approximate method overestimates as much as 34% than does the Monte-Carlo method. But, the new approximate method gives more accurate results, whose relative error is 10% compared to the Monte-Carlo method, than does the previous approximate method.

The Analysis CO2 Emission and Economic Efficiency of High-rise Apartment Houses (초고층 공동주택의 CO2 배출량과 경제성 분석에 관한 연구)

  • Roh, Seung-Jun;Tae, Sung-Ho;Kim, Tae-Hyoung;Keum, Won-Seok
    • Proceedings of the Korean Institute of Building Construction Conference
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    • 2012.05a
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    • pp.47-48
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    • 2012
  • In this study, the CO2 emission and economic efficiency of high-rise apartment houses were evaluated, and were analyzed as a way to establish database on the evaluation of environment-friendliness of high-rise buildings. To that end, standard of buildings to be evaluated were proposed through analysis of the designing guideline for high-rise apartment houses proposed by Seoul city, and CO2 emission of the subject buildings were evaluated based on the characteristics of materials admitted into each building and the amounts of energy consumed during lifecycle period. In addition, the initial costs in construction stage and annual costs in operation stage were set as analysis parameters, and along with calculation of direct cost by the consumption of construction materials and energy, the costs of CO2 emission were evaluated and analyzed. As a result, the CO2 emission and economic efficiencies of high-rise apartment houses by construction stage and operation stage could be analyzed quantitatively.

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The Nutrition Assessment and Care for the Elderly in Japan

  • Sugiyama, Michiko;Nishimura, Akio;Koyama, Hideo
    • Journal of Community Nutrition
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    • v.2 no.1
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    • pp.12-26
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    • 2000
  • In Japan, a new nursing insurance system was enforced in April 2000, where premiums were paid according to the level of necessary care. Our project, Nutrition Care and Management(NCM) for the elderly was started in 1995, funded by the Ministry of Health and Welfare of Japan. The NCM project was to provide appropriate nutrition care for the elderly and to see that it effectively functions as part of the health care services. There were 4 stages to the project : the first stage was to find out the PEM status among the elderly patients in hospital and home-care settings in Japan. The 2nd stage was to develop and evaluate nutritional assessment methods, anthropometry, resting energy expenditure measuring methods using of portable indirect calorimeter, and the convenient protein energy intake assessment methods, etc. for the elderly patients with PEM risk. The 3rd stage was to examine the effectiveness of the nutrition care plan induced of protein energy supplement and team care in improving nutrition among the elderly patients. The last stage was to develop the NCM set for the elderly patient based on the past three years of scientific evidence. it is expected that the NCM system for the elderly will provide adequate nutritional care management, improve the elderly care environment and create effective resource management.

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Ultrastructural Study on the Morphogenesis of Rat Spleen (흰쥐 비장의 형태형성에 관한 미세구조적 연구)

  • Kim, W.J.;Deung, Y.K.
    • Applied Microscopy
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    • v.15 no.2
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    • pp.19-30
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    • 1985
  • Morphogenesis of rat spleen was studied by light and electron microscope from the fetal stage till the newborn or adult stages. The results indicate as follows: at the 14th day of gestation rat spleen, as an early form, consists of intercellular spaces and mesenchymal cells. And at this stage the spleen is in a premature state, then it appears its adult condition in structures after the 7th postnatal day. Erythropoiesis is shown to be an active process in rat spleen beginning about the 18th day of gestation, and once established the process continues at least till the 7th postnatal day. At the 20th day of gestation, there are splenic nodules, trabeculae, venous sinus, and granular leucocytes such as neutrophils and basophils in rat spleen. Lymphocytes appeared to be well differentiated at the 7th postnatal day and were present till the adult stage. While degenerating erythrocytes are phagocytosed by macrophages. In conclusion, rat spleen started to be appeared from the 14th day of gestation and erythropoiesis in rat spleen was carried out for about 10 days between prenatal and postnatal stage. Erythrophagocytosis was accomplished by macrophages and it is suggested that the proper functions of rat spleen set off from the 7 th postnatal day when its structures are similar to the adult's.

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A Comparative Study on the International Technology Levels and R&D Cooperation Capabilities of Mechanical Engineering and Other Technologies by Delphi Method (Delphi기법에 의한 기계공학기술과 다른 기술분야의 국제적 기술수준과 국제기술협력 가능성에 대한 비교연구)

  • Kwon, Youngjoo
    • Journal of the Korean Society for Precision Engineering
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    • v.14 no.6
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    • pp.74-82
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    • 1997
  • We provide a set of information on technologies to draw meaningful action plans for the internationalization on National R&D activities. In this study, we employed a modiffed Delphi method to evaluate levels of our technological capabilities and developed countries as well. We investigated technology acquis- tion methodologies, technology characteristics and various aspects of international cooperation in terms of technology. Then, we analyzed final responses of participants (i.e., the third round results of Delphe method) to see the correlation among various factors in developing technologies through international R&D cooperation. The technology classification used in this research was developed by STEPI (Science and Technology Policy Institute). In conclusion, levels of our technologies were investigated to be between the stage of imi- tating/absorbing advanced thechnologies and the stage of digesting acquired technologies. Especially, com- paring with other technologies, mechanical engineering was evaluated to be almost near the stage of digesting acquired technology(the middle level stage of technology). Our overal technological capabilities were evaluated to be 40 .approx. 60% of top level countries.

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