• 한국정밀공학회지
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• 제15권7호
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• pp.139-148
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• 1998

Internal and external heat sources will cause to deform to machine elements in the contact joint of structure, which results in the change of contact pressure distribution different from initial assembly. Heat induced variations of contact pressure will change the static and dynamic properties such as contact stiffness, damping as well as contact heat conduction in the structure In order to design and control the intelligent machine tool operating in variant conditions more sophisticatedly, the good prediction for the changes of prescribed properties are strongly required especially in the contact elements adjacent to the rotational or linear bearing. This paper presents some computational and experimental results in regard to static and dynamic characteristics of the press-fitted bush and shaft assembly which is a model of the bearing innerrace and shaft assembly. In the condition of heat generation on the outer surface of the bush, the effects of changes in the negative clearance and the heat flux on pressure distribution and dynamic properties are investigated. Results of this study show that the edge effect of the bush and the initial clearance have effects on the transient dynamic characteristics significantly.

• Design & Manufacturing
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• 제17권2호
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• pp.15-21
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• 2023

In this study, a diamond turning machine and a laser-assisted machining module were utilized for the complex combined cutting of aspheric shapes and fine patterns on the surface of high-hardness brittle material, silicon. The analysis of material's form accuracy and corrective machining was conducted based on key factors such as laser output, rotational speed, feed rate, and cutting depth to achieve form accuracy below 1 ㎛ and surface roughness below 0.1 ㎛. The cutting condition and corrective machining methods were investigated to achieve the desired form accuracy and surface roughness. The rotational speed of the spindle and the linear feed rate of the diamond turning machine were varied in five stages for the cutting condition test. Surface roughness and form accuracy were measured using both a contact surface profilometer and a non-contact surface profilometer. The experimental results revealed a tendency of improved surface roughness with increased rotational speed of the workpiece, and the best surface roughness and form accuracy were observed at a feed rate of 5 mm/min. Furthermore, based on the cutting condition experiments, corrective machining was performed. The experimental results demonstrated an improvement in form accuracy from 0.94 ㎛ to 0.31 ㎛ and a significant reduction in the average value of the surface roughness curve from 0.234 ㎛ to 0.061 ㎛. This research serves as a foundation for future studies focusing on the machinability in relation to laser output parameters.

• Transactions on Electrical and Electronic Materials
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• 제12권2호
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• pp.56-59
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• 2011

The characterization of the chemical mechanical polishing (CMP) process for undensified phophosilicate glass (PSG) film is reported using design of experiments (DOE). DOE has been used by experimenters to understand the relationship between the input variables and responses of interest in a simple and efficient way, and it typically is beneficial for determining the appropriatesize of experiments with multiple process variables and making statistical inferences for the responses of interest. The equipment controllable parameters used to operate the machine consist of the down force of the wafer carrier, pressure on the back side wafer, table and spindle speeds (SS), slurry flow (SF) rate, pad condition, etc. None of these are independent ofeach other and, thus, the interaction between the parameters also needs to be understoodfor improved process characterization in CMP. In this study, we selected the five controllable equipment parameters the most recommendedby process engineers, viz. the down force (DF), back pressure (BP), table speed (TS), SS, and SF, for the characterization of the CMP process with respect to the material removal rate and film uniformity in percentage terms. The polished material is undensified PSG which is widely used for the plananization of multi-layered metal interconnects. By statistical modeling and the analysis of the metrology data acquired from a series of $2^{5-1}$ fractional factorial designs with two center points, we showed that the DF, BP and TS have the greatest effect on both the removal rate and film uniformity, as expected. It is revealed that the film uniformity of the polished PSG film contains two and three-way interactions. Therefore, one can easily infer that process control based on a better understanding of the process is the key to success in current semiconductor manufacturing, in which the size of the wafer is approaching 300 mm and is scheduled to continuously increase up to 450 mm in or slightly after 2012.

• 한국정밀공학회지
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• 제30권4호
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• pp.397-402
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• 2013

In this study, we carried out the each lines of section, using GC (green silicon carbide) whetstone, the SCM415 material which separated by after and before heat treatments process, in 3+2 axis machining centers for integrated grinding after cutting end mill works, the spindle speed 8000 rpm and feed rate 150 mm/min. For the analysis of the centerline average roughness (Ra), we measured by 10 steps stages. Using Finite element analysis, we found the result of the load analysis effect of the assembly parts, when applied the 11 kg's load on both side of the ATC (Automatic tool change) arm. The result is as follows. For the centerline average roughness (Ra) in the non-heat treatment work pieces, are appeared the most favorable in the tenth section are $0.510{\mu}m$, that were shown in the near the straight line section which is the smallest deformation of curve. In addition, the bad surface roughness appears on the path is to long by changing angle, the more inclined depth of cut, because the chip discharging is not smoothly.

• 대한기계학회논문집A
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• 제24권9호
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• pp.2159-2166
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• 2000

Recently, high performance machining center requires special type of sealing mechanism that prevent a leakage of oil jet or oil mist lubrication system. Sealing of oil-air mixture plays important r oles to have an enhanced lubrication for performance machining center. Current work emphasizes on investigations of the air jet effect on the protective collar type labyrinth seal. To improve sealing capabilities of conventional labyrinth seals, air jet is injected against the leakage flow. In this study, an adapted model is introduced to improve sealing capability of conventional non-contact type seals. It has a combined geometry of a protective collar type and an air jet type. Both of a numerical analysis by CFD (Computational Fluid Dynamics) and experimental measurements are carried out to verify sealing improvement. The sealing effects of the leakage clearance and the air jet magnitude aic studied in various parameters. Gas or liquid has been used as a working fluid for most of nori-contact types seals including the labyrinth seal. However, it is more reasonable to regard two-phase flows because oil mist or oil jet are used for high performance spindle's lubrication. In this study, working fluid is regarded as two phases that are mixed flow of oil and air phase. Both of turbulence and compressible flow model are also introduced in a CFD analysis to represent an isentropic process. Estimation of non-leaking property is determined by amount of pressure drop in the leakage path. Results of pressure drop in the experiment match reasonably to those of the simulation by introducing a flow coefficient. Effect of the sealing improvement is explained as decreasing of leakage clearance by air jetting. Thus, sealing effect is improved by amount of air jetting even though clearance becomes larger

• 대한기계학회논문집A
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• 제35권4호
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• pp.401-407
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• 2011

본 연구에서는 AZ31B 마그네슘 합금 평판 연마에 제 2세대 자기연마공정을 적용하고 실험계획법을 통해 공정인자들의 특성을 평가하였으며, 2차 반응표면모델을 이용한 표면거칠기 예측모델을 개발하였다. 비자성체 재료의 기존 자기연마 공정에서는 재료의 표면에서 자기력이 낮아 표면거칠기의 향상에 효율이 낮은 단점을 가진다. 이를 보완하기 위하여 전자석 배열을 이용한 자기력 테이블을 자기연마 공정에 적용하여 비자성체 표면의 자기력을 향상시킬 수 있었다. 이러한 시스템을 제 2세대 자기연마라 일컫고, 실험계획법에 따른 공정 인자 평가 결과, 자기력 테이블의 전자석 세기가 AZ31B 평판의 표면 거칠기 향상에 가장 큰 영향을 가지고 있음을 확인했다. 또한 자기력 테이블과 공구의 회전속도에 따른 반응표면모델을 개발함으로써 마그네슘 자기연마 공정의 효율성을 높일 수 있었다.

• 대한기계학회논문집A
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• 제41권3호
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• pp.181-186
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• 2017

점진 판재 성형은 금형을 제작하지 않고 판재를 가공하는 방법으로써 빠른 시제품 제작과 소량 생산에 적합한 성형법이다. 이러한 점진 판재 성형의 공정 변수로 공구 직경, 매 스탭당 z-방향 깊이, 공구 이송속도, 공구 회전 속도 등은 성형품의 품질에 크게 영향을 미친다. 본 연구에서는 Al5052-O(0.8mm) 판재를 사용하여 Varying Wall Angle Conical Frustum 모델의 점진성형을 실시하였으며, 각각의 변수들의 조합에서 성형성을 판단하였다. 다구찌 기법을 사용하여 점진성형 변수들의 조합을 찾아내고, 그레이 관계형 최적화를 통하여 최적 성형 변수 값의 조합을 찾아 내였다. 최종 성형물의 품질은 성형성, 스프링 백, 두께 감소량을 측정하여 판단하였다. 본 연구의 실험 조건에서의 최적의 변수 조합은 공구직경 6 mm, 회전속도 60rpm, 매 스탭당 z-방향 깊이 0.3 mm, 이송속도 500 mm/min으로 판단되었다.

• 한국기계가공학회지
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• 제16권6호
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• pp.69-74
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• 2017

In the current machining industry, machining precision is necessary and machining is being carried out. In this ultra-precision machining industry, the fixation of the workpiece is very important and the degree of machining depends on the degree of fixation of the workpiece. In ultra-precision machining, various methods, such as using a vise chuck or the like and using bolt nut coupling, are used for fixing a workpiece to an existing machine tool. In particular, when the precision gripping force of the jig is insufficient during machining of the ultra-precision mold parts, the machining material shakes due to the vibration or friction, and the machining precision is lowered. In the ultra-precision machining of power transmission parts, such as gears, the accuracy of the product is then determined. In addition, the amount of heat generated during machining has a significant effect on the machining accuracy. This is because the vibration value changes according to the grasp force of the jig that fixes the workpiece, and the change in the calorific value due to the change in the main shaft rotation speed of the ultra-precision machining. The increase in the spindle rotation speed during machining decreased the heat generation during machining, and the machining accuracy was also good, and it was confirmed that the machining heat changed according to the fixed state of the workpiece and the machining accuracy also changed. In this study, we try to optimize the driving part of the power vise by using structural analysis, rather than the power vise, using the basic mechanical-type power unit.

• Design & Manufacturing
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• 제11권3호
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• pp.19-24
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• 2017

In these days, increase requirement of TEM (Transmission Electro Microscope) in not only scientific field but also industrial field. Because TEM can measure inner-structure of specimen a variety of materials like metal, bio. etc. When use TEM, specimen should be thin about 50nm. So making for thin specimen, use Ion milling device that include specimen holder. The holder generally made of Aluminium Aluminium holder is worn away easily. For this reason, using time of ion milling with aluminum holder is too short. To solve the problem, we replace aluminium holer to molybdenum alloy holder. In this paper, we design molybdenum alloy holer for CAM and modify CAD modeling for effective machining process. So we array a specimen 3 by 4 and setup orientation for one-shot machining process. Next we make a CAM program for machining. we making a decision two machining strategy that chose condition of tool-path method, step-down, step-over. etc. And then conduct machining using CNC milling machining center. To make clear difference between case.1 and case.2, we fixed machining conditions like feed-rate, main spindle rpm, etc. After machining, we confirm the condition of workpiece and analysis the problems case by case. Finally, case.2 work piece that superior than case.1 cutting with WEDM because that method can not ant mechanical effect on workpiece.

• Clinical and Experimental Reproductive Medicine
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• 제24권2호
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• pp.253-259
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• 1997

Objective: To investigate effects of cryoprotectant and cryopreservation on the chromosome of the human immature oocytes. Design: Intact cumulus-enclosed immature oocytes were collected from unstimulated ovaries and divided into three groups, such as no treatment as control (group 1), only 1,2-propanediol (PROH)-treated (group 2), and cryopreserved oocytes (group 3). Oocytes in group 1, 2, and survived oocytes after cryopreservation in group 3 were cultured for 48 hours. Setting: Infertility Medical Center at the CHA General Hospital, Seoul, Korea. Patients: Oocytes were obtained from Patients undergoing gynecological surgery. Main Outcome Measures: Maturation rate, abnormality in chromosomes by fluorescence in situ hybridization (FISH). Results: There was no effect of PROH only treatment on the chromosomal abnormalities in group 2 compared to control oocytes (41.4% and 31.8%, respectively). Whereas significantly increased abnormalities in chromosome (77.8%) were found in group 3. Conclusions: Human oocytes matured in vitro after cryopreservation at the germinal vesicle (GV) stage showed increased incidence of chromosomal abnormalities. These abnormalities may impair the capacity for further development of the embryos derived from frozen-thawed oocytes.